JP2005516882A5 - - Google Patents
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- Publication number
- JP2005516882A5 JP2005516882A5 JP2003566911A JP2003566911A JP2005516882A5 JP 2005516882 A5 JP2005516882 A5 JP 2005516882A5 JP 2003566911 A JP2003566911 A JP 2003566911A JP 2003566911 A JP2003566911 A JP 2003566911A JP 2005516882 A5 JP2005516882 A5 JP 2005516882A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- superconducting material
- film
- gas
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 43
- 238000000034 method Methods 0.000 claims 33
- 239000000463 material Substances 0.000 claims 22
- 239000007789 gas Substances 0.000 claims 20
- 239000012495 reaction gas Substances 0.000 claims 13
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims 7
- 229910001632 barium fluoride Inorganic materials 0.000 claims 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 6
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims 6
- 239000000203 mixture Substances 0.000 claims 6
- 239000012528 membrane Substances 0.000 claims 5
- 239000000956 alloy Substances 0.000 claims 4
- 229910045601 alloy Inorganic materials 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 4
- 239000002243 precursor Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims 2
- 239000005751 Copper oxide Substances 0.000 claims 2
- 229910000431 copper oxide Inorganic materials 0.000 claims 2
- 239000002887 superconductor Substances 0.000 claims 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US30895701P | 2001-07-31 | 2001-07-31 | |
| PCT/US2002/024101 WO2003067672A2 (en) | 2001-07-31 | 2002-07-30 | Methods and reactors for forming superconductor layers |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006138050A Division JP2006228754A (ja) | 2001-07-31 | 2006-05-17 | 超電導体の作製方法及び反応装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005516882A JP2005516882A (ja) | 2005-06-09 |
| JP2005516882A5 true JP2005516882A5 (https=) | 2006-01-05 |
Family
ID=27734196
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003566911A Pending JP2005516882A (ja) | 2001-07-31 | 2002-07-30 | 超電導体の作製方法及び反応装置 |
| JP2006138050A Pending JP2006228754A (ja) | 2001-07-31 | 2006-05-17 | 超電導体の作製方法及び反応装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006138050A Pending JP2006228754A (ja) | 2001-07-31 | 2006-05-17 | 超電導体の作製方法及び反応装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6797313B2 (https=) |
| EP (1) | EP1419538B1 (https=) |
| JP (2) | JP2005516882A (https=) |
| KR (1) | KR100719612B1 (https=) |
| CN (1) | CN100367525C (https=) |
| AU (1) | AU2002365423A1 (https=) |
| DE (1) | DE60218697T2 (https=) |
| WO (1) | WO2003067672A2 (https=) |
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1325170B1 (en) * | 2000-08-07 | 2014-04-23 | IGC-Superpower, LLC | Fabrication of high current coated high temperature superconducting tapes |
| US20030130129A1 (en) * | 2001-07-13 | 2003-07-10 | Massachusetts Institute Of Technology | Vacuum processing for fabrication of superconducting films fabricated by metal-organic processing |
| JP3725085B2 (ja) * | 2002-03-05 | 2005-12-07 | 株式会社東芝 | 超電導層及びその製造方法 |
| US8124170B1 (en) * | 2004-01-23 | 2012-02-28 | Metal Oxide Technologies, Inc | Method for forming superconductor material on a tape substrate |
| US20040016401A1 (en) * | 2002-07-26 | 2004-01-29 | Metal Oxide Technologies, Inc. | Method and apparatus for forming superconductor material on a tape substrate |
| US20060063680A1 (en) * | 2002-07-26 | 2006-03-23 | Metal Oxide Technologies, Inc. | System and method for joining superconductivity tape |
| US20050065035A1 (en) * | 2003-06-10 | 2005-03-24 | Rupich Martin W. | Superconductor methods and reactors |
| US7531205B2 (en) * | 2003-06-23 | 2009-05-12 | Superpower, Inc. | High throughput ion beam assisted deposition (IBAD) |
| ITTO20030693A1 (it) * | 2003-09-11 | 2005-03-12 | Edison Termoelettrica Spa | Metodo per formare strati con tessitura biassiale su substrati |
| US8227019B2 (en) * | 2003-12-15 | 2012-07-24 | Superpower Inc. | High-throughput ex-situ method for rare-earth-barium-copper-oxide (REBCO) film growth |
| US20050159298A1 (en) * | 2004-01-16 | 2005-07-21 | American Superconductor Corporation | Oxide films with nanodot flux pinning centers |
| US7261776B2 (en) * | 2004-03-30 | 2007-08-28 | American Superconductor Corporation | Deposition of buffer layers on textured metal surfaces |
| US20050223984A1 (en) * | 2004-04-08 | 2005-10-13 | Hee-Gyoun Lee | Chemical vapor deposition (CVD) apparatus usable in the manufacture of superconducting conductors |
| US7338683B2 (en) * | 2004-05-10 | 2008-03-04 | Superpower, Inc. | Superconductor fabrication processes |
| US7463915B2 (en) * | 2004-08-20 | 2008-12-09 | American Superconductor Corporation | Stacked filamentary coated superconductors |
| US7496390B2 (en) * | 2004-08-20 | 2009-02-24 | American Superconductor Corporation | Low ac loss filamentary coated superconductors |
| US7582328B2 (en) * | 2004-08-20 | 2009-09-01 | American Superconductor Corporation | Dropwise deposition of a patterned oxide superconductor |
| AU2005333196B2 (en) * | 2004-10-01 | 2009-10-01 | American Superconductor Corp. | Thick superconductor films with improved performance |
| US7816303B2 (en) * | 2004-10-01 | 2010-10-19 | American Superconductor Corporation | Architecture for high temperature superconductor wire |
| US7622426B2 (en) * | 2004-10-07 | 2009-11-24 | Brookhaven Science Associates, Llc | Methods of controlling hydrogen fluoride pressure during chemical fabrication processes |
| JP4401992B2 (ja) * | 2005-03-25 | 2010-01-20 | 財団法人国際超電導産業技術研究センター | テープ状酸化物超電導線の製造方法及びその製造装置 |
| WO2006110382A2 (en) | 2005-03-31 | 2006-10-19 | American Superconductor Corporation | Mesh-type stabilizer for filamentary coated superconductors |
| JP2009507358A (ja) * | 2005-07-29 | 2009-02-19 | アメリカン・スーパーコンダクター・コーポレーション | 高温超電導ワイヤ及びコイル |
| WO2007025062A2 (en) * | 2005-08-25 | 2007-03-01 | Wakonda Technologies, Inc. | Photovoltaic template |
| JP4716324B2 (ja) * | 2005-12-26 | 2011-07-06 | 古河電気工業株式会社 | 超電導体用基材およびその製造方法 |
| US7674751B2 (en) * | 2006-01-10 | 2010-03-09 | American Superconductor Corporation | Fabrication of sealed high temperature superconductor wires |
| JP4690246B2 (ja) * | 2006-05-19 | 2011-06-01 | 住友電気工業株式会社 | 超電導薄膜材料およびその製造方法 |
| US8030246B2 (en) * | 2006-07-21 | 2011-10-04 | American Superconductor Corporation | Low resistance splice for high temperature superconductor wires |
| WO2008100281A2 (en) * | 2006-07-24 | 2008-08-21 | American Superconductor Corporation | High temperature superconductors having planar magnetic flux pinning centers and methods for making the same |
| DE102007007567B4 (de) * | 2007-02-15 | 2009-07-30 | Zenergy Power Gmbh | Verfahren zum Herstellen eines HTSL-Bandes |
| US7893006B2 (en) * | 2007-03-23 | 2011-02-22 | American Superconductor Corporation | Systems and methods for solution-based deposition of metallic cap layers for high temperature superconductor wires |
| US8195260B2 (en) | 2008-07-23 | 2012-06-05 | American Superconductor Corporation | Two-sided splice for high temperature superconductor laminated wires |
| US8415187B2 (en) * | 2009-01-28 | 2013-04-09 | Solexant Corporation | Large-grain crystalline thin-film structures and devices and methods for forming the same |
| US8530845B2 (en) * | 2009-02-04 | 2013-09-10 | Trustees Of Boston University | Synthesis of advanced scintillators via vapor deposition techniques |
| WO2010124059A2 (en) * | 2009-04-24 | 2010-10-28 | Wakonda Technologies, Inc. | Crystalline thin-film photovoltaic structures and methods for forming the same |
| JP5096422B2 (ja) | 2009-07-10 | 2012-12-12 | 住友電気工業株式会社 | 基板および超電導線材の製造方法 |
| RU2521827C2 (ru) | 2010-02-05 | 2014-07-10 | Санам Ко., Лтд. | Способ получения керамического проводника, система для его получения и сверхпроводящий проводник с его применением |
| KR101410598B1 (ko) * | 2010-03-02 | 2014-06-24 | 도호쿠 다이가쿠 | 적층체, 그 제조 방법, 및 그것을 이용한 기능 소자 |
| US8428671B2 (en) | 2010-03-31 | 2013-04-23 | American Superconductor Corporation | Thick oxide film by single coating |
| ES2394395T3 (es) * | 2010-07-19 | 2013-01-31 | Bruker Hts Gmbh | Método de producción de un conductor recubierto de HTS y conducto recubiertor de HTS con pérdidas reducidas |
| DE102010031741B4 (de) * | 2010-07-21 | 2012-09-20 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur Herstellung von supraleitenden Schichten auf Substraten |
| JP5688804B2 (ja) * | 2011-04-27 | 2015-03-25 | 住友電気工業株式会社 | 酸化物超電導薄膜層形成用の中間層、酸化物超電導薄膜層および酸化物超電導薄膜線材 |
| GB2498565B (en) * | 2012-01-20 | 2014-09-17 | Siemens Plc | Methods for forming joints between magnesium diboride conductors |
| US8703651B2 (en) | 2012-07-06 | 2014-04-22 | Dale Richard Harshman | Layered ionic superconductor |
| CN108796474B (zh) * | 2018-06-15 | 2020-05-12 | 电子科技大学 | 一种基于溶液法同质外延MgO薄膜的制备方法 |
| US11426818B2 (en) | 2018-08-10 | 2022-08-30 | The Research Foundation for the State University | Additive manufacturing processes and additively manufactured products |
| JP7278111B2 (ja) * | 2019-03-08 | 2023-05-19 | 株式会社Screenホールディングス | 熱処理方法および熱処理装置 |
| CN113774348B (zh) * | 2021-09-22 | 2023-06-02 | 季华实验室 | 一种具有非晶氧化钒薄膜的高温超导体及其制备方法和高温超导线圈 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241823A (ja) * | 1987-03-27 | 1988-10-07 | Nissin Electric Co Ltd | 超電導薄膜の製造方法 |
| CN1013812B (zh) * | 1987-05-31 | 1991-09-04 | 西安交通大学 | 用高能量激光合成Y-Ba-Cu-O超导体的方法 |
| EP0387525B1 (de) * | 1989-03-15 | 1993-08-11 | Asea Brown Boveri Ag | Verfahren zur Herstellung einer kristallorientierten Oberflächenschicht aus einem keramischen Hochtemperatur-Supraleiter |
| JP2822447B2 (ja) * | 1989-05-19 | 1998-11-11 | 住友電気工業株式会社 | 酸化物超電導線材の製造方法および装置 |
| JP2923372B2 (ja) * | 1991-03-27 | 1999-07-26 | 財団法人国際超電導産業技術研究センター | 酸化物超電導体膜の製造方法 |
| EP0584410A1 (en) * | 1991-07-05 | 1994-03-02 | Conductus, Inc. | Superconducting electronic structures and methods of preparing same |
| US6451450B1 (en) * | 1995-04-10 | 2002-09-17 | Ut-Battelle, Llc | Method of depositing a protective layer over a biaxially textured alloy substrate and composition therefrom |
| US5972847A (en) * | 1998-01-28 | 1999-10-26 | Lockheed Martin Energy | Method for making high-critical-current-density YBa2 Cu3 O7 superconducting layers on metallic substrates |
| US6231666B1 (en) * | 1999-07-20 | 2001-05-15 | Sandia Corporation | Process for forming epitaxial perovskite thin film layers using halide precursors |
| EP1198849A2 (en) * | 1999-07-23 | 2002-04-24 | American Superconductor Corporation | Surface conditioning process for making multi-layer articles |
| WO2001008236A1 (en) * | 1999-07-23 | 2001-02-01 | American Superconductor Corporation | Coated conductor thick film precursor |
-
2002
- 2002-07-30 KR KR1020047001533A patent/KR100719612B1/ko not_active Expired - Lifetime
- 2002-07-30 JP JP2003566911A patent/JP2005516882A/ja active Pending
- 2002-07-30 EP EP02805695A patent/EP1419538B1/en not_active Expired - Lifetime
- 2002-07-30 AU AU2002365423A patent/AU2002365423A1/en not_active Abandoned
- 2002-07-30 WO PCT/US2002/024101 patent/WO2003067672A2/en not_active Ceased
- 2002-07-30 CN CNB028151879A patent/CN100367525C/zh not_active Expired - Fee Related
- 2002-07-30 US US10/208,134 patent/US6797313B2/en not_active Expired - Lifetime
- 2002-07-30 DE DE60218697T patent/DE60218697T2/de not_active Expired - Lifetime
-
2006
- 2006-05-17 JP JP2006138050A patent/JP2006228754A/ja active Pending
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