JP5750211B2 - Tmr素子およびその形成方法 - Google Patents
Tmr素子およびその形成方法 Download PDFInfo
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- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
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- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
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- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
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- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3912—Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3295—Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1114—Magnetoresistive having tunnel junction effect
Description
ム),Hf(ハフニウム),Ta(タンタル)およびMo(モリブデン)のうちのいずれかである。CoNiFeBM中におけるMの含有量は10原子%未満である。CoNiFeBM層は、CoBターゲットとCoNiFeMターゲットとを並行スパッタすることにより形成可能である。
,Hf,TaまたはMo)。小さい保磁力およびRA値を確保しつつ、従来のCoFe/NiFe構造のフリー層の場合に比べてTMR比を15〜30%程度向上させることも可能である。
コニウム),Nb(ニオビウム),Hf(ハフニウム),Ta(タンタル)またはMo(モリブデン)であり、CoNiFeBM層中のMの含有量は10原子%未満である。このCoNiFeBM層は、CoBターゲットとCoNiFeMターゲットとを並行スパッタすることにより得られる。あるいは、フリー層18を、FeCoY 層/CoNiFeBM層という2層構造として構成してもよい。このとき、CoNiFeBM単層または2層構造(FeCoY 層/CoNiFeBM層)全体としての磁歪係数λは、1×10-6〜4×10-6程度であるのが好ましい。必要に応じて、上記したいくつかの3層構造の例において、CoNiFeB層をCoNiFeBM層に置き換えて、FeCoY 層/CoU FeW BZ 層/CoNiFeBM層、FeCoY 層/CoNiFeBM層/CoU FeW BZ 層、FeCoY 層/CoFeW 層/CoNiFeBM層、またはFeCoY 層/FeBV 層/CoNiFeBM層という3層複合構造としてもよい。ここで、FeCoY 層の膜厚は0.2nm〜1nm程度であり、CoU FeW BZ 層、CoFeW 層およびFeBV 層の膜厚は0.5nm〜2nm程度であり、CoP NiR FeS BT M層の膜厚は2nm〜4nm程度である。
程度であるのが好ましい。CoNiFeB層またはCoNiFeBM層と、他の磁性層(FeCo層、CoU FeW BZ 層、CoFeW 層、FeBV 層)とを組み合わせた磁性層により、小さなRA値と小さな保磁力Hcとを保ちつつ、FeCo/NiFe構造の場合と同等のTMR比改善が見込まれる。
シード層/AFM層/AP2層/Ru層/AP1層/MgOx層/フリー層/キャップ層
シード層=Ta2/Ru2
AFM層=IrMn7
AP2層/Ru層/AP1層8(=ピンド層)
=Co70Fe302.5/Ru0.75/Co70Fe302.5
MgOx=Mg0.7/NOX/Mg0.3
キャップ層=Ru1/Ta6
Claims (5)
- 基板の上に順に積層形成された、シード層、反強磁性層およびピンド層を含む積層体と、
前記ピンド層の上に形成された、MgOx(酸化マグネシウム)からなるトンネルバリア層と、
前記トンネルバリア層の上に形成された、下側FeCoY (0原子%<Y<100原子%)層、と中間CoU FeW BZ (1原子%≦U≦95原子%、0原子%<W≦70原子%、1原子%≦Z≦30原子%)層、と上側CoBX (コバルトボロン;1原子%≦X≦30原子%)層とからなる3層構造を有するフリー層と、
前記フリー層の上に形成されたキャップ層とを備えた
TMR(tunneling magnetoresistive) 素子。 - 前記下側FeCoY層は0.2nmから1nmの膜厚を有し、
前記中間CoU FeW BZ層は0.5nmから2nmの膜厚を有し、
前記上側CoBX層は−5×10-6から0までの磁歪係数λを有すると共に2nmから4nmの膜厚を有する
請求項1に記載のTMR素子。 - 基板の上に順に積層形成された、シード層、反強磁性層およびピンド層を含む積層体と、
前記ピンド層の上に形成された、MgOx(酸化マグネシウム)からなるトンネルバリア層と、
前記トンネルバリア層の上に形成された、下側FeCoY (0原子%<Y<100原子%)層と、中間CoU FeW BZ (1原子%≦U≦95原子%、0原子%<W≦70原子%、1原子%≦Z≦30原子%)層と、上側CoP NiR FeS BT(5原子%≦P≦90原子%、5原子%≦R≦20原子%、5原子%≦S≦90原子%、1原子%≦T≦30原子%;P+R+S+T=100原子%) 層とからなる3層構造を有するフリー層と、
前記フリー層の上に形成されたキャップ層とを備えた
TMR素子。 - TMRセンサにおけるTMR素子の形成方法であって、
基板の上に順に、シード層、反強磁性層およびピンド層を形成する工程と、
前記ピンド層の上に第1のMg層を形成したのち自然酸化を行うことによりMgOx層を形成すると共にその上に第2のMg層を形成することにより、前記ピンド層の上にトンネルバリア層を形成する工程と、
前記トンネルバリア層の上に、下側FeCoY (0原子%<Y<100原子%)層と中間CoU FeW BZ (1原子%≦U≦95原子%、0原子%<W≦70原子%、1原子%≦Z≦30原子%)層と上側Co P Ni R Fe S B T (5原子%≦P≦90原子%、5原子%≦R≦20原子%、5原子%≦S≦90原子%、1原子%≦T≦30原子%;P+R+S+T=100原子%)層とからなる3層構造を有するフリー層を形成する工程と、
前記フリー層の上にキャップ層を形成する工程とを含む
TMR素子の形成方法。 - 前記中間CoU FeW BZ 層の膜厚を0.5nmから2nmとし、
前記上側Co P Ni R Fe S B T 層の膜厚を2nmから4nmとする
請求項4に記載のTMR素子の形成方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/983,329 US20090122450A1 (en) | 2007-11-08 | 2007-11-08 | TMR device with low magnetostriction free layer |
US11/983,329 | 2007-11-08 |
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JP2009117846A JP2009117846A (ja) | 2009-05-28 |
JP5750211B2 true JP5750211B2 (ja) | 2015-07-15 |
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Cited By (1)
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JP2017215326A (ja) * | 2017-07-04 | 2017-12-07 | 株式会社東芝 | センサ |
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JP2017215326A (ja) * | 2017-07-04 | 2017-12-07 | 株式会社東芝 | センサ |
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US20090122450A1 (en) | 2009-05-14 |
US8472151B2 (en) | 2013-06-25 |
US20120193738A1 (en) | 2012-08-02 |
US20130277780A1 (en) | 2013-10-24 |
US20150235660A1 (en) | 2015-08-20 |
US9214170B2 (en) | 2015-12-15 |
JP2009117846A (ja) | 2009-05-28 |
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