JP2011123944A - Tmrリード・ヘッドの製造方法及びtmr積層体 - Google Patents
Tmrリード・ヘッドの製造方法及びtmr積層体 Download PDFInfo
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Abstract
【解決手段】本発明の一実施形態において、TMRリード・ヘッドにおいて、固定層の第1強磁性層は反平行結合層と絶縁障壁層との間に形成されている。第1強磁性における反平行結合層との界面を形成する層を、CoxFe(0≦x≦15)で形成する。これにより、薄い反平行結合層を使用しても高温でのアニール処理における固定層の不安定化を抑えることができ、第1強磁性層と第2強磁性層との強い結合を維持することができる。第1強磁性層において、主強磁性層とCoxFe(0≦x≦15)界面層との間に、Co系アモルファス金属層を形成する。これにより、高温アニール処理における第1強磁性層の適切な結晶化を促進することができ、高いMR比を実現する。
【選択図】図5
Description
12 ライト・ヘッド、13 保護膜、21 磁気ディスク対向面
111 下部シールド、112 磁気抵抗センサ、113 上部シールド
114 上部磁気隔離膜、115 ハードバイアス膜、116 ハードバイアス下地膜
117 ジャンクション絶縁膜、121 薄膜コイル、122 記録磁極
123 絶縁体、211 センサ下地層、212 反強磁性層、213 固定層
214 絶縁障壁層、215 自由層、216 キャップ層、311 第2強磁性層
312 反平行結合層、313 第1強磁性層
331 CoxFe(0≦x≦15)界面層、332 Co系アモルファス金属層
333 主強磁性層、351 第2主強磁性層
352 CoxFe(0≦x≦15)第2界面層
Claims (13)
- TMRリード・ヘッドの製造方法であって、
自由層を形成し、
固定層を形成し、
前記自由層と前記固定層との間の絶縁障壁層を形成し、
形成した前記自由層、前記固定層、そして前記絶縁障壁層をアニール処理し、
前記固定層の形成は、
反平行結合層を形成し、
前記反平行結合層に隣接するCoxFe(0≦x≦15)界面層と、そのCoxFe(0≦x≦15)界面層と前記絶縁障壁層との間のCo系アモルファス金属層と、を有する第1強磁性層を形成し、
前記第1強磁性層との間において前記反平行結合層を挟む第2強磁性層を形成する、
TMRリード・ヘッドの製造方法。 - 前記反平行結合層はRuであり、その厚みが3.5Å〜4.5Åの範囲である、
請求項1に記載のTMRリード・ヘッドの製造方法。 - 前記CoxFe(0≦x≦15)界面層におけるxは0である、
請求項1に記載のTMRリード・ヘッドの製造方法。 - 前記アニール処理におけるアニール温度は、270℃〜300℃の範囲内にある、
請求項1に記載のTMRリード・ヘッドの製造方法。 - 前記第2強磁性層は、前記反平行結合層に隣接するCoxFe(0≦x≦15)第2界面層を有する、
請求項1に記載のTMRリード・ヘッドの製造方法。 - 前記CoxFe(0≦x≦15)第2界面層におけるxは0である、
請求項5に記載のTMRリード・ヘッドの製造方法。 - 前記Co系アモルファス合金層は、Ta、Ti、Zr、Nb、Hf、W、Y、La の少なくとも一つの元素を含む、
請求項1に記載のTMRリード・ヘッドの製造方法。 - 外部磁界によって磁化方向が変化する自由層と、
前記自由層と積層されており、磁化方向が固定された固定層と、
前記自由層と前記固定層との間の絶縁障壁層と、を有し、
前記固定層は、
反平行結合層と、
前記反平行結合層に隣接するCoxFe(0≦x≦15)界面層と、前記CoxFe(0≦x≦15)界面層と前記絶縁障壁層との間のCo系アモルファス金属層と、を有する第1強磁性層と、
前記第1強磁性層との間において前記反平行結合層を挟む第2強磁性層と、を有する、
TMR積層体。 - 前記反平行結合層はRuであり、その厚みが3.5Å〜4.5Åの範囲である、
請求項8に記載のTMRリード・ヘッド。 - 前記CoxFe(0≦x≦15)界面層におけるxは0である、
請求項8に記載のTMR積層体。 - 前記第2強磁性層は、前記反平行結合層に隣接するCoxFe(0≦x≦15)第2界面層を有する、
請求項8に記載のTMR積層体。 - 前記CoxFe(0≦x≦15)第2界面層におけるxは0である、
請求項11に記載のTMR積層体。 - 前記Co系アモルファス合金層は、Ta、Ti、Zr、Nb、Hf、W、Y、La の少なくとも一つの元素を含む、
請求項8に記載のTMR積層体。
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US12/948,072 US8351163B2 (en) | 2009-12-10 | 2010-11-17 | Tunneling magnetoresistance read head having a cofe interface layer and methods for producing the same |
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JP2013089967A (ja) * | 2011-10-17 | 2013-05-13 | Hgst Netherlands B V | 固定層構造および自由層構造にCoFeBTaを有する磁気センサ |
CN104488102A (zh) * | 2012-07-27 | 2015-04-01 | 高通股份有限公司 | 用于垂直mtj的非晶态合金间隔物 |
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JP6886951B2 (ja) * | 2018-09-13 | 2021-06-16 | 株式会社東芝 | 磁気記憶装置 |
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