JP2008302487A5 - - Google Patents

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Publication number
JP2008302487A5
JP2008302487A5 JP2007153922A JP2007153922A JP2008302487A5 JP 2008302487 A5 JP2008302487 A5 JP 2008302487A5 JP 2007153922 A JP2007153922 A JP 2007153922A JP 2007153922 A JP2007153922 A JP 2007153922A JP 2008302487 A5 JP2008302487 A5 JP 2008302487A5
Authority
JP
Japan
Prior art keywords
suction
substrate
unit
rectangular substrate
base point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007153922A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008302487A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007153922A priority Critical patent/JP2008302487A/ja
Priority claimed from JP2007153922A external-priority patent/JP2008302487A/ja
Priority to KR1020080052407A priority patent/KR20080108904A/ko
Priority to CNA2008101089197A priority patent/CN101323396A/zh
Priority to TW097121524A priority patent/TW200906695A/zh
Publication of JP2008302487A publication Critical patent/JP2008302487A/ja
Publication of JP2008302487A5 publication Critical patent/JP2008302487A5/ja
Pending legal-status Critical Current

Links

JP2007153922A 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置 Pending JP2008302487A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置
KR1020080052407A KR20080108904A (ko) 2007-06-11 2008-06-04 기판 흡착 장치, 기판 반송 장치 및 외관 검사 장치
CNA2008101089197A CN101323396A (zh) 2007-06-11 2008-06-06 基板吸附装置和基板搬送装置以及外观检查装置
TW097121524A TW200906695A (en) 2007-06-11 2008-06-10 Substrate adsorption device, substrate transportation device and external inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置

Publications (2)

Publication Number Publication Date
JP2008302487A JP2008302487A (ja) 2008-12-18
JP2008302487A5 true JP2008302487A5 (ru) 2010-07-01

Family

ID=40187135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007153922A Pending JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置

Country Status (4)

Country Link
JP (1) JP2008302487A (ru)
KR (1) KR20080108904A (ru)
CN (1) CN101323396A (ru)
TW (1) TW200906695A (ru)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465313B (zh) * 2009-04-07 2014-12-21 Kromax Internat Corp 非接觸式定位平臺與定位方法
KR101906129B1 (ko) * 2009-11-26 2018-10-08 가부시키가이샤 니콘 기판 처리 장치 및 표시 소자의 제조 방법
KR101309144B1 (ko) * 2011-01-10 2013-09-17 엘아이지에이디피 주식회사 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치
JP5931409B2 (ja) * 2011-11-14 2016-06-08 川崎重工業株式会社 板材の搬送システム
KR102099882B1 (ko) * 2012-12-27 2020-04-13 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
CN104058257B (zh) * 2013-03-22 2017-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 晶片的辅助取片机构、取片系统及取片方法
JP6280805B2 (ja) * 2014-04-30 2018-02-14 平田機工株式会社 ワーク形状測定システム及び制御方法
WO2015170208A1 (en) * 2014-05-03 2015-11-12 Semiconductor Energy Laboratory Co., Ltd. Film-like member support apparatus
CN105058401A (zh) * 2015-08-07 2015-11-18 天津联欣盈塑胶科技有限公司 一种夹取塑料产品的机械手
ES2948058T3 (es) 2015-08-26 2023-08-30 Berkshire Grey Operating Company Inc Sistemas y métodos para proporcionar conjuntos de válvula de vacío para efectores finales
CN105397828B (zh) * 2015-11-27 2017-03-29 大连理工大学 一种用于管桩端板加工的大尺寸变直径机器人夹具
CN105428290B (zh) * 2015-12-23 2018-06-29 上海华虹宏力半导体制造有限公司 晶圆传输装置及其真空吸附机械手
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
TWI648211B (zh) * 2016-12-20 2019-01-21 亞智科技股份有限公司 吸取基板的方法與吸取裝置
CN106927258A (zh) * 2017-01-26 2017-07-07 江苏东旭亿泰智能装备有限公司 一种用于玻璃基板的传送装置及其传送方法
CN108238447A (zh) * 2018-01-16 2018-07-03 京东方科技集团股份有限公司 传输系统
TW202301531A (zh) * 2021-03-25 2023-01-01 日商東京威力科創股份有限公司 基板搬送裝置、塗佈處理裝置、基板搬送方法及基板搬送程式
TW202306651A (zh) * 2021-03-31 2023-02-16 日商東京威力科創股份有限公司 基板搬送裝置、塗佈處理裝置及基板搬送方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101055911B1 (ko) * 2003-05-06 2011-08-10 올림푸스 가부시키가이샤 기판 흡착 장치

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