JP2005524987A5 - - Google Patents

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Publication number
JP2005524987A5
JP2005524987A5 JP2004504268A JP2004504268A JP2005524987A5 JP 2005524987 A5 JP2005524987 A5 JP 2005524987A5 JP 2004504268 A JP2004504268 A JP 2004504268A JP 2004504268 A JP2004504268 A JP 2004504268A JP 2005524987 A5 JP2005524987 A5 JP 2005524987A5
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JP
Japan
Prior art keywords
layer
semiconductor
insulator
structure according
manufacturing
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JP2004504268A
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English (en)
Japanese (ja)
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JP4951202B2 (ja
JP2005524987A (ja
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Priority claimed from PCT/US2003/014314 external-priority patent/WO2003096385A2/en
Publication of JP2005524987A publication Critical patent/JP2005524987A/ja
Publication of JP2005524987A5 publication Critical patent/JP2005524987A5/ja
Application granted granted Critical
Publication of JP4951202B2 publication Critical patent/JP4951202B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004504268A 2002-05-07 2003-05-07 シリコンオンインシュレータ構造の製造方法 Expired - Lifetime JP4951202B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US37886802P 2002-05-07 2002-05-07
US60/378,868 2002-05-07
US45501803P 2003-03-12 2003-03-12
US60/455,018 2003-03-12
PCT/US2003/014314 WO2003096385A2 (en) 2002-05-07 2003-05-07 Silicon-on-insulator structures and methods

Publications (3)

Publication Number Publication Date
JP2005524987A JP2005524987A (ja) 2005-08-18
JP2005524987A5 true JP2005524987A5 (enExample) 2006-06-22
JP4951202B2 JP4951202B2 (ja) 2012-06-13

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JP2004504268A Expired - Lifetime JP4951202B2 (ja) 2002-05-07 2003-05-07 シリコンオンインシュレータ構造の製造方法

Country Status (5)

Country Link
US (1) US7452757B2 (enExample)
EP (1) EP1502285A2 (enExample)
JP (1) JP4951202B2 (enExample)
KR (1) KR101023034B1 (enExample)
WO (1) WO2003096385A2 (enExample)

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