AT500829B1 - Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist - Google Patents
Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist Download PDFInfo
- Publication number
- AT500829B1 AT500829B1 AT0167704A AT16772004A AT500829B1 AT 500829 B1 AT500829 B1 AT 500829B1 AT 0167704 A AT0167704 A AT 0167704A AT 16772004 A AT16772004 A AT 16772004A AT 500829 B1 AT500829 B1 AT 500829B1
- Authority
- AT
- Austria
- Prior art keywords
- measuring
- compensation
- electrodes
- piezoelectric
- measuring element
- Prior art date
Links
- 238000005259 measurement Methods 0.000 claims abstract description 19
- 238000012937 correction Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 21
- 230000000694 effects Effects 0.000 claims description 13
- 230000001133 acceleration Effects 0.000 claims description 5
- 239000012799 electrically-conductive coating Substances 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 229940070527 tourmaline Drugs 0.000 claims description 2
- 229910052613 tourmaline Inorganic materials 0.000 claims description 2
- 239000011032 tourmaline Substances 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims description 2
- 239000002033 PVDF binder Substances 0.000 claims 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims 1
- 206010073261 Ovarian theca cell tumour Diseases 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 9
- 238000002485 combustion reaction Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910000154 gallium phosphate Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
- G01L9/085—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor with temperature compensating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT0167704A AT500829B1 (de) | 2004-10-07 | 2004-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
| EP05790304A EP1797603B1 (de) | 2004-10-07 | 2005-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
| JP2007534962A JP5139803B2 (ja) | 2004-10-07 | 2005-10-07 | 圧電特性とパイロ電気特性とを有する少なくとも１つの測定素子を有するセンサ素子 |
| AT05790304T ATE438932T1 (de) | 2004-10-07 | 2005-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
| DE502005007858T DE502005007858D1 (de) | 2004-10-07 | 2005-10-07 | Ches piezoelektrische und pyroelektrische eigenschaften aufweist |
| US11/664,498 US7618188B2 (en) | 2004-10-07 | 2005-10-07 | Sensor element having at least one measurement element with piezoelectric and pyroelectric properties |
| PCT/AT2005/000400 WO2006037145A1 (de) | 2004-10-07 | 2005-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
| DE202005021706U DE202005021706U1 (de) | 2004-10-07 | 2005-10-07 | Sensorelement mit zumindest einem Messelement, welches piezoelektrische und pyroelektrische Eigenschaften aufweist |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT0167704A AT500829B1 (de) | 2004-10-07 | 2004-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AT500829A1 AT500829A1 (de) | 2006-04-15 |
| AT500829B1 true AT500829B1 (de) | 2007-03-15 |
Family
ID=35406316
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT0167704A AT500829B1 (de) | 2004-10-07 | 2004-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
| AT05790304T ATE438932T1 (de) | 2004-10-07 | 2005-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT05790304T ATE438932T1 (de) | 2004-10-07 | 2005-10-07 | Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7618188B2 (enExample) |
| EP (1) | EP1797603B1 (enExample) |
| JP (1) | JP5139803B2 (enExample) |
| AT (2) | AT500829B1 (enExample) |
| DE (2) | DE502005007858D1 (enExample) |
| WO (1) | WO2006037145A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009025065A (ja) * | 2007-07-18 | 2009-02-05 | Hiroshima Univ | 圧力センサ及びこれを用いた分布型圧力センサ |
| JP5348451B2 (ja) * | 2008-02-13 | 2013-11-20 | アイシン精機株式会社 | 荷重検出装置 |
| JP5463510B2 (ja) * | 2010-06-22 | 2014-04-09 | 独立行政法人科学技術振興機構 | 物理量センサ及びその製造方法 |
| US9509235B2 (en) | 2011-06-27 | 2016-11-29 | Canon Kabushiki Kaisha | Piezoelectric element, oscillatory wave motor, and optical apparatus |
| JP5866891B2 (ja) * | 2011-09-06 | 2016-02-24 | セイコーエプソン株式会社 | 力センサー、力検出装置、ロボットハンド、およびロボット |
| JP5975506B2 (ja) * | 2011-09-20 | 2016-08-23 | Ｎｅｃプラットフォームズ株式会社 | 赤外線センサシステム |
| US9294014B2 (en) * | 2012-02-10 | 2016-03-22 | Genziko Incorporated | Power generator |
| US8324783B1 (en) | 2012-04-24 | 2012-12-04 | UltraSolar Technology, Inc. | Non-decaying electric power generation from pyroelectric materials |
| GB201214567D0 (en) * | 2012-08-15 | 2012-09-26 | Kromek Ltd | Detector and method of operation |
| JP6315883B2 (ja) | 2012-12-26 | 2018-04-25 | キヤノン株式会社 | 圧電素子、振動波モーター用ステーター |
| US9846091B2 (en) * | 2013-03-12 | 2017-12-19 | Interlink Electronics, Inc. | Systems and methods for press force detectors |
| JP2015087291A (ja) * | 2013-10-31 | 2015-05-07 | セイコーエプソン株式会社 | 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および温度補償方法 |
| CH709395A1 (de) * | 2014-03-21 | 2015-09-30 | Kistler Holding Ag | Piezoelektrisches Messelement zur Messung des dynamischen Druckes sowie des statischen Druckes und/oder der Temperatur. |
| US9500585B2 (en) | 2014-10-16 | 2016-11-22 | Spectro Scientific, Inc. | Photometer and method for compensating for ambient temperature changes in a photometer |
| EP3185658A1 (de) | 2015-12-23 | 2017-06-28 | Voestalpine Stahl GmbH | Metallband und coil-coating-verfahren |
| CN108886090B (zh) * | 2016-03-28 | 2022-10-18 | 大金工业株式会社 | 双压电晶片型压电膜 |
| US10620233B2 (en) | 2016-06-28 | 2020-04-14 | Kistler Holding Ag | Piezoelectric transducer |
| DE102019008761A1 (de) | 2019-12-14 | 2021-06-17 | PRlGNlTZ Mikrosystemtechnik GmbH | Drucksensor mit einer Membran mit Sensorchips mit Messbrücken mit Sensorelementen |
| DE202019005702U1 (de) | 2019-12-14 | 2021-07-15 | Prignitz Mikrosystemtechnik GmbH | Drucksensor mit einer Membran mit Sensorchips mit Messbrücken mit Sensorelementen |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1945373A1 (de) * | 1969-04-14 | 1970-10-29 | Metra Mess Frequenztechn | Verfahren und Einrichtung zur Kompensation des pyroelektrischen Effektes an elektromechanischen Wandlern,insbesondere Ferroelektrika |
| DE2605809A1 (de) * | 1976-02-12 | 1977-08-18 | Minnesota Mining & Mfg | Elektrisch kompensierter sensor |
| EP0055345A1 (de) * | 1980-12-29 | 1982-07-07 | WALZ ELEKTRONIK GmbH | Lagerstatt für einen Patienten mit piezoelektrischen Kraftsignalgeber |
| DE3146986A1 (de) * | 1981-11-26 | 1983-06-01 | Siemens AG, 1000 Berlin und 8000 München | "elektromechanischer wandler" |
| DE19649679A1 (de) * | 1996-02-26 | 1997-08-28 | Samsung Electronics Co Ltd | Schwingungserfassungssensor |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE55345C (de) | TH. MEINHOLD in Klingenthal, Sachsen | Mundharmonika mit Trillervorrichtung | ||
| US3060748A (en) | 1959-10-29 | 1962-10-30 | Gulton Ind Inc | Accelerometer |
| US3581092A (en) * | 1969-04-09 | 1971-05-25 | Barnes Eng Co | Pyroelectric detector array |
| US3877308A (en) | 1974-01-02 | 1975-04-15 | Minnesota Mining & Mfg | Pyroelectric temperature compensated sensing apparatus |
| US4060729A (en) * | 1976-12-10 | 1977-11-29 | Martin Marietta Corporation | Pyroelectric detector with decreased susceptibility to vibrational noise |
| US4467202A (en) * | 1981-03-04 | 1984-08-21 | Kureha Kagaku Kogyo Kabushiki Kaisha | Photoelectric detector |
| JPS5879122A (ja) | 1981-11-05 | 1983-05-12 | Kureha Chem Ind Co Ltd | 焦電性赤外線検出器 |
| JPS5928629A (ja) * | 1982-08-10 | 1984-02-15 | Sanyo Electric Co Ltd | 焦電型赤外線検出器の製造方法 |
| US4514631A (en) * | 1982-12-30 | 1985-04-30 | American District Telegraph Company | Optical system for ceiling mounted passive infrared sensor |
| JPS6384540U (enExample) * | 1986-11-21 | 1988-06-02 | ||
| US4841494A (en) * | 1987-07-03 | 1989-06-20 | Ngk Spark Plug Co., Ltd. | Underwater piezoelectric arrangement |
| GB2224598B (en) | 1988-11-02 | 1992-08-19 | Plessey Co Plc | A piezoelectric shear mode accelerometer |
| JPH06207869A (ja) * | 1993-01-11 | 1994-07-26 | Fujikura Ltd | 圧電型振動センサ |
| JPH06341914A (ja) * | 1993-06-01 | 1994-12-13 | Matsushita Electric Ind Co Ltd | 圧電型圧力センサ |
| US5677487A (en) | 1995-10-13 | 1997-10-14 | A/S Bruel & Kjaer | Method and apparatus for measuring acceleration or mechanical forces |
| JPH09159563A (ja) * | 1995-12-04 | 1997-06-20 | Unisia Jecs Corp | 圧力センサ |
-
2004
- 2004-10-07 AT AT0167704A patent/AT500829B1/de not_active IP Right Cessation
-
2005
- 2005-10-07 JP JP2007534962A patent/JP5139803B2/ja not_active Expired - Fee Related
- 2005-10-07 DE DE502005007858T patent/DE502005007858D1/de not_active Expired - Lifetime
- 2005-10-07 AT AT05790304T patent/ATE438932T1/de not_active IP Right Cessation
- 2005-10-07 WO PCT/AT2005/000400 patent/WO2006037145A1/de not_active Ceased
- 2005-10-07 EP EP05790304A patent/EP1797603B1/de not_active Expired - Lifetime
- 2005-10-07 DE DE202005021706U patent/DE202005021706U1/de not_active Expired - Lifetime
- 2005-10-07 US US11/664,498 patent/US7618188B2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1945373A1 (de) * | 1969-04-14 | 1970-10-29 | Metra Mess Frequenztechn | Verfahren und Einrichtung zur Kompensation des pyroelektrischen Effektes an elektromechanischen Wandlern,insbesondere Ferroelektrika |
| DE2605809A1 (de) * | 1976-02-12 | 1977-08-18 | Minnesota Mining & Mfg | Elektrisch kompensierter sensor |
| EP0055345A1 (de) * | 1980-12-29 | 1982-07-07 | WALZ ELEKTRONIK GmbH | Lagerstatt für einen Patienten mit piezoelektrischen Kraftsignalgeber |
| DE3146986A1 (de) * | 1981-11-26 | 1983-06-01 | Siemens AG, 1000 Berlin und 8000 München | "elektromechanischer wandler" |
| DE19649679A1 (de) * | 1996-02-26 | 1997-08-28 | Samsung Electronics Co Ltd | Schwingungserfassungssensor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE202005021706U1 (de) | 2009-07-02 |
| WO2006037145A1 (de) | 2006-04-13 |
| AT500829A1 (de) | 2006-04-15 |
| JP2008516202A (ja) | 2008-05-15 |
| US7618188B2 (en) | 2009-11-17 |
| EP1797603B1 (de) | 2009-08-05 |
| US20070283769A1 (en) | 2007-12-13 |
| ATE438932T1 (de) | 2009-08-15 |
| EP1797603A1 (de) | 2007-06-20 |
| JP5139803B2 (ja) | 2013-02-06 |
| DE502005007858D1 (de) | 2009-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ELJ | Ceased due to non-payment of the annual fee |