JP2006516366A - 担体上に固定した電子部品を、封入材料で封入するためのデバイス及び方法 - Google Patents
担体上に固定した電子部品を、封入材料で封入するためのデバイス及び方法 Download PDFInfo
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- JP2006516366A JP2006516366A JP2006502725A JP2006502725A JP2006516366A JP 2006516366 A JP2006516366 A JP 2006516366A JP 2006502725 A JP2006502725 A JP 2006502725A JP 2006502725 A JP2006502725 A JP 2006502725A JP 2006516366 A JP2006516366 A JP 2006516366A
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- 239000000463 material Substances 0.000 title claims abstract description 69
- 238000000034 method Methods 0.000 title claims abstract description 25
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- 239000008393 encapsulating agent Substances 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 239000011888 foil Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 2
- 238000005538 encapsulation Methods 0.000 abstract description 7
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000008188 pellet Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/40—Removing or ejecting moulded articles
- B29C45/4005—Ejector constructions; Ejector operating mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
- B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Description
Claims (17)
- 担体上に固定した電子部品、特に半導体を、封入材料で封入するためのデバイスであって、
担体上に閉じたときに、少なくとも一つの型空洞を区画形成する位置を占める封入位置と、この封入位置の状態よりも、相互からより長距離に分離した開位置との間で、相互に対して変位可能な二つの共作用型部材、そして
前記型空洞へと繋がる封入材料のための供給手段からなり、
封入材料のための前記供給手段が少なくとも一つの突出端を備え、その下に、前記担体の一部に対する受容空間が位置し、そして、前記デバイスが、また、前記突出端を持つ前記型部材内に受容され、前記担体が制御可能な力で前記突出端へ向けて付勢されるよう、前記端に対して変位可能な前記担体に対するサポートからなることを特徴とする、デバイス。 - 前記突出端が、一つの型部材に組み付けた材料ストリップによって区画形成されることを特徴とする、請求項1に記載のデバイス。
- 前記材料ストリップが、一つの型部材に解除可能に組み付けられていることを特徴とする、請求項2に記載のデバイス。
- 前記変位可能なサポートが、前記担体の一部に対する前記受容空間の一側を形成することを特徴とする、前述の請求項のいずれかに記載のデバイス。
- 前記デバイスが、前記変位可能なサポートの方向へ、前記担体を変位させるための解放手段を備えることを特徴とする、前述の請求項のいずれかに記載のデバイス。
- 前記解放手段が、付勢下での変位のために、第二の型部材内に設けられた少なくとも一つの圧力エレメントによって形成されることを特徴とする、前述の請求項のいずれかに記載のデバイス。
- 前記圧力エレメントが、型部材が一緒に閉じられた状態で、前記圧力エレメントが前記担体から離れる位置へ前記圧力エレメントを付勢する制御部材に結合されていることを特徴とする、請求項6に記載のデバイス。
- 前記変位可能なサポートに対する駆動手段が、前記サポートが前記担体に及ぼす付勢を最大にするために、圧力リミッタを備えることを特徴とする、前述の請求項のいずれかに記載のデバイス。
- 前記デバイスが、前記型部材の相互変位のために、型部材駆動装置を備え、この型部材駆動装置が、前記型部材間の距離を調節するためのコントロールからなることを特徴とする、前述の請求項のいずれかに記載のデバイス。
- 担体上に固定した電子部品、特に半導体を、封入材料で封入するための方法であって、
A)前記担体を第一の型部材上に、前記第一の型部材に結合した少なくとも一つの突出端が、前記第一の型部材上に支持された前記担体の側の反対側に位置するように配置する処理ステップ、
B)前記担体の一部が、前記担体を支持する前記第一の型部材の一部と、前記突出端との間で締め付けられるよう、前記突出端と、前記担体を支持する前記第一の型部材の部分との間の距離を減少させる処理ステップ、
C)少なくとも一つの型空洞が、前記担体を封鎖するように形成されるよう、前記第一の型部材へ第二の型部材を閉じる処理ステップ、そして
D)前記型空洞へ液体封入材料を供給する処理ステップからなる、方法。 - ステップD)による液体封入材料の供給が、前記第一の型部材の前記突出端によって(直接的に、あるいは間接的に、例えばホイル材料を介して)少なくとも部分的に制限されることを特徴とする、請求項10に記載の方法。
- 処理ステップD)の後、前記封入材料が、処理ステップE)の間に硬化することを特徴とする、請求項10あるいは11に記載の方法。
- 処理ステップE)によって前記封入材料が少なくとも部分的に硬化した後、封入材料を盛った前記担体が前記突出端に対して変位されて、前記突出端から前記担体へ続く封入材料の硬化ストリップが、その変位によって切断されることを特徴とする、請求項12に記載の方法。
- 前記担体が、前記突出端に対して、前記担体を支持する前記第一の型部材の前記一部の方向へ変位されることを特徴とする、請求項13に記載の方法。
- 前記担体が前記突出端に対して回転されることを特徴とする、請求項13あるいは14に記載の方法。
- 前記第一の、そして第二の型部材が分離移動され、そして前記封入を行った前記担体と、前記硬化封入材料の残部とが、相互から分離した状態で、前記第一の型部材から取り除かれることを特徴とする、請求項10から15のいずれかに記載の方法。
- 処理ステップC)によって前記第一の型部材に第二の型部材を閉じた後、前記型部材が、1から50μmの距離で分離移動され、その後、前記突出端と、前記担体を支持する前記第一の型部材の前記一部との間の距離が、前記担体の一部が、前記担体を支持する前記第一の型部材の前記一部と、前記突出端との間で制御可能な力で締め付けられるよう、減少することを特徴とする、請求項10から16のいずれかに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1022323A NL1022323C2 (nl) | 2003-01-08 | 2003-01-08 | Inrichting en werkwijze voor het met omhulmateriaal omhullen van een op een drager bevestigde elektronische component. |
NL1022323 | 2003-01-08 | ||
PCT/NL2004/000005 WO2004070838A2 (en) | 2003-01-08 | 2004-01-06 | Device and method for encapsulating with encapsulating material and electronic component fixed on a carrier |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006516366A true JP2006516366A (ja) | 2006-06-29 |
JP5204400B2 JP5204400B2 (ja) | 2013-06-05 |
Family
ID=32844959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006502725A Expired - Lifetime JP5204400B2 (ja) | 2003-01-08 | 2004-01-06 | 担体上に固定した電子部品を、封入材料で封入するためのデバイス及び方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7608486B2 (ja) |
EP (1) | EP1584109A2 (ja) |
JP (1) | JP5204400B2 (ja) |
KR (1) | KR101138561B1 (ja) |
CN (2) | CN101667549B (ja) |
MY (1) | MY144186A (ja) |
NL (1) | NL1022323C2 (ja) |
TW (1) | TWI341016B (ja) |
WO (1) | WO2004070838A2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1026670C2 (nl) * | 2004-07-16 | 2006-01-17 | Fico Bv | Werkwijze en inrichting voor het met een conditioneringsgas omhullen van elektronische componenten. |
US7242573B2 (en) * | 2004-10-19 | 2007-07-10 | E. I. Du Pont De Nemours And Company | Electroconductive paste composition |
JP4084844B2 (ja) * | 2005-09-27 | 2008-04-30 | Towa株式会社 | 電子部品の樹脂封止成形方法及び装置 |
JP4855026B2 (ja) * | 2005-09-27 | 2012-01-18 | Towa株式会社 | 電子部品の樹脂封止成形方法及び装置 |
JP2007095804A (ja) * | 2005-09-27 | 2007-04-12 | Towa Corp | 電子部品の樹脂封止成形方法及び装置 |
NL2001818C2 (nl) * | 2008-07-17 | 2010-01-19 | Fico Bv | Werkwijze voor het met een beheersbare sluitkracht omhullen van elektronische componenten. |
JP6218549B2 (ja) * | 2013-10-17 | 2017-10-25 | Towa株式会社 | 半導体封止型への半導体基板供給方法及び半導体基板供給装置 |
NL2013191B1 (en) * | 2014-07-15 | 2016-07-14 | Sencio B V | Integrated circuit package moulding method and mould. |
NL2013978B1 (en) | 2014-12-15 | 2016-10-11 | Besi Netherlands Bv | Device and method for controlled moulding and degating of a carrier with electronic components and moulded product. |
NL2016011B1 (en) * | 2015-12-23 | 2017-07-03 | Besi Netherlands Bv | Press, actuator set and method for encapsulating electronic components with at least two individual controllable actuators. |
Citations (3)
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WO2001017012A1 (en) * | 1999-07-01 | 2001-03-08 | Fico B.V. | Device and method for encapsulating electronic components mounted on a carrier |
JP2001223230A (ja) * | 2000-02-10 | 2001-08-17 | Towa Corp | 電子部品、電子部品の樹脂封止方法、及び樹脂封止装置 |
JP2004153045A (ja) * | 2002-10-31 | 2004-05-27 | Towa Corp | 電子部品の樹脂封止成形方法及び金型 |
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JPS57128930A (en) * | 1981-02-04 | 1982-08-10 | Yamagata Nippon Denki Kk | Resin sealing |
US4381384A (en) * | 1981-08-17 | 1983-04-26 | E. I. Du Pont De Nemours And Company | Continuous polymerization process |
JP2977889B2 (ja) * | 1990-11-20 | 1999-11-15 | シチズン時計株式会社 | Icの樹脂封止方法 |
JPH0780895A (ja) * | 1993-09-10 | 1995-03-28 | Olympus Optical Co Ltd | 成型部材のゲートカット装置 |
JPH07183317A (ja) * | 1993-12-22 | 1995-07-21 | Matsushita Electric Ind Co Ltd | 電子部品の製造装置及び製造方法 |
JPH07205214A (ja) * | 1994-01-12 | 1995-08-08 | Pack Vision:Kk | ボール・グリッド・アレイ用の金型 |
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JP3572833B2 (ja) * | 1996-12-19 | 2004-10-06 | 株式会社デンソー | 樹脂封止型半導体装置の製造方法 |
US6114189A (en) * | 1997-09-10 | 2000-09-05 | Lsi Logic Corp. | Molded array integrated circuit package |
JP3127889B2 (ja) * | 1998-06-25 | 2001-01-29 | 日本電気株式会社 | 半導体パッケージの製造方法およびその成形用金型 |
-
2003
- 2003-01-08 NL NL1022323A patent/NL1022323C2/nl not_active IP Right Cessation
-
2004
- 2004-01-06 KR KR1020057012708A patent/KR101138561B1/ko active IP Right Grant
- 2004-01-06 CN CN2009101734711A patent/CN101667549B/zh not_active Expired - Lifetime
- 2004-01-06 CN CNA2004800040075A patent/CN1765017A/zh active Pending
- 2004-01-06 JP JP2006502725A patent/JP5204400B2/ja not_active Expired - Lifetime
- 2004-01-06 EP EP04700303A patent/EP1584109A2/en not_active Withdrawn
- 2004-01-06 US US10/541,715 patent/US7608486B2/en active Active
- 2004-01-06 WO PCT/NL2004/000005 patent/WO2004070838A2/en active Application Filing
- 2004-01-07 TW TW093100339A patent/TWI341016B/zh not_active IP Right Cessation
- 2004-01-07 MY MYPI20040030A patent/MY144186A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2001017012A1 (en) * | 1999-07-01 | 2001-03-08 | Fico B.V. | Device and method for encapsulating electronic components mounted on a carrier |
JP2001223230A (ja) * | 2000-02-10 | 2001-08-17 | Towa Corp | 電子部品、電子部品の樹脂封止方法、及び樹脂封止装置 |
JP2004153045A (ja) * | 2002-10-31 | 2004-05-27 | Towa Corp | 電子部品の樹脂封止成形方法及び金型 |
Also Published As
Publication number | Publication date |
---|---|
CN101667549B (zh) | 2012-04-04 |
NL1022323C2 (nl) | 2004-07-09 |
WO2004070838A3 (en) | 2005-07-21 |
KR20050098858A (ko) | 2005-10-12 |
KR101138561B1 (ko) | 2012-05-10 |
US20060160275A1 (en) | 2006-07-20 |
US7608486B2 (en) | 2009-10-27 |
MY144186A (en) | 2011-08-15 |
TW200421573A (en) | 2004-10-16 |
EP1584109A2 (en) | 2005-10-12 |
TWI341016B (en) | 2011-04-21 |
WO2004070838A2 (en) | 2004-08-19 |
JP5204400B2 (ja) | 2013-06-05 |
CN1765017A (zh) | 2006-04-26 |
CN101667549A (zh) | 2010-03-10 |
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