JP2006515256A - A method of reaching one or more levels of material storage shelves from a single track position by elevated hoist transport means - Google Patents

Abstract

An improved automated material handling system that allows an elevated hoist supported by a suspended track to reach work in process (WIP) from a storage location beside the track. The automated material transport system includes an elevated hoist transport means for transporting an overhead hoist on a suspended track and one or more bins that house WIP parts located beside the track. To obtain WIP parts from the selected shelf, the elevated hoist transport means moves along the suspension track to a position on the shelf side. Instead, the overhead hoist moves to a position on the fixed shelf. The movable shelf then moves to a position below the elevated hoist. Instead, the overhead hoist moves to a position on the fixed shelf. The elevated hoist is then actuated to pick up the desired WIP part directly from the shelf or to place one or more WIP parts directly on the shelf. Once the WIP component is held by the elevated hoist, the elevated hoist conveyance means conveys the WIP component to a workstation or processing machine on the product manufacturing floor.

Description

Citation of Related Application This application relates to US Provisional Patent Application No. 60/417993, filed Oct. 11, 2002, with name relating to Offset Zero Storage (ZFS) using moving shelves or moving hoist platforms. Claim priority.

No representation regarding federal aid research or development

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates generally to an automatic material transfer method, and more particularly to an automatic material transfer method in which an elevated hoist on a suspended track can reach a work-in-process (WIP) stored near the track.

  It is known that automatic material transport methods use a work-in-process storage and an overhead hoist for work-in-process storage and for transporting between workstations and / or processing equipment in a product manufacturing environment. For example, such automated material transport methods are utilized in the manufacture of integrated circuit (IC) chips. A typical manufacturing method of an IC chip includes deposition, cleaning, ion implantation, etching, and non-conducting processes. Each process in these IC chip manufacturing methods is operated by different processing machines such as a chemical vapor deposition chamber, an ion implantation chamber, or an etching chamber. In addition, the work in progress, in this case, the semiconductor wafer, is typically moved multiple times between different workstations and / or processing machines to manipulate the various steps required to manufacture the IC chip.

  A typical automatic material transfer method used for manufacturing IC chips includes a plurality of WIP storage units for storing semiconductor wafers and their own overhead hoists that move the wafer between the workstation and the processing machine on the IC chip manufacturing floor. Consists of mobile institutions. The semiconductor wafers stored in the WIP storage unit are typically placed on a carrier such as front-open integrated pods (FOUPs), each selectively via a respective elevated hoist moving engine that moves on a suspended track. Can be obtained. In a typical method arrangement, the FOUP is stored in a WIP storage located below the track. Therefore, the overhead hoist mobile is typically moved along the suspension track to a direct position above the selected FOUP, and the overhead hoist is lowered toward the FOUP and chooses the FOUP from the WIP compartment Alternatively, it works to place the FOUP in the WIP storage unit.

One drawback of the conventional automatic material handling method described above is that the elevated hoist can only reach one of the WIP storage under the suspended track. This is problematic, and if the product production floor has only one level of WIP storage, it results in increased costs due to inefficient use of floor space. In order to reach various levels of WIP under orbit, the WIP storage unit must be structured to move the selected FOUP from the current position of the storage unit to a position at a level where it can reach the elevated hoist. However, the need to move the FOUP selected by the WIP storage unit down to the track where the elevated hoist can reach would significantly reduce the throughput of the material transport system. In addition, WIP storage units typically have many moving parts that can fail, such as rollers, bearings, and motors, and this not only increases costs, but also compromises the reliability of the overall system.

  In addition, the overhead hoist included in the automatic material handling system reaches the WIP part from the storage unit located under the suspension track, so that it is the smallest between the ceiling and floor of the product manufacturing facility to accommodate the track and the overhead hoist transport engine. A limited amount of space is typically required. This further reduces the space in the manufacturing facility that was otherwise used to house the WIP components. In addition, since only one level of WIP storage is reachable for each elevated hoist, multiple elevated hoists usually need to be lined up in the WIP storage unit to reach the WIP components from the storage unit However, it further reduces the throughput of the system.

  Therefore, there is a need for an automatic material transfer system that overcomes the drawbacks of conventional automatic material transfer systems and increases material transfer efficiency.

SUMMARY OF THE INVENTION An improved automated material handling system is provided in accordance with the present invention, which allows an elevated hoist supported on a suspended track to obtain work-in-progress (WIP) parts from a stowed storage location. . By allowing the overhead hoist to obtain work-in-progress (WIP) parts from the side of the track, the automated material handling system disclosed herein can use the space more efficiently and increase the throughput and reliability. Improve and further reduce the cost.
In the first aspect of the present invention, an improved automatic material conveyance system includes at least one elevated hoist conveying means for conveying an elevated hoist to a suspended track, and a plurality of storage bins for storing WIP parts located beside the track. (Container). The plurality of storage bins are configured such that the elevated hoist can directly obtain one or more of the WIP parts from a selected one of the storage bins. The plurality of mobile shelves may be arranged in a single row or multiple rows substantially parallel to the side of the track. Furthermore, one or more rows of moving shelves may be located on either side or both sides of the suspended track. To reach one or more WIP parts from the selected shelf, the elevated hoist transport means including the elevated hoist moves along the suspension track toward the selected shelf. The selected shelf then moves to a position below the direct overhead hoist. The elevated hoist is then activated to pick up the desired WIP part directly from the shelf or to load one or more WIP parts directly onto the shelf. In a preferred embodiment, the selected shelf may be substantially the same height as the elevated hoist since it is not required to pass through the desired WIP part. In this case, since the shelf moves to a position below the elevated hoist, the WIP component passes through the cowl opening of the elevated hoist conveying means. Once the WIP component is supported by the overhead hoist, the shelf is lowered to its original position in the shelf row.

  If the automated material handling system includes many columns of moving shelves, each column of shelves is either directly above or below the adjacent shelf column, and many columns and rows of moving shelves At least one shelf arrangement is formed. The shelf top row of the shelf array is substantially at the same height as the elevated hoist. To reach one or more WIP parts from a selected shelf in the upper row of shelves, the elevated hoist transport means, including the elevated hoist, moves along the suspension track to a position on the side of the selected shelf and selects The moved shelf moves to a position directly below the elevated hoist, and the elevated hoist picks one or more desired WIP parts directly from the shelf or loads one or more WIP parts directly onto the shelf . The selected shelf is then lowered to its original position in the shelf array.

  To reach the WIP part from the selected shelf in the row below the top row of shelves, the elevated hoist transport means moves along the suspension track to a position on the side of the row containing the selected shelf. The selected shelf then moves to a position directly below the elevated hoist so that the hoist sinks towards the shelf and takes the desired WIP part directly from the shelf or one or more WIP parts directly to the shelf. Loading. The elevated hoist can then reach different shelves in the same row of shelves from the same position in the suspended track. Alternatively, the overhead hoist moves to the position of the track adjacent to a different row of shelves and reaches a WIP part on one or more shelves in that row. Once the desired WIP part is held by the elevated hoist, the selected shelf returns to its original position in the shelf array.

  In a second aspect, an improved automated material handling system includes at least one elevated hoist conveying means for conveying an elevated hoist along a suspended track and a plurality of WIP storage containers located beside the track, The storage container consists of a passive or fixed shelf. In this second aspect, the elevated hoist is installed on a moving stage and is configured to move the hoist to a selected, substantially directly up position on the fixed shelf. The plurality of fixed shelves may be arranged in a single row or many rows that are substantially parallel beside the track. Furthermore, one or more rows of fixed shelves may be located on either side or both sides of the track. To reach one or more WIP parts from the selected fixed shelf, the elevated hoist transport means moves along the suspension track to a position on the selected shelf side. Next, the moving stage moves the elevated hoist from the first position in the elevated hoist conveying means to the second position directly above the selected shelf. The elevated hoist then operates to pick up the desired WIP part directly from the shelf or to place one or more WIP parts directly on the shelf. The selected shelf can be at substantially the same height as the elevated hoist. Once the WIP component is held on the elevated hoist, the moving stage returns the elevated hoist from its position on the shelf to its original position in the elevated hoist transport means.

  In a preferred embodiment, a plurality of storage containers for storing WIP parts are suspended on the floor of the product manufacturing facility. For example, the plurality of storage containers are suspended from the track structure and supported from the ceiling of the product manufacturing facility or from the floor of the manufacturing facility. Since the storage containers are suspended on either side or both sides of the track, the multiple suspension storage containers provide a zero footprint (ZFS) offset for the WIP parts, which is more efficient use in product manufacturing facilities.

  The improved automatic material handling system is more space efficient by arranging the elevated hoist and WIP storage container to allow the elevated hoist supported by the suspended track to reach the WIP stored by the track Use can be achieved and throughput can be increased, reliability can be increased, and costs can be reduced.

Other features, functions, and aspects of the invention will become apparent from the following detailed description of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS The drawings, together with the following description, will be better understood according to the following detailed description of the invention:
FIG. 1 is an exploded view of an IC chip manufacturing environment including an automated material handling system according to the present invention;
2a-2b are exploded views of a first aspect of offset zero footprint storage used in the automated material handling system of FIG. 1, wherein the offset zero footprint storage consists of a single row of moving shelves;
3a-3b are exploded views of the first aspect of offset zero footprint storage of FIG. 2, wherein the offset zero footprint storage comprises multiple moving shelves;
4a-4b are exploded views of a second aspect of offset zero footprint storage used in the automated material handling system of FIG. 1, where the offset zero footprint is a single row of fixed shelves and an elevated overhead on the moving stage. Consisting of a hoist mechanism;
FIG. 5 is an exploded view of the elevated hoist mechanism of FIG. 4 used in connection with a WIP storage unit;
6 is an exploded view of the elevated hoist mechanism of FIG. 4 used in the WIP parts transport system;
7 is a perspective view of an alternative embodiment of the elevated hoist mechanism of FIG. 4;
FIG. 8 is a perspective view of the elevated hoist mechanism of FIG. 7 used in connection with a fixed shelf arrangement;
FIG. 9 is a perspective view of a multiple elevated hoist mechanism, such as the elevated hoist mechanism of FIG. 7, which travels on the same track and is used in connection with an array of fixed shelves;
FIG. 10 is a perspective view of a multiple elevated hoist mechanism, such as the elevated hoist mechanism of FIG. 7, which is used in conjunction with a back-to-back arrangement of fixed shelves that travels each track;
FIG. 11 is a perspective view of a third mode of zero offset footprint storage with the elevated hoist mechanism of FIG. 7 used in connection with multiple arrays of fixed shelves;
12a-12b are explanatory flow diagrams illustrating the operation of the automatic material handling system of FIG. 1;
13 is a flow diagram of a method for controlling the automatic material handling system of FIG. 1;
14a-14b are perspective views of the moving stage of FIGS. 4a-4b.

DETAILED DESCRIPTION OF THE INVENTION US Provisional Patent Application No. 60 / 417,993, filed Oct. 11, 2002, Name Storage of offset zero footprint (ZFS) using moving shelf or moving hoist platform Incorporated by reference.

  An improved automated material handling system is disclosed herein that allows an elevated hoist mechanism supported on a suspended track to obtain work-in-progress (WIP) parts from a storage container located beside the track. The automated material delivery system disclosed here makes space use more efficient while increasing throughput, increasing reliability, and lowering costs.

  FIG. 1 graphically illustrates aspects of a product manufacturing environment 101 that includes an automated material handling system (AMHS) 100 in accordance with the present invention. In the illustrated embodiment, the AMHS 100 automatically houses WIP parts and places them in various workstations and / or processing machines in the product manufacturing environment 101, eg, processing machines 114- having respective input / output ports 118-119. It is structured to convey between 115.

  Note that AMHS 100 is used in a clean environment or other suitable product manufacturing environment for the manufacture of integrated circuit (IC) chips, such as 200 mm or 300 mm FAB factories. As shown in FIG. 1, the IC chip manufacturing environment includes a ceiling 104 and a floor 105, which is typically covered with an electrically non-conductive material and has specific load and earthquake resistance. Further, the processing machines 114-115 are configured to go through a number of processing steps for manufacturing an IC chip. For example, the ceiling 104 is separated from the floor 105 by a distance 126 of about 3.5 m, the processing machines 114-115 are separated by a distance of at least about 1.9 m, and the top of the input / output ports 118-119 is It is separated from the floor 105 by a distance of about 0.9 m.

  In the illustrated embodiment, AMHS 100 includes elevated hoist transport means 102a-102b movably coupled to tracks 106a-106b, both suspended from ceiling 104. Elevated hoist transport means 102a-102b is structured to move each elevated hoist along tracks 106a-106b and is a front-open integrated pod (FOUP) designed to accommodate WIP components, ie, semiconductor wafers. To reach the carrier. As shown in FIG. 1, the FOUPs 108a-108b are respectively stored in storage bins such as shelves 110a-110b. Further, the suspension tracks 106a-106b each define a route that passes through the ends of the shelves 110a-110b so that the overhead hoist transport means 102a-102b can reach the FOUPs 108a-108b directly from the respective shelves 110a-110b. Is possible. For example, the elevated hoist transport means 102a-102b may be located at a distance 122 of about 2.6 meters above the floor 105.

  In particular, shelf 110a is a passive or fixed hand shelf, which can be one of many fixed shelves arranged in a substantially parallel row beside suspended track 106a. It should be understood that one or more rows of fixed shelves may be located on one or both sides of the track 106a. In the illustrated embodiment, to reach the FOUP 108a from the fixed shelf 110a, the elevated hoist conveyance means 102a moves along the suspension track 106a to a position on the shelf 110a side. Next, the moving stage 112 included in the elevated hoist conveying means 102a moves the elevated hoist from a first position in the elevated hoist conveying means 102a to a second position substantially directly on the fixed shelf 110a as indicated by an arrow 109a. Move sideways in the direction. The elevated hoist is then actuated to pick up the FOUP 108a directly from the shelf 110a and then transport it to a workstation or processing machine on the IC chip manufacturing floor. It should be understood that the overhead hoist may instead have one or more FOUPs placed on the shelf 110a. It should also be noted that the moving stage 112 may be configured to allow the elevated hoist to be picked up or placed from or to either side of the elevated hoist transport means 102a.

  In a preferred embodiment, the fixed shelf 110a can be substantially the same height as the elevated hoist transport means 102a. In this aspect, the elevated hoist transport means 102a includes a cowl 103a having an opening formed therein, through which the moving stage 112 can move from the transport means to a position above the fixed shelf 110a. After picking up the FOUP 108a from the shelf 110a, the moving stage 112 is returned to the original position in the elevated hoist transfer means 102a, and the FOUP 108a passes through the opening of the cowl 103a.

  The shelf 110a is a fixed shelf, while the shelf 110b is a movable shelf. Similar to the fixed shelf 110a, the moving shelf 110b can be one of many moving shelves arranged in a substantially parallel row on the side of the suspension track 106b. Further, one or more rows of moving shelves may be located on either side or both sides of the track 106b. In the illustrated embodiment, to reach the FOUP 108b on the moving shelf 110b, the elevated hoist transport means 102b moves along the suspension track 106b to the shelf 110b side. The shelf 110b then moves laterally from a first position beside the track 106b to a second position directly below the elevated hoist in the elevated hoist transport means 102b, which is in the direction indicated by arrow 109b. For example, the moving shelf 110b has a mechanism for moving the shelf 110b along the axis of a pneumatic step motor or servo motor drive between a first position beside the track 106b and a second position below the track and the overhead hoist. Can be provided. The elevated hoist is then actuated to pick up the FOUP 108b directly from the shelf 110b and then transport it to a workstation or processing machine on the IC chip manufacturing floor. It should be understood that the overhead hoist can instead place one or more FOUPs on the shelf 110b.

  Similar to the fixed shelf 110a, the movable shelf 110b may be substantially the same height above the floor 105 as the elevated hoist transport means 102b. Further, the elevated hoist conveying means 102b includes a cowl 103b formed with an opening, through which the movable shelf 110b holding the FOUP can move to a position below the elevated hoist in the conveying means 102b. Once the FOUP 108b is held by the elevated hoist, the shelf 110b returns to its original position beside the suspension track 106b.

  It should be appreciated that the automated material handling system described herein operates under computerized control. For example, AMHS 100 comprises a computer system that includes one or more processors that command from memory. Instructions that perform the operations described herein are recorded as program code that can be considered part of an arithmetic system}, instructions recorded as program code that can be considered part of an application, or between an arithmetic system and an application. It can consist of instructions recorded as assigned program code. In addition, the memory comprises random access memory (RAM), a combination of RAM and read only memory (ROM), or other suitable program records.

  2a-2b illustrate an automated material handling system (AMHS) 200 that may be used in the IC chip manufacturing environment 101 of FIG. In the illustrated embodiment, the AMHS 200 includes a suspended track 206 and an elevated hoist transport means 202 structured to move on the track 206. The elevated hoist transport means 202 is configured to pick up or move the FOUP 208 from or to the moving shelf 210. For example, the overhead hoist transport means 202 extends at a distance 221 of about 0.9 m below the ceiling 204, and the moving shelf 210 can be positioned at a distance of about 2.6 m above the floor 205. Therefore, the ceiling 204 can be a distance 220 of about 3.5 m above the floor 205.

  In a preferred embodiment, the moving shelf 210 is suspended on the floor 205 of the IC chip manufacturing facility. For example, the moving shelf 210 may be suspended from the track 206, from the ceiling 204, or other suitable structure. Since the moving shelf can be suspended on either side or both sides of the track 206 as well as the shelf 210, the shelf 210b provides an offset zero footprint storage (ZFS) to the FOUP 208, thereby making it more efficient for the IC chip manufacturing environment. Make use of space.

  As described above, the overhead hoist conveyance means 202 is configured to pick up the FOUP 208 from the moving shelf 210 or place it on the moving shelf 210. Therefore, the elevated hoist conveying means 202 moves to the position on the shelf 210 side along the suspension track 206. As shown in FIG. 2 a, the shelf 210 disposed on the side of the track 206 is substantially the same height as the elevated hoist conveying means 202. Next, the shelf 210 moves sideways in the direction indicated by the arrow 209 to a position immediately below the elevated hoist in the elevated hoist transport means 202 (see FIG. 2b). The elevated hoist transport means 202 includes a hoist gripper (see, eg, hoist gripper 426 in FIG. 5), which is configured to pick up or place the FOUP 208 from the shelf 210. Once the FOUP 208 is held by a hoist gripper, the elevated hoist transport means 202 can move it to a workstation or processing machine on the IC chip manufacturing floor.

  3a-3b illustrate an automated material handling system (AMHS) 300 that may be used in the IC chip manufacturing environment 101 of FIG. Similar to AMHS 200 (see FIGS. 2 a-2 b), AMHS 300 includes a suspended track 306 and an elevated hoist transport means 302 structured to move on track 306. However, the elevated host transport means 202 included in the AMHS 200 picks up or places the FOUP 208 on or from a moving shelf arranged in a single shelf row, while the elevated hoist transport means 302 places the FOUP 308 on each row shelf. A structure that picks up or rests on or from a selected mobile shelf 310-311 to be placed. For example, the elevated hoist transport means 302 extends at a distance 323 of about 0.9 m below the ceiling 304, the shelf 310 is arranged at substantially the same height as the elevated hoist transport means 302, and the shelf 311 is a shelf 310b. At a distance 323 of about 0.4 m below and a distance 322 of about 2.6 m above the floor 305. Therefore, the ceiling 304 can be at a distance 320 of about 3.9 m from the floor 305.

  Since the moving shelf 310-311 can be suspended from the track 306 structure, from the ceiling 304, or from any other suitable structure, the shelf 310-311 provides a multiplexed column or level of offset zero footprint storage for the FOUP 308. In addition, each column of shelves is substantially directly above or below the adjacent column of shelves, thereby forming at least one shelf array including multiple columns or multiple rows of shelves. The top row of shelves in the shelf arrangement (including the shelves 310) may be substantially the same height as the elevated hoist transport means 302.

  In the illustrated embodiment, the elevated hoist transport means 302 is configured to pick up or place the FOUP 308 on or from the moving shelves 310-311. In order to pick up the FOUP 308 from the shelf 308, the elevated hoist conveyance means 302 moves along the suspension track 306 to a position on the shelf 310 side. Next, the shelf 310 moves sideways and moves in the direction indicated by the arrow 309 to a position directly below the elevated hoist in the elevated hoist conveying means 302 (see FIG. 3b). Similar to elevated hoist transport means 202, elevated hoist transport means 302 includes a hoist gripper (see, eg, hoist gripper 426 of FIG. 5) that picks up or rests FOUP 308 from or directly to shelf 310. Configured to do. Once the FOUP 308 is picked up from the shelf 310 and held with a hoist gripper, the elevated hoist transport means 302 can move it to a workstation or processing machine on the IC chip manufacturing floor.

  To pick up a FOUP from shelf 311 in the same row of shelves 310, rather than the column below shelf 310, elevated hoist transport means 302 is itself located on the shelf 310 side. Next, the shelf 311 moves sideways and moves in the direction indicated by the arrow 309 to a position within the elevated hoist conveying means 302 substantially directly below the elevated hoist. The elevated hoist is lowered in a conventional manner toward shelf 311 and picks FOUP 308 from shelf 311 using a hoist gripper. The elevated hoist is then raised and the FOUP 308 is held by the hoist gripper within the elevated hoist transport means 308, after which the engine can move the FOUP to a workstation or processing machine on the IC chip manufacturing floor. Finally, the shelf 311 returns to the original position of the shelf arrangement.

  The elevated hoist included in the elevated hoist transport means 302 can reach the WIP parts stored on the selected moving shelf (eg, shelves 310-311), which is located in the same row of shelves from the same position on the suspension track 306. Is done. In this way, the elevated hoist transport means 302 can reach one or more levels of WIP parts from a single orbital position.

  4a-4b illustrate an automated material handling system (AMHS) 400 that may be used in the IC chip manufacturing environment 101 of FIG. In the illustrated embodiment, the AMHS 400 includes a suspended track 406 and an elevated hoist transport means 402 configured to move on the track 406. The elevated hoist transport means 402 is configured to pick up or place the FOUP 408 from or into the passive or fixed shelf 410. For example, the overhead hoist transport means 402 may extend at a distance 421 of about 0.9 m below the ceiling 404 and the fixed shelf 410 a may be disposed at a distance 422 of about 2.6 m above the floor 405. Note that shelf 410 may be at the same floor height as elevated hoist transport means 402.

  It should be understood that a plurality of fixed shelves, like the shelves 410, can be arranged in a single row or multiple rows substantially parallel to the track 406. Further, one or more fixed shelf rows may be located on either or both sides of the track 406. Since multiple rows of fixed shelves can be suspended from the track structure, from the ceiling 404, or from other suitable structures to the track 406 side, the fixed shelves provide many levels of offset zero footprint storage for the FOUP 408.

  In the illustrated embodiment, the elevated hoist included in the elevated hoist conveying means 402 is placed on the moving stage 412 and moves the hoist to a position substantially immediately above the fixed shelf selected on the conveying means 402 side. It has a configuration. FIG. 14a illustrates a moving stage 412 with a retracted structure, and FIG. 14b illustrates a moving stage 412 with a laterally extended structure. To pick up the FOUP 408 from the shelf 410 (see FIGS. 4a-4b), the elevated hoist transport means 402 moves along the suspension track 406 to a position on the shelf 410 side. Next, the moving stage 412 moves sideways to a position on the shelf 410 in the direction indicated by the arrow 409 (see FIG. 4a). The hoist gripper 426 (see FIG. 5) is then actuated to pick up or place the FOUP 408 directly on or from the shelf 410. Once the FOUP 408 is picked up from the shelf 410 and gripped by the hoist gripper 426, the moving stage 412 returns to the original position in the elevated hoist transport means 402. Note that when the moving stage 412 returns to its original position in the transport means 402, the FOUP 408 moves to the transport means 402 through the cowl opening 403 (see FIG. 4b). The elevated hoist conveyance means 402 then conveys FOUP08 to a workstation or processing machine on the IC chip manufacturing floor.

  The elevated hoist included in the elevated hoist transport means 402 can reach a WIP component located on a selected fixed shelf (eg, shelf 410a), which is located in the same row of the shelf from the same location on the suspension track 406. . For example, to reach a FOUP that is not in the bottom row of shelves 410 but is located on a fixed shelf in the same row as shelves 410, the overhead hoist is lowered to the appropriate level on the lower shelf side in the normal manner. And the moving stage 412 moves sideways to allow the hoist gripper 426 to pick up or place the FOUP from or onto the shelf. In this way, the elevated hoist transport means 402 can reach one or more levels of WIP storage from a single track position.

  FIG. 5 illustrates an illustrative application of AMHS 400 (see also FIGS. 4a-4b), where AMHS 400 is used with WIP storage unit 500 (“stocker”). In the illustrated embodiment, stocker 500 includes a plurality of storage bins such as shelves 510 disposed within a stocker housing. The storage bin in the stocker 500 rotates around the central axis and is positioned at a storage unit position where it can be taken out by the elevated hoist transport means 402. The FOUP 508 is picked up from the shelf 510 when the elevated hoist conveying means 402 moves along the suspension track 406 and moves to a position on the shelf 510 side. The moving stage 412 then moves sideways and moves to a position substantially directly above the shelf 510 in the direction indicated by arrow 409. The hoist gripper 426 is then actuated to pick up the FOUP 508 directly from the shelf 510 and remove the FOUP 508 from the stocker 500. It should be understood that the hoist gripper 426 can alternatively be used to place the FOUP on the shelf 510 in the stocker 500. Once the FOUP 508 is picked up from the shelf 510 and held by the hoist gripper 426, the moving stage 412 returns to its original position in the elevated hoist transport means 402, and then the workstation or processing on the IC chip manufacturing floor. Transported to the machine.

  Note that the elevated hoist of FIG. 5 instead takes up or places the FOUP from or to the shelf outside the stocker 500. For example, the stocker 500 can include one or more moving shelves, each shelf moving sideways to move from a first position within the stocker 500 to a second position outside the stocker, with an elevated hoist It is a structure that makes it possible to reach the FOUP. Once the FOUP is picked up from the shelf and held by the hoist gripper 426, the shelf returns to its original position in the stocker 500. When the overhead hoist of FIG. 5 is used to reach the FOUP directly from the stocker 500, conventional I / O mechanisms, such as the input / output ports 118-119 (see FIG. 1), are not required, thereby reducing system cost. Can be reduced.

  FIG. 6 illustrates an illustrative application of AMHS 400 (see also FIGS. 4 a-b), where AMHS 400 is used with an elevated WIP conveyor 610. In the illustrated embodiment, the overhead hoist installed on the moving stage 412 is used to pick up or place the FOUP 608 directly from or onto the WIP conveyor 610 and is configured to move along the rail 606. It should be understood that the rail 606 extends in a direction perpendicular to the plane of the drawing of FIG. The elevated hoist can be used to pick up the FOUP 608 from the rail laying conveyor 610 and place the FOUP 608 on, for example, a machine load port 635, and vice versa. For example, the elevated hoist transport means 402 may be located at a distance 624 of about 0.35 m above the rail laying conveyor 610. Further, the elevated hoist rail 606 may be a distance 626 of about 2.6 meters above the floor 605 of the IC manufacturing facility.

  A suspended hoist, such as an elevated hoist carrier moving on track 406, can typically be used as a “hop-to-hop” movement for FOUP movement between adjacent workstations and machine tools. Conversely, rail laid conveyor 610 can be used to provide a quick transfer of FOUPs between workstations and processing machines located at a substantial distance on the IC chip manufacturing floor. By using a rail-laid conveyor to transport the FOUP across a substantial distance across the IC chip manufacturing facility, the transport system congestion can be significantly reduced.

  As described above, the overhead hoist installed on the moving stage 412 can be utilized to pick up or place the FOUP 608 from or on the rail-laid conveyor 610. For this purpose, the overhead hoist conveying means 402 and the rail laying conveyor 610 move and are located on the side of the conveyor 610 together with the FOUP 608 disposed thereon. The moving stage 412 then moves sideways to place the FOUP substantially directly on the surface of the conveyor 610 in the direction indicated by arrow 409. The elevated hoist is then lowered in a conventional manner toward the conveyor 610 in the direction indicated by arrow 628. Next, the elevated hoist is operated to place FOUP 608 on conveyor 610 and then transport FOUP 608 across the IC chip manufacturing floor.

  FIG. 7 illustrates an alternative embodiment 700 of the AMHS 400 of FIGS. 4a-4b. Similar to AMHS 400, AMHS 700 is configured to pick up or place a FOUP from or on a passive or fixed shelf. In the illustrated embodiment, the AMHS 700 includes a suspended track 706 and elevated hoist transport means 702 supported on the track 706. As shown in FIG. 7, the elevated hoist transport means 702 includes a proximal end 744, a distal end 746 and a suspension element 748 connecting between the proximal end and the distal ends 744 and 746. The elevated hoist transport means 702 is further movably connected to a hoist gripper 726 and a proximal end 744 located at the distal end 746 and is configured to allow the transport means 702 to move on the track 706. A transport element 742 is included.

  In particular, the proximal end 744 is configured to move laterally relative to the transport element 742 in a direction substantially perpendicular to the track 706 in the direction indicated by arrow 709. For example, the proximal end 744 may move as a Y-table, pneumatic mechanism, stepper, servo mechanism, or other suitable mechanism that provides a relatively long lateral bias. Further, the end 746 is configured to move in the vertical direction in the direction indicated by the arrow 728. For example, the proximal end 746 can be coupled to the end of the suspension element 748, which can be telescopically retracted to allow the distal end 746 to move in the desired vertical direction. Therefore, the combination of the proximal end 746 and the suspension element 748 is a 2-degrees-of-freedom such that the distal end 746 that houses the hoist gripper 726 is identified by arrow directions 709 and 728. It is possible to move with.

  FIG. 8 illustrates the AMHS 700 of FIG. 7 used with a passive or fixed shelf array 800. In the illustrated embodiment, the overhead hoist transport means 702 is configured to pick up or place a FOUP, eg, FOUP 808, from or onto a selected shelf in the array 800, which array is fixed as a shelf 810. Includes multiple columns or multiple rows of shelves. As shown in FIG. 8, the shelf array 800 is disposed substantially parallel to the side of the suspension track 706. In addition, each shelf is provided along a single edge relative to a vertical support member 760 that can be secured to the floor, and adjacent rows of shelves are spaced apart and each suspension element 748 is adjacent. Allows to fit in line spacing. Note that in this structure, FOUP 808 is manually reachable open if desired.

  For example, in order to pick up the FOUP 808 from the shelf 810, the elevated hoist conveying means 702 moves along the suspension track 706 and moves to a position on the side of the row including the shelf 810. The end 746, including the hoist gripper, then moves downward in the direction indicated by the arrow 728 to a position on the side of the shelf 810 that holds the FOUP 808. Proximal end 742 then moves sideways and moves in the direction indicated by arrow 709 to the position of hoist gripper 726 on track 706 substantially directly above shelf 810. Note that the proximal end 742 moves to its side and each suspension element 748 is received in the space on each side of the shelf row.

  Once FOUP 808 is picked up from shelf 810 by hoist gripper 726, proximal end 742 returns to its original position under track 706, thereby causing hoist gripper 726 to hold FOUP 808 and proximal end 746. Makes it possible to return to the trajectory 706. The transport member 702 then moves the FOUP 808 to a workstation or processing machine on the IC chip manufacturing floor. It should be understood that the elevated hoist transport means 702 can reach the WIP parts housed in the selected shelf, located in the same row of the shelf, from the same location on the suspended track 706. In this way, the elevated hoist transport means 702 can reach one or more levels of WIP storage from a single track position.

  FIG. 9 illustrates a plurality of automated material handling systems (AMHS) 700a-700b used with the shelf arrangement 800. It should be understood that each AMHS 700a-700b is similar to the AMHS 700 of FIG. In the illustrated embodiment, the AMHS 700a-700b is configured to move on a single track 706 to allow simultaneous access to the FOUP 808 housed in the shelf array 800, thereby ensuring high system throughput. To do.

  FIG. 10 illustrates AMHS 700a-700b used with two arrays of rear-facing shelves 800a-800b for increased storage density. As shown in FIG. 10, each of the shelf arrays 800 a-800 b is installed along a single end of the vertical support member 1060. Each shelf in shelf array 800a-800b is similar to shelf array 800 (see FIG. 8), where adjacent rows of shelves are spaced apart and each suspension element 748 fits between adjacent rows. Make it possible. In the illustrated embodiment, the AMHS 700a-700b has a structure that moves on the suspension tracks 706a-706b to enable simultaneous arrival of the FOUPs stored in the shelf arrays 800a-800b, thereby ensuring a high system throughput. Is done. The system structure of FIGS. 8-10 does not require a robot to reach the FOUP (similar to conventional material transport systems), thus reducing the need for floor space and system cost while maintaining system reliability. Will increase.

  FIG. 11 illustrates the AMHS 700 of FIG. 7 used with a fixed shelf array 1100. Similar to the shelf array 800 (see FIG. 8), the shelf array 1100 is disposed beside the suspension track 706 substantially in parallel. Further, each shelf is provided at a single end of one or more vertical support members 1160a-1160b, and adjacent rows of shelves are spaced apart, and each suspension element 748 fits into the spacing between adjacent rows. Making it possible. However, while the shelf array 800 is fixed to the floor, the shelf array 1100 is suspended from the structure of the track 706 by support members 1160a-1160b. It should be understood that the 1100 shelf arrangement could instead be suspended from the ceiling or other suitable structure. As a result, the shelf arrangement 1100 provides multiple rows or levels of offset zero footprint of the FOUPs stored therein.

  The first method of operating the automatic material delivery system disclosed herein will be described with reference to FIG. 12a. As illustrated in step 1202, the elevated hoist transport (OHT) means moves along the suspension track and moves to the position of the selected moving shelf in the shelf array. The shelf has at least one FOUP disposed on it. The shelf then moves to a position below the elevated hoist included in the OHT engine, as illustrated in step 1204. The elevated hoist then operates to pick up the FOUP from the shelf, as illustrated in step 1208. Next, as illustrated in step 1208, the shelf moves and returns to its original position in the shelf array. Eventually, the OHT transport means transports the FOUP to a workstation or processing machine on the product production floor, as illustrated in step 1210.

  A second method of operating the automated material delivery system disclosed herein is described with reference to FIG. 12b. As illustrated in step 1212, the OHT transport means moves along a suspended track to a point on the selected fixed shelf side of the shelf array. At least one FOUP is arranged on the shelf. The moving stage with an elevated hoist installed on it then moves to a position on the shelf, as illustrated in step 1214. The elevated hoist then operates to pick up the FOUP from the shelf as illustrated at step 1216. Next, the moving stage returns to the original position of the OHT transport means as illustrated in step 1218. The OHT transport means then moves the FOUP to a workstation or processing machine on the product production floor, as illustrated in step 1220. The elevated hoist is then actuated to place the FOUP on the I / O port of the machine as illustrated at step 1222, which moves the moving stage to a position on the I / O port and moves the FOUP to the I / O port. Place on the O port and move the moving stage to its original position in the OHT transport means. The elevated hoist is then actuated to pick up the FOUP from the machine I / O port, as illustrated in step 1224. Next, the OHT transport means moves to a position on the side of the rail laying conveyor as illustrated in step 1226. The moving stage then moves to step 1228 as illustrated to place the FOUP on a rail laying conveyor. The elevated hoist holding the FOUP is then lowered toward the conveyor as illustrated at step 1230 and the elevated hoist places the FOUP on the conveyor as illustrated at step 1232. After the moving stage has returned to its original position in the OHT transport means, the rail laying conveyor transports the FOUP across the product manufacturing floor over a long distance, as illustrated at step 1234.

  The method of adjusting the automatic material delivery system disclosed herein will be described with reference to FIG. The storage location is configured to handle overflowing FOUPs from a tool here, from a group of tools, or from a bay. A storage unit is one or more storage locations. The system controller stores the FOUP near the destination tool and stores it in the storage location unit, optimizing quick correction and other FOUP storage in the unit. As illustrated in step 1302, the AMHS controller directs the FOUP elevated hoist carrier to the process tool. Then, as step 1304 indicates, no process tool is available to accept the FOUP. As illustrated in step 1306, it is then determined if the storage unit associated with the process tool can store the FOUP. If yes, the AMHS controller assigns the FOUP to the process tool storage unit, as illustrated in step 1310. Otherwise, as illustrated in step 1308, it is determined whether the storage unit linked to the group of process tools can store the FOUP. If yes, the AMHS controller assigns a FOUP to the storage unit of the group of process tools as illustrated in step 1312. Otherwise, the AMHS controller assigns FOUPs to the storage units in the semiconductor bay as illustrated in step 1314. By performing each of steps 1310, 1312 and 1314, the AMHS controller places the FOUP in the AMHS by executing an algorithm built into the computer system of the AMHS controller as illustrated in step 1316. Therefore, it is possible to schedule the correction efficiently.

  Having described aspects by way of illustration above, other alternative aspects or variations are possible. For example, the automatic material conveyance system includes an elevated hoist conveyance means configured to move an elevated host to a conveyance tool such as a front opening integrated pod (FOUP) in an IC chip manufacturing environment. However, it should be understood that the automatic material delivery system described above may be used in any suitable environment where articles are stored from place to place. For example, the automated material handling system described herein can be used in an automobile manufacturing facility, and the WIP parts housed and moved by the system can consist of automobile parts.

  The above-described system and method of reaching one or more levels of shelves by elevated hoist transport means from a single track position can be further modified or changed by those skilled in the art without departing from the basis of the disclosed invention. It should be understood that variations can be made. Accordingly, the invention is not to be construed as limiting unless it is limited by the scope and spirit of the appended claims.

1 is an exploded view of an IC chip manufacturing environment including an automatic material transfer system according to the present invention. FIG. FIG. 2 is an exploded view of a first aspect of offset zero footprint storage used in the automated material handling system of FIG. 1, wherein the offset zero footprint storage consists of a single row of moving shelves. FIG. 2 is an exploded view of a first aspect of offset zero footprint storage used in the automated material handling system of FIG. 1, wherein the offset zero footprint storage consists of a single row of moving shelves. FIG. 3 is an exploded view of a first mode of storing an offset zero installation area in FIG. FIG. 3 is an exploded view of a first mode of storing an offset zero installation area in FIG. FIG. 3 is an exploded view of a second embodiment of offset zero footprint storage used in the automatic material handling system of FIG. FIG. 3 is an exploded view of a second embodiment of offset zero footprint storage used in the automatic material handling system of FIG. 4 is an exploded view of the elevated hoist mechanism of FIG. 4 used in connection with the WIP storage unit. 4 is an exploded view of the elevated hoist mechanism of FIG. 4 used in the WIP parts transfer system. 4 is a perspective view of an alternative embodiment of the elevated hoist mechanism of FIG. 7 is a perspective view of the elevated hoist mechanism of FIG. 7 used in connection with a fixed shelf arrangement. FIG. 8 is a perspective view of a multiple elevated hoist mechanism, such as the elevated hoist mechanism of FIG. 7, that travels on the same track and is used in connection with an array of fixed shelves. FIG. 8 is a perspective view of a multiple elevated hoist mechanism, such as the elevated hoist mechanism of FIG. 7, which is used in conjunction with a back-to-back arrangement of fixed shelves that travels each track. FIG. 8 is a perspective view of a third mode of zero installation area storage, in which the elevated hoist mechanism of FIG. 1 is a flow explanatory diagram for explaining the operation of the automatic material conveyance system of FIG. 1 is a flow explanatory diagram for explaining the operation of the automatic material conveyance system of FIG. Flow diagram of a method for controlling the automatic material conveyance system of FIG. 4a-4b perspective view of moving stage 4a-4b perspective view of moving stage

Claims (123)

At least one elevated hoist conveying means including a track, an elevated hoist and a conveying means configured to move the hoist along the track; and at least one material storage location configured to store at least one material unit;
The material storage location is located on the first side of the track;
Here, when the hoist is arranged on the material storage location side, the material storage location is a structure that moves from the first position on the first side of the track to the second position adjacent to the hoist, and thus the hoist is It is possible to pick up the material unit from the storage location or place the material unit on the storage location.
Automatic material conveyance system that is.   The system of claim 1, wherein the at least one material storage location comprises a plurality of storage locations arranged substantially in parallel on the side of the track.   3. The structure according to claim 2, wherein when the hoist is disposed on the side of the storage location, each storage location moves from a first position on the first side of the track to a second position adjacent to the hoist. System.   The system of claim 1, wherein the at least one material storage location comprises a plurality of storage locations arranged in multiple rows substantially parallel on the side of the track.   When the hoist is disposed on the storage location side, each storage location in the uppermost row is configured to move from a first position on the first side of the track to a second position adjacent to the hoist. The system according to claim 4.   5. The system according to claim 4, wherein the plurality of storage locations are arranged in an array of a plurality of columns and a plurality of rows.   When the hoists are arranged in the first storage location in the uppermost row, each storage location in the same row as the first storage location has a second position substantially directly below the hoist from the third position on the first side of the track. The system according to claim 6, wherein the system moves to a position of 4.   The elevated hoist transport subsystem is further configured to move the hoist closer to the storage location at the fourth position to pick up material from the storage location or place material on the storage location. The system according to claim 7.   The at least one material storage location comprises a first plurality of storage locations arranged in a first row of tracks and a second plurality of storage locations arranged in a second row of tracks, The system of claim 1, wherein the second side of the track is opposite the first side of the track.   Each of the storage locations of the second plurality of storage locations is structured to move from a third position on the second side of the track to a second position adjacent to the hoist when the hoist is disposed on the storage location side. The system according to claim 9.   10. The system of claim 9, wherein the first plurality of storage locations are suspended on a first side of the track and the second plurality of storage locations are suspended on a second side of the track.   12. The system of claim 11, wherein the first and second plurality of storage locations are suspended from a track.   12. The system of claim 11, wherein the first second plurality of storage locations are suspended from the ceiling.   At least one material storage location comprises a first plurality of storage locations arranged in multiple rows on the first side of the track and a second plurality of storage locations arranged in multiple rows on the second side of the track. The system of claim 1, wherein the second side of the trajectory is opposite the second side of the trajectory.   When the hoist is positioned on the storage location side, each storage location in the top row on the second side of the track moves from a third position on the second side of the track to a second position adjacent to the hoist. 15. The system of claim 14, wherein the system is a structure.   15. The system of claim 14, wherein the first and second plurality of storage locations are arranged in respective arrays, each comprising a plurality of columns and a plurality of rows.   When the hoist is placed on the first storage location in the top row on the second side of the track, each storage location in the same row as the first storage location is a third location on the first side of the track. The system of claim 16, wherein the system moves to a fourth position substantially directly below the hoist.   The elevated hoist transport subsystem is further configured to move the hoist to the vicinity of the storage location at the fourth position, which allows the hoist to pick up material from the storage location or place material on the storage location. 18. The system of claim 17, wherein:   15. The system of claim 14, wherein the first plurality of storage locations are suspended on the first side of the track, and the second plurality of storage locations are suspended on the second side of the track.   20. The system of claim 19, wherein the first and second plurality of storage locations are suspended from the track.   The system of claim 19, wherein the first and second plurality of storage locations are suspended from the ceiling.   The system of claim 1, wherein at least one material storage location is suspended on the first side of the track.   The system of claim 22, wherein at least one material storage location is suspended from a track.   24. The system of claim 22, wherein at least one material storage location is suspended from the ceiling.   The system further comprises a conveyor subsystem configured to move material units, and the hoist is further configured to pick up material units from the conveyor subsystem or to place material units on the conveyor subsystem. The system according to 1.   26. The system of claim 25, wherein the conveyor subsystem includes at least one rail, the conveyor subsystem being configured to move material units along the rail.   The system of claim 1, wherein the material storage location comprises a moving shelf.   The system of claim 1, wherein the material unit comprises a front-opening integrated pod (FOUP).   The system of claim 1, wherein the material unit comprises at least one manufactured part. Automatic comprising: a track, an overhead hoist, and at least one elevated hoist transport subsystem comprising transport means configured to move the elevated hoist along the track; and at least one material storage location configured to store at least one material unit A material transport system,
The material storage location is located on the first side of the track,
When the hoist is disposed on the material storage location side, the hoist is configured to move from the first position in the overhead hoist conveying means to the second position adjacent to the material storage location, whereby the hoist is moved from the storage location. Makes it possible to pick up a material unit or to place a material unit in a storage location,
The automatic material conveyance system characterized by this.   31. The system of claim 30, wherein the at least one material storage location comprises a plurality of storage locations arranged substantially parallel on the side of the track.   The system of claim 0, wherein the at least one material storage location comprises a plurality of storage locations arranged in multiple rows substantially parallel on the side of the track.   The system of claim 32, wherein the plurality of storage locations are arranged in an array including a plurality of columns and a plurality of rows.   At least one material storage location comprising a first plurality of storage locations disposed in a first side row of tracks and a second plurality of storage locations disposed in a second side row of tracks; The system of claim 30, wherein the second side of the track is opposite the first side of the track.   35. The system of claim 34, wherein the first plurality of storage locations are suspended on a first side of the track, and the second plurality of storage locations are suspended on a second side of the track.   36. The system of claim 35, wherein the first and second plurality of storage locations are suspended from a track.   36. The system of claim 35, wherein the first and second storage locations are suspended from the ceiling.   At least one material storage location is a first plurality of storage locations arranged in a multiplex row on the first side of the track and a second plurality of storage locations arranged in a multiplex row on the second side of the track. 32. The system of claim 30, wherein the second side of the track is opposite the first side of the track.   39. The system of claim 38, wherein the first and second plurality of storage locations are each arranged in an array, each array comprising a plurality of columns and a plurality of rows.   39. The system of claim 38, wherein the first plurality of storage locations are suspended on a first side of the track, and the second plurality of storage locations are suspended on a second side of the track.   41. The system of claim 40, wherein the first and second plurality of storage locations are suspended from a track.   41. The system of claim 40, wherein the first and second plurality of storage locations are suspended from the ceiling.   32. The system of claim 30, wherein the at least one material storage location is suspended on the first side of the track.   44. The system of claim 43, wherein the at least one material storage location is suspended from the track.   44. The system of claim 43, wherein the at least one material storage location is suspended from the ceiling.   31. The system of claim 30, wherein the material unit comprises a front-opening integrated pod (FOUP).   The system of claim 30, wherein the material unit comprises at least one manufactured part.   The elevated hoist conveyance subsystem further comprises a moving stage coupled to the hoist, the moving stage having a structure for moving the hoist from a first position in the elevated hoist conveying means to a second position adjacent to the material storage place. 32. The system of claim 30, wherein:   32. The system of claim 30, wherein the at least one material storage location includes at least one storage location disposed on a second side of the track, the second side being opposite the first side.   When the hoist is placed in the material storage location on the second side of the track, the hoist moves from the first position in the elevated hoist transport means to a third position adjacent to the material storage location on the second side of the track. 50. The system of claim 49, wherein:   The system further comprises a conveyor subsystem structured to move the material unit, wherein the hoist further moves from a first position in the elevated hoist transport means to a third position adjacent to the conveyor subsystem. 31. The system of claim 30, wherein the system allows the hoist to pick up material units from the conveyor subsystem or to place material units on the conveyor subsystem.   52. The system of claim 51, wherein the conveyor subsystem comprises at least one rail and the conveyor subsystem is configured to transport material units along the rail. A method of operating an automatic material handling system characterized by comprising the following steps;
Constructing at least one elevated hoist transport subsystem including a track, an elevated hoist and a transport means for moving the hoist along the track;
Constructing at least one material storage location for storing at least one material unit, the material storage location being located on the first side of the track;
When the hoist is located on the side of the material storage location, the material storage location is moved from a first position on the first side of the track to a second position adjacent to the hoist; To place the material unit in the storage location.   54. The method of claim 53, wherein the at least one material storage location comprises a plurality of storage locations arranged substantially parallel on the side of the track.   54. The method of claim 53, wherein the at least one material storage location comprises a plurality of storage locations arranged in multiple rows substantially parallel on the side of the track.   56. The method of claim 55, wherein the plurality of storage locations are arranged in an array of a plurality of columns and a plurality of rows.   When the hoist is arranged in the first storage location in the uppermost row, the moving process moves the at least one storage location in the same row as the first storage location from the third position on the first side of the track to the substantial position of the hoist. 57. The method of claim 56, further comprising: moving to a fourth position directly below.   58. The method of claim 57, further comprising moving the hoist near the storage location at the fourth position.   At least one material storage location comprising a first plurality of storage locations arranged in a first side row of tracks and a second plurality of storage locations arranged in a second side row of tracks; 54. The method of claim 53, wherein the second side of the is opposite the first side of the trajectory.   Moving the storage location from a third position on the second side of the track to a second position adjacent to the hoist when the hoist is disposed on one storage location side of the second plurality of storage locations; 60. The method of claim 59, further comprising:   60. The method of claim 59, wherein the first plurality of storage locations is suspended on the first side of the track and the second plurality of storage locations is suspended on the second side of the track.   62. The method of claim 61, wherein the first and second plurality of storage locations are suspended from the track.   62. The method of claim 61, wherein the first and second plurality of storage locations are suspended from the ceiling.   At least one material storage location is a first plurality of storage locations arranged in a multiplex row on the first side of the track and a second plurality of storage locations arranged in a multiplex row on the second side of the track. 54. The method of claim 53, wherein the second side of the trajectory is opposite the first side of the trajectory.   65. The method of claim 64, wherein the first and second plurality of storage locations are each arranged in an array, each including a plurality of columns and a plurality of rows.   When the hoist is arranged on the first storage location side of the uppermost row on the second side of the track, at least one storage location in the same row as the first storage location is positioned at the third position on the first side of the track. 66. The method of claim 65, wherein the method is moved to a fourth position substantially immediately below the hoist.   68. The method of claim 66, comprising moving the hoist near the storage location at the fourth position.   65. The method of claim 64, wherein the first plurality of storage locations are suspended on the first side of the track and the second plurality of storage locations are suspended on the second side of the track.   69. The method of claim 68, wherein the first and second plurality of storage locations are suspended from a track.   69. The method of claim 68, wherein the first and second plurality of storage locations are suspended from the ceiling.   54. The method of claim 53, wherein at least one storage location is suspended on the first side of the track.   72. The method of claim 71, wherein at least one material storage location is suspended from the track.   72. The method of claim 71, wherein the at least one material storage location is suspended from the ceiling.   54. The method of claim 53, wherein the material storage location is a moving shelf.   54. The method of claim 53, wherein the material unit is a front-opening integrated pod (FOUP).   54. The method of claim 53, wherein the material unit is at least one manufactured part. A method of operating an automatic material handling system comprising the following steps;
Constructing at least one elevated hoist transport subsystem including a track, an elevated hoist and a transport means for moving the hoist along the track;
Constructing at least one material storage location for storing at least one material unit, the material storage location being located on the first side of the track;
When the hoist is located on the side of the material storage location, the hoist is moved from a first position in the overhead hoist transport means to a second position adjacent to the material storage location; and the material unit is picked up from the storage location or by the hoist Place the material unit in the storage location.   78. The method of claim 77, wherein the at least one material storage location comprises a plurality of storage locations arranged in a substantially parallel row on the side of the track.   78. The method of claim 77, wherein the at least one storage location comprises a plurality of storage locations arranged in a substantially parallel row on the track side.   80. The method of claim 79, wherein the plurality of storage locations are arranged in an array of a plurality of columns and a plurality of rows.   The at least one storage location comprises a first plurality of storage locations arranged in a row on the first side of the track and a second plurality of storage locations arranged in a row on the second side of the track. 78. The method of claim 77, wherein the second side of the trajectory is opposite the first side of the trajectory.   82. The method of claim 81, wherein the first plurality of storage locations is suspended on a first side of the track and the second plurality of storage locations is suspended on a second side of the track.   The method of claim 82, wherein the first and second plurality of storage locations are suspended from a track.   83. The method of claim 82, wherein the first and second plurality of storage locations are suspended from the ceiling.   The at least one material storage location includes a first plurality of storage locations disposed in the multiple rows on the first side of the track, and a second plurality of storage locations disposed in the multiple rows on the second side of the track. 78. The method of claim 77, wherein the second side of the trajectory is opposite the first side of the trajectory.   86. The method of claim 85, wherein the first and second plurality of storage locations are each arranged in an array, each array comprising a plurality of columns and a plurality of rows.   86. The method of claim 85, wherein the first plurality of storage locations are suspended on a first side of the track and the second plurality of storage locations are suspended on a second side of the track.   88. The method of claim 87, wherein the first and second plurality of storage locations are even suspended from the track.   88. The method of claim 87, wherein the first and second plurality of storage locations are suspended from the ceiling.   78. The method of claim 77, wherein the at least one material storage location is suspended on the first side of the track.   The method of claim 90, wherein at least one material storage location is suspended from a track.   The method of claim 90, wherein the at least one material storage location is suspended from the ceiling.   78. The method of claim 77, wherein the material unit is a front opening integral pod.   78. The method of claim 77, wherein the material unit is at least one manufactured part.   78. The moving step includes moving the hoist from a first position in the elevated hoist transport means to a second position adjacent to the material storage location by a moving stage coupled to the hoist. Method.   78. The method of claim 77, wherein the at least one material storage location includes at least one material storage location disposed on the second side of the track.   When the hoist is placed beside the material storage location on the second side of the track, the hoist is moved from the first position in the overhead hoist transport means to a third position adjacent to the material storage location on the second side of the track. 99. The method of claim 96, wherein: Automatic material handling system consisting of:
A plurality of material storage locations, each material storage location comprising a fixed shelf structured to store at least one material unit, wherein the fixed shelves are arranged in a plurality of spaced rows, each row having one or more rows An elevated hoist transport subsystem that includes first and second hoist transport mechanisms operatively coupled to the overhead hoist and the hoist, wherein the hoist is from a selected shelf included in a selected row of shelves. A structure that reaches at least one material unit; and wherein the first transport mechanism is configured to move the hoist from a first position along an axis arranged adjacent to the selected row and substantially parallel. 2 to move to position 2, and
Here, the second transport mechanism is a structure that moves the hoist along the second axis arranged substantially perpendicular to the first axis,
Thus, the hoist is given a position where the material can be reached directly from the selected shelf.   When the second hoist transport mechanism transports the hoist from the first or second position to the third position, there is at least one space between the selected row and at least one row adjacent to the selected row. 99. The system of claim 98, wherein the system is sufficient to accommodate at least a portion of the first hoist transport mechanism.   The first hoist transport mechanism includes first and second elongated hoist suspension elements, the first and second hoist suspension elements are arranged substantially parallel to the first axis, and the first transport mechanism is The hoist is supported when the hoist is transported from the first position to the second position. Here, the second hoist transport mechanism is hoisted from the first or second position to the third position. The respective spaces on the side with respect to the selected row are configured to allow the first and second hoist suspension elements to straddle the selected row. 99. The system according to 99.   100. The system of claim 99, wherein the second hoist transport mechanism is selected from the group consisting of a Y-table, an air mechanism, a stepper mechanism, and a servo mechanism.   99. The system of claim 98, wherein the elevated hoist transport subsystem further comprises at least one track and a medium for transporting the hoist structured to move to a plurality of locations on the track.   The selected row includes a plurality of shelves, the elevated hoist transport means is located at a predetermined position on the track, and the hoist is a position reaching each material unit from each shelf in the selected row of shelves. 105. The system of claim 102, wherein the system is possible.   105. The system of claim 102, wherein at least a portion of the trajectory is positioned substantially on and against one side of the selected row.   105. The elevated hoist transport subsystem includes a plurality of media for transporting each elevated hoist, and each one of the plurality of media is structured to move on a common track. System.   105. The system of claim 102, wherein the elevated hoist transport subsystem includes a plurality of media for transporting each elevated hoist, and each one of the plurality of media is configured to move on a respective track.   99. The system of claim 98, wherein the hoist includes a gripper portion configured to grip at least one material unit.   108. The system of claim 107, wherein the gripper grips two material units simultaneously.   109. The system of claim 108, wherein the gripper can rotate the two material units so that the first material unit can be exchanged for the second material unit.   A plurality of material storage locations comprises an array of fixed shelves arranged in columns and rows, each row having a first plurality of shelves spaced along a first axis, each column having a first 99. The system of claim 98, comprising a second plurality of shelves spaced along three axes, wherein the third axis is orthogonal to the first and second axes. .   99. The system of claim 98, wherein the shelf is substantially planar and fixed along a single direction substantially perpendicular to the at least one support member.   112. The system of claim 111, wherein the elevated hoist transport subsystem further includes at least one track for use in hoist transport, and the support member is suspended from the track. A method of operating an automatic material handling system, the system comprising a plurality of material storage locations and an elevated hoist transport subsystem, each storage location comprising a fixed shelf for storing at least one unit of material, wherein the shelf comprises a plurality of storage locations. Arranged in spaced rows, each row having one or more shelves, and the overhead hoist transport subsystem reaches at least one material unit from the selected shelves included in the selected row of shelves The method comprises the following steps:
The hoist is transported from a first position to a second position by a first hoist transport mechanism included in the elevated hoist transport subsystem along a first axis substantially parallel to a selected row of shelves And
A second hoist transport mechanism included in the elevated hoist transport subsystem along a second axis arranged substantially perpendicular to the first axis from the first or second position to the third position; Convey and thus place the hoist in a position to reach the material unit from the selected shelf; and obtain the material unit directly from the shelf selected by the hoist.   In the second transport stage, when the hoist is transported from the first or second position to the third position by the second hoist transport mechanism, between the selected row and at least one adjacent to the selected row. 114. The method of claim 113, comprising disposing at least one first hoist transport mechanism portion within the at least one space.   A first hoist transport mechanism including first and second extended hoist suspension elements, the first and second hoist suspension elements being disposed substantially parallel to the first axis; Includes transporting the hoist by the first and second extended hoist suspension elements when transporting the hoist from the first position to the second position by the first transport mechanism, wherein the second transport process comprises: , Disposing first and second elongated hoist suspension elements in respective spaces on opposite sides of the selected row, thereby moving the hoist from the first or second position to the third position. 115. A method according to claim 114, wherein the method traverses selected rows when transported by the second hoist transport mechanism.     114. The elevated hoist conveyance subsystem further includes at least one track and a medium for hoist conveyance, and further includes the step of conveying to at least one position by an elevated hoist conveyance means. the method of.   The selected row includes a plurality of shelves, the transporting process includes transporting to a predetermined position on the track by an elevated hoist transporting means, and the hoist is further moved to the shelf by the first and second hoist transporting mechanisms. 117. The method of claim 116, comprising the step of locating each material unit from one or more shelves in a selected row.   The elevated hoist conveyance subsystem includes a plurality of media for conveying each elevated hoist, and the conveying step includes conveying to a plurality of respective positions on a common track by a plurality of elevated hoist conveying means. 117. A method according to claim 116, characterized in that   The elevated hoist conveyance subsystem includes a plurality of media for conveying each elevated hoist, and the conveying step includes a step of conveying to a plurality of positions on each track by a plurality of elevated hoist conveying means. 117. The method of claim 116.   114. The method according to claim 113, wherein the reaching step includes holding at least one material unit with a gripper included in the hoist.   114. The method of claim 113, wherein the shelf is secured in a substantially planar manner along a single direction substantially perpendicular to the at least one support member.   The elevated hoist transport subsystem further includes at least one track and a hoist transport medium, and further includes the step of transporting the track over the track to at least one position by the elevated hoist transport means, wherein the support member is suspended from the track. 122. The method of claim 121, wherein: A method for controlling an automated material handling system comprising the following steps:
Directing the conveying device containing at least one material unit at the controller to the process tool;
When the process tool is not used to receive the material unit, the storage unit associated with the process tool determines whether the material unit can be stored by the controller;
If the storage unit linked to the process tool can store the material unit, the controller assigns the material unit to the tool storage unit;
When the storage unit linked to the process tool cannot store the material unit, the controller determines whether the storage unit linked to the process tool group can store the material unit;
When the storage unit linked to the process tool group can store the material unit, the material unit is assigned to the storage unit of the tool group by the controller;
If the storage unit linked to the process tool group cannot store the material unit, the material unit is assigned to the storage unit in the semiconductor bay by the controller; and the arrangement and correction of the material unit in the automatic material transfer system are assigned by the controller. .

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