JP2007512680A5 - - Google Patents

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Publication number
JP2007512680A5
JP2007512680A5 JP2006523830A JP2006523830A JP2007512680A5 JP 2007512680 A5 JP2007512680 A5 JP 2007512680A5 JP 2006523830 A JP2006523830 A JP 2006523830A JP 2006523830 A JP2006523830 A JP 2006523830A JP 2007512680 A5 JP2007512680 A5 JP 2007512680A5
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JP
Japan
Prior art keywords
semiconductor layer
depositing
pattern
aperture mask
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006523830A
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English (en)
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JP2007512680A (ja
Filing date
Publication date
Priority claimed from US10/642,919 external-priority patent/US20070178710A1/en
Application filed filed Critical
Publication of JP2007512680A publication Critical patent/JP2007512680A/ja
Publication of JP2007512680A5 publication Critical patent/JP2007512680A5/ja
Pending legal-status Critical Current

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Claims (3)

  1. （ａ）ゲート電極と、ゲート誘電体と、ソースおよびドレイン電極と、半導体層とを含む薄膜トランジスタを提供する工程と、
    （ｂ）封止材料をアパーチャマスクのパターンを通して前記半導体層の少なくとも一部の上に蒸着する工程と、
    を含む、薄膜トランジスタの封止方法。
  2. 薄膜トランジスタの製造方法であって、
    （ａ）基板を提供する工程と、
    （ｂ）ゲート電極材料をアパーチャマスクのパターンを通して前記基板の上に堆積する工程と、
    （ｃ）ゲート誘電体をアパーチャマスクのパターンを通して前記ゲート電極材料の上に堆積する工程と、
    （ｄ）半導体層をアパーチャマスクのパターンを通して前記ゲート誘電体に隣接して堆積する工程と、
    （ｅ）ソース電極およびドレイン電極をアパーチャマスクのパターンを通して前記半導体層に接触して堆積する工程と、
    （ｆ）封止材料をアパーチャマスクのパターンを通して前記半導体層の少なくとも一部の上に蒸着する工程と、
    を含む方法。
  3. 基板と、ゲート電極と、ゲート誘電体と、ソースおよびドレイン電極と、半導体層と、前記半導体層の少なくとも一部の上の蒸着された封止層とを含むトランジスタ。
JP2006523830A 2003-08-18 2004-06-10 薄膜トランジスタの封止方法 Pending JP2007512680A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/642,919 US20070178710A1 (en) 2003-08-18 2003-08-18 Method for sealing thin film transistors
PCT/US2004/018681 WO2005020343A1 (en) 2003-08-18 2004-06-10 Method for sealing thin film transistors

Publications (2)

Publication Number Publication Date
JP2007512680A JP2007512680A (ja) 2007-05-17
JP2007512680A5 true JP2007512680A5 (ja) 2007-07-26

Family

ID=34216368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006523830A Pending JP2007512680A (ja) 2003-08-18 2004-06-10 薄膜トランジスタの封止方法

Country Status (6)

Country Link
US (1) US20070178710A1 (ja)
EP (1) EP1656695A1 (ja)
JP (1) JP2007512680A (ja)
KR (1) KR20060079195A (ja)
CN (1) CN1839491A (ja)
WO (1) WO2005020343A1 (ja)

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