JP2006525878A5 - - Google Patents

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Publication number
JP2006525878A5
JP2006525878A5 JP2006519155A JP2006519155A JP2006525878A5 JP 2006525878 A5 JP2006525878 A5 JP 2006525878A5 JP 2006519155 A JP2006519155 A JP 2006519155A JP 2006519155 A JP2006519155 A JP 2006519155A JP 2006525878 A5 JP2006525878 A5 JP 2006525878A5
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JP
Japan
Prior art keywords
substrate
polishing
measurement
fluid
light
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006519155A
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English (en)
Japanese (ja)
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JP2006525878A (ja
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Priority claimed from PCT/JP2004/006768 external-priority patent/WO2004101223A1/en
Publication of JP2006525878A publication Critical patent/JP2006525878A/ja
Publication of JP2006525878A5 publication Critical patent/JP2006525878A5/ja
Pending legal-status Critical Current

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JP2006519155A 2003-05-16 2004-05-13 基板研磨装置 Pending JP2006525878A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003138479 2003-05-16
JP2003138496 2003-05-16
JP2003138782 2003-05-16
PCT/JP2004/006768 WO2004101223A1 (en) 2003-05-16 2004-05-13 Substrate polishing apparatus

Publications (2)

Publication Number Publication Date
JP2006525878A JP2006525878A (ja) 2006-11-16
JP2006525878A5 true JP2006525878A5 (enExample) 2007-06-28

Family

ID=33458361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006519155A Pending JP2006525878A (ja) 2003-05-16 2004-05-13 基板研磨装置

Country Status (7)

Country Link
US (3) US20040242121A1 (enExample)
EP (1) EP1641597A4 (enExample)
JP (1) JP2006525878A (enExample)
KR (1) KR20060009327A (enExample)
CN (1) CN1791490B (enExample)
TW (1) TWI338605B (enExample)
WO (1) WO2004101223A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102815099B1 (ko) 2018-12-26 2025-06-04 가부시키가이샤 에바라 세이사꾸쇼 광학식 막 두께 측정 시스템의 세정 방법

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Publication number Priority date Publication date Assignee Title
KR102815099B1 (ko) 2018-12-26 2025-06-04 가부시키가이샤 에바라 세이사꾸쇼 광학식 막 두께 측정 시스템의 세정 방법

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