JP2005522051A5 - - Google Patents

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Publication number
JP2005522051A5
JP2005522051A5 JP2003582806A JP2003582806A JP2005522051A5 JP 2005522051 A5 JP2005522051 A5 JP 2005522051A5 JP 2003582806 A JP2003582806 A JP 2003582806A JP 2003582806 A JP2003582806 A JP 2003582806A JP 2005522051 A5 JP2005522051 A5 JP 2005522051A5
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JP
Japan
Prior art keywords
set temperature
wafer
temperature
outer set
inner set
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JP2003582806A
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English (en)
Japanese (ja)
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JP4698951B2 (ja
JP2005522051A (ja
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Priority claimed from US10/235,453 external-priority patent/US6921724B2/en
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Publication of JP2005522051A publication Critical patent/JP2005522051A/ja
Publication of JP2005522051A5 publication Critical patent/JP2005522051A5/ja
Application granted granted Critical
Publication of JP4698951B2 publication Critical patent/JP4698951B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003582806A 2002-04-02 2003-03-25 調整可能な静電チャックのための可変温度方法 Expired - Fee Related JP4698951B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US36977302P 2002-04-02 2002-04-02
US60/369,773 2002-04-02
US10/235,453 2002-09-04
US10/235,453 US6921724B2 (en) 2002-04-02 2002-09-04 Variable temperature processes for tunable electrostatic chuck
PCT/US2003/009153 WO2003085721A2 (en) 2002-04-02 2003-03-25 Variable temperature processes for tunable electrostatic chuck

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010113921A Division JP5881277B2 (ja) 2002-04-02 2010-05-18 調整可能な静電チャックのための可変温度方法

Publications (3)

Publication Number Publication Date
JP2005522051A JP2005522051A (ja) 2005-07-21
JP2005522051A5 true JP2005522051A5 (https=) 2011-02-03
JP4698951B2 JP4698951B2 (ja) 2011-06-08

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ID=28456852

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2003582806A Expired - Fee Related JP4698951B2 (ja) 2002-04-02 2003-03-25 調整可能な静電チャックのための可変温度方法
JP2010113921A Expired - Fee Related JP5881277B2 (ja) 2002-04-02 2010-05-18 調整可能な静電チャックのための可変温度方法
JP2015227250A Expired - Lifetime JP6170540B2 (ja) 2002-04-02 2015-11-20 調整可能な静電チャックのための可変温度方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2010113921A Expired - Fee Related JP5881277B2 (ja) 2002-04-02 2010-05-18 調整可能な静電チャックのための可変温度方法
JP2015227250A Expired - Lifetime JP6170540B2 (ja) 2002-04-02 2015-11-20 調整可能な静電チャックのための可変温度方法

Country Status (11)

Country Link
US (1) US6921724B2 (https=)
EP (1) EP1493180B1 (https=)
JP (3) JP4698951B2 (https=)
KR (1) KR100921356B1 (https=)
CN (1) CN1323427C (https=)
AT (1) ATE362652T1 (https=)
AU (1) AU2003233432A1 (https=)
DE (1) DE60313861T2 (https=)
IL (2) IL164363A0 (https=)
TW (1) TWI281212B (https=)
WO (1) WO2003085721A2 (https=)

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