JP2007173809A - 感知向上層(senseenhancinglayer)を含む磁気感知デバイス - Google Patents
感知向上層(senseenhancinglayer)を含む磁気感知デバイス Download PDFInfo
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Abstract
【解決手段】第1の磁性部分及び第2の磁性部分のうち少なくとも一方が、バリア層に隣接する正の磁気ひずみを有する第1の磁性層と、第2の磁性層と、第1の磁性層と第2の磁性層の間の中間層とを有する多層構造を含む。この磁気センサは、その抵抗−面積(RA)積が約1.0Ω・μm2であるとき、少なくとも約80%のMR比を有する。
【選択図】図1
Description
Claims (21)
- 第1の磁性部分と、第2の磁性部分と、前記第1の磁性部分と前記第2の磁性部分の間のバリア層とを含むセンサスタックを含んでなる磁気センサであって、
前記第1の磁性部分及び前記第2の磁性部分のうち少なくとも一方が、前記バリア層に隣接する正の磁気ひずみを有する第1の磁性層と、第2の磁性層と、第1の磁性層と第2の磁性層の間の中間層とを含む多層構造を含んでなり、
前記磁気センサの抵抗−面積(RA)積が約1.0Ω・μm2のとき、前記磁気センサが少なくとも約80%の磁気抵抗比を示す、上記磁気センサ。 - 前記中間層が、Ta、Ru、Zr、Hf、Nb、Mo、W、Pt、Rh、Ir、Al、Cu、Cr、Ti、CoZrNb、CoZrTa、FeTa、FeTaN、NiFeZr、CoFeTa、CoNb、及びそれらの合金からなる群から選択された材料を含む、請求項1に記載の磁気センサ。
- 前記中間層が、非磁性体を含み、約0.5Å〜約10Åの範囲の厚さを有する、請求項1に記載の磁気センサ。
- 前記バリア層が、MgO及びMgからなる群から選択された材料を含む、請求項1に記載の磁気センサ。
- 前記第1の磁性層が、CoFeB、CoFeNiB、CoFe、及びそれらの合金からなる群から選択された材料を含む、請求項1に記載の磁気センサ。
- 前記第1の磁性部分及び前記第2の磁性部分のうち前記少なくとも一方が自由層であり、前記第2の磁性層が、負の磁気ひずみを有する材料を含む、請求項1に記載の磁気センサ。
- 前記第2の磁性層が、Ni及びNiベース合金からなる群から選択された材料を含む、請求項6に記載の磁気センサ。
- 前記第2の磁性層が、結晶強磁性体及びアモルファス強磁性体からなる群から選択された材料を含む、請求項1に記載の磁気センサ。
- MgOを含むバリア層と、
前記バリア層に隣接する第1の強磁性層と、第2の強磁性層と、第1と第2の強磁性層の間にあり、Ta、Ru、Zr、Hf、Nb、Mo、W、Pt、Rh、Ir、Al、Cu、Cr、Ti、CoZrNb、CoZrTa、FeTa、FeTaN、NiFeZr、CoFeTa、CoNb、及びそれらの合金からなる群から選択された材料を含む中間層とを含む第1の多層磁性構造とを含んでなるセンサスタック。 - 前記中間層の厚さが約0.5Å〜約10Åの範囲である、請求項9に記載のセンサスタック。
- 前記第1の強磁性層が、CoFeB、CoFeNiB、CoFe、及びそれらの合金からなる群から選択された材料を含む、請求項9に記載のセンサスタック。
- 前記第2の強磁性層が、Ni及びNiベース合金からなる群から選択された材料を含む、請求項11に記載のセンサスタック。
- 前記第1の多層構造が自由層であり、前記第2の強磁性層が、負の磁気ひずみを有する材料を含む、請求項9に記載の磁気センサ。
- 前記第2の強磁性層が、結晶強磁性体及びアモルファス強磁性体からなる群から選択された材料を含む、請求項9に記載のセンサスタック。
- 前記第1の多層磁性構造が自由層であり、前記第1の強磁性層と前記第2の強磁性層の間の結合が、強磁性結合及び反強磁性結合からなる群から選択される、請求項9に記載のセンサスタック。
- 前記第1の多層磁性構造が自由層であり、前記第2の強磁性層が、負の磁気ひずみを有する材料を含む、請求項9に記載のセンサスタック。
- 前記バリア層に隣接する正の磁気ひずみを有する第3の強磁性層と、第4の強磁性層と、第3と第4の強磁性層の間にあり、Ta、Ru、Zr、Hf、Nb、Mo、W、Pt、Rh、Ir、Al、Cu、Cr、Ti、CoZrNb、CoZrTa、FeTa、FeTaN、NiFeZr、CoFeTa、CoNb、及びそれらの合金からなる群から選択された材料を含む中間層とを含む第2の多層磁性構造をさらに備える、請求項9に記載のセンサスタック。
- 第1の磁性構造と、
前記第1の磁性構造に隣接するMgOバリア層と、
前記MgOバリア層に前記第1の磁性構造とは反対の側で隣接し、前記バリア層に隣接する正の磁気ひずみ層と、負の磁気ひずみ層と、正の磁気ひずみ層と前記負の磁気ひずみ層の間の感知向上層とを含む第2の磁性構造とを含んでなる、感度が改善された磁気抵抗(MR)センサであって、
(a)抵抗−面積(RA)積が約0.5Ω・μm2の場合、少なくとも約30%の、(b)RA積が約0.8Ω・μm2の場合、少なくとも約50%の、(c)RA積が約1.0Ω・μm2の場合、少なくとも約80%の、(d)RA積が約1.4Ω・μm2の場合、少なくとも約100%のMR比を有することを特徴とする、MRセンサ。 - 前記感知向上層が、Ta、Ru、Zr、Hf、Nb、Mo、W、Pt、Rh、Ir、Al、Cu、Cr、Ti、CoZrNb、CoZrTa、FeTa、FeTaN、NiFeZr、CoFeTa、CoNb、及びそれらの合金からなる群から選択された材料を含む、請求項18に記載の磁気センサ。
- 前記感知向上層が、非磁性体を含み、約0.5Å〜約10Åの範囲の厚さを有する、請求項18に記載の磁気センサ。
- 前記正の磁気ひずみ層が、CoFeB、CoFeNiB、CoFe、及びそれらの合金からなる群から選択された材料を含む、請求項18に記載のセンサスタック。
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US7929259B2 (en) | 2011-04-19 |
US7800868B2 (en) | 2010-09-21 |
US20100255349A1 (en) | 2010-10-07 |
CN103761977A (zh) | 2014-04-30 |
CN101000943A (zh) | 2007-07-18 |
JP5759973B2 (ja) | 2015-08-05 |
JP2013102178A (ja) | 2013-05-23 |
JP5191652B2 (ja) | 2013-05-08 |
US20070139827A1 (en) | 2007-06-21 |
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