WO2010054291A3 - Abatement system - Google Patents

Abatement system Download PDF

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Publication number
WO2010054291A3
WO2010054291A3 PCT/US2009/063692 US2009063692W WO2010054291A3 WO 2010054291 A3 WO2010054291 A3 WO 2010054291A3 US 2009063692 W US2009063692 W US 2009063692W WO 2010054291 A3 WO2010054291 A3 WO 2010054291A3
Authority
WO
WIPO (PCT)
Prior art keywords
combustion chamber
abatement system
abatement
system includes
coupled
Prior art date
Application number
PCT/US2009/063692
Other languages
French (fr)
Other versions
WO2010054291A2 (en
Inventor
Allen G. Fox
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Priority to CN2009801449462A priority Critical patent/CN102210006A/en
Publication of WO2010054291A2 publication Critical patent/WO2010054291A2/en
Publication of WO2010054291A3 publication Critical patent/WO2010054291A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Incineration Of Waste (AREA)

Abstract

Abatement systems are described. An abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. Another abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber.
PCT/US2009/063692 2008-11-10 2009-11-09 Abatement system WO2010054291A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009801449462A CN102210006A (en) 2008-11-10 2009-11-09 Abatement system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11314308P 2008-11-10 2008-11-10
US61/113,143 2008-11-10
US12/613,883 US20100119984A1 (en) 2008-11-10 2009-11-06 Abatement system
US12/613,883 2009-11-06

Publications (2)

Publication Number Publication Date
WO2010054291A2 WO2010054291A2 (en) 2010-05-14
WO2010054291A3 true WO2010054291A3 (en) 2010-07-29

Family

ID=42153609

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/063692 WO2010054291A2 (en) 2008-11-10 2009-11-09 Abatement system

Country Status (4)

Country Link
US (1) US20100119984A1 (en)
KR (1) KR20110095305A (en)
CN (1) CN102210006A (en)
WO (1) WO2010054291A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009105434A2 (en) * 2008-02-18 2009-08-27 Applied Materials, Inc. Apparatus and methods for supplying fuel employed by abatement systems to effectively abate effluents
GB2516267B (en) * 2013-07-17 2016-08-17 Edwards Ltd Head assembly
US10269600B2 (en) 2016-03-15 2019-04-23 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
US10453721B2 (en) 2016-03-15 2019-10-22 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
KR20190085358A (en) 2018-01-10 2019-07-18 김진홍 An apparatus and a method for removing harmful fluoride by using aqueous methanol solution
GB201810916D0 (en) * 2018-07-03 2018-08-15 Edwards Ltd Gas abatement apparatus
US11517831B2 (en) * 2019-06-25 2022-12-06 George Andrew Rabroker Abatement system for pyrophoric chemicals and method of use
GB2608816A (en) * 2021-07-13 2023-01-18 Edwards Ltd Abatement apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006053231A2 (en) * 2004-11-12 2006-05-18 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US20070053803A1 (en) * 2005-09-02 2007-03-08 Clean Systems Korea Inc. Scrubber for processing semiconductor waste gas
WO2007053626A2 (en) * 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
US20080003150A1 (en) * 2006-02-11 2008-01-03 Applied Materials, Inc. Methods and apparatus for pfc abatement using a cdo chamber

Family Cites Families (35)

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US1871783A (en) * 1928-02-27 1932-08-16 Cleveland Heater Co Dual gas burner
US2369235A (en) * 1941-05-10 1945-02-13 Servel Inc Gas burner
US2573502A (en) * 1945-05-23 1951-10-30 Gen Motors Corp Multichambered gas burner with selective gas supply
US2992531A (en) * 1958-07-11 1961-07-18 Westinghouse Electric Corp Turbine apparatus
US3302684A (en) * 1965-04-15 1967-02-07 Aero Flow Dynamics Inc Combination gas and liquid fuel burner
US3308869A (en) * 1965-12-17 1967-03-14 Combustion Eng Liquid fuel burner for wide range of load
US3376098A (en) * 1966-08-29 1968-04-02 Phillips Petroleum Co Two-chamber burner and process
US3615213A (en) * 1969-05-01 1971-10-26 Air Reduction Method and apparatus for the production of carbon black
US3644077A (en) * 1970-11-02 1972-02-22 S I Johnson Co Flame stabilizing system for power gas burners
US3729285A (en) * 1972-05-22 1973-04-24 G Schwedersky Burner and method of operating it to control the production of nitrogen oxides
DE2242037C2 (en) * 1972-08-26 1974-10-31 Vits-Maschinenbau Gmbh, 4018 Langenfeld Tubular gas burner, especially for dryers
US3827851A (en) * 1972-10-03 1974-08-06 Peabody Gordon Piatt Combination, oil, gas, and/or solid burner
US3859935A (en) * 1972-10-03 1975-01-14 Peabody Gordon Piatt Process using a combination, oil, gas, and/or solid burner
US4105394A (en) * 1976-10-18 1978-08-08 John Zink Company Dual pressure flare
US4122674A (en) * 1976-12-27 1978-10-31 The Boeing Company Apparatus for suppressing combustion noise within gas turbine engines
US4480559A (en) * 1983-01-07 1984-11-06 Combustion Engineering, Inc. Coal and char burner
US4475885A (en) * 1983-07-28 1984-10-09 Bloom Engineering Company, Inc. Adjustable flame burner
FR2653544B1 (en) * 1989-10-24 1992-02-14 Gaz De France STEAM PUMP WITH AIR EXCHANGER-COUNTER-CURRENT COMBUSTION PRODUCTS WITHOUT INTERMEDIATE FLUID.
DK169633B1 (en) * 1990-01-29 1994-12-27 Smidth & Co As F L Burner for solid and liquid or gaseous fuel
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
DE59811961D1 (en) * 1998-11-09 2004-10-21 Alstom Technology Ltd Baden burner
US6684641B2 (en) * 1999-12-15 2004-02-03 Osaka Gas Co., Ltd. Fluid distributor, burner device, gas turbine engine, and cogeneration system
DE10045322C2 (en) * 2000-09-12 2002-07-18 Messer Griesheim Gmbh Atomizing burner for the thermal splitting of sulfur-containing residues
DE50110801D1 (en) * 2000-12-23 2006-10-05 Alstom Technology Ltd Burner for generating a hot gas
US6655137B1 (en) * 2001-06-25 2003-12-02 Amir A. Sardari Advanced combined cycle co-generation abatement system
US6881053B2 (en) * 2002-03-16 2005-04-19 Exxonmobil Chemical Patents Inc. Burner with high capacity venturi
US20040168900A1 (en) * 2003-02-27 2004-09-02 Peter Tung Staged heat and mass transfer applications
US6916172B2 (en) * 2003-08-25 2005-07-12 L & S Cryogenics, Inc. Burner apparatus
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7422427B2 (en) * 2004-02-25 2008-09-09 Coen Company, Inc. Energy efficient low NOx burner and method of operating same
US7934926B2 (en) * 2004-05-06 2011-05-03 Deka Products Limited Partnership Gaseous fuel burner
US7682574B2 (en) * 2004-11-18 2010-03-23 Applied Materials, Inc. Safety, monitoring and control features for thermal abatement reactor
DE102005053819A1 (en) * 2005-11-11 2007-05-16 Khd Humboldt Wedag Gmbh Rotary kiln burner
FR2899956B1 (en) * 2006-04-14 2008-07-25 Thirode Grandes Cuisines Poligny GAS BURNER FOR KITCHEN OVEN
DE102007021927A1 (en) * 2007-05-10 2008-11-20 Siemens Ag Oil gasification burner for ashless liquid fuel

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006053231A2 (en) * 2004-11-12 2006-05-18 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US20070053803A1 (en) * 2005-09-02 2007-03-08 Clean Systems Korea Inc. Scrubber for processing semiconductor waste gas
WO2007053626A2 (en) * 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
US20080003150A1 (en) * 2006-02-11 2008-01-03 Applied Materials, Inc. Methods and apparatus for pfc abatement using a cdo chamber

Also Published As

Publication number Publication date
KR20110095305A (en) 2011-08-24
US20100119984A1 (en) 2010-05-13
CN102210006A (en) 2011-10-05
WO2010054291A2 (en) 2010-05-14

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