JP2008066605A - 半導体装置用テープキャリア、半導体装置の製造方法、半導体装置、および半導体モジュール装置 - Google Patents
半導体装置用テープキャリア、半導体装置の製造方法、半導体装置、および半導体モジュール装置 Download PDFInfo
- Publication number
- JP2008066605A JP2008066605A JP2006244782A JP2006244782A JP2008066605A JP 2008066605 A JP2008066605 A JP 2008066605A JP 2006244782 A JP2006244782 A JP 2006244782A JP 2006244782 A JP2006244782 A JP 2006244782A JP 2008066605 A JP2008066605 A JP 2008066605A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- pitch
- tape
- cof
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 295
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 79
- 239000011347 resin Substances 0.000 claims abstract description 15
- 229920005989 resin Polymers 0.000 claims abstract description 15
- 238000007789 sealing Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 64
- 238000012545 processing Methods 0.000 claims description 32
- 238000004080 punching Methods 0.000 claims description 24
- 238000013461 design Methods 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 6
- 230000007723 transport mechanism Effects 0.000 claims description 6
- 238000009413 insulation Methods 0.000 abstract description 5
- 239000010409 thin film Substances 0.000 abstract description 5
- 239000011295 pitch Substances 0.000 description 186
- 239000000463 material Substances 0.000 description 20
- 229910000679 solder Inorganic materials 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- 239000011889 copper foil Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000013310 covalent-organic framework Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/4985—Flexible insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3185—Partial encapsulation or coating the coating covering also the sidewalls of the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49572—Lead-frames or other flat leads consisting of thin flexible metallic tape with or without a film carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0097—Processing two or more printed circuits simultaneously, e.g. made from a common substrate, or temporarily stacked circuit boards
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】表面に複数配置した配線パターン11と半導体素子21のバンプ23とを電気的に接続し、絶縁性の樹脂22で封止することで半導体装置となる薄膜の絶縁テープ1であって、絶縁テープ1の搬送方向における半導体装置の外形サイズが、絶縁テープ1を搬送する為に開口されたスプロケットホール2のピッチ間隔の整数倍Xピッチ(X=1,2,3,4,5,・・・)より大きく、尚かつ整数倍X+小数Yピッチ(0<Y<1)以下である半導体装置用テープキャリアにおいて、半導体装置1デバイスのテープピッチを整数倍X+小数Yピッチ(0<Y<1)に設定し、半導体装置の外形サイズに関与しない絶縁テープ1の無形領域を削減している。
【選択図】図1
Description
図1〜図4に本発明でのCOF、TCP用テープキャリア、及び半導体装置の実施の形態を示し、図5〜図8にCOF、TCP半導体装置、及びモジュールの断面図を示す。
図9、図10に本発明でのCOF用のテープキャリア100、及び半導体装置の実施の形態を示す。
図11に本発明のCOF半導体装置の実施の形態を示す。
図12に本発明のCOF半導体装置の実施の形態を示す。
図13に本発明のCOF半導体装置の実施の形態として製造工程(半導体素子実装工程)を示す。
図14に本発明のCOF半導体装置の実施の形態として製造工程(半導体装置打ち抜き工程)を示す。
2,502 スプロケットホール
11、511 配線パターン
12、512 外部接続用コネクタ部
13、513 ソルダーレジスト
14、514 ソルダーレジスト開口部
15、515 搭載領域
16、516 開口部
17、517 スリット
18、 接着剤
21、521 半導体素子
22、522 樹脂(絶縁性樹脂)
23 バンプ(突起電極)
24 液晶パネル
25 プリント基板
100 テープキャリア(半導体装置用テープキャリア)
200 テープキャリア(半導体装置用テープキャリア)
500 テープキャリア(半導体装置用テープキャリア)
503 無形領域(不要領域)
600 テープキャリア(半導体装置用テープキャリア)
700 テープキャリア(半導体装置用テープキャリア)
Claims (12)
- 表面に複数配置した配線パターンと半導体素子の突起電極とを電気的に接続し、絶縁性樹脂で封止することで半導体装置となる薄膜の絶縁テープからなる半導体装置用テープキャリアであって、
前記絶縁テープの搬送方向における前記半導体装置の外形サイズが、
前記絶縁テープを搬送する為に開口されたスプロケットホールのピッチ間隔の整数倍Xピッチ(X=1,2,3,4,5,・・・)より大きく、尚かつ整数倍X+小数Yピッチ(0<Y<1)以下であり、
前記半導体装置1デバイスのテープピッチを整数倍X+小数Yピッチ(0<Y<1)に設定し、前記半導体装置の外形サイズに関与しない前記絶縁テープの無形領域を削減していることを特徴とする半導体装置用テープキャリア。 - 前記半導体装置がCOFまたはTCPであることを特徴とする請求項1に記載の半導体装置用テープキャリア。
- 前記絶縁テープの搬送方向における前記半導体装置の外形サイズを前記配線パターンの設計面で縮小した場合において、
小数Yピッチ(0<Y<1)化を同時に行い、前記COF、又はTCP半導体装置用テープキャリアのテープピッチを整数倍X+小数Yピッチ(0<Y<1)に設定していることを特徴とする請求項1または2に記載の半導体装置用テープキャリア。 - 小数Yが、0.05の整数倍(1,2,3,4,5,・・・)であることを特徴とする請求項1〜3の何れか1項に記載の半導体装置用テープキャリア。
- 前記半導体素子の実装、樹脂封止、テスト、他、アセンブリ工程での搬送ピッチを小数Zピッチ(0<Z<1、Z=0.05の整数倍)で実施し、テープピッチを整数倍X+小数Yピッチ(0<Y<1)に設定した前記半導体装置を製造していることを特徴とする請求項1〜4の何れか1項に記載の半導体装置の製造方法。
- 製造設備の搬送ピッチを小数Zピッチ(0<Z<1、Z=0.05の整数倍)で実施できるように、ソフトや搬送機構を変更していることを特徴とする請求項5に記載の半導体装置の製造方法。
- 前記半導体素子の実装、樹脂封止、テスト、他、アセンブリ工程が、
前記半導体装置を複数個 同時に処理し、前記半導体装置の製品処理ピッチが整数倍となっていることを特徴とする請求項1〜4の何れか1項に記載の半導体装置の製造方法。 - 前記半導体装置を処理する処理機構を複数個保有している製造設備を使用して、複数個の半導体装置を同時に処理していることを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記半導体装置の前記絶縁テープからの打ち抜き工程が、前記半導体装置を複数個同時に打ち抜く工程であり、
前記半導体装置の製品打ち抜きの外形、及び搬送ピッチが前記スプロケットホールの前記ピッチ間隔の整数倍となっていることを特徴とする請求項1〜8の何れか1項に記載の半導体装置の製造方法。 - 1セットの打ち抜き金型によって、複数個の前記半導体装置を同時に打ち抜いていることを特徴とする請求項9に記載の半導体装置の製造方法。
- 請求項1〜4の何れか1項に記載の半導体装置用テープキャリア、または請求項5〜10の何れか1項に記載の半導体装置の製造方法を用いて、製造された半導体装置。
- 請求項11に記載の半導体装置を用いて製造された半導体モジュール装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006244782A JP4283292B2 (ja) | 2006-09-08 | 2006-09-08 | 半導体装置用テープキャリア、および半導体装置の製造方法 |
TW096133101A TWI343614B (en) | 2006-09-08 | 2007-09-05 | Semiconductor device tape carrier, manufacturing method for semiconductor device, semiconductor device, and semiconductor module device |
US11/896,827 US7582976B2 (en) | 2006-09-08 | 2007-09-06 | Semiconductor device tape carrier, manufacturing method for semiconductor device, semiconductor device, and semiconductor module device |
KR1020070091090A KR100955439B1 (ko) | 2006-09-08 | 2007-09-07 | 반도체 장치용 테이프 캐리어, 반도체 장치의 제조 방법,반도체 장치 및 반도체 모듈 장치 |
CNB2007101490991A CN100543978C (zh) | 2006-09-08 | 2007-09-07 | 半导体器件及其制造方法、条带载体、半导体模块装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006244782A JP4283292B2 (ja) | 2006-09-08 | 2006-09-08 | 半導体装置用テープキャリア、および半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008066605A true JP2008066605A (ja) | 2008-03-21 |
JP4283292B2 JP4283292B2 (ja) | 2009-06-24 |
Family
ID=39168730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006244782A Active JP4283292B2 (ja) | 2006-09-08 | 2006-09-08 | 半導体装置用テープキャリア、および半導体装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7582976B2 (ja) |
JP (1) | JP4283292B2 (ja) |
KR (1) | KR100955439B1 (ja) |
CN (1) | CN100543978C (ja) |
TW (1) | TWI343614B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011035178A (ja) * | 2009-08-03 | 2011-02-17 | Hitachi High-Technologies Corp | 電子部品実装装置 |
JP2019197936A (ja) * | 2019-08-27 | 2019-11-14 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US11244883B2 (en) | 2009-07-15 | 2022-02-08 | Renesas Electronics Corporation | Semiconductor device |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9944051B2 (en) * | 2006-10-02 | 2018-04-17 | Mead Johnson Nutrition Co. | Laminate |
CN102237334A (zh) * | 2011-06-09 | 2011-11-09 | 深圳市华星光电技术有限公司 | Cof及cof载带 |
US20120314175A1 (en) * | 2011-06-09 | 2012-12-13 | Shenzhen China Star Oploelectronics Technology Co., Ltd. | Cof, cof carrier tape and drive circuit of liquid crystal television |
KR101957492B1 (ko) * | 2012-12-26 | 2019-03-12 | 엘지디스플레이 주식회사 | 가요성 드라이브 ic 패키지와 그 절삭 장치 |
KR102508527B1 (ko) | 2016-07-01 | 2023-03-09 | 삼성전자주식회사 | 필름형 반도체 패키지 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3558921B2 (ja) * | 1999-05-14 | 2004-08-25 | シャープ株式会社 | テープキャリア並びにテープキャリア型半導体装置の製造方法 |
JP2001110853A (ja) | 1999-08-03 | 2001-04-20 | Mitsui Mining & Smelting Co Ltd | 電子部品実装用フィルムキャリアテープの製造方法および電子部品実装用フィルムキャリアテープの製造装置 |
JP4070135B2 (ja) * | 2004-05-11 | 2008-04-02 | 沖電気工業株式会社 | テープキャリア、半導体装置の製造方法および半導体装置 |
JP2006165517A (ja) * | 2004-11-11 | 2006-06-22 | Sharp Corp | フレキシブル配線基板、それを用いた半導体装置および電子機器、並びにフレキシブル配線基板の製造方法 |
JP2007150088A (ja) * | 2005-11-29 | 2007-06-14 | Matsushita Electric Ind Co Ltd | 配線基板およびその製造方法 |
-
2006
- 2006-09-08 JP JP2006244782A patent/JP4283292B2/ja active Active
-
2007
- 2007-09-05 TW TW096133101A patent/TWI343614B/zh active
- 2007-09-06 US US11/896,827 patent/US7582976B2/en active Active
- 2007-09-07 KR KR1020070091090A patent/KR100955439B1/ko active IP Right Grant
- 2007-09-07 CN CNB2007101490991A patent/CN100543978C/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11244883B2 (en) | 2009-07-15 | 2022-02-08 | Renesas Electronics Corporation | Semiconductor device |
JP2011035178A (ja) * | 2009-08-03 | 2011-02-17 | Hitachi High-Technologies Corp | 電子部品実装装置 |
JP2019197936A (ja) * | 2019-08-27 | 2019-11-14 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI343614B (en) | 2011-06-11 |
CN101140918A (zh) | 2008-03-12 |
CN100543978C (zh) | 2009-09-23 |
US20080061432A1 (en) | 2008-03-13 |
KR100955439B1 (ko) | 2010-05-04 |
TW200828467A (en) | 2008-07-01 |
KR20080023196A (ko) | 2008-03-12 |
US7582976B2 (en) | 2009-09-01 |
JP4283292B2 (ja) | 2009-06-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101071800B (zh) | 载带、半导体器件和半导体模块装置 | |
JP4283292B2 (ja) | 半導体装置用テープキャリア、および半導体装置の製造方法 | |
US7977805B2 (en) | Flexible wiring substrate, semiconductor device and electronic device using flexible wiring substrate, and fabricating method of flexible wiring substrate | |
JP3536023B2 (ja) | Cof用テープキャリアおよびこれを用いて製造されるcof構造の半導体装置 | |
JP3523536B2 (ja) | 半導体装置及びその製造方法、並びに液晶モジュール及びその搭載方法 | |
KR20010049250A (ko) | 테이프캐리어 및 테이프캐리어형 반도체장치의 제조 방법 | |
KR101477818B1 (ko) | 배선 회로 기판 및 그 제조 방법 | |
US20060054349A1 (en) | Cof film carrier tape and its manufacturing method | |
JP2005252227A (ja) | フィルム基板およびその製造方法と画像表示用基板 | |
JP2008177618A (ja) | フレキシブル配線基板、及びそれを用いた半導体装置および電子機器 | |
JP2001036246A (ja) | 配線基板およびこれを用いた多層配線基板 | |
JP2006253247A (ja) | フレキシブルプリント配線板、およびその製造方法 | |
CN103098565A (zh) | 元器件内置基板 | |
JP2000340617A (ja) | Tabテープキャリアおよびその製造方法 | |
JP4760866B2 (ja) | Cof基板 | |
JP2011155201A (ja) | テープキャリア、テープキャリア型半導体装置、およびテープキャリア型半導体装置の製造方法 | |
KR20020069675A (ko) | 연성인쇄회로기판의 접합방법 | |
JP5184578B2 (ja) | プリント配線基板 | |
JP4770884B2 (ja) | Cof基板及びその製造方法 | |
JP4123371B2 (ja) | 半導体装置及びその製造方法、回路基板並びに電子機器 | |
KR20060006441A (ko) | 전해 도금에 의하여 캐리어 테이프 상에 도금층을형성하는 방법 | |
JPH04254344A (ja) | インナーリード先端に補強テープを有するtab用テープキャリアの製造方法 | |
JP2001110851A (ja) | フィルムキャリヤテープ | |
JP2001332590A (ja) | テープキャリア型半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080711 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080715 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080912 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090317 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090318 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4283292 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120327 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120327 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130327 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130327 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140327 Year of fee payment: 5 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |