JP2007323045A - プラズマディスプレイパネルフィルタ及びその製造方法 - Google Patents
プラズマディスプレイパネルフィルタ及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000010409 thin film Substances 0.000 claims abstract description 96
- 239000010408 film Substances 0.000 claims abstract description 82
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 23
- 238000002834 transmittance Methods 0.000 claims abstract description 19
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 10
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 10
- 229910052709 silver Inorganic materials 0.000 claims description 19
- 239000004332 silver Substances 0.000 claims description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 238000010030 laminating Methods 0.000 claims description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 5
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims 5
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims 5
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 239000011787 zinc oxide Substances 0.000 claims 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 150
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 26
- 238000000576 coating method Methods 0.000 description 19
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 15
- 229910052786 argon Inorganic materials 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 13
- 239000000470 constituent Substances 0.000 description 11
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- 230000006866 deterioration Effects 0.000 description 7
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- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
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- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
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- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
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- 229910052802 copper Inorganic materials 0.000 description 2
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- 238000005137 deposition process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/44—Optical arrangements or shielding arrangements, e.g. filters, black matrices, light reflecting means or electromagnetic shielding means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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Abstract
【解決手段】本発明は、透明基板と、透明基板の上に位置し、高屈折透明薄膜層、金属酸化物層、及び金属薄膜層を含む1個以上の繰り返し構造の単位膜と、1個以上の繰り返し構造の単位膜の上に形成された高屈折透明薄膜層と、を含む多層薄膜を有するPDPフィルタを提供する。
【選択図】図3
Description
310−1、310−2、310-3、310−4、310−5:高屈折透明薄膜層(Nb205層)
320−1、320−2、320-3、320−4: 金属酸化物層(AZO層)
330−1、330−2、330-3、330−4:金属薄膜層(Ag層)
Claims (19)
- 透明基板と、
前記透明基板の上に位置し、第1の高屈折透明薄膜層、金属酸化物層、及び金属薄膜層を含む繰り返し構造の単位膜と、
前記単位膜の上に形成された第2の高屈折透明薄膜層と、を含む多層薄膜を有することを特徴とするプラズマディスプレイパネルフィルタ。 - 前記第1及び第2の高屈折透明薄膜層のそれぞれは、五酸化ニオブ(Nb205)からなることを特徴とする請求項1に記載のプラズマディスプレイパネルフィルタ。
- 前記五酸化ニオブ(Nb205)は、Nb2Ox(x=4.5〜4.99)ターゲットを使用して酸素雰囲気でコーティングされたことを特徴とする請求項2に記載のプラズマディスプレイパネルフィルタ。
- 前記五酸化ニオブ(Nb205)は、Nb2Ox(x=4.8〜4.99)ターゲットを使用して酸素雰囲気でコーティングされたことを特徴とする請求項2又は3に記載のプラズマディスプレイパネルフィルタ。
- 前記金属薄膜層は、銀または銀を含有する合金からなることを特徴とする請求項1〜4のいずれか1項に記載のプラズマディスプレイパネルフィルタ。
- 前記金属酸化物層は、アルミニウムが添加された酸化亜鉛(AZO)からなることを特徴とする請求項1〜5のいずれか1項に記載のプラズマディスプレイパネルフィルタ。
- 前記第1及び第2の高屈折透明薄膜層のそれぞれは、25〜33nmの厚さを有することを特徴とする請求項1〜6のいずれか1項に記載のプラズマディスプレイパネルフィルタ。
- 前記第1及び第2の高屈折透明薄膜層のそれぞれは、27〜33nmの厚さを有することを特徴とする請求項1〜7のいずれか1項に記載のプラズマディスプレイパネルフィルタ。
- 前記金属酸化物層は、10〜12nmの厚さを有することを特徴とする請求項1〜8のいずれか1項に記載のプラズマディスプレイパネルフィルタ。
- 前記単位膜は、2個以上であり、
前記2個以上の単位膜のうち前記透明基板から最も近い単位膜に含まれる前記金属薄膜層及び最も遠い単位膜に含まれる前記金属薄膜層のそれぞれは、10〜12nmの厚さを有し、
前記最も近い単位膜及び前記最も遠い単位膜とは異なる他の単位膜に含まれる金属薄膜層は、11〜14nmの厚さを有することを特徴とする請求項1に記載のプラズマディスプレイパネルフィルタ。 - 前記単位膜は、3個であり,
前記多層薄膜は、0.9〜2.5Ω/sqのシート抵抗及び71〜79%の光透過率を有することを特徴とする請求項1に記載のプラズマディスプレイパネルフィルタ。 - 前記多層薄膜は、0.9〜1.1Ω/sqのシート抵抗を有することを特徴とする請求項11に記載のプラズマディスプレイパネルフィルタ。
- 前記単位膜は、4個であり,
前記多層薄膜は、0.6〜1.2Ω/sqのシート抵抗及び62〜72%の光透過率を有することを特徴とする請求項1に記載のプラズマディスプレイパネルフィルタ。 - 前記多層薄膜は、0.7〜1.1Ω/sqのシート抵抗及び63〜71%の光透過率を有することを特徴とする請求項13に記載のプラズマディスプレイパネルフィルタ。
- 透明基板の上に、第1の高屈折透明薄膜層、金属酸化物層、及び金属薄膜層を含む1個以上の繰り返し構造の単位膜を積層する工程と、
前記単位膜の上に、第2の高屈折透明薄膜層を積層する工程と、
を含むことを特徴とするプラズマディスプレイパネルフィルタの製造方法。 - 前記第1及び第2の高屈折透明薄膜層のそれぞれは、五酸化ニオブ(Nb205)からなることを特徴とする請求項15に記載のプラズマディスプレイパネルフィルタの製造方法。
- 前記五酸化ニオブ(Nb205)は、Nb2Ox(x=4.5〜4.99)ターゲットを使用して酸素雰囲気でコーティングされたことを特徴とする請求項16に記載のプラズマディスプレイパネルフィルタの製造方法。
- 前記金属薄膜層は、銀または銀を含有する合金からなることを特徴とする請求項15〜17のいずれか1項に記載のプラズマディスプレイパネルフィルタの製造方法。
- 前記金属酸化物層は、アルミニウムが添加された酸化亜鉛(AZO)からなることを特徴とする請求項15〜18のいずれか1項に記載のプラズマディスプレイパネルフィルタの製造方法。
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KR100827401B1 (ko) * | 2004-10-18 | 2008-05-06 | 삼성코닝정밀유리 주식회사 | 전자파 차폐 필터와 그 제조 방법 및 그를 포함하는pdp 장치 |
US8824079B2 (en) * | 2008-09-15 | 2014-09-02 | Seagate Technology Llc | Servo patterns for bit patterned media with multiple dots per servo period |
US9932267B2 (en) * | 2010-03-29 | 2018-04-03 | Vitro, S.A.B. De C.V. | Solar control coatings with discontinuous metal layer |
US10654748B2 (en) | 2010-03-29 | 2020-05-19 | Vitro Flat Glass Llc | Solar control coatings providing increased absorption or tint |
US10654747B2 (en) | 2010-03-29 | 2020-05-19 | Vitro Flat Glass Llc | Solar control coatings with subcritical copper |
KR20120015273A (ko) * | 2010-08-11 | 2012-02-21 | 삼성코닝정밀소재 주식회사 | 적층체 및 적층체 제조방법 |
CN102749667B (zh) * | 2012-07-28 | 2014-09-17 | 杭州科汀光学技术有限公司 | 用于图像芯片的光学滤波器 |
KR20140042318A (ko) * | 2012-09-28 | 2014-04-07 | 삼성코닝정밀소재 주식회사 | 투명 도전성 기재 및 이를 포함하는 터치 패널 |
US9365450B2 (en) * | 2012-12-27 | 2016-06-14 | Intermolecular, Inc. | Base-layer consisting of two materials layer with extreme high/low index in low-e coating to improve the neutral color and transmittance performance |
CN103258966B (zh) * | 2013-05-27 | 2016-05-18 | 上海和辉光电有限公司 | 用于有机发光装置的反射阳极电极及其制造方法 |
TWI577543B (zh) * | 2013-12-30 | 2017-04-11 | 聖高拜塑膠製品公司 | 展現改良的光對太陽能增益熱比率的光學膜 |
JP6423198B2 (ja) * | 2014-08-05 | 2018-11-14 | 日東電工株式会社 | 赤外線反射フィルム |
EP3136141A1 (en) | 2015-08-26 | 2017-03-01 | Saint-Gobain Performance Plastics Corporation | Infrared reflecting film |
US11078718B2 (en) | 2018-02-05 | 2021-08-03 | Vitro Flat Glass Llc | Solar control coatings with quadruple metallic layers |
US10562812B2 (en) | 2018-06-12 | 2020-02-18 | Guardian Glass, LLC | Coated article having metamaterial-inclusive layer, coating having metamaterial-inclusive layer, and/or method of making the same |
US10830933B2 (en) | 2018-06-12 | 2020-11-10 | Guardian Glass, LLC | Matrix-embedded metamaterial coating, coated article having matrix-embedded metamaterial coating, and/or method of making the same |
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- 2006-12-20 TW TW095147756A patent/TWI395980B/zh not_active IP Right Cessation
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KR100926233B1 (ko) | 2009-11-09 |
CN101083191A (zh) | 2007-12-05 |
TWI395980B (zh) | 2013-05-11 |
CN101083191B (zh) | 2011-03-09 |
TW200743830A (en) | 2007-12-01 |
KR20070114890A (ko) | 2007-12-05 |
US20070281178A1 (en) | 2007-12-06 |
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