JP2007524243A5 - - Google Patents

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Publication number
JP2007524243A5
JP2007524243A5 JP2007500029A JP2007500029A JP2007524243A5 JP 2007524243 A5 JP2007524243 A5 JP 2007524243A5 JP 2007500029 A JP2007500029 A JP 2007500029A JP 2007500029 A JP2007500029 A JP 2007500029A JP 2007524243 A5 JP2007524243 A5 JP 2007524243A5
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JP
Japan
Prior art keywords
transparent material
protective layer
replication tool
layer
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007500029A
Other languages
English (en)
Japanese (ja)
Other versions
JP4903685B2 (ja
JP2007524243A (ja
Filing date
Publication date
Priority claimed from EP04405110A external-priority patent/EP1569276A1/en
Application filed filed Critical
Publication of JP2007524243A publication Critical patent/JP2007524243A/ja
Publication of JP2007524243A5 publication Critical patent/JP2007524243A5/ja
Application granted granted Critical
Publication of JP4903685B2 publication Critical patent/JP4903685B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007500029A 2004-02-27 2005-02-25 集積光学システムを製造する方法 Expired - Lifetime JP4903685B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP04405110A EP1569276A1 (en) 2004-02-27 2004-02-27 Micro-optics on optoelectronics
EP04405110.0 2004-02-27
PCT/CH2005/000109 WO2005083789A2 (en) 2004-02-27 2005-02-25 Micro-optics on optoelectronics

Publications (3)

Publication Number Publication Date
JP2007524243A JP2007524243A (ja) 2007-08-23
JP2007524243A5 true JP2007524243A5 (enExample) 2008-03-27
JP4903685B2 JP4903685B2 (ja) 2012-03-28

Family

ID=34746192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007500029A Expired - Lifetime JP4903685B2 (ja) 2004-02-27 2005-02-25 集積光学システムを製造する方法

Country Status (9)

Country Link
US (1) US7457490B2 (enExample)
EP (2) EP1569276A1 (enExample)
JP (1) JP4903685B2 (enExample)
KR (1) KR101194452B1 (enExample)
CN (1) CN1947254B (enExample)
AT (1) ATE498910T1 (enExample)
DE (1) DE602005026367D1 (enExample)
TW (1) TWI362058B (enExample)
WO (1) WO2005083789A2 (enExample)

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SG11201400917VA (en) * 2011-10-06 2014-07-30 Heptagon Micro Optics Pte Ltd Method for wafer-level manufacturing of objects and corresponding semi-finished products
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US9329080B2 (en) 2012-02-15 2016-05-03 Aplle Inc. Modular optics for scanning engine having beam combining optics with a prism intercepted by both beam axis and collection axis
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WO2015088442A1 (en) * 2013-12-10 2015-06-18 Heptagon Micro Optics Pte. Ltd. Wafer-level optical modules and methods for manufacturing the same
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