JP2006279008A - ヒータ及びヒータを備えた加熱装置 - Google Patents

ヒータ及びヒータを備えた加熱装置 Download PDF

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Publication number
JP2006279008A
JP2006279008A JP2005191222A JP2005191222A JP2006279008A JP 2006279008 A JP2006279008 A JP 2006279008A JP 2005191222 A JP2005191222 A JP 2005191222A JP 2005191222 A JP2005191222 A JP 2005191222A JP 2006279008 A JP2006279008 A JP 2006279008A
Authority
JP
Japan
Prior art keywords
heater
lamp unit
filament
filaments
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005191222A
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English (en)
Japanese (ja)
Other versions
JP2006279008A5 (enExample
Inventor
Yoichi Mizukawa
洋一 水川
Keita Kanatsu
桂太 金津
Masaki Yoshioka
正樹 吉岡
Shinji Suzuki
信二 鈴木
Tadahira Seki
匡平 関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=36481395&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2006279008(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP2005191222A priority Critical patent/JP2006279008A/ja
Priority to TW095100084A priority patent/TW200633166A/zh
Priority to KR1020060009885A priority patent/KR100859401B1/ko
Priority to DE602006007049T priority patent/DE602006007049D1/de
Priority to EP06003999A priority patent/EP1699071B1/en
Priority to US11/362,788 priority patent/US7656079B2/en
Priority to CN2008100996426A priority patent/CN101295632B/zh
Publication of JP2006279008A publication Critical patent/JP2006279008A/ja
Publication of JP2006279008A5 publication Critical patent/JP2006279008A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K7/00—Lamps for purposes other than general lighting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K9/00—Lamps having two or more incandescent bodies separately heated
    • H01K9/08—Lamps having two or more incandescent bodies separately heated to provide selectively different light effects, e.g. for automobile headlamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/032—Heaters specially adapted for heating by radiation heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Resistance Heating (AREA)
  • Control Of Resistance Heating (AREA)
  • Chemical Vapour Deposition (AREA)
JP2005191222A 2005-03-02 2005-06-30 ヒータ及びヒータを備えた加熱装置 Pending JP2006279008A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2005191222A JP2006279008A (ja) 2005-03-02 2005-06-30 ヒータ及びヒータを備えた加熱装置
TW095100084A TW200633166A (en) 2005-03-02 2006-01-02 Heater and heating device with heaters
KR1020060009885A KR100859401B1 (ko) 2005-03-02 2006-02-02 히터 및 히터를 구비한 가열 장치
DE602006007049T DE602006007049D1 (de) 2005-03-02 2006-02-28 Heizelement und Heizvorrichtung mit Heizelementen
EP06003999A EP1699071B1 (en) 2005-03-02 2006-02-28 Heater and heating device with heaters
US11/362,788 US7656079B2 (en) 2005-03-02 2006-02-28 Heater and heating device with heaters with lamps having an independently powered multiple part filament
CN2008100996426A CN101295632B (zh) 2005-03-02 2006-03-02 加热装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005057803 2005-03-02
JP2005191222A JP2006279008A (ja) 2005-03-02 2005-06-30 ヒータ及びヒータを備えた加熱装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2010285312A Division JP2011103475A (ja) 2005-03-02 2010-12-22 ヒータランプ
JP2010285313A Division JP2011103476A (ja) 2005-03-02 2010-12-22 ヒータランプを備えた加熱装置

Publications (2)

Publication Number Publication Date
JP2006279008A true JP2006279008A (ja) 2006-10-12
JP2006279008A5 JP2006279008A5 (enExample) 2007-06-28

Family

ID=36481395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005191222A Pending JP2006279008A (ja) 2005-03-02 2005-06-30 ヒータ及びヒータを備えた加熱装置

Country Status (6)

Country Link
US (1) US7656079B2 (enExample)
EP (1) EP1699071B1 (enExample)
JP (1) JP2006279008A (enExample)
KR (1) KR100859401B1 (enExample)
DE (1) DE602006007049D1 (enExample)
TW (1) TW200633166A (enExample)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008135313A (ja) * 2006-11-29 2008-06-12 Matsushita Electric Ind Co Ltd 発熱体ユニット及び加熱装置
JP2008166073A (ja) * 2006-12-27 2008-07-17 Ushio Inc フィラメントランプ及び光照射式加熱装置
EP1962323A1 (en) 2007-02-26 2008-08-27 Ushiodenki Kabushiki Kaisha Filament lamp and light irradiation type heat treatment apparatus
EP1998358A2 (en) 2007-05-29 2008-12-03 Ushiodenki Kabushiki Kaisha Filament lamp and light-irradiation-type heat treatment device
JP2008300073A (ja) * 2007-05-29 2008-12-11 Ushio Inc フィラメントランプ
EP2003677A2 (en) 2007-05-29 2008-12-17 Ushiodenki Kabushiki Kaisha Filament lamp and light irradiation type heat treatment device
JP2009009927A (ja) * 2007-05-29 2009-01-15 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
WO2009008673A3 (en) * 2007-07-10 2009-03-05 Jusung Eng Co Ltd Substrate heating apparatus
JP2009093941A (ja) * 2007-10-10 2009-04-30 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
EP2058839A2 (en) 2007-11-08 2009-05-13 Ushiodenki Kabushiki Kaisha Filament lamp and light irradiation type heat treatment device
EP2059089A2 (en) 2007-11-06 2009-05-13 Ushiodenki Kabushiki Kaisha Light irradiation type heat treatment device
JP2009200401A (ja) * 2008-02-25 2009-09-03 Ushio Inc 光照射式加熱方法及び光照射式加熱装置
EP2105948A2 (en) 2008-03-27 2009-09-30 Ushiodenki Kabushiki Kaisha Filament lamp
EP2107596A2 (en) 2008-03-31 2009-10-07 Ushiodenki Kabushiki Kaisha Filament lamp
JP2010033857A (ja) * 2008-07-29 2010-02-12 Ushio Inc フィラメントランプ
EP2154707A2 (en) 2008-07-28 2010-02-17 Ushio Denki Kabushiki Kaisha Filament lamp
JP2010040230A (ja) * 2008-08-01 2010-02-18 Ushio Inc フィラメントランプ
JP2010055763A (ja) * 2008-08-26 2010-03-11 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
EP2166561A1 (en) 2008-09-22 2010-03-24 Ushiodenki Kabushiki Kaisha Filament lamp
EP2169705A2 (en) 2008-09-26 2010-03-31 Ushiodenki Kabushiki Kaisha Filament lamp
JP2015216254A (ja) * 2014-05-12 2015-12-03 東京エレクトロン株式会社 ヒータ給電機構及びステージの温度制御方法
CN107526269A (zh) * 2016-06-20 2017-12-29 株式会社东芝 加热器以及加热装置
JP2019057613A (ja) * 2017-09-21 2019-04-11 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4692249B2 (ja) * 2005-11-30 2011-06-01 ウシオ電機株式会社 フィラメントランプ
JP4893159B2 (ja) 2006-08-24 2012-03-07 ウシオ電機株式会社 フィラメントランプおよび光照射式加熱処理装置
ITMI20061648A1 (it) * 2006-08-29 2008-02-29 Star Progetti Tecnologie Applicate Spa Dispositivo di irraggiamento di calore tramite infrarossi
KR100918103B1 (ko) * 2008-03-25 2009-09-22 강병호 전기 발열관
KR101103180B1 (ko) 2008-03-27 2012-01-04 우시오덴키 가부시키가이샤 필라멘트 램프
KR20110131292A (ko) * 2009-03-16 2011-12-06 알타 디바이씨즈, 인크. 증기 증착용 샤워헤드
KR101031226B1 (ko) * 2009-08-21 2011-04-29 에이피시스템 주식회사 급속열처리 장치의 히터블록
WO2013096748A1 (en) * 2011-12-23 2013-06-27 Applied Materials, Inc. Methods and apparatus for cleaning substrate surfaces with atomic hydrogen
US8970110B2 (en) * 2012-10-17 2015-03-03 Elwha Llc Managed multiple-filament incandescent lighting system
US9049758B2 (en) * 2012-10-17 2015-06-02 Elwha Llc Multiple-filament tungsten-halogen lighting system having managed tungsten redeposition
KR102475565B1 (ko) * 2013-09-05 2022-12-08 어플라이드 머티어리얼스, 인코포레이티드 감소된 코일 가열을 위한 램프 단면
TWI674071B (zh) 2014-12-15 2019-10-11 瑞士商菲利浦莫里斯製品股份有限公司 氣溶膠產生系統及用於在電熱式氣溶膠產生系統內導引氣流的方法
WO2016126381A1 (en) * 2015-02-05 2016-08-11 Applied Materials, Inc. Rapid thermal processing chamber with linear control lamps
JP2016206484A (ja) * 2015-04-24 2016-12-08 株式会社リコー ヒータ、定着装置及び画像形成装置
JP6473659B2 (ja) * 2015-05-13 2019-02-20 株式会社Ｓｃｒｅｅｎホールディングス 熱処理方法および熱処理装置
JP7082514B2 (ja) * 2018-04-04 2022-06-08 株式会社Kelk 流体加熱装置
CN114126101B (zh) * 2021-11-02 2024-01-26 Tcl华星光电技术有限公司 石英红外加热装置及其对基板加热的方法

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JPS61181087A (ja) * 1985-02-05 1986-08-13 ミノルタ株式会社 加熱装置用ハロゲン発熱体
JPS62167397A (ja) * 1986-01-17 1987-07-23 オリザ油化株式会社 粗油脂類から脂肪酸を分離する方法
JPH0221667A (ja) * 1988-07-08 1990-01-24 Mitsubishi Electric Corp 光検出素子
JPH04286319A (ja) * 1991-03-15 1992-10-12 Sony Corp ハロゲンランプ及び熱処理炉
JP2000036469A (ja) * 1998-07-21 2000-02-02 Dainippon Screen Mfg Co Ltd 基板熱処理装置

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US3443144A (en) * 1964-12-31 1969-05-06 Sylvania Electric Prod Infrared incandescent lamp
JPH0737833A (ja) 1993-07-22 1995-02-07 Dainippon Screen Mfg Co Ltd 基板の光照射式熱処理装置
JPH0716353U (ja) 1993-08-31 1995-03-17 ウシオ電機株式会社 管型ランプ
JP3988338B2 (ja) * 1999-10-07 2007-10-10 ウシオ電機株式会社 光照射式急速加熱処理装置の制御装置
JP3528042B2 (ja) * 2000-01-24 2004-05-17 ウシオ電機株式会社 光加熱装置
DE10024709B4 (de) 2000-05-18 2008-03-13 Steag Rtp Systems Gmbh Vorrichtung zum thermischen Behandeln von Substraten
JP4948701B2 (ja) 2000-12-28 2012-06-06 東京エレクトロン株式会社 加熱装置、当該加熱装置を有する熱処理装置、及び、熱処理制御方法
US6614008B2 (en) * 2001-12-14 2003-09-02 Xerox Corporation Universal voltage fuser heater lamp
US20040182847A1 (en) 2003-02-17 2004-09-23 Kazuaki Ohkubo Radiation source for gas sensor

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
JPS61181087A (ja) * 1985-02-05 1986-08-13 ミノルタ株式会社 加熱装置用ハロゲン発熱体
JPS62167397A (ja) * 1986-01-17 1987-07-23 オリザ油化株式会社 粗油脂類から脂肪酸を分離する方法
JPH0221667A (ja) * 1988-07-08 1990-01-24 Mitsubishi Electric Corp 光検出素子
JPH04286319A (ja) * 1991-03-15 1992-10-12 Sony Corp ハロゲンランプ及び熱処理炉
JP2000036469A (ja) * 1998-07-21 2000-02-02 Dainippon Screen Mfg Co Ltd 基板熱処理装置

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008135313A (ja) * 2006-11-29 2008-06-12 Matsushita Electric Ind Co Ltd 発熱体ユニット及び加熱装置
JP2008166073A (ja) * 2006-12-27 2008-07-17 Ushio Inc フィラメントランプ及び光照射式加熱装置
EP1962323A1 (en) 2007-02-26 2008-08-27 Ushiodenki Kabushiki Kaisha Filament lamp and light irradiation type heat treatment apparatus
JP2008210623A (ja) * 2007-02-26 2008-09-11 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
KR101195666B1 (ko) 2007-02-26 2012-10-30 우시오덴키 가부시키가이샤 필라멘트 램프 및 광 조사식 가열 처리 장치
EP1998358A2 (en) 2007-05-29 2008-12-03 Ushiodenki Kabushiki Kaisha Filament lamp and light-irradiation-type heat treatment device
JP2008300077A (ja) * 2007-05-29 2008-12-11 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
JP2008300073A (ja) * 2007-05-29 2008-12-11 Ushio Inc フィラメントランプ
EP2003677A2 (en) 2007-05-29 2008-12-17 Ushiodenki Kabushiki Kaisha Filament lamp and light irradiation type heat treatment device
JP2009009927A (ja) * 2007-05-29 2009-01-15 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
WO2009008673A3 (en) * 2007-07-10 2009-03-05 Jusung Eng Co Ltd Substrate heating apparatus
JP2009093941A (ja) * 2007-10-10 2009-04-30 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
EP2061069A1 (en) 2007-10-10 2009-05-20 Ushiodenki Kabushiki Kaisha Filament lamp and heat treatment device of the light irradiation type
EP2059089A2 (en) 2007-11-06 2009-05-13 Ushiodenki Kabushiki Kaisha Light irradiation type heat treatment device
JP2009117585A (ja) * 2007-11-06 2009-05-28 Ushio Inc 光照射式加熱処理装置
JP2009117237A (ja) * 2007-11-08 2009-05-28 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
EP2058839A2 (en) 2007-11-08 2009-05-13 Ushiodenki Kabushiki Kaisha Filament lamp and light irradiation type heat treatment device
JP2009200401A (ja) * 2008-02-25 2009-09-03 Ushio Inc 光照射式加熱方法及び光照射式加熱装置
EP2105948A2 (en) 2008-03-27 2009-09-30 Ushiodenki Kabushiki Kaisha Filament lamp
JP2009238552A (ja) * 2008-03-27 2009-10-15 Ushio Inc フィラメントランプ
EP2107596A2 (en) 2008-03-31 2009-10-07 Ushiodenki Kabushiki Kaisha Filament lamp
KR101057302B1 (ko) 2008-03-31 2011-08-16 우시오덴키 가부시키가이샤 필라멘트 램프
JP2009245720A (ja) * 2008-03-31 2009-10-22 Ushio Inc フィラメントランプ
EP2154707A2 (en) 2008-07-28 2010-02-17 Ushio Denki Kabushiki Kaisha Filament lamp
US8488953B2 (en) 2008-07-28 2013-07-16 Ushio Denki Kabushiki Kaisha Filament lamp
JP2010033857A (ja) * 2008-07-29 2010-02-12 Ushio Inc フィラメントランプ
JP2010040230A (ja) * 2008-08-01 2010-02-18 Ushio Inc フィラメントランプ
JP2010055763A (ja) * 2008-08-26 2010-03-11 Ushio Inc フィラメントランプおよび光照射式加熱処理装置
EP2166561A1 (en) 2008-09-22 2010-03-24 Ushiodenki Kabushiki Kaisha Filament lamp
JP2010080250A (ja) * 2008-09-26 2010-04-08 Ushio Inc フィラメントランプ
EP2169705A2 (en) 2008-09-26 2010-03-31 Ushiodenki Kabushiki Kaisha Filament lamp
JP2015216254A (ja) * 2014-05-12 2015-12-03 東京エレクトロン株式会社 ヒータ給電機構及びステージの温度制御方法
US11121009B2 (en) 2014-05-12 2021-09-14 Tokyo Electron Limited Power feeding mechanism and method for controlling temperature of a stage
US11756807B2 (en) 2014-05-12 2023-09-12 Tokyo Electron Limited Power feeding mechanism and method for controlling temperature of a stage
CN107526269A (zh) * 2016-06-20 2017-12-29 株式会社东芝 加热器以及加热装置
JP2019057613A (ja) * 2017-09-21 2019-04-11 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置
US11183403B2 (en) 2017-09-21 2021-11-23 SCREEN Holdings Co., Ltd. Light irradiation type heat treatment apparatus

Also Published As

Publication number Publication date
TW200633166A (en) 2006-09-16
US20060197454A1 (en) 2006-09-07
EP1699071A1 (en) 2006-09-06
DE602006007049D1 (de) 2009-07-16
US7656079B2 (en) 2010-02-02
KR100859401B1 (ko) 2008-09-22
TWI348208B (enExample) 2011-09-01
EP1699071B1 (en) 2009-06-03
KR20060096275A (ko) 2006-09-11

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