JP2006521279A5 - - Google Patents
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- Publication number
- JP2006521279A5 JP2006521279A5 JP2006509297A JP2006509297A JP2006521279A5 JP 2006521279 A5 JP2006521279 A5 JP 2006521279A5 JP 2006509297 A JP2006509297 A JP 2006509297A JP 2006509297 A JP2006509297 A JP 2006509297A JP 2006521279 A5 JP2006521279 A5 JP 2006521279A5
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen trifluoride
- container
- impurity
- wall
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/396,926 US20040191155A1 (en) | 2003-03-25 | 2003-03-25 | Thermal process for reducing the concentration of dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride |
| PCT/US2004/009183 WO2004087569A2 (en) | 2003-03-25 | 2004-03-25 | Thermal process for reducing the concentration of dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006521279A JP2006521279A (ja) | 2006-09-21 |
| JP2006521279A5 true JP2006521279A5 (https=) | 2007-06-07 |
Family
ID=32988892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006509297A Pending JP2006521279A (ja) | 2003-03-25 | 2004-03-25 | 三フッ化窒素中の二フッ化二窒素および四フッ化二窒素濃度を低減する熱的方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US20040191155A1 (https=) |
| EP (1) | EP1606217A2 (https=) |
| JP (1) | JP2006521279A (https=) |
| KR (1) | KR20050114686A (https=) |
| CN (1) | CN1761615A (https=) |
| CA (1) | CA2514345A1 (https=) |
| RU (1) | RU2005132825A (https=) |
| TW (1) | TW200502161A (https=) |
| WO (1) | WO2004087569A2 (https=) |
| ZA (1) | ZA200505304B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AR055831A1 (es) | 2004-12-30 | 2007-09-12 | Janssen Pharmaceutica Nv | Pepirazinilureas y piperidinilureas como moduladores de hidrolasa de amida de acidos grasos |
| CN1328160C (zh) * | 2005-07-27 | 2007-07-25 | 中国船舶重工集团公司第七一八研究所 | 三氟化氮气体的纯化方法 |
| US8201619B2 (en) | 2005-12-21 | 2012-06-19 | Exxonmobil Research & Engineering Company | Corrosion resistant material for reduced fouling, a heat transfer component having reduced fouling and a method for reducing fouling in a refinery |
| CA2634252A1 (en) * | 2005-12-21 | 2007-07-05 | Exxonmobil Research And Engineering Company | Corrosion resistant material for reduced fouling, heat transfer component with improved corrosion and fouling resistance, and method for reducing fouling |
| UA108233C2 (uk) | 2010-05-03 | 2015-04-10 | Модулятори активності гідролази амідів жирних кислот | |
| CN104548927B (zh) * | 2015-01-07 | 2017-01-25 | 黎明化工研究设计院有限责任公司 | 一种四氟化碳中微量三氟化氮的去除工艺 |
| US11754541B2 (en) | 2017-09-25 | 2023-09-12 | Cymer, Llc | Fluorine detection in a gas discharge light source |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3032400A (en) * | 1960-01-14 | 1962-05-01 | Du Pont | Method of producing nitrogen fluorides |
| DE1186857B (de) * | 1962-09-22 | 1965-02-11 | Huels Chemische Werke Ag | Verwendung von elektropoliertem, nichtrostendem Stahl als Apparatematerial bei der Oxydation organischer Verbindungen |
| US4193976A (en) * | 1978-04-06 | 1980-03-18 | Air Products & Chemicals, Inc. | Removal of dinitrogen difluoride from nitrogen trifluoride |
| US4156598A (en) * | 1978-06-08 | 1979-05-29 | Air Products And Chemicals, Inc. | Purification of nitrogen trifluoride atmospheres |
| EP0337294B1 (en) * | 1988-04-11 | 1993-06-30 | MITSUI TOATSU CHEMICALS, Inc. | Process for purifying nitrogen trifluoride gas |
| JPH01261208A (ja) * | 1988-04-11 | 1989-10-18 | Mitsui Toatsu Chem Inc | 三弗化窒素ガスの精製方法 |
| JPH01261209A (ja) * | 1988-04-13 | 1989-10-18 | Mitsui Toatsu Chem Inc | 三弗化窒素ガスの精製方法 |
| JPH0218309A (ja) * | 1988-07-05 | 1990-01-22 | Mitsui Toatsu Chem Inc | 三弗化窒素ガスの精製方法 |
| US5009963A (en) * | 1988-07-20 | 1991-04-23 | Tadahiro Ohmi | Metal material with film passivated by fluorination and apparatus composed of the metal material |
| JP2867376B2 (ja) * | 1988-12-09 | 1999-03-08 | ステラケミファ株式会社 | フッ化不動態膜が形成された金属材料、その金属材料を用いたガス装置、並びに該フッ化不動態膜の形成方法 |
| EP0366078B1 (en) * | 1988-10-25 | 1996-06-26 | MITSUI TOATSU CHEMICALS, Inc. | Method for Purifying nitrogen trifluoride gas |
| JPH0446672A (ja) * | 1990-06-14 | 1992-02-17 | Fuaiaaransu Kogyo Kk | 継手付ランスパイプの製造方法及び継手付ランスパイプ |
| JP3782151B2 (ja) * | 1996-03-06 | 2006-06-07 | キヤノン株式会社 | エキシマレーザー発振装置のガス供給装置 |
| JP3532345B2 (ja) * | 1996-05-14 | 2004-05-31 | 日本エア・リキード株式会社 | 超高純度三弗化窒素製造方法及びその装置 |
| JPH11326160A (ja) * | 1998-05-13 | 1999-11-26 | L'air Liquide | 反応性フッ素系ガスのサンプリング装置及び方法 |
-
2003
- 2003-03-25 US US10/396,926 patent/US20040191155A1/en not_active Abandoned
-
2004
- 2004-03-19 TW TW093107561A patent/TW200502161A/zh unknown
- 2004-03-25 RU RU2005132825/15A patent/RU2005132825A/ru not_active Application Discontinuation
- 2004-03-25 WO PCT/US2004/009183 patent/WO2004087569A2/en not_active Ceased
- 2004-03-25 EP EP04758350A patent/EP1606217A2/en not_active Withdrawn
- 2004-03-25 KR KR1020057017857A patent/KR20050114686A/ko not_active Withdrawn
- 2004-03-25 CN CNA2004800077489A patent/CN1761615A/zh active Pending
- 2004-03-25 CA CA002514345A patent/CA2514345A1/en not_active Abandoned
- 2004-03-25 ZA ZA200505304A patent/ZA200505304B/en unknown
- 2004-03-25 JP JP2006509297A patent/JP2006521279A/ja active Pending
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