JP2005526371A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005526371A5 JP2005526371A5 JP2003513046A JP2003513046A JP2005526371A5 JP 2005526371 A5 JP2005526371 A5 JP 2005526371A5 JP 2003513046 A JP2003513046 A JP 2003513046A JP 2003513046 A JP2003513046 A JP 2003513046A JP 2005526371 A5 JP2005526371 A5 JP 2005526371A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating layer
- electron transistor
- face
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 92
- 239000002105 nanoparticle Substances 0.000 claims 50
- 238000000034 method Methods 0.000 claims 36
- 239000002094 self assembled monolayer Substances 0.000 claims 17
- 239000013545 self-assembled monolayer Substances 0.000 claims 17
- 239000000758 substrate Substances 0.000 claims 8
- 239000012491 analyte Substances 0.000 claims 4
- 239000011230 binding agent Substances 0.000 claims 4
- 230000005669 field effect Effects 0.000 claims 4
- 230000009870 specific binding Effects 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000002356 single layer Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/905,319 | 2001-07-13 | ||
| US09/905,319 US6483125B1 (en) | 2001-07-13 | 2001-07-13 | Single electron transistors in which the thickness of an insulating layer defines spacing between electrodes |
| PCT/US2002/022137 WO2003007384A2 (en) | 2001-07-13 | 2002-07-12 | Single-electron transistors and fabrication methods |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005526371A JP2005526371A (ja) | 2005-09-02 |
| JP2005526371A5 true JP2005526371A5 (enExample) | 2010-02-12 |
| JP4814487B2 JP4814487B2 (ja) | 2011-11-16 |
Family
ID=25420626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003513046A Expired - Fee Related JP4814487B2 (ja) | 2001-07-13 | 2002-07-12 | 絶縁層の厚さが電極間の間隔を形成する単一電子トランジスタ及び製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US6483125B1 (enExample) |
| EP (1) | EP1407492B1 (enExample) |
| JP (1) | JP4814487B2 (enExample) |
| AT (1) | ATE468611T1 (enExample) |
| AU (1) | AU2002322459A1 (enExample) |
| DE (1) | DE60236436D1 (enExample) |
| TW (1) | TW557546B (enExample) |
| WO (1) | WO2003007384A2 (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9724642D0 (en) * | 1997-11-21 | 1998-01-21 | British Tech Group | Single electron devices |
| US6653653B2 (en) * | 2001-07-13 | 2003-11-25 | Quantum Logic Devices, Inc. | Single-electron transistors and fabrication methods in which a projecting feature defines spacing between electrodes |
| TW531890B (en) * | 2002-02-27 | 2003-05-11 | Ind Tech Res Inst | Single electron device fabricated from nanoparticle derivatives |
| WO2004005587A2 (en) * | 2002-07-08 | 2004-01-15 | The Regents Of The University Of California | Surface nanopatterning |
| US8070988B2 (en) * | 2003-09-09 | 2011-12-06 | International Technology Center | Nano-carbon hybrid structures |
| US7224039B1 (en) | 2003-09-09 | 2007-05-29 | International Technology Center | Polymer nanocomposite structures for integrated circuits |
| WO2005081707A2 (en) | 2003-11-20 | 2005-09-09 | Biowarn, Llc | Methodology and apparatus for the detection of biological substances |
| KR100671813B1 (ko) * | 2004-10-15 | 2007-01-19 | 세이코 엡슨 가부시키가이샤 | 박막 패턴 형성 방법, 반도체 장치, 전기 광학 장치, 및전자 기기 |
| JP4297106B2 (ja) * | 2005-02-23 | 2009-07-15 | セイコーエプソン株式会社 | 膜パターンの形成方法及びデバイスの製造方法、電気光学装置及び電子機器 |
| US7309650B1 (en) | 2005-02-24 | 2007-12-18 | Spansion Llc | Memory device having a nanocrystal charge storage region and method |
| US7378310B1 (en) | 2005-04-27 | 2008-05-27 | Spansion Llc | Method for manufacturing a memory device having a nanocrystal charge storage region |
| US7335594B1 (en) | 2005-04-27 | 2008-02-26 | Spansion Llc | Method for manufacturing a memory device having a nanocrystal charge storage region |
| JP4613314B2 (ja) * | 2005-05-26 | 2011-01-19 | 独立行政法人産業技術総合研究所 | 単結晶の製造方法 |
| US20070202648A1 (en) * | 2006-02-28 | 2007-08-30 | Samsung Electronics Co. Ltd. | Memory device and method of manufacturing the same |
| AU2009214818B2 (en) * | 2008-02-11 | 2014-05-01 | Newsouth Innovations Pty Limited | Control and readout of electron or hole spin |
| ES2636664T3 (es) * | 2008-09-02 | 2017-10-06 | The Governing Council Of The University Of Toronto | Microelectrodos nanoestructurados y dispositivos de biodetección que los incorporan |
| CN108027335B (zh) | 2015-06-25 | 2021-05-04 | 罗斯韦尔生物技术股份有限公司 | 生物分子传感器和方法 |
| JP7280590B2 (ja) | 2016-01-28 | 2023-05-24 | ロズウェル バイオテクノロジーズ,インコーポレイテッド | 大スケールの分子電子工学センサアレイを使用する被分析物を測定するための方法および装置 |
| KR102763291B1 (ko) | 2016-01-28 | 2025-02-04 | 로스웰 엠이 아이엔씨. | 대량 병렬 dna 시퀀싱 장치 |
| EP3882616A1 (en) | 2016-02-09 | 2021-09-22 | Roswell Biotechnologies, Inc | Electronic label-free dna and genome sequencing |
| US10597767B2 (en) | 2016-02-22 | 2020-03-24 | Roswell Biotechnologies, Inc. | Nanoparticle fabrication |
| US9829456B1 (en) | 2016-07-26 | 2017-11-28 | Roswell Biotechnologies, Inc. | Method of making a multi-electrode structure usable in molecular sensing devices |
| US10902939B2 (en) | 2017-01-10 | 2021-01-26 | Roswell Biotechnologies, Inc. | Methods and systems for DNA data storage |
| CA3052140A1 (en) | 2017-01-19 | 2018-07-26 | Roswell Biotechnologies, Inc. | Solid state sequencing devices comprising two dimensional layer materials |
| KR102879682B1 (ko) | 2017-04-25 | 2025-10-30 | 로스웰 엠이 아이엔씨. | 분자 센서들을 위한 효소 회로들 |
| US10508296B2 (en) | 2017-04-25 | 2019-12-17 | Roswell Biotechnologies, Inc. | Enzymatic circuits for molecular sensors |
| KR102606670B1 (ko) | 2017-05-09 | 2023-11-24 | 로스웰 바이오테크놀로지스 인코포레이티드 | 분자 센서들을 위한 결합 프로브 회로들 |
| US11371955B2 (en) | 2017-08-30 | 2022-06-28 | Roswell Biotechnologies, Inc. | Processive enzyme molecular electronic sensors for DNA data storage |
| EP3694990A4 (en) | 2017-10-10 | 2022-06-15 | Roswell Biotechnologies, Inc. | METHODS, APPARATUS AND SYSTEMS FOR NON-AMPLIFICATION DNA DATA STORAGE |
| US12146852B2 (en) | 2019-09-06 | 2024-11-19 | Roswell Biotechnologies, Inc. | Methods of fabricating nanoscale structures usable in molecular sensors and other devices |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8406955D0 (en) | 1984-03-16 | 1984-04-18 | Serono Diagnostics Ltd | Assay |
| DE3513168A1 (de) | 1985-04-12 | 1986-10-16 | Thomas 8000 München Dandekar | Biosensor bestehend aus einem halbleiter auf silizium oder kohlenstoffbasis (elektronischer teil) und nukleinbasen (od. anderen biol. monomeren) |
| US4894339A (en) | 1985-12-18 | 1990-01-16 | Seitaikinouriyou Kagakuhin Sinseizogijutsu Kenkyu Kumiai | Immobilized enzyme membrane for a semiconductor sensor |
| JPS6350745A (ja) | 1986-08-20 | 1988-03-03 | Fuji Photo Film Co Ltd | 化学センサ− |
| DE3827314C1 (enExample) | 1988-08-11 | 1989-10-19 | Christoff Prof. Dr. Braeuchle | |
| US5219577A (en) | 1990-06-22 | 1993-06-15 | The Regents Of The University Of California | Biologically active composition having a nanocrystalline core |
| CA2121797A1 (en) | 1991-10-21 | 1993-04-29 | James W. Holm-Kennedy | Method and device for biochemical sensing |
| US5846708A (en) | 1991-11-19 | 1998-12-08 | Massachusetts Institiute Of Technology | Optical and electrical methods and apparatus for molecule detection |
| US5405454A (en) * | 1992-03-19 | 1995-04-11 | Matsushita Electric Industrial Co., Ltd. | Electrically insulated silicon structure and producing method therefor |
| US5420746A (en) | 1993-04-13 | 1995-05-30 | The United States Of America As Represented By The Secretary Of The Army | Single electron device including clusters of pure carbon atoms |
| EP0756761B1 (de) * | 1994-04-19 | 1998-06-24 | Siemens Aktiengesellschaft | Mikroelektronisches bauelement und verfahren zu dessen herstellung |
| JPH0878669A (ja) * | 1994-09-02 | 1996-03-22 | Hitachi Ltd | 半導体装置および半導体装置の製造方法 |
| JP3149718B2 (ja) | 1995-02-03 | 2001-03-26 | 松下電器産業株式会社 | 単電子トランジスタ |
| US5576563A (en) | 1995-04-24 | 1996-11-19 | Motorola Inc. | Chemical probe field effect transistor for measuring the surface potential of a gate electrode in response to chemical exposure |
| DE19522351A1 (de) * | 1995-06-20 | 1997-01-09 | Max Planck Gesellschaft | Verfahren zur Herstellung von Quantenstrukturen, insbesondere von Quantenpunkten und Tunnelbarrieren sowie Bauelemente mit solchen Quantenstrukturen |
| AU2579297A (en) | 1996-03-26 | 1997-10-17 | Samsung Electronics Co., Ltd. | Tunnelling device and method of producing a tunnelling device |
| DE19621994C1 (de) | 1996-05-31 | 1997-06-12 | Siemens Ag | Einzelelektron-Speicherzellenanordnung |
| US6066265A (en) | 1996-06-19 | 2000-05-23 | Kionix, Inc. | Micromachined silicon probe for scanning probe microscopy |
| US5747839A (en) | 1996-09-30 | 1998-05-05 | Motorola, Inc. | Chemical sensing trench field effect transistor |
| US5922537A (en) | 1996-11-08 | 1999-07-13 | N.o slashed.AB Immunoassay, Inc. | Nanoparticles biosensor |
| US6103868A (en) | 1996-12-27 | 2000-08-15 | The Regents Of The University Of California | Organically-functionalized monodisperse nanocrystals of metals |
| EP0865078A1 (en) | 1997-03-13 | 1998-09-16 | Hitachi Europe Limited | Method of depositing nanometre scale particles |
| US5900728A (en) | 1997-03-20 | 1999-05-04 | International Business Machines Corporation | Alternating current magnetic force microscopy system with probe having integrated coil |
| US5900729A (en) | 1997-03-20 | 1999-05-04 | International Business Machines Corporation | Magnetic force microscopy probe with integrated coil |
| US6159620A (en) | 1997-03-31 | 2000-12-12 | The Regents Of The University Of California | Single-electron solid state electronic device |
| EP1154493A3 (en) | 1997-05-30 | 2003-10-15 | Matsushita Electric Industrial Co., Ltd. | Light-emitting semiconductor device having quantum dots |
| KR100223807B1 (ko) * | 1997-06-04 | 1999-10-15 | 구본준 | 반도체 소자의 제조방법 |
| JP3452764B2 (ja) * | 1997-06-11 | 2003-09-29 | 科学技術振興事業団 | 超微細突起構造体の製造方法 |
| US5892252A (en) | 1998-02-05 | 1999-04-06 | Motorola, Inc. | Chemical sensing trench field effect transistor and method for same |
| WO1999061911A2 (en) | 1998-04-20 | 1999-12-02 | University Of North Carolina At Chapel Hill | Nanometer particles containing a reactive monolayer |
| US6211530B1 (en) * | 1998-06-12 | 2001-04-03 | Motorola, Inc. | Sparse-carrier devices and method of fabrication |
| US6218175B1 (en) * | 1998-10-30 | 2001-04-17 | International Business Machines Corporation | Nano-devices using block-copolymers |
| JP2000349275A (ja) * | 1999-06-01 | 2000-12-15 | Nec Corp | 単一電子素子とその製造方法 |
| EP1212795A4 (en) * | 1999-08-18 | 2006-09-27 | Univ North Carolina State | SENSOR ARRANGEMENT WITH CHEMICALLY CONTROLLED GATE OF AN ONE-ELECTRONIC TRANSISTOR |
| US6410934B1 (en) * | 2001-02-09 | 2002-06-25 | The Board Of Trustees Of The University Of Illinois | Silicon nanoparticle electronic switches |
-
2001
- 2001-07-13 US US09/905,319 patent/US6483125B1/en not_active Expired - Fee Related
-
2002
- 2002-07-12 TW TW091115527A patent/TW557546B/zh active
- 2002-07-12 DE DE60236436T patent/DE60236436D1/de not_active Expired - Fee Related
- 2002-07-12 AT AT02756451T patent/ATE468611T1/de not_active IP Right Cessation
- 2002-07-12 AU AU2002322459A patent/AU2002322459A1/en not_active Abandoned
- 2002-07-12 JP JP2003513046A patent/JP4814487B2/ja not_active Expired - Fee Related
- 2002-07-12 WO PCT/US2002/022137 patent/WO2003007384A2/en not_active Ceased
- 2002-07-12 EP EP02756451A patent/EP1407492B1/en not_active Expired - Lifetime
- 2002-09-17 US US10/244,860 patent/US6784082B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2005526371A5 (enExample) | ||
| US8803130B2 (en) | Graphene transistors with self-aligned gates | |
| CN104143505B (zh) | 自对准环绕结构 | |
| US8816328B2 (en) | Patterning contacts in carbon nanotube devices | |
| KR100923193B1 (ko) | 나노스케일 다중접합 양자점 소자 및 그 제조방법 | |
| US9257528B2 (en) | Graphene electronic device and method of fabricating the same | |
| WO2003007384A3 (en) | Single-electron transistors and fabrication methods | |
| JP2006504268A5 (enExample) | ||
| JP2005535119A5 (enExample) | ||
| TW200304679A (en) | Self-aligned nanotube field effect transistor and method of fabricating same | |
| JP2008504679A5 (enExample) | ||
| JP2011505697A5 (enExample) | ||
| CN104900533B (zh) | 薄膜晶体管、阵列基板、制备方法、显示面板和显示装置 | |
| JP2006352087A5 (enExample) | ||
| JP2004014875A5 (enExample) | ||
| CN103489839B (zh) | 硬掩模间隙壁结构及其制作方法 | |
| TW201029114A (en) | Thin film transistor array substrate and method for manufacturing the same | |
| US8795772B2 (en) | Method of forming nano-pads of catalytic metal for growth of single walled carbon nanotubes | |
| JP3182892B2 (ja) | 量子素子の製造方法 | |
| CN112103325B (zh) | 显示背板及其制作方法和显示装置 | |
| JP2008529301A5 (enExample) | ||
| WO2004055852A3 (en) | Field emission device, and method of manufacturing such a device | |
| CN102437064B (zh) | 硅纳米线的制造方法 | |
| US7977248B2 (en) | Double patterning with single hard mask | |
| CN111710645B (zh) | 一种显示装置制程方法和显示装置 |