JP2009300116A5 - - Google Patents

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Publication number
JP2009300116A5
JP2009300116A5 JP2008152127A JP2008152127A JP2009300116A5 JP 2009300116 A5 JP2009300116 A5 JP 2009300116A5 JP 2008152127 A JP2008152127 A JP 2008152127A JP 2008152127 A JP2008152127 A JP 2008152127A JP 2009300116 A5 JP2009300116 A5 JP 2009300116A5
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JP
Japan
Prior art keywords
cantilever
voltage
displacement
resistor
strain
Prior art date
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Granted
Application number
JP2008152127A
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English (en)
Japanese (ja)
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JP5187839B2 (ja
JP2009300116A (ja
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Priority to JP2008152127A priority Critical patent/JP5187839B2/ja
Priority claimed from JP2008152127A external-priority patent/JP5187839B2/ja
Priority to US12/455,556 priority patent/US8214915B2/en
Publication of JP2009300116A publication Critical patent/JP2009300116A/ja
Publication of JP2009300116A5 publication Critical patent/JP2009300116A5/ja
Application granted granted Critical
Publication of JP5187839B2 publication Critical patent/JP5187839B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008152127A 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡 Expired - Fee Related JP5187839B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008152127A JP5187839B2 (ja) 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡
US12/455,556 US8214915B2 (en) 2008-06-10 2009-06-03 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008152127A JP5187839B2 (ja) 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2009300116A JP2009300116A (ja) 2009-12-24
JP2009300116A5 true JP2009300116A5 (enExample) 2011-06-16
JP5187839B2 JP5187839B2 (ja) 2013-04-24

Family

ID=41547188

Family Applications (1)

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JP2008152127A Expired - Fee Related JP5187839B2 (ja) 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡

Country Status (2)

Country Link
US (1) US8214915B2 (enExample)
JP (1) JP5187839B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008003796A1 (es) * 2006-07-04 2008-01-10 Consejo Superior De Investigaciones Científicas Método de utilización de un microscopio de fuerzas atómicas
JP5226481B2 (ja) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス 自己変位検出型カンチレバーおよび走査型プローブ顕微鏡
JP5461917B2 (ja) * 2009-08-12 2014-04-02 株式会社日立ハイテクサイエンス 軟化点測定装置および熱伝導測定装置
KR101891940B1 (ko) * 2010-03-19 2018-08-27 브루커 나노, 인코퍼레이션. 원자력 현미경을 작동시키는 방법
EP2428804B1 (en) * 2010-09-14 2015-01-14 Consiglio Nazionale Delle Ricerche A method for driving a scanning probe microscope at elevated scan frequencies
US8384020B2 (en) * 2010-09-24 2013-02-26 Ut-Battelle, Llc Spatially resolved thermal desorption/ionization coupled with mass spectrometry
TWI439695B (zh) * 2011-07-12 2014-06-01 Univ Nat Cheng Kung 熱探針
GB201313725D0 (en) * 2013-07-31 2013-09-11 Salunda Ltd Fluid sensor
JP6594905B2 (ja) * 2014-02-17 2019-10-23 ウニヴァジテート バーゼル 生物学的システムの質量および／または機械的特性を決定するための測定デバイスおよび方法
CN106062525B (zh) * 2014-03-13 2019-07-09 精工电子有限公司 压力传感器
JP7048964B2 (ja) * 2018-03-26 2022-04-06 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びその走査方法
KR102240875B1 (ko) * 2021-01-26 2021-04-16 에스케이씨 주식회사 무선충전 장치 및 이를 포함하는 이동 수단

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4671058A (en) * 1983-11-21 1987-06-09 Nippondenso Co., Ltd. Heating device
US5822285A (en) * 1997-03-31 1998-10-13 International Business Machines Corporation Atomic force microscopy disk data storage system with nonradial tracking lines
US6126311A (en) * 1998-11-02 2000-10-03 Claud S. Gordon Company Dew point sensor using mems
JP2000266657A (ja) * 1999-03-16 2000-09-29 Seiko Instruments Inc 自己励振型カンチレバー
JP2000329681A (ja) * 1999-03-16 2000-11-30 Seiko Instruments Inc 自己励振、自己検知型プローブ及び走査型プローブ装置
US6457360B1 (en) * 2001-02-21 2002-10-01 Conel Ltd. High-precision integrated semiconductor peizoresistive detector devices and methods using the same
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
JP2004306197A (ja) * 2003-04-08 2004-11-04 Kansai Tlo Kk マルチプローブ及びこれを用いた微細加工方法
US20070063613A1 (en) * 2003-05-09 2007-03-22 Technion Research And Development Foundation Ltd. Thermoelastically actuated microresonator
US7928343B2 (en) * 2007-12-04 2011-04-19 The Board Of Trustees Of The University Of Illinois Microcantilever heater-thermometer with integrated temperature-compensated strain sensor

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