JP5187839B2 - カンチレバーシステム及び走査型プローブ顕微鏡 - Google Patents

カンチレバーシステム及び走査型プローブ顕微鏡 Download PDF

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Publication number
JP5187839B2
JP5187839B2 JP2008152127A JP2008152127A JP5187839B2 JP 5187839 B2 JP5187839 B2 JP 5187839B2 JP 2008152127 A JP2008152127 A JP 2008152127A JP 2008152127 A JP2008152127 A JP 2008152127A JP 5187839 B2 JP5187839 B2 JP 5187839B2
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Japan
Prior art keywords
voltage
cantilever
lever portion
resistor
lever
Prior art date
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Expired - Fee Related
Application number
JP2008152127A
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English (en)
Japanese (ja)
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JP2009300116A (ja
JP2009300116A5 (enExample
Inventor
雅次 繁野
誠人 伊與木
直哉 渡邉
和俊 渡辺
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Hitachi High Tech Science Corp
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Hitachi High Tech Science Corp
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Publication date
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Priority to JP2008152127A priority Critical patent/JP5187839B2/ja
Priority to US12/455,556 priority patent/US8214915B2/en
Publication of JP2009300116A publication Critical patent/JP2009300116A/ja
Publication of JP2009300116A5 publication Critical patent/JP2009300116A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G9/00—Methods of, or apparatus for, the determination of weight, not provided for in groups G01G1/00 - G01G7/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2008152127A 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡 Expired - Fee Related JP5187839B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008152127A JP5187839B2 (ja) 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡
US12/455,556 US8214915B2 (en) 2008-06-10 2009-06-03 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008152127A JP5187839B2 (ja) 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2009300116A JP2009300116A (ja) 2009-12-24
JP2009300116A5 JP2009300116A5 (enExample) 2011-06-16
JP5187839B2 true JP5187839B2 (ja) 2013-04-24

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JP2008152127A Expired - Fee Related JP5187839B2 (ja) 2008-06-10 2008-06-10 カンチレバーシステム及び走査型プローブ顕微鏡

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Country Link
US (1) US8214915B2 (enExample)
JP (1) JP5187839B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2045818B1 (en) * 2006-07-04 2019-05-08 Consejo Superior de Investigaciones Cientificas (CSIC) Method for using an atomic force microscope
JP5226481B2 (ja) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス 自己変位検出型カンチレバーおよび走査型プローブ顕微鏡
JP5461917B2 (ja) * 2009-08-12 2014-04-02 株式会社日立ハイテクサイエンス 軟化点測定装置および熱伝導測定装置
US8869310B2 (en) * 2010-03-19 2014-10-21 Bruker Nano, Inc. Low drift scanning probe microscope
EP2428804B1 (en) * 2010-09-14 2015-01-14 Consiglio Nazionale Delle Ricerche A method for driving a scanning probe microscope at elevated scan frequencies
US8384020B2 (en) * 2010-09-24 2013-02-26 Ut-Battelle, Llc Spatially resolved thermal desorption/ionization coupled with mass spectrometry
TWI439695B (zh) * 2011-07-12 2014-06-01 Univ Nat Cheng Kung 熱探針
GB201313725D0 (en) * 2013-07-31 2013-09-11 Salunda Ltd Fluid sensor
US10564182B2 (en) * 2014-02-17 2020-02-18 Universität Basel Measuring device and method for determining mass and/or mechanical properties of a biological system
CN106062525B (zh) * 2014-03-13 2019-07-09 精工电子有限公司 压力传感器
JP7048964B2 (ja) * 2018-03-26 2022-04-06 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びその走査方法
KR102240875B1 (ko) * 2021-01-26 2021-04-16 에스케이씨 주식회사 무선충전 장치 및 이를 포함하는 이동 수단

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4671058A (en) * 1983-11-21 1987-06-09 Nippondenso Co., Ltd. Heating device
US5822285A (en) * 1997-03-31 1998-10-13 International Business Machines Corporation Atomic force microscopy disk data storage system with nonradial tracking lines
US6126311A (en) * 1998-11-02 2000-10-03 Claud S. Gordon Company Dew point sensor using mems
JP2000329681A (ja) * 1999-03-16 2000-11-30 Seiko Instruments Inc 自己励振、自己検知型プローブ及び走査型プローブ装置
JP2000266657A (ja) * 1999-03-16 2000-09-29 Seiko Instruments Inc 自己励振型カンチレバー
US6457360B1 (en) * 2001-02-21 2002-10-01 Conel Ltd. High-precision integrated semiconductor peizoresistive detector devices and methods using the same
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
JP2004306197A (ja) * 2003-04-08 2004-11-04 Kansai Tlo Kk マルチプローブ及びこれを用いた微細加工方法
US20070063613A1 (en) * 2003-05-09 2007-03-22 Technion Research And Development Foundation Ltd. Thermoelastically actuated microresonator
US7928343B2 (en) * 2007-12-04 2011-04-19 The Board Of Trustees Of The University Of Illinois Microcantilever heater-thermometer with integrated temperature-compensated strain sensor

Also Published As

Publication number Publication date
US8214915B2 (en) 2012-07-03
JP2009300116A (ja) 2009-12-24
US20100107284A1 (en) 2010-04-29

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