JP5447756B2 - 放射検出器 - Google Patents
放射検出器 Download PDFInfo
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Description
図1 本発明による放射検出器の第1の実施例を示す概略的な断面図である。
機能層4b(In0.5(Ga0.9Al0.1)0.5P、厚さ≒100nm、EG≒1.97eV、λG≒630nm)
機能層4c(In0.5(Ga0.7Al0.3)0.5P、厚さ≒300nm、EG≒2.07eV、λG≒600nm)
機能層4d(In0.5(Ga0.5Al0.5)0.5P、厚さ≒700nm、EG≒2.20eV、λG≒565nm)図2aにおける構成と異なるのは、機能層4cおよび4dの厚さである。これらの厚さは、フィルタリング層の組成が異なるため、図2aの構成より薄く形成されているか、ないしは厚く形成されている。図2bに示された検出器感度10の長波長側102の基本的な特性は実質的に、図2aに示された検出器感度と一致する。
Claims (26)
- 所定の波長λ0の最大値を有する所定のスペクトル感度分布(9)にしたがって放射(8)を検出するための放射検出器であって、
検出器信号の生成に使用され放射受信のために設けられた活性領域(5)を有する、成長基板上にエピタキシャル成長により形成された半導体ボディ(1)を含んでいる形式のものにおいて、
前記半導体ボディは少なくとも1つのIII-V半導体材料を含み、
該活性領域(5)は複数の機能層(4a,4b,4c,4d)を有し、
該機能層のバンドギャップおよび厚さは異なり、
波長が前記λ 0 より大きい、前記所定のスペクトル感度分布の長波長側にしたがって、前記放射検出器によって生成される検出器信号が振る舞うように、該機能層は、波長λ0より大きい波長を含む波長領域にある放射を少なくとも部分的に吸収するように構成されており、
前記半導体ボディ(1)は1つのpinダイオード構造に相当することを特徴とする放射検出器。 - 前記所定のスペクトル感度分布(9)は、人間の眼のスペクトル感度分布である、請求項1記載の放射検出器。
- 前記活性領域にフィルタリング層構造体(70)が後置されており、
該フィルタリング層構造体(70)は、少なくとも1つのフィルタリング層(7,7a,7b,7c)を含み、
該フィルタリング層構造体(70)は検出器感度(10)の短波長側(101)を、所定のスペクトル感度分布(9)にしたがって、λ0を下回る波長を含む波長領域にある放射の吸収によって決定する、請求項1または2記載の放射検出器。 - 波長λ0’の最大値を含む人間の眼の所定のスペクトル感度分布(9)にしたがって放射を検出するための放射検出器であって、
検出器信号の生成に使用され放射受信のために設けられた活性領域(5)を含む、成長基板上にエピタキシャル成長により形成された半導体ボディ(1)を有する形式のものにおいて、
該半導体ボディ(1)は少なくともIII‐V族半導体材料を含み、
該活性領域(5)は、バンドギャップおよび厚さが異なる複数の機能層を有し、
前記半導体ボディ(1)は1つのpinダイオード構造に相当することを特徴とする放射検出器。 - 前記機能層(4a,4b,4c,4d)は、波長λ0’を上回る波長を含む波長領域で放射(8)を少なくとも部分的に吸収する、請求項4記載の放射検出器。
- 前記活性領域にフィルタリング層構造体(70)が後置されており、
該フィルタリング層構造体(70)は、少なくとも1つのフィルタリング層(7,7a,7b,7c)を含み、
該フィルタリング層構造体(70)は検出器感度(10)の短波長側(101)を、所定のスペクトル感度分布(9)にしたがって、λ0’を下回る波長を含む波長領域にある放射の吸収によって決定する、請求項4または5記載の放射検出器。 - 所定の波長λ0の最大値を有する所定のスペクトル感度分布(9)にしたがって放射(8)を検出するための放射検出器であって、
検出器信号の生成に使用され放射受信のために設けられた活性領域(5)を有する、成長基板上にエピタキシャル成長により形成された半導体ボディ(1)を含んでいる形式のものにおいて、
前記半導体ボディ(1)は少なくとも1つのIII-V半導体材料を含み、
該活性領域にフィルタリング層構造体(70)が後置されており、
該フィルタリング層構造体(70)は前記半導体ボディの一部であり、少なくとも1つのフィルタリング層(7,7a,7b,7c)を含み、
該フィルタリング層構造体(70)は、所定のスペクトル感度分布(9)による検出器感度(10)の短波長側(101)を、波長λ0より小さい波長を含む波長領域にある波長を吸収することにより決定し、
前記半導体ボディ(1)は1つのpinダイオード構造に相当し、
前記所定のスペクトル感度分布(9)は人間の眼のスペクトル感度分布である
ことを特徴とする、放射検出器。 - 前記活性領域(5)は複数の機能層を含む、請求項7記載の放射検出器。
- 機能層(4a,4b,4c,4d)は、波長λ0を上回る波長を含む波長領域で放射(8)を少なくとも部分的に吸収する、請求項8記載の放射検出器。
- 前記機能層(4a,4b,4c,4d)のバンドギャップおよび厚さは異なる、請求項8または9記載の放射検出器。
- フィルタリング層構造体(70)は、入射される放射(8)の方向で活性領域(5)に後置されている、請求項3,6から10までのいずれか1項記載の放射検出器。
- フィルタリング層構造体(70)は1つの個別のフィルタリング層(7)を含み、
該フィルタリング層(7)は、直接的なバンドギャップと間接的なバンドギャップとを有する、請求項3,6から11までのいずれか1項記載の放射検出器。 - 前記直接的なバンドギャップは、活性領域(5)の側で該フィルタリング層(7)に後置された機能層のバンドギャップより大きい、請求項12記載の放射検出器。
- 前記フィルタリング層(7)は、前記間接的なバンドギャップを介して、λ0を下回る波長を含む波長領域で放射の吸収を行うことにより、検出器感度の短波長側を決定する、請求項12または13記載の放射検出器。
- 前記直接的なバンドギャップが、検出器感度の短波長の限界を決定する、請求項12から14までのいずれか1項記載の放射検出器。
- 前記フィルタリング層(7)の厚さは1μmを上回り、とりわけ10μm以上である、請求項12から15までのいずれか1項記載の放射検出器。
- フィルタリング層構造体(70)は、異なるバンドギャップおよび/または厚さの複数のフィルタリング層(7a,7b,7c)を含む、請求項3,6から16までのいずれか1項記載の放射検出器。
- 前記フィルタリング層構造体(70)は、各フィルタリング層(7a,7b,7c)の直接的なバンドギャップを介して、λ0を下回る波長を含む波長領域で放射を吸収することにより、検出器感度(10)の短波長側を決定する、請求項17記載の放射検出器。
- フィルタリング層構造体(70)の厚さは1μm以下である、請求項17または18記載の放射検出器。
- 機能層(4a,4b,4c,4d)は該機能層の構成を介して、λ0を上回る波長において検出器感度(10)の長波長側(102)を所定のスペクトル感度分布(9)にしたがって決定する、請求項1,4,8のいずれか1項記載の放射検出器。
- 半導体ボディ(1)において後置された機能層(4a,4b,4c,4d)のバンドギャップは、少なくとも部分的に、入射される放射(8)の方向に上昇するように構成されている、請求項1,4,10,20のいずれか1項記載の放射検出器。
- 機能層(4a,4b,4c,4d)または該機能層の少なくとも一部は、実質的にドーピングされない、請求項1から21までのいずれか1項記載の放射検出器。
- 活性領域(5)は少なくとも1つのヘテロ構造部を含む、請求項1から22までのいずれか1項記載の放射検出器。
- 前記機能層は、少なくとも1つのIII‐V族半導体材料、有利にはInxGayAl1-x-yP、InxGayAl1-x-yAsまたはInxGayAl1-x-yNの半導体材料を含有し、ここではそれぞれ0≦x≦1、0≦y≦1およびx+y≦1である、請求項1から23までのいずれか1項記載の放射検出器。
- 前記フィルタリング層構造体(70)を有する半導体ボディ(1)は、モノリシックに統合化されている、請求項3,6から19までのいずれか1項記載の放射検出器。
- 前記フィルタリング層構造体は、少なくとも1つのIII-V半導体材料、有利にはIn x Ga y Al 1−x−y P、In x Ga y Al 1−x−y AsまたはIn x Ga y Al 1−x−y Nを含み、ここではそれぞれ0≦x≦1、0≦y≦1およびx+y≦1である、
請求項3,6から19までのいずれか1項記載の放射検出器。
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