JP2008311627A5 - - Google Patents

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Publication number
JP2008311627A5
JP2008311627A5 JP2008110291A JP2008110291A JP2008311627A5 JP 2008311627 A5 JP2008311627 A5 JP 2008311627A5 JP 2008110291 A JP2008110291 A JP 2008110291A JP 2008110291 A JP2008110291 A JP 2008110291A JP 2008311627 A5 JP2008311627 A5 JP 2008311627A5
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JP
Japan
Prior art keywords
layer
semiconductor substrate
substrate
manufacturing
insulating
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JP2008110291A
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English (en)
Japanese (ja)
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JP5500781B2 (ja
JP2008311627A (ja
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Priority claimed from JP2008110291A external-priority patent/JP5500781B2/ja
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Publication of JP2008311627A5 publication Critical patent/JP2008311627A5/ja
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Publication of JP5500781B2 publication Critical patent/JP5500781B2/ja
Expired - Fee Related legal-status Critical Current
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JP2008110291A 2007-05-17 2008-04-21 Ｓｏｉ基板の製造方法 Expired - Fee Related JP5500781B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008110291A JP5500781B2 (ja) 2007-05-17 2008-04-21 Ｓｏｉ基板の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007132085 2007-05-17
JP2007132085 2007-05-17
JP2008110291A JP5500781B2 (ja) 2007-05-17 2008-04-21 Ｓｏｉ基板の製造方法

Publications (3)

Publication Number Publication Date
JP2008311627A JP2008311627A (ja) 2008-12-25
JP2008311627A5 true JP2008311627A5 (enExample) 2011-06-02
JP5500781B2 JP5500781B2 (ja) 2014-05-21

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JP2008110291A Expired - Fee Related JP5500781B2 (ja) 2007-05-17 2008-04-21 Ｓｏｉ基板の製造方法

Country Status (3)

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US (3) US7666757B2 (enExample)
EP (1) EP1993128A3 (enExample)
JP (1) JP5500781B2 (enExample)

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US7763502B2 (en) * 2007-06-22 2010-07-27 Semiconductor Energy Laboratory Co., Ltd Semiconductor substrate, method for manufacturing semiconductor substrate, semiconductor device, and electronic device
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TWI493609B (zh) * 2007-10-23 2015-07-21 Semiconductor Energy Lab 半導體基板、顯示面板及顯示裝置的製造方法
JP5548351B2 (ja) * 2007-11-01 2014-07-16 株式会社半導体エネルギー研究所 半導体装置の作製方法
US7820527B2 (en) * 2008-02-20 2010-10-26 Varian Semiconductor Equipment Associates, Inc. Cleave initiation using varying ion implant dose
US7939389B2 (en) 2008-04-18 2011-05-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP5663150B2 (ja) * 2008-07-22 2015-02-04 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法
US7943414B2 (en) * 2008-08-01 2011-05-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
JP5263509B2 (ja) * 2008-09-19 2013-08-14 信越半導体株式会社 貼り合わせウェーハの製造方法
US8741740B2 (en) * 2008-10-02 2014-06-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
EP2345060B1 (en) 2008-10-30 2013-12-04 Soitec Methods of forming layers of semiconductor material having reduced lattice strain and engineered substrates including same
JP5478199B2 (ja) * 2008-11-13 2014-04-23 株式会社半導体エネルギー研究所 半導体装置の作製方法
US8043938B2 (en) * 2009-05-14 2011-10-25 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate and SOI substrate
JP5866088B2 (ja) * 2009-11-24 2016-02-17 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法
JP5471379B2 (ja) * 2009-12-04 2014-04-16 株式会社村田製作所 圧電デバイスの製造方法
EP2330697A1 (en) * 2009-12-07 2011-06-08 S.O.I.Tec Silicon on Insulator Technologies Semiconductor device having an InGaN layer
JP2011124738A (ja) * 2009-12-10 2011-06-23 Murata Mfg Co Ltd 圧電デバイスの製造方法
JP2011227369A (ja) * 2010-04-22 2011-11-10 Hitachi Displays Ltd 画像表示装置及びその製造方法
JP5851113B2 (ja) * 2010-04-26 2016-02-03 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法
KR101850540B1 (ko) * 2010-10-13 2018-04-20 삼성전자주식회사 후면 수광 이미지 센서를 갖는 반도체 소자
JP5917861B2 (ja) * 2011-08-30 2016-05-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法
US8883612B2 (en) * 2011-09-12 2014-11-11 Infineon Technologies Austria Ag Method for manufacturing a semiconductor device
JP6315262B2 (ja) 2014-06-12 2018-04-25 ソニー株式会社 固体撮像素子、固体撮像素子の製造方法、及び、撮像装置
FR3036223B1 (fr) * 2015-05-11 2018-05-25 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de collage direct de substrats avec amincissement des bords d'au moins un des deux substrats
US9725312B1 (en) * 2016-02-05 2017-08-08 Taiwan Semiconductor Manufacturing Co., Ltd. Preconditioning to enhance hydrophilic fusion bonding
CN107154379B (zh) * 2016-03-03 2020-01-24 上海新昇半导体科技有限公司 绝缘层上顶层硅衬底及其制造方法
FR3065322B1 (fr) * 2017-04-18 2019-06-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de realisation d'un dispositif d'affichage a matrice de leds
US10553474B1 (en) 2018-08-29 2020-02-04 Taiwan Semiconductor Manufacturing Co., Ltd. Method for forming a semiconductor-on-insulator (SOI) substrate
FR3094559B1 (fr) * 2019-03-29 2024-06-21 Soitec Silicon On Insulator Procédé de transfert de paves d’un substrat donneur sur un substrat receveur
CN115881622B (zh) * 2023-01-29 2023-05-12 合肥晶合集成电路股份有限公司 一种晶圆键合的方法

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FR2888663B1 (fr) * 2005-07-13 2008-04-18 Soitec Silicon On Insulator Procede de diminution de la rugosite d'une couche epaisse d'isolant
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