WO2023218757A1

WO2023218757A1 - Overhead conveying vehicle

Info

Publication number: WO2023218757A1
Application number: PCT/JP2023/010434
Authority: WO
Inventors: 誠小林
Original assignee: 村田機械株式会社
Priority date: 2022-05-10
Filing date: 2023-03-16
Publication date: 2023-11-16

Abstract

This overhead conveying vehicle comprises a slide mechanism that causes a unit including an article-retaining part for retaining an article to slide along a first direction orthogonal to a travel direction. The slide mechanism has a slide part that moves along the first direction relative to a conveying vehicle body, a guide block that is provided between the conveying vehicle body and the slide part and is capable of sliding along the first direction relative to the conveying vehicle body and the slide part, and a guide-block-retaining part that retains the position of the guide block such that the positional relationship between the guide block and at least one of the conveying vehicle body and the slide part is maintained while the slide part moves.

Description

ceiling transport vehicle

One aspect of the present invention relates to an overhead transport vehicle.

For example, Patent Document 1 describes an overhead transport vehicle that includes an elevator drive section (unit) that raises and lowers an elevator platform, and a lateral movement section (slide mechanism) that moves the elevator drive section laterally. There is.

Japanese Patent Application Publication No. 2007-331906

In the ceiling transport vehicle described above, when the unit is slid by the slide mechanism, the slide portion may be moved relative to the transport vehicle main body while being guided by a guide block. In such an overhead conveyance vehicle, the sliding unit tilts depending on the amount of protrusion from the conveyance vehicle body. Further, the position of the guide block (the supporting state of the unit) at that time is not fixed, and as a result, there is a possibility that the angle at which the unit tilts changes each time the unit slides.

Therefore, one aspect of the present invention aims to provide an overhead transport vehicle that can suppress an angle change in which a unit slid by a slide mechanism is tilted more than expected.

An overhead transport vehicle according to one aspect of the present invention includes a slide mechanism that slides a unit including an article holding section that holds an article along a first direction perpendicular to a traveling direction, and the slide mechanism is attached to the transport vehicle main body. a slide portion that moves along the first direction; and a guide block that is provided between the carrier body and the slide portion and is slidable in the first direction with respect to the carrier body and the slide portion, respectively. and a guide block holding part that holds the position of the guide block so that the positional relationship between the guide block and either the conveyor body or the slide part is maintained when the slide part moves.

As a result of extensive studies, the inventor found that when the unit is slid by the slide mechanism in an overhead transport vehicle, if the guide block can move freely in the first direction (the position in the first direction is uncertain), the guide block It has been found that depending on the position in the first direction, the slide part tilts more than expected, and the tilt angle changes. Therefore, in one aspect of the present invention, when the sliding portion is moved, the positional relationship (hereinafter also simply referred to as “positional relationship”) between the guide block and either the carrier main body or the sliding portion is determined by holding the guide block. Maintained by the department. This makes it possible to prevent the slide portion from tilting more than expected. In other words, it is possible to suppress an angle change in which the unit slid by the slide mechanism is tilted more than expected.

In the ceiling transport vehicle according to one aspect of the present invention, the guide block holding portion is provided on the guide block and includes a first magnetic member including a magnet or a magnetic material, and a first magnetic member provided on at least one of the transport vehicle main body and the slide portion. A second magnetic member including a magnet or a magnetic substance attracted to the first magnetic member may be included. In this case, by using the first magnetic member and the second magnetic member as a guide block holding section, it is possible to suppress an angle change in which the unit slid by the sliding mechanism is tilted more than expected.

In the ceiling transport vehicle according to one aspect of the present invention, the first magnetic member may be attracted to the second magnetic member through the gap or the protective member while maintaining the position of the guide block. In this case, since the first magnetic member and the second magnetic member do not come into direct contact with each other, it is possible to suppress their damage.

In the ceiling transport vehicle according to one aspect of the present invention, a plurality of guide blocks are provided, and the guide block holding section moves at least one of the plurality of guide blocks in a direction away from another guide block adjacent to the guide block. It may be energized. Thereby, when a plurality of guide blocks are provided, it is possible to effectively maintain the positional relationship of at least one of the plurality of guide blocks.

In the ceiling guided vehicle according to one aspect of the present invention, the guide block includes a first guide block and a second guide block, and the guide block holding portion is configured to support at least one of the guided vehicle body and the sliding portion in the first direction. The position of the first guide block may be maintained at one end, and the position of the second guide block may be maintained at the other end of at least one of the carrier body and the slide portion in the first direction. In this case, the distance between the first guide block and the second guide block can be widened as much as possible. Therefore, it is possible to suppress the inclination of the sliding portion and the inclination of the slid unit.

In the ceiling transport vehicle according to one aspect of the present invention, the slide mechanism is provided with another slide part that moves along the first direction with respect to the slide part, and between the slide part and the other slide part, and the slide mechanism and another guide block that is slidable along the first direction with respect to each of the sliding part and the other sliding part, and when the other sliding part moves, the sliding part and the other sliding part are connected to each other. In order to maintain the positional relationship with the guide block, it may have another guide block holding part that holds the position of the other guide block. In this case, it becomes possible to easily increase the sliding amount (stroke) of the sliding mechanism.

In the ceiling transport vehicle according to one aspect of the present invention, the slide mechanism may slide the unit to both one side and the other side in the first direction. In such a configuration, the position of the guide block in the first direction is often unstable, so the effect of maintaining the positional relationship with the guide block holding part and suppressing changes in the angle of inclination of the sliding part more than expected is significant. become.

According to one aspect of the present invention, it is possible to provide an overhead transport vehicle that can suppress an angle change in which a unit slid by a slide mechanism is tilted more than expected.

FIG. 1 is a side view showing an overhead transport vehicle according to an embodiment. FIG. 2 is an enlarged front view showing the lateral unit of FIG. 1. FIG. FIG. 3(a) is a schematic cross-sectional view showing the upper guide block of FIG. 2. FIG. FIG. 3(b) is a schematic sectional view showing the lower guide block of FIG. 2. FIG. FIG. 4 is a front view showing the lateral unit of FIG. 2 when sliding. FIG. 5 is a front view showing the lateral unit according to the modified example when sliding.

Hereinafter, one embodiment will be described in detail with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description will be omitted. The words "upper" and "lower" correspond to the vertical direction.

As shown in FIG. 1, the ceiling transport vehicle 1 of the embodiment travels along a track 20 laid near the ceiling of a clean room where semiconductor devices are manufactured. The track 20 forms a travel path for the overhead transport vehicle 1. The overhead transport vehicle 1 transports a FOUP (Front Opening Unified Pod) (article) 200 containing a plurality of semiconductor wafers, and transports the FOUP 200 to a load port 300 or the like provided in a processing device that performs various processes on semiconductor wafers. Perform the transfer.

The ceiling transport vehicle 1 includes a frame unit 2, a traveling unit 3, a lateral unit (slide mechanism) 4, a theta unit 5, an elevating drive unit 6, a holding unit (article holding section) 7, and a transport vehicle controller 8. and. The frame unit 2 includes a center frame (vehicle main body) 15, a front frame 16, and a rear frame 17. The front frame 16 extends downward from the front end of the center frame 15 (the front side in the traveling direction of the ceiling transport vehicle 1). The rear frame 17 extends downward from the rear end of the center frame 15 (the rear side in the traveling direction of the ceiling transport vehicle 1).

The traveling unit 3 is arranged above the center frame 15. For example, the traveling unit 3 travels along the track 20 by receiving power from a high-frequency current line laid along the track 20 in a non-contact manner. The lateral unit 4 is arranged below the center frame 15. The lateral unit 4 slides the theta unit 5, the lifting drive unit 6, and the holding unit 7 laterally with respect to the center frame 15.

Note that the theta unit 5, the elevation drive unit 6, and the holding unit 7 are also simply referred to as a unit 9. The lateral direction in which the lateral unit 4 slides the unit 9 (the first direction, the lateral direction, and the lateral direction perpendicular to the traveling direction of the ceiling transport vehicle 1) is also simply referred to as the lateral direction. The lateral unit 4 moves the unit 9 to both one side and the other side in the lateral direction (left direction and right direction in the figure) by the driving force of a drive mechanism (not shown, such as a drive motor, pulley, belt, etc.). Slide it.

The theta unit 5 is arranged below the lateral unit 4. Theta unit 5 rotates the elevation drive unit 6 and the holding unit 7 in a horizontal plane. The elevating drive unit 6 is arranged below the theta unit 5. The lifting drive unit 6 moves the holding unit 7 up and down by feeding out and winding up a plurality of belts B connected to the holding unit 7. The holding unit 7 is arranged below the lifting drive unit 6. The holding unit 7 is provided so as to be movable up and down by the up/down drive unit 6. The holding unit 7 has a pair of grippers 12 that can be opened and closed in the horizontal direction. The holding unit 7 holds the flange 201 of the FOUP 200 using a pair of grippers 12 .

The conveyance vehicle controller 8 is arranged on the center frame 15. The conveyance vehicle controller 8 is an electronic control unit composed of a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The carrier controller 8 controls each part of the ceiling carrier 1 . The carrier controller 8 may be composed of a plurality of electronic control units. Moreover, the carrier controller 8 may be arranged on the front frame 16 or the like.

The ceiling transport vehicle 1 configured as described above operates as follows, as an example. When transferring the FOUP 200 from the load port 300 to the overhead carrier 1, the ceiling carrier 1 that does not hold the FOUP 200 stops at a predetermined position above the load port 300. If the position of the holding unit 7 to be lowered at the stop position deviates from the predetermined position with respect to the load port 300 (FOUP 200 placed on the load port 300), the holding unit 7 is lowered by driving the lateral unit 4 and theta unit 5. Adjust the horizontal position and horizontal angle of 7. Subsequently, the lifting drive unit 6 lowers the holding unit 7, and the holding unit 7 holds the flange 201 of the FOUP 200 placed on the load port 300. Subsequently, the lifting drive unit 6 raises the holding unit 7 to the rising end, and the FOUP 200 is placed between the front frame 16 and the rear frame 17. Subsequently, the ceiling transport vehicle 1 holding the FOUP 200 starts traveling.

On the other hand, when transferring the FOUP 200 from the overhead carrier 1 to the load port 300, the ceiling carrier 1 holding the FOUP 200 stops at a predetermined position above the load port 300. If the position of the holding unit 7 (FOUP 200) that is lowered at the stop position deviates from the predetermined position with respect to the load port 300, the horizontal position and horizontal angle of the holding unit are adjusted by driving the lateral unit 4 and theta unit 5. do. Subsequently, the lifting drive unit 6 lowers the holding unit 7 to place the FOUP 200 on the load port 300, and the holding unit 7 releases the holding of the flange 201 of the FOUP 200. Subsequently, the lifting drive unit 6 raises the holding unit 7 to the rising end. Subsequently, the ceiling transport vehicle 1 that does not hold the FOUP 200 starts traveling.

Next, the configuration of the lateral unit 4 will be explained.

As shown in FIG. 2, the lateral unit 4 includes an upper slide section (slide section) 41, an upper guide block (guide block) 42, a lower slide section (other slide section) 43, and a lower guide block (other guide block). ) 44, an upper guide block holding part (guide block holding part) 45, and a lower guide block holding part (another guide block holding part) 48.

[Upper slide section]
As shown in FIGS. 2 and 3(a), the upper slide portion 41 moves laterally with respect to the center frame 15. As shown in FIGS. The upper slide portion 41 is configured to be movable to both one side and the other side in the lateral direction below the center frame 15.

[Upper guide block]
The upper guide block 42 is provided between the center frame 15 and the upper slide portion 41. The upper guide block 42 is slidable along the lateral direction relative to the center frame 15 and the upper slide portion 41, respectively. The upper guide block 42 is, for example, a linear motion guide (LM guide) block.

An upper groove 42a that opens upward is formed in the upper part of the upper guide block 42. A first upper rail portion 15a provided at the lower part of the center frame 15 so as to protrude downward is slidably engaged with the upper groove 42a along the lateral direction. The upper groove 42a and the first upper rail portion 15a extend in the lateral direction. A lower groove 42b that opens downward is formed in the lower part of the upper guide block 42. A second upper rail part 41a provided at the upper part of the upper slide part 41 so as to protrude upward is slidably engaged with the lower groove 42b along the lateral direction. The lower groove 42b and the second upper rail portion 41a extend in the lateral direction.

A plurality of upper guide blocks 42 are provided. Here, the upper guide block 42 includes a first upper guide block (first guide block) 42X and a second upper guide block (second guide block) 42Y. The upper guide block 42 as described above guides the movement of the upper slide portion 41 in the lateral direction. The upper guide block 42 restricts the movement of the upper slide portion 41 in the traveling direction of the ceiling transport vehicle 1 . The upper guide block 42 connects the center frame 15 and the upper slide portion 41 in the vertical direction. The upper guide block 42 is not fixed in the lateral direction and is freely movable in the lateral direction (the lateral position is undefined).

[Lower slide section]
As shown in FIGS. 2 and 3(b), the lower slide section 43 moves laterally with respect to the upper slide section 41. The lower slide section 43 is configured to be movable to both one side and the other side in the lateral direction below the upper slide section 41 . The theta unit 5 is connected to the lower slide portion 43.

[Lower guide block]
The lower guide block 44 is provided between the upper slide section 41 and the lower slide section 43. The lower guide block 44 is slidable along the lateral direction with respect to each of the upper slide section 41 and the lower slide section 43. The lower guide block 44 is, for example, a linear motion guide (LM guide) block.

An upper groove 44a that opens upward is formed in the upper part of the lower guide block 44. A first lower rail part 41b provided at the lower part of the upper slide part 41 so as to protrude downward is slidably engaged with the upper groove 44a along the lateral direction. The upper groove 44a and the first lower rail portion 41b extend in the lateral direction. A lower groove 44b that opens downward is formed in the lower part of the lower guide block 44. A second lower rail part 43a provided at the upper part of the lower slide part 43 so as to protrude upward is slidably engaged with the lower groove 44b along the lateral direction. The lower groove 44b and the second lower rail portion 43a extend in the lateral direction.

A plurality of lower guide blocks 44 are provided. Here, the lower guide block 44 includes a first lower guide block 44X and a second lower guide block 44Y. The lower guide block 44 as described above guides the movement of the lower slide portion 43 in the lateral direction. The lower guide block 44 restricts the movement of the lower slide portion 43 in the traveling direction of the ceiling transport vehicle 1 . The lower guide block 44 connects the upper slide section 41 and the lower slide section 43 in the vertical direction. The lower guide block 44 is not fixed in the lateral direction and is freely movable in the lateral direction (the lateral position is undefined).

[Upper guide block holding part]
The upper guide block holding part 45 holds the upper guide block 42 so that the positional relationship between the center frame 15 and the upper slide part 41 and the upper guide block 42 is maintained when the upper slide part 41 moves. Hold position. The upper guide block holding section 45 urges the first upper guide block 42X and the second upper guide block 42Y in a direction in which they move away from each other. The upper guide block holding section 45 holds the position of the first upper guide block 42X at one end side of the center frame 15 and the upper slide section 41 in the lateral direction, and holds the position of the first upper guide block 42X at one end side of the center frame 15 and the upper slide section 41 in the lateral direction. The position of the second upper stage guide block 42Y is maintained at the end side.

The upper guide block holding section 45 maintains the position of the upper guide block 42 using magnetic force that attracts each other (in other words, attractive force or attractive force due to magnetic force). The upper guide block holding section 45 includes first

magnetic members

46X and 46Y that include magnets or magnetic bodies, and second magnetic members 47A to 47D that include magnets or magnetic bodies that are attracted to the first

magnetic members

46X and 46Y. . The first magnetic member 46X is provided on the outer side of the first upper guide block 42X in the lateral direction (on the opposite side to the second upper guide block 42Y side). The first magnetic member 46Y is provided on the outer side of the second upper guide block 42Y in the lateral direction (on the side opposite to the first upper guide block 42X side).

The second magnetic member 47A is fixed to the center frame 15 via a stopper 61A. The stopper 61A is provided at the lower part of the center frame 15 on the outside of the first upper rail portion 15a in the lateral direction. The stopper 61A is arranged at one end of the center frame 15 in the lateral direction. The stopper 61A prevents the first upper guide block 42X from falling off from the first upper rail portion 15a by coming into contact with the first upper guide block 42X.

The second magnetic member 47A is fixed to the lower surface of the stopper 61A. The second magnetic member 47A is disposed outwardly in the lateral direction from the stopper 61A. In other words, the inner surface in the lateral direction of the second magnetic member 47A is located on the outer side in the lateral direction than the inner surface in the lateral direction of the stopper 61A. Thereby, when the first upper guide block 42X hits the stopper 61A, a gap is formed between the second magnetic member 47A and the first upper guide block 42X, and direct contact between them is prevented. . As a result, the first magnetic member 46X is magnetically attracted to the second magnetic member 47A through the gap while maintaining the position of the first upper guide block 42X.

The second magnetic member 47B is fixed to the upper slide portion 41 via a stopper 61B. The stopper 61B is provided on the upper side of the upper slide portion 41 and on the outer side of the second upper rail portion 41a in the lateral direction. The stopper 61B is arranged at one end of the upper slide portion 41 in the lateral direction. The stopper 61B prevents the first upper guide block 42X from falling off from the second upper rail portion 41a by coming into contact with the first upper guide block 42X.

The second magnetic member 47B is fixed to the top surface of the stopper 61B. The second magnetic member 47B is disposed outwardly in the lateral direction from the stopper 61B. In other words, the inner surface in the lateral direction of the second magnetic member 47B is located on the outer side in the lateral direction than the inner surface in the lateral direction of the stopper 61B. Thereby, when the first upper guide block 42X hits the stopper 61B, a gap is formed between the second magnetic member 47B and the first upper guide block 42X, and direct contact between them is prevented. . As a result, the first magnetic member 46X is magnetically attracted to the second magnetic member 47B through the gap while maintaining the position of the first upper guide block 42X.

The second magnetic member 47C is fixed to the center frame 15 via a stopper 61C. The stopper 61C is provided at the lower part of the center frame 15 on the outside of the first upper rail portion 15a in the lateral direction. The stopper 61C is arranged at the other end of the center frame 15 in the lateral direction. The stopper 61C prevents the second upper guide block 42Y from falling off from the first upper rail portion 15a by coming into contact with the second upper guide block 42Y.

The second magnetic member 47C is fixed to the lower surface of the stopper 61C. The second magnetic member 47C is disposed outwardly in the lateral direction from the stopper 61C. In other words, the inner surface in the lateral direction of the second magnetic member 47C is located on the outer side in the lateral direction than the inner surface in the lateral direction of the stopper 61C. As a result, when the second upper guide block 42Y hits the stopper 61C, a gap is formed between the second magnetic member 47C and the second upper guide block 42Y, and direct contact between them is prevented. . As a result, the first magnetic member 46Y is magnetically attracted to the second magnetic member 47C through the gap while maintaining the position of the second upper guide block 42Y.

The second magnetic member 47D is fixed to the upper slide portion 41 via a stopper 61D. The stopper 61D is provided at the upper part of the upper slide section 41 on the outside of the second upper rail section 41a in the lateral direction. The stopper 61D is arranged at the other end of the upper slide portion 41 in the lateral direction. The stopper 61D prevents the second upper guide block 42Y from falling off from the second upper rail portion 41a by coming into contact with the second upper guide block 42Y.

The second magnetic member 47D is fixed to the top surface of the stopper 61D. The second magnetic member 47D is disposed outwardly in the lateral direction from the stopper 61D. In other words, the inner surface in the lateral direction of the second magnetic member 47D is located on the outer side in the lateral direction than the inner surface in the lateral direction of the stopper 61D. Thereby, when the second upper guide block 42Y hits the stopper 61D, a gap is formed between the second magnetic member 47D and the second upper guide block 42Y, and direct contact between them is prevented. . As a result, the first magnetic member 46Y is magnetically attracted to the second magnetic member 47D through the gap while maintaining the position of the second upper guide block 42Y.

[Lower guide block holding part]
The lower guide block holding section 48 holds the lower guide block 44 so that the positional relationship between either the upper slide section 41 or the lower slide section 43 and the lower guide block 44 is maintained when the lower slide section 43 moves. hold the position. The lower guide block holding section 48 urges the first lower guide block 44X and the second lower guide block 44Y in a direction in which they move away from each other. The lower guide block holding section 48 holds the position of the first lower guide block 44X at one end side of the upper slide section 41 and the lower slide section 43 in the lateral direction, and holds the position of the first lower guide block 44X at one end side of the upper slide section 41 and the lower slide section 43 in the lateral direction. The position of the second lower guide block 44Y is held at the other end.

The lower guide block holding section 48 holds the position of the lower guide block 44 by using magnetic force that attracts each other. The lower guide block holding section 48 includes first

magnetic members

49X, 49Y that include magnets or magnetic bodies, and second magnetic members 50A to 50D that include magnets or magnetic bodies that are attracted to the first

magnetic members

49X, 49Y. . The first magnetic member 49X is provided on the outer side of the first lower guide block 44X in the lateral direction (on the opposite side to the second lower guide block 44Y side). The first magnetic member 49Y is provided on the outer side of the second lower guide block 44Y in the lateral direction (on the side opposite to the first lower guide block 44X side).

The second magnetic member 50A is fixed to the upper slide portion 41 via a stopper 62A. The stopper 62A is provided at the lower part of the upper slide section 41 on the outside of the first lower rail section 41b in the lateral direction. The stopper 62A is arranged at one end of the upper slide portion 41 in the lateral direction. The stopper 62A prevents the first lower guide block 44X from falling off from the first lower rail portion 41b by coming into contact with the first lower guide block 44X. The second magnetic member 50A is fixed to the lower surface of the stopper 62A. The second magnetic member 50A is disposed outwardly in the lateral direction from the stopper 62A. In other words, the inner surface of the second magnetic member 50A in the lateral direction is located on the outer side in the lateral direction than the inner surface of the stopper 62A in the lateral direction. As a result, when the first lower guide block 44X hits the stopper 62A, a gap is formed between the second magnetic member 50A and the first lower guide block 44X, preventing direct contact between them. . As a result, the first magnetic member 49X is magnetically attracted to the second magnetic member 50A through the gap while maintaining the position of the first lower guide block 44X.

The second magnetic member 50B is fixed to the lower slide portion 43 via a stopper 62B. The stopper 62B is provided on the upper side of the lower slide section 43 and on the outer side of the second upper rail section 43b in the lateral direction. The stopper 62B is arranged at one end of the lower slide portion 43 in the lateral direction. The stopper 62B prevents the first lower guide block 44X from falling off from the second lower rail portion 43a by coming into contact with the first lower guide block 44X. The second magnetic member 50B is fixed to the top surface of the stopper 62B. The second magnetic member 50B is disposed outwardly in the lateral direction from the stopper 62B. In other words, the inner surface in the lateral direction of the second magnetic member 50B is located on the outer side in the lateral direction than the inner surface in the lateral direction of the stopper 62B. Thereby, when the first lower guide block 44X hits the stopper 62B, a gap is formed between the second magnetic member 50B and the first lower guide block 44X, and direct contact between them is prevented. . As a result, the first magnetic member 49X is magnetically attracted to the second magnetic member 50B through the gap while maintaining the position of the first lower guide block 44X.

The second magnetic member 50C is fixed to the upper slide portion 41 via a stopper 62C. The stopper 62C is provided at the lower part of the upper slide section 41 and on the outer side of the first lower rail section 41b in the lateral direction. The stopper 62C is arranged at the other end of the upper slide portion 41 in the lateral direction. The stopper 62C prevents the second lower guide block 44Y from falling off from the first lower rail portion 41b by coming into contact with the second lower guide block 44Y. The second magnetic member 50C is fixed to the lower surface of the stopper 62C. The second magnetic member 50C is disposed outwardly in the lateral direction from the stopper 62C. In other words, the inner surface in the lateral direction of the second magnetic member 50C is located on the outer side in the lateral direction than the inner surface in the lateral direction of the stopper 62C. As a result, when the second lower guide block 44Y hits the stopper 62C, a gap is formed between the second magnetic member 50C and the second lower guide block 44Y, preventing direct contact between them. . As a result, the first magnetic member 49Y is magnetically attracted to the second magnetic member 50C through the gap while maintaining the position of the second lower guide block 44Y.

The second magnetic member 50D is fixed to the lower slide portion 43 via a stopper 62D. The stopper 62D is provided on the upper side of the lower slide portion 43 and on the outer side of the second lower rail portion 43a in the lateral direction. The stopper 62D is arranged at the other end of the lower slide portion 43 in the lateral direction. The stopper 62D prevents the second lower guide block 44Y from falling off from the second lower rail portion 43a by coming into contact with the second lower guide block 44Y. The second magnetic member 50D is fixed to the top surface of the stopper 62D. The second magnetic member 50D is disposed outwardly in the lateral direction from the stopper 62D. In other words, the inner surface of the second magnetic member 47D in the lateral direction is located on the outer side in the lateral direction than the inner surface of the stopper 62D in the lateral direction. Thereby, when the second lower guide block 44Y hits the stopper 62D, a gap is formed between the second magnetic member 50D and the second lower guide block 44Y, and direct contact between them is prevented. . As a result, the first magnetic member 49Y is magnetically attracted to the second magnetic member 50D through the gap while maintaining the position of the second lower guide block 44Y.

Next, an example of the operation of the lateral unit 4 will be explained.

For example, as shown in FIG. 4, in the lateral unit 4, the upper slide portion 41 is moved to the other side in the lateral direction with respect to the center frame 15 while being guided by the upper guide block 42 due to the driving force of the drive mechanism (not shown). Slide. At the same time, the lower slide section 43 further slides to the other side in the lateral direction with respect to the upper slide section 41 while being guided by the lower guide block 44 due to the driving force of a drive mechanism (not shown).

In this case, the first upper guide block 42X slides along the first upper rail part 15a as the upper slide part 41 moves. At this time, the first upper guide block 42X remains located at one end of the upper slide portion 41 because the first magnetic member 46X is attracted by the magnetic force of the second magnetic member 47B. Further, the second upper guide block 42Y slides along the second upper rail section 41a as the upper slide section 41 moves. At this time, the second upper guide block 42Y remains located on the other end side of the center frame 15 because the first magnetic member 46Y is attracted by the magnetic force of the second magnetic member 47C.

In this case, the first lower guide block 44X slides along the first lower rail part 41b as the lower slide part 43 moves. At this time, the first lower guide block 44X remains located at one end of the lower slide portion 43 because the first magnetic member 49X is attracted by the magnetic force of the second magnetic member 50B. The second lower guide block 44Y slides along the second lower rail part 43a as the lower slide part 43 moves. At this time, the first magnetic member 49Y is attracted by the magnetic force of the second magnetic member 50C, and the second lower guide block 44Y remains located on the other end side of the upper slide portion 41.

Note that in the operation example here, a case has been described in which the upper slide section 41 and the lower slide section 43 slide to the other side in the lateral direction, but the same applies to the case where they slide to one side in the lateral direction.

As described above, in the ceiling transport vehicle 1, when the upper slide section 41 is moved, the positional relationship between the center frame 15 or the upper slide section 41 and the upper guide block 42 is maintained by the upper guide block holding section 45. There is. This makes it possible to suppress unexpected changes in the angle at which the upper slide portion 41 tilts. Similarly, when the lower slide section 43 moves, the positional relationship between either the upper slide section 41 or the lower slide section 43 and the lower guide block 44 is maintained by the lower guide block holding section 48. This makes it possible to suppress unexpected changes in the angle at which the lower slide portion 43 tilts.

Therefore, according to the ceiling transport vehicle 1, it is possible to suppress an angle change in which the unit 9 slid by the lateral unit 4 is tilted more than expected. It becomes possible to suppress variations in the inclination of the unit 9. The lateral unit 4 allows the unit 9 to slide as expected. It is possible to reduce shaking, improve transfer stability (transfer accuracy, etc.), and suppress the amount of deviation of various mounted sensors.

In the ceiling transport vehicle 1, the upper guide block holding section 45 includes first

magnetic members

46X, 46Y provided on the upper guide block 42, and second magnetic members 47A to 47D provided on the center frame 15 and the upper slide section 41. and, including. In this case, the first

magnetic members

46X, 46Y and the second magnetic members 47A to 47D are used as the upper guide block holding section 45 to suppress the angle change in which the unit 9 slid by the lateral unit 4 is tilted more than expected. becomes possible.

Similarly, in the ceiling transport vehicle 1, the lower guide block holding section 48 has first

magnetic members

49X and 49Y provided on the lower guide block 44, and second magnetic members provided on the upper slide section 41 and the lower slide section 43. members 50A to 50D. In this case, the first

magnetic members

49X, 49Y and the second magnetic members 50A to 50D are used as the lower guide block holding portion 48 to suppress an angle change in which the unit 9 slid by the lateral unit 4 is tilted more than expected. becomes possible.

In the ceiling transport vehicle 1, the first

magnetic members

46X, 46Y are attracted to the second magnetic members 47A to 47D through the gaps while maintaining the position of the upper guide block 42. The first

magnetic members

49X, 49Y are attracted to the second magnetic members 50A to 50D through the gaps while maintaining the position of the lower guide block 44. In this case, since the first

magnetic members

46X, 46Y, 49X, 49Y and the second magnetic members 47A to 47D, 50A to 50D do not come into direct contact with each other, damage to these members can be suppressed.

In the ceiling transport vehicle 1, a plurality of upper guide blocks 42 are provided (configured to be divided). The upper guide block holding section 45 urges the first upper guide block 42X and the second upper guide block 42Y in a direction away from each other. That is, at least one of the plurality of upper guide blocks 42 is urged in a direction away from other upper guide blocks 42 adjacent to the upper guide block 42 . Thereby, when a plurality of upper guide blocks 42 are provided, it is possible to effectively maintain their positional relationship.

Similarly, in the ceiling transport vehicle 1, a plurality of lower guide blocks 44 are provided (configured to be divided). The lower guide block holding portion 48 urges the first lower guide block 44X and the second lower guide block 44Y in a direction away from each other. In other words, at least one of the plurality of lower guide blocks 44 is urged in a direction away from other lower guide blocks 44 adjacent to the lower guide block 44 . Thereby, when a plurality of lower guide blocks 44 are provided, it is possible to effectively maintain their positional relationship.

In the ceiling transport vehicle 1, the upper guide block holding section 45 holds the position of the first upper guide block 42X at one end side of the center frame 15 and the upper slide section 41 in the lateral direction, and The position of the second upper guide block 42Y is maintained at the other end side of the upper slide section 41. Thereby, the distance between the first upper guide block 42X and the second upper guide block 42Y can be widened as much as possible. When the unit 9 is slid by the lateral unit 4, the first upper guide block 42X and the second upper guide block 42Y can be positioned at the most advantageous positions. Therefore, it becomes possible to suppress the inclination of the upper slide portion 41 and the inclination of the slid unit 9.

Similarly, in the ceiling transport vehicle 1, the lower guide block holding section 48 holds the position of the first lower guide block 44X at one end side of the upper slide section 41 and the lower slide section 43 in the lateral direction, and The position of the second lower guide block 44Y is maintained at the other end side of the upper slide section 41 and the lower slide section 43. Thereby, the interval between the first lower guide block 44X and the second lower guide block 44Y can be widened as much as possible. When the unit 9 is slid by the lateral unit 4, the first lower guide block 44X and the second lower guide block 44Y can be positioned at the most advantageous position. Therefore, the lower slide portion 43 can suppress inclination, and the slid unit 9 can suppress inclination.

In the ceiling transport vehicle 1, the lateral unit 4 includes a lower slide portion 43, a lower guide block 44, and a lower guide block holder 48 in addition to an upper slide portion 41, an upper guide block 42, and an upper guide block holder 45. By employing a plurality of vertical stages in this manner, it is possible to easily increase the amount of slide (stroke) of the lateral unit 4.

In the ceiling transport vehicle 1, the lateral unit 4 slides the unit 9 to both one side and the other side in the lateral direction. In such a configuration, since the positions of the upper guide block 42 and the lower guide block 44 in the lateral direction are uncertain, the positional relationship is maintained by the upper guide block holding part 45 and the lower guide block holding part 48, and the upper slide part 41 Also, the effect of suppressing changes in the angle at which the lower slide portion 43 is tilted more than expected becomes significant.

Although one embodiment has been described above, one aspect of the present invention is not limited to the above embodiment. Various changes can be made without departing from the spirit of one aspect of the invention.

In the embodiment described above, a plurality of upper guide blocks 42 are provided, including a first upper guide block 42X and a second upper guide block 42Y, but the number of upper guide blocks 42 is not limited and may be one. There may be three or more. Similarly, the number of lower guide blocks 44 is not limited either, and may be one, three or more. For example, as shown in FIG. 5, the lateral unit 104 according to the modification may include one undivided upper guide block 142 and one undivided lower guide block 144. The upper guide block 142 and the lower guide block 144 have a shape that is elongated in the lateral direction (for example, a shape in which the longitudinal dimension is twice or more the transverse dimension). In this case, as illustrated, the

stoppers

61C, 61D, 62C, 62D and the second

magnetic members

47C, 47D, 50C, 50D may not be provided.

In the above embodiments or modified examples, the first

magnetic members

46X, 46Y are attracted to the second magnetic members 47A to 47D through the gaps, but the present invention is not limited thereto. The first

magnetic members

46X, 46Y may be attracted to the second magnetic members 47A-47D, for example, via a protective member that protects the second magnetic members 47A-47D. Similarly, the first

magnetic members

49X, 49Y are attracted to the second magnetic members 50A to 50D through gaps, but the present invention is not limited thereto. The first

magnetic members

49X, 49Y may be attracted to the second magnetic members 50A to 50D, for example, via a protective member that protects the second magnetic members 50A to 50D. In this case, since the first

magnetic members

46X, 46Y, 49X, 49Y and the second magnetic members 47A to 47D, 50A to 50D do not come into direct contact with each other, damage to these members can be suppressed. The protective member is not particularly limited, and various known members may be used.

In the above embodiment or modified example, the upper guide block holding part 45 and the lower guide block holding part 48 hold the positions of the upper guide block 42 and the lower guide block 44 using magnetic force, but the present invention is not limited thereto. The upper guide block holding section 45 and the lower guide block holding section 48 may hold the positions of the upper guide block 42 and the lower guide block 44 using the elastic force of an elastic body such as a spring.

Each structure in the above embodiment or modified example is not limited to the materials and shapes described above, and various materials and shapes can be applied. Each configuration in the above embodiment or modified example can be arbitrarily applied to each configuration in other embodiments or modified examples. A part of each configuration in the above embodiment or modified example can be omitted as appropriate without departing from the gist of one aspect of the present invention.

Note that constituent elements of one embodiment of the present invention will be described below.
<Invention 1>
comprising a slide mechanism that slides a unit including an article holding section that holds the article along a first direction orthogonal to the traveling direction;
The slide mechanism is
a slide portion that moves along the first direction with respect to the carrier body;
a guide block provided between the carrier body and the slide portion and slidable along the first direction with respect to each of the carrier body and the slide portion;
a guide block holding part that holds the position of the guide block so that the positional relationship between the guide block and either the conveyor body or the slide part is maintained when the slide part moves; It has an overhead transport vehicle.
<Invention 2>
The guide block holding part is
a first magnetic member provided on the guide block and including a magnet or a magnetic body;
The overhead conveyance vehicle according to invention 1, further comprising: a second magnetic member that is provided on at least one of the conveyance vehicle body and the slide portion and includes a magnet or a magnetic body that is attracted to the first magnetic member.
<Invention 3>
The ceiling transport vehicle according to invention 2, wherein the first magnetic member is attracted to the second magnetic member through a gap or a protective member while maintaining the position of the guide block.
<Invention 4>
A plurality of guide blocks are provided,
The ceiling according to any one of inventions 1 to 3, wherein the guide block holding section urges at least one of the plurality of guide blocks in a direction away from another guide block adjacent to the guide block. Transport vehicle.
<Invention 5>
The guide block includes a first guide block and a second guide block,
The guide block holding part is
maintaining the position of the first guide block at one end side of at least one of the carrier body and the slide portion in the first direction;
The ceiling conveyance vehicle according to invention 4, wherein the position of the second guide block is maintained at the other end side of at least one of the conveyance vehicle body and the slide portion in the first direction.
<Invention 6>
The slide mechanism is
another slide part that moves along the first direction with respect to the slide part;
another guide block provided between the slide part and the other slide part and slidable along the first direction with respect to each of the slide part and the other slide part;
Maintaining the position of the other guide block so that the positional relationship between either the slide part or the other slide part and the other guide block is maintained when the other slide part moves. The ceiling conveyance vehicle according to any one of inventions 1 to 5, further comprising another guide block holding section.
<Invention 7>
The ceiling transport vehicle according to any one of inventions 1 to 6, wherein the slide mechanism slides the unit to both one side and the other side in the first direction.

DESCRIPTION OF SYMBOLS 1... Ceiling transport vehicle, 4,104... Lateral unit (slide mechanism), 7... Holding unit (article holding part), 9... Unit, 15... Center frame (transport vehicle main body), 41... Upper slide part (slide part) , 42, 142...Upper guide block (guide block), 42X...First upper guide block (first guide block), 42Y...Second upper guide block (second guide block), 43...Lower slide section (other slides) part), 44, 144...lower guide block (other guide blocks), 44X...first lower guide block, 44Y...second lower guide block, 45...upper guide block holding section (guide block holding section), 46X, 46Y , 49X, 49Y...first magnetic member, 47A, 47B, 47C, 47D, 50A, 50B, 50C, 50D...second magnetic member, 48...lower guide block holding part (other guide block holding part), 200...FOUP (Goods).

Claims

comprising a slide mechanism that slides a unit including an article holding section that holds the article along a first direction orthogonal to the traveling direction;
The slide mechanism is
a slide portion that moves along the first direction with respect to the carrier body;
a guide block provided between the carrier body and the slide portion and slidable along the first direction with respect to each of the carrier body and the slide portion;
a guide block holding part that holds the position of the guide block so that the positional relationship between the guide block and either the conveyor body or the slide part is maintained when the slide part moves; It has a ceiling transport vehicle.
The guide block holding part is
a first magnetic member provided on the guide block and including a magnet or a magnetic body;
The ceiling guided vehicle according to claim 1, further comprising: a second magnetic member that is provided on at least one of the guided vehicle body and the slide portion and includes a magnet or a magnetic body that is attracted to the first magnetic member.
The overhead conveyance vehicle according to claim 2, wherein the first magnetic member is attracted to the second magnetic member through a gap or a protective member while maintaining the position of the guide block.
A plurality of guide blocks are provided,
The ceiling conveyance vehicle according to claim 1, wherein the guide block holding section urges at least one of the plurality of guide blocks in a direction away from another guide block adjacent to the guide block.
The guide block includes a first guide block and a second guide block,
The guide block holding part is
maintaining the position of the first guide block at one end side of at least one of the carrier body and the slide portion in the first direction;
The ceiling conveyance vehicle according to claim 4, wherein the position of the second guide block is maintained at the other end side of at least one of the conveyance vehicle body and the slide portion in the first direction.
The slide mechanism is
another slide part that moves along the first direction with respect to the slide part;
another guide block provided between the slide part and the other slide part and slidable along the first direction with respect to each of the slide part and the other slide part;
Maintaining the position of the other guide block so that the positional relationship between either the slide part or the other slide part and the other guide block is maintained when the other slide part moves. The ceiling conveyance vehicle according to claim 1, further comprising another guide block holding section.
The ceiling transport vehicle according to claim 1, wherein the slide mechanism slides the unit to both one side and the other side in the first direction.