JP5139803B2 - 圧電特性とパイロ電気特性とを有する少なくとも１つの測定素子を有するセンサ素子 - Google Patents

圧電特性とパイロ電気特性とを有する少なくとも１つの測定素子を有するセンサ素子 Download PDF

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JP5139803B2
JP5139803B2 JP2007534962A JP2007534962A JP5139803B2 JP 5139803 B2 JP5139803 B2 JP 5139803B2 JP 2007534962 A JP2007534962 A JP 2007534962A JP 2007534962 A JP2007534962 A JP 2007534962A JP 5139803 B2 JP5139803 B2 JP 5139803B2
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measurement
compensation
measuring
electrode
piezoelectric
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Japanese (ja)
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JP2008516202A (ja
JP2008516202A5 (enExample
Inventor
グラーザー，ヨーゼフ
クレーガー，ディートマール
ロイプレヒト，ゲルノート
ライター，クリスチアン
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ピエツォクリスト・アドヴァンスト・ゼンゾリクス・ゲー・エム・ベー・ハー
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
    • G01L9/085—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor with temperature compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Inorganic Insulating Materials (AREA)
JP2007534962A 2004-10-07 2005-10-07 圧電特性とパイロ電気特性とを有する少なくとも１つの測定素子を有するセンサ素子 Expired - Fee Related JP5139803B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT0167704A AT500829B1 (de) 2004-10-07 2004-10-07 Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist
ATA1677/2004 2004-10-07
PCT/AT2005/000400 WO2006037145A1 (de) 2004-10-07 2005-10-07 Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist

Publications (3)

Publication Number Publication Date
JP2008516202A JP2008516202A (ja) 2008-05-15
JP2008516202A5 JP2008516202A5 (enExample) 2008-11-27
JP5139803B2 true JP5139803B2 (ja) 2013-02-06

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ID=35406316

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JP2007534962A Expired - Fee Related JP5139803B2 (ja) 2004-10-07 2005-10-07 圧電特性とパイロ電気特性とを有する少なくとも１つの測定素子を有するセンサ素子

Country Status (6)

Country Link
US (1) US7618188B2 (enExample)
EP (1) EP1797603B1 (enExample)
JP (1) JP5139803B2 (enExample)
AT (2) AT500829B1 (enExample)
DE (2) DE502005007858D1 (enExample)
WO (1) WO2006037145A1 (enExample)

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JP2009025065A (ja) * 2007-07-18 2009-02-05 Hiroshima Univ 圧力センサ及びこれを用いた分布型圧力センサ
JP5348451B2 (ja) * 2008-02-13 2013-11-20 アイシン精機株式会社 荷重検出装置
JP5463510B2 (ja) * 2010-06-22 2014-04-09 独立行政法人科学技術振興機構 物理量センサ及びその製造方法
US9509235B2 (en) 2011-06-27 2016-11-29 Canon Kabushiki Kaisha Piezoelectric element, oscillatory wave motor, and optical apparatus
JP5866891B2 (ja) * 2011-09-06 2016-02-24 セイコーエプソン株式会社 力センサー、力検出装置、ロボットハンド、およびロボット
JP5975506B2 (ja) * 2011-09-20 2016-08-23 Ｎｅｃプラットフォームズ株式会社 赤外線センサシステム
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator
US8324783B1 (en) 2012-04-24 2012-12-04 UltraSolar Technology, Inc. Non-decaying electric power generation from pyroelectric materials
GB201214567D0 (en) * 2012-08-15 2012-09-26 Kromek Ltd Detector and method of operation
JP6315883B2 (ja) 2012-12-26 2018-04-25 キヤノン株式会社 圧電素子、振動波モーター用ステーター
US9846091B2 (en) * 2013-03-12 2017-12-19 Interlink Electronics, Inc. Systems and methods for press force detectors
JP2015087291A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および温度補償方法
CH709395A1 (de) * 2014-03-21 2015-09-30 Kistler Holding Ag Piezoelektrisches Messelement zur Messung des dynamischen Druckes sowie des statischen Druckes und/oder der Temperatur.
US9500585B2 (en) 2014-10-16 2016-11-22 Spectro Scientific, Inc. Photometer and method for compensating for ambient temperature changes in a photometer
EP3185658A1 (de) 2015-12-23 2017-06-28 Voestalpine Stahl GmbH Metallband und coil-coating-verfahren
CN108886090B (zh) * 2016-03-28 2022-10-18 大金工业株式会社 双压电晶片型压电膜
US10620233B2 (en) 2016-06-28 2020-04-14 Kistler Holding Ag Piezoelectric transducer
DE102019008761A1 (de) 2019-12-14 2021-06-17 PRlGNlTZ Mikrosystemtechnik GmbH Drucksensor mit einer Membran mit Sensorchips mit Messbrücken mit Sensorelementen
DE202019005702U1 (de) 2019-12-14 2021-07-15 Prignitz Mikrosystemtechnik GmbH Drucksensor mit einer Membran mit Sensorchips mit Messbrücken mit Sensorelementen

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DE55345C (de) TH. MEINHOLD in Klingenthal, Sachsen Mundharmonika mit Trillervorrichtung
US3060748A (en) 1959-10-29 1962-10-30 Gulton Ind Inc Accelerometer
US3581092A (en) * 1969-04-09 1971-05-25 Barnes Eng Co Pyroelectric detector array
DE1945373A1 (de) * 1969-04-14 1970-10-29 Metra Mess Frequenztechn Verfahren und Einrichtung zur Kompensation des pyroelektrischen Effektes an elektromechanischen Wandlern,insbesondere Ferroelektrika
US3877308A (en) 1974-01-02 1975-04-15 Minnesota Mining & Mfg Pyroelectric temperature compensated sensing apparatus
DE2605809C2 (de) * 1976-02-12 1986-11-13 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. Sensoreinrichtung zur Erfassung einer Temperaturänderung oder einer Biegespannungsänderung
US4060729A (en) * 1976-12-10 1977-11-29 Martin Marietta Corporation Pyroelectric detector with decreased susceptibility to vibrational noise
DE3049347C2 (de) * 1980-12-29 1985-10-10 Siemens AG, 1000 Berlin und 8000 München Lagerstatt für einen Patienten mit piezoelektrischem Kraftsignalgeber
US4467202A (en) * 1981-03-04 1984-08-21 Kureha Kagaku Kogyo Kabushiki Kaisha Photoelectric detector
JPS5879122A (ja) 1981-11-05 1983-05-12 Kureha Chem Ind Co Ltd 焦電性赤外線検出器
DE3146986A1 (de) * 1981-11-26 1983-06-01 Siemens AG, 1000 Berlin und 8000 München "elektromechanischer wandler"
JPS5928629A (ja) * 1982-08-10 1984-02-15 Sanyo Electric Co Ltd 焦電型赤外線検出器の製造方法
US4514631A (en) * 1982-12-30 1985-04-30 American District Telegraph Company Optical system for ceiling mounted passive infrared sensor
JPS6384540U (enExample) * 1986-11-21 1988-06-02
US4841494A (en) * 1987-07-03 1989-06-20 Ngk Spark Plug Co., Ltd. Underwater piezoelectric arrangement
GB2224598B (en) 1988-11-02 1992-08-19 Plessey Co Plc A piezoelectric shear mode accelerometer
JPH06207869A (ja) * 1993-01-11 1994-07-26 Fujikura Ltd 圧電型振動センサ
JPH06341914A (ja) * 1993-06-01 1994-12-13 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
US5677487A (en) 1995-10-13 1997-10-14 A/S Bruel & Kjaer Method and apparatus for measuring acceleration or mechanical forces
JPH09159563A (ja) * 1995-12-04 1997-06-20 Unisia Jecs Corp 圧力センサ
KR0165516B1 (ko) * 1996-02-26 1999-05-01 김광호 진동 검출 센서

Also Published As

Publication number Publication date
DE202005021706U1 (de) 2009-07-02
WO2006037145A1 (de) 2006-04-13
AT500829A1 (de) 2006-04-15
JP2008516202A (ja) 2008-05-15
AT500829B1 (de) 2007-03-15
US7618188B2 (en) 2009-11-17
EP1797603B1 (de) 2009-08-05
US20070283769A1 (en) 2007-12-13
ATE438932T1 (de) 2009-08-15
EP1797603A1 (de) 2007-06-20
DE502005007858D1 (de) 2009-09-17

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