US20100119984A1 - Abatement system - Google Patents
Abatement system Download PDFInfo
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- US20100119984A1 US20100119984A1 US12/613,883 US61388309A US2010119984A1 US 20100119984 A1 US20100119984 A1 US 20100119984A1 US 61388309 A US61388309 A US 61388309A US 2010119984 A1 US2010119984 A1 US 2010119984A1
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- Prior art keywords
- abatement system
- fuel
- combustion chamber
- vacuum generator
- generator device
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- 239000000446 fuel Substances 0.000 claims abstract description 104
- 238000002485 combustion reaction Methods 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims description 37
- 239000007789 gas Substances 0.000 description 38
- 238000006243 chemical reaction Methods 0.000 description 10
- 238000009826 distribution Methods 0.000 description 10
- 238000001816 cooling Methods 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005184 irreversible process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 238000005200 wet scrubbing Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
Definitions
- Embodiments of the present invention pertain to the field of abatement systems and, in particular, to a fuel burner ring for a combustion chamber in an abatement system and to a fuel flow control for an abatement system.
- Abatement systems can provide environmental abatement solutions for the semiconductor, solar and display industries.
- a wide range of point-of-use scrubbing systems are available, including wet, dry, thermal and integrated technologies for abatement of toxic and hazardous exhaust gases for a variety of applications.
- some abatement systems handle complex effluent challenges ranging from a single unit to an entire fabrication facility.
- Embodiments of the present invention include abatement systems.
- an abatement system in an embodiment, includes a combustion chamber.
- the abatement system also includes a fuel burner ring.
- the fuel burner ring is coupled with the combustion chamber.
- an abatement system in another embodiment, includes a combustion chamber.
- the abatement system also includes a fuel flow control mechanism.
- the fuel flow control mechanism is coupled with the combustion chamber.
- an abatement system in yet another embodiment, includes a combustion chamber.
- the abatement system also includes a fuel burner ring and a fuel flow control mechanism. Both the a fuel burner ring and the fuel flow control mechanism are coupled with the combustion chamber.
- FIG. 1 illustrates a block-diagram of an abatement system, in accordance with an embodiment of the present invention.
- FIG. 2 illustrates a cross-sectional view of an abatement system, in accordance with an embodiment of the present invention.
- FIG. 3 illustrates a cross-sectional view of a conventional arrangement of four process gas inlet tubes, each surrounded by four nozzles for injection combustion fuel.
- FIG. 4 illustrates a cross-sectional view of an arrangement of four process gas inlet tubes, each surrounded by a burner ring for injecting combustion fuel, in accordance with an embodiment of the present invention.
- FIG. 5 is a temperature distribution map representing temperature distribution for a ring burner used approximately in a temperature range of 300-900 Kelvin, in accordance with an embodiment of the present invention.
- FIG. 6 is a temperature distribution map representing temperature distribution for four conventional nozzles used approximately in a temperature range of 300-2200 Kelvin.
- FIG. 7 illustrates various views of a portion of an abatement system including a combustion chamber having a fuel burner ring, in accordance with an embodiment of the present invention.
- FIG. 8 illustrates various views of a burner ring for use in an abatement system including a combustion chamber, in accordance with an embodiment of the present invention.
- FIG. 9 illustrates a diagram of a vacuum generator device, in accordance with an embodiment of the present invention.
- an abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. In one embodiment, an abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber. In one embodiment, an abatement system includes a combustion chamber, a fuel burner ring, and a fuel flow control mechanism, both the fuel burner ring and the fuel flow control mechanism coupled with the combustion chamber.
- an abatement system destroys residual process gases through active flame oxidation and combustion for reliable and safe abatement.
- effluent gases are heated by a flame in the main chamber of the system which provides ignition of flammable and pyrophoric gas by-products.
- the advanced design of the flame ignition system ensures a stable flame with high inert gas flow.
- an abatement system provides wet-scrubbing solutions that support up to four process effluent streams including those from challenging processes such as epitaxial silicon deposition and metal etch.
- the abatement system handles perfluorocarbons (PFCs) and global-warming gasses.
- the treatment of hydride and acid-based gases is performed in an abatement system.
- process gases and by-products react with resin to form nonvolatile solids, an irreversible process that traps by-products and ensures safe disposal of the resin.
- an abatement system may include a combustion chamber or reactor.
- FIG. 1 illustrates a block-diagram of an abatement system, in accordance with an embodiment of the present invention.
- abatement system 100 includes a gas inlet 102 , a combustion chamber or reactor 104 , a cooling chamber 106 , a receiving tank 108 , a scrubber 110 , and an exhaust 112 .
- combustion chamber or reactor 104 includes a burner.
- cooling chamber 106 is a waterfall cooling chamber configured with spray jets to spray water into a gas stream.
- receiving tank 108 includes a large tank holding an amount of water at the bottom of the tank with space over-head for gas that is moving through the abatement system.
- scrubber 110 sits directly above receiving tank 108 .
- scrubber 110 includes a spray shower for spraying water into a stream of effluent gases.
- FIG. 2 illustrates a cross-sectional view of an abatement system, in accordance with an embodiment of the present invention.
- abatement system 200 includes a gas inlet 202 , a combustion chamber or reactor 204 , a cooling chamber 206 , a receiving tank 208 , a scrubber 210 , and an exhaust 212 .
- combustion chamber or reactor 204 includes a burner.
- cooling chamber 206 is a waterfall cooling chamber configured with spray jets to spray water into a gas stream.
- receiving tank 208 includes a large tank holding an amount of water at the bottom of the tank with space over-head for gas that is moving through the abatement system, as is depicted in FIG. 2 .
- scrubber 210 sits directly above receiving tank 208 , as is also depicted in FIG. 2 .
- scrubber 210 includes a spray shower for spraying water into a stream of effluent gases.
- An abatement system may include a combustion chamber having a fuel burner ring.
- an abatement system uses combustion to heat a process gas to a sufficiently to a sufficiently high temperature and for a sufficient duration for abatement.
- an abatement system using burners composed of one or a few large jets may provide non-uniform temperature and flow distributions, which can degrade the performance of the abatement system. The degraded performance may result from some of the process gas not reaching a required temperature and, thus, high velocity gas may exit a reaction chamber before a combustion reaction is complete.
- a burner ring with many small ports is used and is coupled to the combustion chamber of an abatement system. In a specific embodiment, by using a burner ring with many small ports, a more uniform flow pattern is generated along the length of the reaction chamber.
- the reaction chamber of an ErikaTM abatement system is equipped with a fuel burner ring instead of a conventional arrangement process using four nozzles.
- the reaction chamber of an Integrated Subfab System (ISS) abatement system or a MarathonTM abatement system is equipped with a fuel burner ring instead of a conventional arrangement process using four nozzles.
- gases are introduced to a reaction chamber of the abatement system through four inlet tubes.
- each inlet tube is surrounded by up to four nozzles. For example, FIG.
- FIG. 3 illustrates a cross-sectional view of a conventional arrangement of four process gas inlet tubes 300 , each surrounded by four nozzles 302 for injecting combustion fuel.
- FIG. 4 illustrates a cross-sectional view of an arrangement of four process gas inlet tubes 400 , each surrounded by a burner ring 402 having holes 404 for injecting combustion fuel, in accordance with an embodiment of the present invention.
- the holes 404 in each burner ring 402 are coupled to a single plenum to obtain uniform flow around the ring.
- the velocity at each burner ring is reduced to be approximately the same as the velocity of a process gas in each process gas inlet tube 400 .
- a range of approximately 8-30 holes 404 are included in each burner ring 402 .
- heating in a combustion chamber of an abatement system is more uniform, improving the overall performance of the abatement system.
- FIG. 5 is a temperature distribution map 500 representing temperature distribution for a ring burner used approximately in a temperature range of 300-900 Kelvin, in accordance with an embodiment of the present invention.
- FIG. 6 is a temperature distribution map 600 representing temperature distribution for four conventional nozzles used approximately in a temperature range of 300-2200 Kelvin.
- FIG. 7 illustrates various views of a portion of an abatement system including a combustion chamber having a fuel burner ring, in accordance with an embodiment of the present invention.
- a bottom view 790 of a cover 710 of a reaction chamber for an abatement system includes four process gas inlet tubes 700 , each surrounded by a burner ring 702 having holes 704 for injecting combustion fuel.
- a top view 799 of a cover 710 of a reaction chamber for an abatement system includes four process gas inlet tubes 700 .
- FIG. 8 illustrates various views of a burner ring for use in an abatement system including a combustion chamber, in accordance with an embodiment of the present invention.
- a burner ring 802 includes holes 804 for injecting combustion fuel into a reaction chamber in an abatement system.
- an abatement system with a fuel burner ring may be provided.
- an abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber.
- the fuel burner ring includes a plurality of ports.
- the plurality of ports is arranged to provide an approximately uniform flow pattern of a fuel provided to the plurality of ports.
- the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber.
- the abatement system further includes a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring.
- the abatement further includes one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring.
- the fuel burner ring includes a number of ports approximately in the range of 8-30 ports.
- an abatement system may include a fuel flow control mechanism.
- the ratio of fuel to air in a pilot or main burner in a combustion abatement device are controlled to prevent flashback, loss of flame, and sooting.
- Conventional systems may require several devices or software control to maintain the proper ratio while still allowing for variable set-points.
- Other designs do not even allow for adequate mixing of the air and the fuel. Accordingly, in some facilities, e.g. facilities with low fuel pressure, the fuel pressure supplied by the facility may be too low for some flow control devices.
- an abatement system is equipped with a vacuum generator device that is driven by high pressure air.
- the high pressure air creates a slight vacuum to draw gaseous fuel into the device, even when supply pressure is too low.
- the fuel is a gas such as, but not limited to, methane or a natural gas composition.
- the fuel to air ratio is determined by the design of the vacuum generator device.
- the vacuum generator device can be used alone with no other control required. In a specific embodiment, this eliminates the need for separate flow controllers and software input on the air and fuel lines.
- the fuel pressure is fixed by a pressure regulator.
- FIG. 9 illustrates a diagram of a vacuum generator device 900 , in accordance with an embodiment of the present invention.
- vacuum generator device 900 is a venturi device, as illustrated in FIG. 9 .
- an abatement system with a fuel flow control mechanism includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber.
- the fuel flow control mechanism includes a vacuum generator device configured to be driven by a high pressure airflow.
- the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing gaseous fuel into the vacuum generator device.
- the vacuum generator device is the sole fuel flow control mechanism in the abatement system.
- the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system.
- the vacuum generator device is further configured to mix a fuel flow and an airflow.
- an abatement system may include a fuel burner ring and a fuel flow control mechanism.
- an abatement system includes a combustion chamber, a fuel burner ring coupled with the combustion chamber, and a fuel flow control mechanism also coupled with the combustion chamber.
- the fuel burner ring includes a plurality of ports
- the fuel flow control mechanism includes a vacuum generator device configured to be driven by a high pressure airflow.
- the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing a fuel into the vacuum generator device, and the plurality of ports is arranged to provide an approximately uniform flow pattern of the fuel provided to the plurality of ports.
- the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber, and the vacuum generator device is the sole fuel flow control mechanism in the abatement system.
- the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system, and the abatement system further includes a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring.
- the vacuum generator device is further configured to mix a fuel flow and an airflow, and the abatement system further includes one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring.
- the fuel burner ring includes a number of ports approximately in the range of 8-30 ports.
- an abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber.
- the fuel burner ring includes a plurality of ports.
- an abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber.
- the fuel flow control mechanism includes a vacuum generator device configured to be driven by a high pressure airflow.
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Abstract
Abatement systems are described. An abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. Another abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber.
Description
- This application claims the benefit of U.S. Provisional Application No. 61/113,143, filed Nov. 10, 2008, the entire contents of which are hereby incorporated by reference herein.
- 1) Field
- Embodiments of the present invention pertain to the field of abatement systems and, in particular, to a fuel burner ring for a combustion chamber in an abatement system and to a fuel flow control for an abatement system.
- 2) Description of Related Art
- Abatement systems can provide environmental abatement solutions for the semiconductor, solar and display industries. A wide range of point-of-use scrubbing systems are available, including wet, dry, thermal and integrated technologies for abatement of toxic and hazardous exhaust gases for a variety of applications. For example, some abatement systems handle complex effluent challenges ranging from a single unit to an entire fabrication facility.
- Embodiments of the present invention include abatement systems.
- In an embodiment, an abatement system includes a combustion chamber. The abatement system also includes a fuel burner ring. The fuel burner ring is coupled with the combustion chamber.
- In another embodiment, an abatement system includes a combustion chamber. The abatement system also includes a fuel flow control mechanism. The fuel flow control mechanism is coupled with the combustion chamber.
- In yet another embodiment, an abatement system includes a combustion chamber. The abatement system also includes a fuel burner ring and a fuel flow control mechanism. Both the a fuel burner ring and the fuel flow control mechanism are coupled with the combustion chamber.
-
FIG. 1 illustrates a block-diagram of an abatement system, in accordance with an embodiment of the present invention. -
FIG. 2 illustrates a cross-sectional view of an abatement system, in accordance with an embodiment of the present invention. -
FIG. 3 illustrates a cross-sectional view of a conventional arrangement of four process gas inlet tubes, each surrounded by four nozzles for injection combustion fuel. -
FIG. 4 illustrates a cross-sectional view of an arrangement of four process gas inlet tubes, each surrounded by a burner ring for injecting combustion fuel, in accordance with an embodiment of the present invention. -
FIG. 5 is a temperature distribution map representing temperature distribution for a ring burner used approximately in a temperature range of 300-900 Kelvin, in accordance with an embodiment of the present invention. -
FIG. 6 is a temperature distribution map representing temperature distribution for four conventional nozzles used approximately in a temperature range of 300-2200 Kelvin. -
FIG. 7 illustrates various views of a portion of an abatement system including a combustion chamber having a fuel burner ring, in accordance with an embodiment of the present invention. -
FIG. 8 illustrates various views of a burner ring for use in an abatement system including a combustion chamber, in accordance with an embodiment of the present invention. -
FIG. 9 illustrates a diagram of a vacuum generator device, in accordance with an embodiment of the present invention. - Abatement systems are described. In the following description, numerous specific details are set forth, such as system configuration, in order to provide a thorough understanding of embodiments of the present invention. It will be apparent to one skilled in the art that embodiments of the present invention may be practiced without these specific details. In other instances, well-known features, such as facility layouts, are not described in detail in order to not unnecessarily obscure embodiments of the present invention. Furthermore, it is to be understood that the various embodiments shown in the Figures are illustrative representations and are not necessarily drawn to scale.
- Disclosed herein are abatement systems. In one embodiment, an abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. In one embodiment, an abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber. In one embodiment, an abatement system includes a combustion chamber, a fuel burner ring, and a fuel flow control mechanism, both the fuel burner ring and the fuel flow control mechanism coupled with the combustion chamber.
- In accordance with an embodiment of the present invention, an abatement system destroys residual process gases through active flame oxidation and combustion for reliable and safe abatement. In one embodiment, effluent gases are heated by a flame in the main chamber of the system which provides ignition of flammable and pyrophoric gas by-products. In a specific embodiment, the advanced design of the flame ignition system ensures a stable flame with high inert gas flow. In an embodiment, an abatement system provides wet-scrubbing solutions that support up to four process effluent streams including those from challenging processes such as epitaxial silicon deposition and metal etch. In one embodiment, the abatement system handles perfluorocarbons (PFCs) and global-warming gasses. In another embodiment, the treatment of hydride and acid-based gases is performed in an abatement system. In one embodiment, by utilizing chemisorptive technology, process gases and by-products react with resin to form nonvolatile solids, an irreversible process that traps by-products and ensures safe disposal of the resin.
- In an aspect of the present invention, an abatement system may include a combustion chamber or reactor.
FIG. 1 illustrates a block-diagram of an abatement system, in accordance with an embodiment of the present invention. Referring toFIG. 1 ,abatement system 100 includes agas inlet 102, a combustion chamber orreactor 104, acooling chamber 106, areceiving tank 108, ascrubber 110, and anexhaust 112. In one embodiment, combustion chamber orreactor 104 includes a burner. In another embodiment,cooling chamber 106 is a waterfall cooling chamber configured with spray jets to spray water into a gas stream. In an embodiment, receivingtank 108 includes a large tank holding an amount of water at the bottom of the tank with space over-head for gas that is moving through the abatement system. In another embodiment,scrubber 110 sits directly above receivingtank 108. In a specific embodiment,scrubber 110 includes a spray shower for spraying water into a stream of effluent gases. -
FIG. 2 illustrates a cross-sectional view of an abatement system, in accordance with an embodiment of the present invention. Referring toFIG. 2 ,abatement system 200 includes agas inlet 202, a combustion chamber orreactor 204, acooling chamber 206, a receivingtank 208, ascrubber 210, and anexhaust 212. In one embodiment, combustion chamber orreactor 204 includes a burner. In another embodiment,cooling chamber 206 is a waterfall cooling chamber configured with spray jets to spray water into a gas stream. In an embodiment, receivingtank 208 includes a large tank holding an amount of water at the bottom of the tank with space over-head for gas that is moving through the abatement system, as is depicted inFIG. 2 . In another embodiment,scrubber 210 sits directly above receivingtank 208, as is also depicted inFIG. 2 . In a specific embodiment,scrubber 210 includes a spray shower for spraying water into a stream of effluent gases. - An abatement system may include a combustion chamber having a fuel burner ring. In accordance with an embodiment of the present invention, an abatement system uses combustion to heat a process gas to a sufficiently to a sufficiently high temperature and for a sufficient duration for abatement. However, an abatement system using burners composed of one or a few large jets may provide non-uniform temperature and flow distributions, which can degrade the performance of the abatement system. The degraded performance may result from some of the process gas not reaching a required temperature and, thus, high velocity gas may exit a reaction chamber before a combustion reaction is complete. Instead, in one embodiment, a burner ring with many small ports is used and is coupled to the combustion chamber of an abatement system. In a specific embodiment, by using a burner ring with many small ports, a more uniform flow pattern is generated along the length of the reaction chamber.
- In an exemplary embodiment of the present invention, the reaction chamber of an Erika™ abatement system, available from Applied Materials, Inc., is equipped with a fuel burner ring instead of a conventional arrangement process using four nozzles. In another exemplary embodiment of the present invention, the reaction chamber of an Integrated Subfab System (ISS) abatement system or a Marathon™ abatement system, available from Applied Materials, Inc., is equipped with a fuel burner ring instead of a conventional arrangement process using four nozzles. In an embodiment, gases are introduced to a reaction chamber of the abatement system through four inlet tubes. In a conventional arrangement, each inlet tube is surrounded by up to four nozzles. For example,
FIG. 3 illustrates a cross-sectional view of a conventional arrangement of four processgas inlet tubes 300, each surrounded by fournozzles 302 for injecting combustion fuel. By contrast,FIG. 4 illustrates a cross-sectional view of an arrangement of four processgas inlet tubes 400, each surrounded by aburner ring 402 havingholes 404 for injecting combustion fuel, in accordance with an embodiment of the present invention. In an embodiment, theholes 404 in eachburner ring 402 are coupled to a single plenum to obtain uniform flow around the ring. In one embodiment, by distributing the fuel flow over a large number of holes, the velocity at each burner ring is reduced to be approximately the same as the velocity of a process gas in each processgas inlet tube 400. In a specific embodiment, a range of approximately 8-30holes 404 are included in eachburner ring 402. In an embodiment, by reducing the fuel velocity surrounding each processgas inlet tube 400, heating in a combustion chamber of an abatement system is more uniform, improving the overall performance of the abatement system. - By using a fuel burner ring, the temperature distribution in a reaction chamber may be more uniform. For example,
FIG. 5 is atemperature distribution map 500 representing temperature distribution for a ring burner used approximately in a temperature range of 300-900 Kelvin, in accordance with an embodiment of the present invention. By contrast,FIG. 6 is atemperature distribution map 600 representing temperature distribution for four conventional nozzles used approximately in a temperature range of 300-2200 Kelvin. -
FIG. 7 illustrates various views of a portion of an abatement system including a combustion chamber having a fuel burner ring, in accordance with an embodiment of the present invention. Referring toFIG. 7 , in one embodiment, abottom view 790 of acover 710 of a reaction chamber for an abatement system includes four processgas inlet tubes 700, each surrounded by aburner ring 702 havingholes 704 for injecting combustion fuel. Referring toFIG. 7 , in another embodiment, atop view 799 of acover 710 of a reaction chamber for an abatement system includes four processgas inlet tubes 700.FIG. 8 illustrates various views of a burner ring for use in an abatement system including a combustion chamber, in accordance with an embodiment of the present invention. Referring toFIG. 8 , aburner ring 802 includesholes 804 for injecting combustion fuel into a reaction chamber in an abatement system. - Thus, an abatement system with a fuel burner ring may be provided. In an embodiment, an abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. In one embodiment, the fuel burner ring includes a plurality of ports. In a specific embodiment, the plurality of ports is arranged to provide an approximately uniform flow pattern of a fuel provided to the plurality of ports. In a particular embodiment, the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber. In another particular embodiment, the abatement system further includes a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring. In another particular embodiment, the abatement further includes one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring. In an embodiment, the fuel burner ring includes a number of ports approximately in the range of 8-30 ports.
- In another aspect of the present invention, an abatement system may include a fuel flow control mechanism. In accordance with an embodiment of the present invention, the ratio of fuel to air in a pilot or main burner in a combustion abatement device are controlled to prevent flashback, loss of flame, and sooting. Conventional systems may require several devices or software control to maintain the proper ratio while still allowing for variable set-points. Other designs do not even allow for adequate mixing of the air and the fuel. Accordingly, in some facilities, e.g. facilities with low fuel pressure, the fuel pressure supplied by the facility may be too low for some flow control devices.
- Instead, in accordance with an embodiment of the present invention, an abatement system is equipped with a vacuum generator device that is driven by high pressure air. In one embodiment, the high pressure air creates a slight vacuum to draw gaseous fuel into the device, even when supply pressure is too low. In a specific embodiment, the fuel is a gas such as, but not limited to, methane or a natural gas composition. In an embodiment, for a given fuel pressure, the fuel to air ratio is determined by the design of the vacuum generator device. In one embodiment, the vacuum generator device can be used alone with no other control required. In a specific embodiment, this eliminates the need for separate flow controllers and software input on the air and fuel lines. In another embodiment, the fuel pressure is fixed by a pressure regulator. In accordance with an embodiment of the present invention, air flow is adjusted in the vacuum generator device for various operating condition selection. In one embodiment, the adjustment is performed by a flow or pressure control device coupled to the vacuum generator device. In another embodiment, the vacuum generator device also acts as a mixer for the fuel and air, improving the stability of a flame within a reaction chamber of an abatement system. In an exemplary embodiment,
FIG. 9 illustrates a diagram of avacuum generator device 900, in accordance with an embodiment of the present invention. In a specific embodiment,vacuum generator device 900 is a venturi device, as illustrated inFIG. 9 . - Thus, an abatement system with a fuel flow control mechanism may be provided. In an embodiment, an abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber. In one embodiment, the fuel flow control mechanism includes a vacuum generator device configured to be driven by a high pressure airflow. In a specific embodiment, the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing gaseous fuel into the vacuum generator device. In a particular embodiment, the vacuum generator device is the sole fuel flow control mechanism in the abatement system. In another particular embodiment, the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system. In another particular embodiment, the vacuum generator device is further configured to mix a fuel flow and an airflow.
- In another aspect of the present invention, an abatement system may include a fuel burner ring and a fuel flow control mechanism. In an embodiment, an abatement system includes a combustion chamber, a fuel burner ring coupled with the combustion chamber, and a fuel flow control mechanism also coupled with the combustion chamber. In one embodiment, the fuel burner ring includes a plurality of ports, and the fuel flow control mechanism includes a vacuum generator device configured to be driven by a high pressure airflow. In a specific embodiment, the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing a fuel into the vacuum generator device, and the plurality of ports is arranged to provide an approximately uniform flow pattern of the fuel provided to the plurality of ports. In a particular embodiment, the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber, and the vacuum generator device is the sole fuel flow control mechanism in the abatement system. In another particular embodiment, the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system, and the abatement system further includes a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring. In another particular embodiment, the vacuum generator device is further configured to mix a fuel flow and an airflow, and the abatement system further includes one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring. In an embodiment, the fuel burner ring includes a number of ports approximately in the range of 8-30 ports.
- Thus, abatement systems have been disclosed. In accordance with an embodiment of the present invention, an abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. In one embodiment, the fuel burner ring includes a plurality of ports. In accordance with another embodiment of the present invention, an abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber. In one embodiment, the fuel flow control mechanism includes a vacuum generator device configured to be driven by a high pressure airflow.
Claims (20)
1. An abatement system, comprising:
a combustion chamber; and
a fuel burner ring coupled with the combustion chamber.
2. The abatement system of claim 1 , wherein the fuel burner ring comprises a plurality of ports.
3. The abatement system of claim 2 , wherein the plurality of ports is arranged to provide an approximately uniform flow pattern of a fuel provided to the plurality of ports.
4. The abatements system of claim 3 , wherein the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber.
5. The abatement system of claim 4 , further comprising:
a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring.
6. The abatement system of claim 5 , further comprising:
one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring.
7. The abatement system of claim 2 , wherein the fuel burner ring comprises a number of ports approximately in the range of 8-30 ports.
8. An abatement system, comprising:
a combustion chamber; and
a fuel flow control mechanism coupled with the combustion chamber.
9. The abatement system of claim 8 , wherein the fuel flow control mechanism comprises a vacuum generator device configured to be driven by a high pressure airflow.
10. The abatement system of claim 9 , wherein the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing gaseous fuel into the vacuum generator device.
11. The abatement system of claim 10 , wherein the vacuum generator device is the sole fuel flow control mechanism in the abatement system.
12. The abatement system of claim 10 , wherein the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system.
13. The abatement system of claim 10 , wherein the vacuum generator device is further configured to mix a fuel flow and an airflow.
14. An abatement system, comprising:
a combustion chamber;
a fuel burner ring coupled with the combustion chamber; and
a fuel flow control mechanism coupled with the combustion chamber.
15. The abatement system of claim 14 , wherein the fuel burner ring comprises a plurality of ports, and wherein the fuel flow control mechanism comprises a vacuum generator device configured to be driven by a high pressure airflow.
16. The abatement system of claim 15 , wherein the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing a fuel into the vacuum generator device, and wherein the plurality of ports is arranged to provide an approximately uniform flow pattern of the fuel provided to the plurality of ports.
17. The abatements system of claim 16 , wherein the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber, and wherein the vacuum generator device is the sole fuel flow control mechanism in the abatement system.
18. The abatement system of claim 17 , wherein the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system, the abatement system further comprising:
a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring.
19. The abatement system of claim 18 , wherein the vacuum generator device is further configured to mix a fuel flow and an airflow, the abatement system further comprising:
one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring.
20. The abatement system of claim 15 , wherein the fuel burner ring comprises a number of ports approximately in the range of 8-30 ports.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/613,883 US20100119984A1 (en) | 2008-11-10 | 2009-11-06 | Abatement system |
CN2009801449462A CN102210006A (en) | 2008-11-10 | 2009-11-09 | Abatement system |
KR1020117013222A KR20110095305A (en) | 2008-11-10 | 2009-11-09 | Abatement system |
PCT/US2009/063692 WO2010054291A2 (en) | 2008-11-10 | 2009-11-09 | Abatement system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11314308P | 2008-11-10 | 2008-11-10 | |
US12/613,883 US20100119984A1 (en) | 2008-11-10 | 2009-11-06 | Abatement system |
Publications (1)
Publication Number | Publication Date |
---|---|
US20100119984A1 true US20100119984A1 (en) | 2010-05-13 |
Family
ID=42153609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US12/613,883 Abandoned US20100119984A1 (en) | 2008-11-10 | 2009-11-06 | Abatement system |
Country Status (4)
Country | Link |
---|---|
US (1) | US20100119984A1 (en) |
KR (1) | KR20110095305A (en) |
CN (1) | CN102210006A (en) |
WO (1) | WO2010054291A2 (en) |
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US20090214991A1 (en) * | 2008-02-18 | 2009-08-27 | Applied Materials, Inc. | Apparatus and methods for supplying fuel employed by abatement systems to effectively abate effluents |
US20160146458A1 (en) * | 2013-07-17 | 2016-05-26 | Edwards Limited | A head assembly for a radiant burner |
US10269600B2 (en) | 2016-03-15 | 2019-04-23 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
US10453721B2 (en) | 2016-03-15 | 2019-10-22 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
WO2020008177A1 (en) * | 2018-07-03 | 2020-01-09 | Edwards Limited | Gas abatement apparatus |
US11517831B2 (en) * | 2019-06-25 | 2022-12-06 | George Andrew Rabroker | Abatement system for pyrophoric chemicals and method of use |
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Publication number | Priority date | Publication date | Assignee | Title |
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KR20190085358A (en) | 2018-01-10 | 2019-07-18 | 김진홍 | An apparatus and a method for removing harmful fluoride by using aqueous methanol solution |
GB2608816A (en) * | 2021-07-13 | 2023-01-18 | Edwards Ltd | Abatement apparatus |
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Cited By (10)
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US20090214991A1 (en) * | 2008-02-18 | 2009-08-27 | Applied Materials, Inc. | Apparatus and methods for supplying fuel employed by abatement systems to effectively abate effluents |
US20160146458A1 (en) * | 2013-07-17 | 2016-05-26 | Edwards Limited | A head assembly for a radiant burner |
US11162676B2 (en) * | 2013-07-17 | 2021-11-02 | Edwards Limited | Head assembly for a radiant burner |
US10269600B2 (en) | 2016-03-15 | 2019-04-23 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
US10453721B2 (en) | 2016-03-15 | 2019-10-22 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
US10943803B2 (en) | 2016-03-15 | 2021-03-09 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
US11462426B2 (en) | 2016-03-15 | 2022-10-04 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
US11923221B2 (en) | 2016-03-15 | 2024-03-05 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
WO2020008177A1 (en) * | 2018-07-03 | 2020-01-09 | Edwards Limited | Gas abatement apparatus |
US11517831B2 (en) * | 2019-06-25 | 2022-12-06 | George Andrew Rabroker | Abatement system for pyrophoric chemicals and method of use |
Also Published As
Publication number | Publication date |
---|---|
WO2010054291A2 (en) | 2010-05-14 |
WO2010054291A3 (en) | 2010-07-29 |
CN102210006A (en) | 2011-10-05 |
KR20110095305A (en) | 2011-08-24 |
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