JP2008516202A5 - - Google Patents

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Publication number
JP2008516202A5
JP2008516202A5 JP2007534962A JP2007534962A JP2008516202A5 JP 2008516202 A5 JP2008516202 A5 JP 2008516202A5 JP 2007534962 A JP2007534962 A JP 2007534962A JP 2007534962 A JP2007534962 A JP 2007534962A JP 2008516202 A5 JP2008516202 A5 JP 2008516202A5
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JP
Japan
Prior art keywords
measurement
compensation
measuring
electrode
noise factor
Prior art date
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Application number
JP2007534962A
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English (en)
Japanese (ja)
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JP2008516202A (ja
JP5139803B2 (ja
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Publication date
Priority claimed from AT0167704A external-priority patent/AT500829B1/de
Application filed filed Critical
Publication of JP2008516202A publication Critical patent/JP2008516202A/ja
Publication of JP2008516202A5 publication Critical patent/JP2008516202A5/ja
Application granted granted Critical
Publication of JP5139803B2 publication Critical patent/JP5139803B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007534962A 2004-10-07 2005-10-07 圧電特性とパイロ電気特性とを有する少なくとも１つの測定素子を有するセンサ素子 Expired - Fee Related JP5139803B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT0167704A AT500829B1 (de) 2004-10-07 2004-10-07 Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist
ATA1677/2004 2004-10-07
PCT/AT2005/000400 WO2006037145A1 (de) 2004-10-07 2005-10-07 Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist

Publications (3)

Publication Number Publication Date
JP2008516202A JP2008516202A (ja) 2008-05-15
JP2008516202A5 true JP2008516202A5 (enExample) 2008-11-27
JP5139803B2 JP5139803B2 (ja) 2013-02-06

Family

ID=35406316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007534962A Expired - Fee Related JP5139803B2 (ja) 2004-10-07 2005-10-07 圧電特性とパイロ電気特性とを有する少なくとも１つの測定素子を有するセンサ素子

Country Status (6)

Country Link
US (1) US7618188B2 (enExample)
EP (1) EP1797603B1 (enExample)
JP (1) JP5139803B2 (enExample)
AT (2) AT500829B1 (enExample)
DE (2) DE502005007858D1 (enExample)
WO (1) WO2006037145A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009025065A (ja) * 2007-07-18 2009-02-05 Hiroshima Univ 圧力センサ及びこれを用いた分布型圧力センサ
JP5348451B2 (ja) * 2008-02-13 2013-11-20 アイシン精機株式会社 荷重検出装置
JP5463510B2 (ja) * 2010-06-22 2014-04-09 独立行政法人科学技術振興機構 物理量センサ及びその製造方法
US9509235B2 (en) 2011-06-27 2016-11-29 Canon Kabushiki Kaisha Piezoelectric element, oscillatory wave motor, and optical apparatus
JP5866891B2 (ja) * 2011-09-06 2016-02-24 セイコーエプソン株式会社 力センサー、力検出装置、ロボットハンド、およびロボット
JP5975506B2 (ja) * 2011-09-20 2016-08-23 Ｎｅｃプラットフォームズ株式会社 赤外線センサシステム
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator
US8324783B1 (en) 2012-04-24 2012-12-04 UltraSolar Technology, Inc. Non-decaying electric power generation from pyroelectric materials
GB201214567D0 (en) * 2012-08-15 2012-09-26 Kromek Ltd Detector and method of operation
JP6315883B2 (ja) 2012-12-26 2018-04-25 キヤノン株式会社 圧電素子、振動波モーター用ステーター
US9846091B2 (en) * 2013-03-12 2017-12-19 Interlink Electronics, Inc. Systems and methods for press force detectors
JP2015087291A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および温度補償方法
CH709395A1 (de) * 2014-03-21 2015-09-30 Kistler Holding Ag Piezoelektrisches Messelement zur Messung des dynamischen Druckes sowie des statischen Druckes und/oder der Temperatur.
US9500585B2 (en) 2014-10-16 2016-11-22 Spectro Scientific, Inc. Photometer and method for compensating for ambient temperature changes in a photometer
EP3185658A1 (de) 2015-12-23 2017-06-28 Voestalpine Stahl GmbH Metallband und coil-coating-verfahren
CN108886090B (zh) * 2016-03-28 2022-10-18 大金工业株式会社 双压电晶片型压电膜
US10620233B2 (en) 2016-06-28 2020-04-14 Kistler Holding Ag Piezoelectric transducer
DE102019008761A1 (de) 2019-12-14 2021-06-17 PRlGNlTZ Mikrosystemtechnik GmbH Drucksensor mit einer Membran mit Sensorchips mit Messbrücken mit Sensorelementen
DE202019005702U1 (de) 2019-12-14 2021-07-15 Prignitz Mikrosystemtechnik GmbH Drucksensor mit einer Membran mit Sensorchips mit Messbrücken mit Sensorelementen

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE55345C (de) TH. MEINHOLD in Klingenthal, Sachsen Mundharmonika mit Trillervorrichtung
US3060748A (en) 1959-10-29 1962-10-30 Gulton Ind Inc Accelerometer
US3581092A (en) * 1969-04-09 1971-05-25 Barnes Eng Co Pyroelectric detector array
DE1945373A1 (de) * 1969-04-14 1970-10-29 Metra Mess Frequenztechn Verfahren und Einrichtung zur Kompensation des pyroelektrischen Effektes an elektromechanischen Wandlern,insbesondere Ferroelektrika
US3877308A (en) 1974-01-02 1975-04-15 Minnesota Mining & Mfg Pyroelectric temperature compensated sensing apparatus
DE2605809C2 (de) * 1976-02-12 1986-11-13 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. Sensoreinrichtung zur Erfassung einer Temperaturänderung oder einer Biegespannungsänderung
US4060729A (en) * 1976-12-10 1977-11-29 Martin Marietta Corporation Pyroelectric detector with decreased susceptibility to vibrational noise
DE3049347C2 (de) * 1980-12-29 1985-10-10 Siemens AG, 1000 Berlin und 8000 München Lagerstatt für einen Patienten mit piezoelektrischem Kraftsignalgeber
US4467202A (en) * 1981-03-04 1984-08-21 Kureha Kagaku Kogyo Kabushiki Kaisha Photoelectric detector
JPS5879122A (ja) 1981-11-05 1983-05-12 Kureha Chem Ind Co Ltd 焦電性赤外線検出器
DE3146986A1 (de) * 1981-11-26 1983-06-01 Siemens AG, 1000 Berlin und 8000 München "elektromechanischer wandler"
JPS5928629A (ja) * 1982-08-10 1984-02-15 Sanyo Electric Co Ltd 焦電型赤外線検出器の製造方法
US4514631A (en) * 1982-12-30 1985-04-30 American District Telegraph Company Optical system for ceiling mounted passive infrared sensor
JPS6384540U (enExample) * 1986-11-21 1988-06-02
US4841494A (en) * 1987-07-03 1989-06-20 Ngk Spark Plug Co., Ltd. Underwater piezoelectric arrangement
GB2224598B (en) 1988-11-02 1992-08-19 Plessey Co Plc A piezoelectric shear mode accelerometer
JPH06207869A (ja) * 1993-01-11 1994-07-26 Fujikura Ltd 圧電型振動センサ
JPH06341914A (ja) * 1993-06-01 1994-12-13 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
US5677487A (en) 1995-10-13 1997-10-14 A/S Bruel & Kjaer Method and apparatus for measuring acceleration or mechanical forces
JPH09159563A (ja) * 1995-12-04 1997-06-20 Unisia Jecs Corp 圧力センサ
KR0165516B1 (ko) * 1996-02-26 1999-05-01 김광호 진동 검출 센서

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