JP2007324450A - 処理装置及び処理方法 - Google Patents
処理装置及び処理方法 Download PDFInfo
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- JP2007324450A JP2007324450A JP2006154494A JP2006154494A JP2007324450A JP 2007324450 A JP2007324450 A JP 2007324450A JP 2006154494 A JP2006154494 A JP 2006154494A JP 2006154494 A JP2006154494 A JP 2006154494A JP 2007324450 A JP2007324450 A JP 2007324450A
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- 238000003672 processing method Methods 0.000 title claims description 6
- 239000002216 antistatic agent Substances 0.000 claims description 59
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 46
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 41
- 238000009826 distribution Methods 0.000 claims description 18
- 239000003595 mist Substances 0.000 claims description 15
- 238000011144 upstream manufacturing Methods 0.000 claims description 13
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 239000001569 carbon dioxide Substances 0.000 claims description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 4
- 238000005949 ozonolysis reaction Methods 0.000 claims description 3
- 230000003068 static effect Effects 0.000 abstract description 19
- 230000005611 electricity Effects 0.000 abstract description 14
- 230000002265 prevention Effects 0.000 abstract 3
- 239000007789 gas Substances 0.000 description 114
- 230000001105 regulatory effect Effects 0.000 description 53
- 239000000758 substrate Substances 0.000 description 31
- 235000012431 wafers Nutrition 0.000 description 29
- 238000000034 method Methods 0.000 description 18
- 239000012530 fluid Substances 0.000 description 11
- 239000000498 cooling water Substances 0.000 description 7
- 238000002156 mixing Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000005063 solubilization Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005502 peroxidation Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000007928 solubilization Effects 0.000 description 1
- 108010004350 tyrosine-rich amelogenin polypeptide Proteins 0.000 description 1
Images
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Respiratory Apparatuses And Protective Means (AREA)
Abstract
【解決手段】本発明では、処理室(24)の内部で被処理体(ウエハ2)を処理ガスを用いて処理する処理装置(9)において、前記処理ガスを流通させるための処理ガス流通配管(25)と、前記処理ガス流通配管(25)に介設したダイヤフラム弁(圧力調整弁41,55)と、前記ダイヤフラム弁(圧力調整弁41,55)よりも上流側の前記処理ガス流通配管(25)に接続した前記ダイヤフラム弁(圧力調整弁41,55)の帯電を防止するための帯電防止剤を供給する供給源(帯電防止剤供給源43,56)とを有し、前記ダイヤフラム弁(圧力調整弁41,55)に帯電防止剤を供給するようにした。
【選択図】図3
Description
3 キャリア 4 基板搬入出ユニット
5 基板搬送ユニット 6 基板処理ユニット
7 基板受渡装置 8 主搬送装置
9〜16 処理装置 17〜20 洗浄装置
21 処理剤貯蔵庫 22 オゾンガス発生装置
23 フィルターファンユニット 24 処理室
25 処理ガス流通配管 26 ヒータ
27 処理空間 28 流入口
29 流出口 30 処理ガス供給配管
30a 第1処理ガス供給管 30b 第2処理ガス供給管
30c 第3処理ガス供給管 30d 第4処理ガス供給管
31 処理ガス排出配管 32 水蒸気排出配管
33 切換混合弁 34 ガス供給源
35 水蒸気発生装置 36 温度調整手段
37 純水供給源 38 ヒータ
39 純水排出管 40 開閉弁
41 圧力調整弁 42 ミストトラップ
43 帯電防止剤供給源 44 開閉弁
45 排液管 46 オゾン分解装置
47 排気管 48 冷却水供給部
49 冷却水排出部 50 冷却水循環流路
51 連通管 52 ヒータ
53 オゾンキラー 54 冷却装置
55 圧力調整弁 56 帯電防止剤供給源
57 開閉弁 58 ケーシング
59,60 上下蓋体 61 仕切壁
62 流入管 63 上流側空間
64 流出管 65 下流側空間
66 流通孔 67 弁座
68 ダイヤフラム弁体 69 ダイヤフラム
70 弁体 71 可撓片
72 保持片 73 調圧室
74 流通室 75 調圧流体流入口
76 調圧流体流出口 77 調圧機構
Claims (12)
- 処理室の内部で被処理体を処理ガスを用いて処理する処理装置において、
前記処理ガスを流通させるための処理ガス流通配管と、
前記処理ガス流通配管に介設したダイヤフラム弁と、
前記ダイヤフラム弁よりも上流側の前記処理ガス流通配管に接続した前記ダイヤフラム弁の帯電を防止するための帯電防止剤を供給する供給源と、
を有することを特徴とする処理装置。 - 前記ダイヤフラム弁を前記処理室よりも下流側に接続された前記処理ガス流通配管に介設するとともに、前記供給源を前記処理室と前記ダイヤフラム弁との間に接続したことを特徴とする請求項1に記載の処理装置。
- 前記ダイヤフラム弁は、前記処理室の内部圧力を調整するための圧力調整弁として機能することを特徴とする請求項1又は請求項2に記載の処理装置。
- 前記帯電防止剤は、前記処理室の内部圧力を変動させない流量で供給することを特徴とする請求項1〜請求項3のいずれかに記載の処理装置。
- 前記処理ガスとしての蒸気を発生させる蒸気発生室を設けるとともに、蒸気発生室に接続した前記処理ガス流通配管の一部を構成する水蒸気排出管に前記ダイヤフラム弁を介設したことを特徴とする請求項1に記載の処理装置。
- 前記ダイヤフラム弁は、前記蒸気発生室の内部圧力を調整するための圧力調整弁として機能することを特徴とする請求項5に記載の処理装置。
- 前記帯電防止剤は、前記蒸気発生室の内部圧力を変動させない流量で供給することを特徴とする請求項5又は請求項6に記載の処理装置。
- 前記帯電防止剤は、純水に炭酸ガスを溶解した液体を用いることを特徴とする請求項1〜請求項7のいずれかに記載の処理装置。
- 前記処理ガスは、水蒸気を含有することを特徴とする請求項1〜請求項8のいずれかに記載の処理装置。
- 前記処理ガスとして水蒸気とオゾンガスとを用いるとともに、前記処理ガス流通配管にミストトラップとオゾンキラーとを順に介設して水分除去とオゾン分解とを行うように構成し、前記帯電防止剤は、ミストトラップでトラップされてオゾンキラーに流入しない流量で供給することを特徴とする請求項1〜請求項9のいずれかに記載の処理装置。
- 処理室の内部で被処理体を処理ガスを用いて処理する処理方法において、
前記処理ガスを流通させるための処理ガス流通配管に介設したダイヤフラム弁に帯電を防止するための帯電防止剤を供給することを特徴とする処理方法。 - 前記帯電防止剤は、前記ダイヤフラム弁に前記処理ガスとともに供給することを特徴とする請求項11に記載の処理方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006154494A JP4653018B2 (ja) | 2006-06-02 | 2006-06-02 | 処理装置及び処理方法 |
TW096119809A TW200805483A (en) | 2006-06-02 | 2007-06-01 | Processing apparatus and processing method |
EP07010880A EP1862711A3 (en) | 2006-06-02 | 2007-06-01 | Processing apparatus and processing method |
US11/806,669 US8002894B2 (en) | 2006-06-02 | 2007-06-01 | Processing apparatus and processing method |
KR1020070053950A KR101061922B1 (ko) | 2006-06-02 | 2007-06-01 | 처리 장치 및 처리 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006154494A JP4653018B2 (ja) | 2006-06-02 | 2006-06-02 | 処理装置及び処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007324450A true JP2007324450A (ja) | 2007-12-13 |
JP4653018B2 JP4653018B2 (ja) | 2011-03-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006154494A Expired - Fee Related JP4653018B2 (ja) | 2006-06-02 | 2006-06-02 | 処理装置及び処理方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8002894B2 (ja) |
EP (1) | EP1862711A3 (ja) |
JP (1) | JP4653018B2 (ja) |
KR (1) | KR101061922B1 (ja) |
TW (1) | TW200805483A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5987100B1 (ja) | 2015-10-16 | 2016-09-06 | サーパス工業株式会社 | 流体機器 |
JP6106794B1 (ja) * | 2016-08-05 | 2017-04-05 | サーパス工業株式会社 | 流体機器 |
US11862482B2 (en) * | 2021-03-11 | 2024-01-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor substrate bonding tool and methods of operation |
Citations (7)
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JPH1143785A (ja) * | 1997-07-25 | 1999-02-16 | Sony Corp | プラズマエッチング装置 |
JPH11236978A (ja) * | 1998-02-24 | 1999-08-31 | Shibaura Mechatronics Corp | 弁装置およびプラズマ処理装置 |
JP2000262874A (ja) * | 1999-03-15 | 2000-09-26 | Mitsubishi Electric Corp | オゾン水の製造方法および製造装置 |
JP2002217157A (ja) * | 2001-01-17 | 2002-08-02 | Tokyo Electron Ltd | 基板処理方法及び基板処理装置 |
JP2003332322A (ja) * | 2002-03-08 | 2003-11-21 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP2004273553A (ja) * | 2003-03-05 | 2004-09-30 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP2004304139A (ja) * | 2003-06-19 | 2004-10-28 | Tokyo Electron Ltd | 基板処理装置 |
Family Cites Families (9)
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US4795497A (en) * | 1985-08-13 | 1989-01-03 | Mcconnell Christopher F | Method and system for fluid treatment of semiconductor wafers |
US6176265B1 (en) * | 1995-11-14 | 2001-01-23 | Kiyoshi Takahashi | Valve unit having an insert molded inner valve block |
EP1077473A2 (en) * | 1999-08-19 | 2001-02-21 | Lucent Technologies Inc. | Method and apparatus for cleaning a surface of a semiconductor wafer |
AU2001281021A1 (en) * | 2000-08-01 | 2002-02-13 | The Deflex Corporation | Gas-vapor cleaning method and system therefor |
JP2002353184A (ja) * | 2001-05-28 | 2002-12-06 | Tokyo Electron Ltd | 基板処理方法及び基板処理装置 |
KR100863782B1 (ko) | 2002-03-08 | 2008-10-16 | 도쿄엘렉트론가부시키가이샤 | 기판처리장치 및 기판처리방법 |
JP3999059B2 (ja) | 2002-06-26 | 2007-10-31 | 東京エレクトロン株式会社 | 基板処理システム及び基板処理方法 |
JP4459774B2 (ja) * | 2004-10-12 | 2010-04-28 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置およびコンピュータプログラム |
JP4498893B2 (ja) * | 2004-11-11 | 2010-07-07 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
-
2006
- 2006-06-02 JP JP2006154494A patent/JP4653018B2/ja not_active Expired - Fee Related
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2007
- 2007-06-01 KR KR1020070053950A patent/KR101061922B1/ko not_active IP Right Cessation
- 2007-06-01 TW TW096119809A patent/TW200805483A/zh not_active IP Right Cessation
- 2007-06-01 US US11/806,669 patent/US8002894B2/en not_active Expired - Fee Related
- 2007-06-01 EP EP07010880A patent/EP1862711A3/en not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1143785A (ja) * | 1997-07-25 | 1999-02-16 | Sony Corp | プラズマエッチング装置 |
JPH11236978A (ja) * | 1998-02-24 | 1999-08-31 | Shibaura Mechatronics Corp | 弁装置およびプラズマ処理装置 |
JP2000262874A (ja) * | 1999-03-15 | 2000-09-26 | Mitsubishi Electric Corp | オゾン水の製造方法および製造装置 |
JP2002217157A (ja) * | 2001-01-17 | 2002-08-02 | Tokyo Electron Ltd | 基板処理方法及び基板処理装置 |
JP2003332322A (ja) * | 2002-03-08 | 2003-11-21 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP2004273553A (ja) * | 2003-03-05 | 2004-09-30 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP2004304139A (ja) * | 2003-06-19 | 2004-10-28 | Tokyo Electron Ltd | 基板処理装置 |
Also Published As
Publication number | Publication date |
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KR20070115788A (ko) | 2007-12-06 |
US20070292611A1 (en) | 2007-12-20 |
TW200805483A (en) | 2008-01-16 |
EP1862711A2 (en) | 2007-12-05 |
US8002894B2 (en) | 2011-08-23 |
TWI372424B (ja) | 2012-09-11 |
JP4653018B2 (ja) | 2011-03-16 |
EP1862711A3 (en) | 2007-12-19 |
KR101061922B1 (ko) | 2011-09-02 |
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