JP2006108675A - ビーム検出器 - Google Patents
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- 229910052738 indium Inorganic materials 0.000 claims description 6
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- 238000003631 wet chemical etching Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
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- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
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- 239000000969 carrier Substances 0.000 description 1
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- H—ELECTRICITY
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/1013—Devices sensitive to infrared, visible or ultraviolet radiation devices sensitive to two or more wavelengths, e.g. multi-spectrum radiation detection devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
- G01J3/513—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs
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- H01L31/02—Details
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- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
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- H—ELECTRICITY
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035209—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions comprising a quantum structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
- G01J3/513—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs
- G01J2003/516—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs with several stacked filters or stacked filter-detector pairs
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Abstract
【解決手段】第1の検出素子において形成される信号が第2の検出素子において形成される信号とは別個に取り出され、第1の検出素子は可視ビームに対して部分的に透過性であり、第1の検出素子を通過した可視ビームは第2の検出素子において信号を形成する。
【選択図】図1
Description
Laser Components社のモジュール「MTCSiCT」についての仮の仕様書 Electronics Review第16巻第3号
Claims (19)
- ビームを受け取って信号を形成するアクティブ領域(14,24,34)をそれぞれ1つ有する複数の検出素子(1,2,3)を備えたビーム検出器であって、
−前記検出素子(1,2,3)はモノリシックにビーム検出器の半導体ボディ(5)に集積されており、
−前記半導体ボディ(5)はビーム入射側(6)を有する、ビーム検出器において、
−第1の検出素子(1)において形成される信号が第2の検出素子(2)において形成される信号とは別個に取り出され、
−前記第1の検出素子(1)は可視ビームに対して部分的に透過性であり、
−前記第1の検出素子(1)を通過した可視ビームは前記第2の検出素子(2)において信号を形成することを特徴とする、ビーム検出器。 - 前記半導体ボディ(5)において隣接する検出素子の前記アクティブ領域は相互に間隔を置いて配置されている、請求項1記載のビーム検出器。
- 少なくとも1つの検出素子(1,2,3)は、所定の最大波長において最大値をとるスペクトル感度分布(100,200,300)を有する、請求項1または2記載のビーム検出器。
- 少なくとも2つのビーム検出器(1,2,3)の前記スペクトル感度分布(100,200,300)は異なる最大波長を有する、請求項3記載のビーム検出器。
- 所定の関連性のある波長領域にあるビーム(7)を検出するために構成されている、請求項1から4までのいずれか1項記載のビーム検出器。
- 少なくとも2つの検出素子(1,2,3,)の前記スペクトル感度分布(100,200,300)は重畳する、請求項3から5までのいずれか1項記載のビーム検出器。
- 前記アクティブ領域(14,24,34)のうちの少なくとも1つは単一量子井戸構造または多重量子井戸構造またはヘテロ構造を有する、請求項1から6までのいずれか1項記載のビーム検出器。
- 前記検出素子(1,2,3)のスペクトル感度分布(100,200,300)の最大波長は、ビーム検出器によって受信されるべきビームの前記ビーム入射側(6)から前記検出素子(1,2,3)までの距離が長くなるにつれ大きくなる、請求項3から7までのいずれか1項記載のビーム検出器。
- 少なくとも1つの検出素子(1,2,3)には、前記半導体ボディ(5)のビーム入射側の方向において、少なくとも1つのフィルタ層(18)を有するフィルタ層構造が後置されている、請求項1から8までのいずれか1項記載のビーム検出器。
- 前記フィルタ層構造は、前記検出素子(1,2,3)の前記スペクトル感度分布(100,200,300)の最大波長領域よりも小さい波長を包含する波長領域にある波長を吸収するために構成されている、請求項9記載のビーム検出器。
- 前記検出素子(1,2,3)にはそれぞれ1つのコンタクト層(11,123)と1つの逆コンタクト層(212,23)が配属されており、該コンタクト層および/または該逆コンタクト層は検出素子と該検出素子に隣接する検出素子との間に配置されている、請求項1から10までのいずれか1項記載のビーム検出器。
- 少なくとも1つの検出素子(1,2,3)の前記コンタクト層ないし前記逆コンタクト層(11,123,212)は同時にフィルタ層として構成されている、請求項9および11記載のビーム検出器。
- 隣接する2つの検出素子(1,2,3)は共通のコンタクト層(123)ないし共通の逆コンタクト層(212)を有する、請求項11または12記載のビーム検出器。
- 前記半導体ボディ(5)は少なくとも1つのIII−V族半導体材料を含有する、請求項1から13までのいずれか1項記載のビーム検出器。
- 前記III−V族半導体材料は材料系InxGayAl1−x−yP、InxGayAl1−x−yAsまたはInxGayAl1−x−yN、ここで0≦x≦1、0≦y≦1且つx+y≦1である、からなる材料である、請求項14記載のビーム検出器。
- 前記検出素子(1,2,3)は種々の色のビームを検出するために構成されている、請求項1から15までのいずれか1項記載のビーム検出器。
- 青、緑ないし赤のスペクトル領域にあるビームを検出するために構成されている3つの検出素子(1,2,3)を包含する、請求項1から16までのいずれか1項記載のビーム検出器。
- ビーム検出器によって受け取られるべきビーム(7)におけるビスペクトル色成分を検出するために構成されている、請求項1から17までのいずれか1項記載のビーム検出器。
- 検出器に入射するビーム(7)の色印象を検出するために構成されている、請求項1から18までのいずれか1項記載のビーム検出器。
Applications Claiming Priority (4)
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DE102004047645.4 | 2004-09-30 | ||
DE102004047645 | 2004-09-30 | ||
DE102005001280.9A DE102005001280B4 (de) | 2004-09-30 | 2005-01-11 | Strahlungsdetektor |
DE102005001280.9 | 2005-01-11 |
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JP2006108675A true JP2006108675A (ja) | 2006-04-20 |
JP5166687B2 JP5166687B2 (ja) | 2013-03-21 |
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US (1) | US7525083B2 (ja) |
EP (1) | EP1643565B1 (ja) |
JP (1) | JP5166687B2 (ja) |
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CN116314215B (zh) * | 2023-05-23 | 2023-08-22 | 中国科学院半导体研究所 | 多波段探测器及其制备方法 |
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JP2011511443A (ja) * | 2008-01-31 | 2011-04-07 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 放射受光器およびその製造方法 |
JP2015142110A (ja) * | 2014-01-30 | 2015-08-03 | 富士通株式会社 | イメージセンサ及びその製造方法 |
JP2016213255A (ja) * | 2015-04-30 | 2016-12-15 | 富士通株式会社 | イメージセンサ及びその製造方法 |
Also Published As
Publication number | Publication date |
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EP1643565A3 (de) | 2010-09-22 |
US20070241260A1 (en) | 2007-10-18 |
EP1643565A2 (de) | 2006-04-05 |
US7525083B2 (en) | 2009-04-28 |
JP5166687B2 (ja) | 2013-03-21 |
EP1643565B1 (de) | 2020-03-04 |
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