JP2005513766A - ダマシン適用において誘電体材料を堆積する方法 - Google Patents

ダマシン適用において誘電体材料を堆積する方法 Download PDF

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JP2005513766A
JP2005513766A JP2003553028A JP2003553028A JP2005513766A JP 2005513766 A JP2005513766 A JP 2005513766A JP 2003553028 A JP2003553028 A JP 2003553028A JP 2003553028 A JP2003553028 A JP 2003553028A JP 2005513766 A JP2005513766 A JP 2005513766A
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oxygen
organosilicon compound
bis
compound
carbon
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Japanese (ja)
Inventor
ジュ−ヒュン リー，
ピン シュー，
シャンカール ヴェンカタラ−マン，
リー−クン シャー，
フェイ ハン，
エリー イェー，
シュリニヴァス， ディー． ネマニ，
カンサブ イム，
アショック， ケー． シンハ，
ファルハド， ケー． モガダム，
イー ゼン，
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Applied Materials Inc
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Applied Materials Inc
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Publication of JP2005513766A publication Critical patent/JP2005513766A/ja
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/312—Organic layers, e.g. photoresist
    • H01L21/3127—Layers comprising fluoro (hydro)carbon compounds, e.g. polytetrafluoroethylene
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005294333A (ja) * 2004-03-31 2005-10-20 Semiconductor Process Laboratory Co Ltd 成膜方法及び半導体装置
JP2007258403A (ja) * 2006-03-23 2007-10-04 United Microelectronics Corp 多孔性低誘電率薄膜及びその製作方法
WO2008020592A1 (fr) 2006-08-15 2008-02-21 Jsr Corporation Matériau filmogène, film isolant contenant du silicium et procédé de formation de celui-ci
JP2008147644A (ja) * 2006-11-21 2008-06-26 Applied Materials Inc ウェットエッチングアンダカットを最小にし且つ超低ｋ（ｋ＜２．５）誘電体をポアシーリングする方法
WO2008099811A1 (ja) 2007-02-14 2008-08-21 Jsr Corporation ケイ素含有膜形成用材料、ならびにケイ素含有絶縁膜およびその形成方法
JP2009509319A (ja) * 2005-09-19 2009-03-05 インターナショナル・ビジネス・マシーンズ・コーポレーション 金属相互接続構造体
JP2012513117A (ja) * 2008-12-18 2012-06-07 アプライド マテリアルズ インコーポレイテッド 低温ギャップフィル改善のための酸化シリコンｃｖｄへの前駆体添加
JP2016135842A (ja) * 2014-11-03 2016-07-28 エア プロダクツ アンド ケミカルズ インコーポレイテッドＡｉｒ Ｐｒｏｄｕｃｔｓ Ａｎｄ Ｃｈｅｍｉｃａｌｓ Ｉｎｃｏｒｐｏｒａｔｅｄ シリコン系膜及びその形成方法

Families Citing this family (227)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6821571B2 (en) * 1999-06-18 2004-11-23 Applied Materials Inc. Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
US6879046B2 (en) * 2001-06-28 2005-04-12 Agere Systems Inc. Split barrier layer including nitrogen-containing portion and oxygen-containing portion
US6759327B2 (en) * 2001-10-09 2004-07-06 Applied Materials Inc. Method of depositing low k barrier layers
US7091137B2 (en) * 2001-12-14 2006-08-15 Applied Materials Bi-layer approach for a hermetic low dielectric constant layer for barrier applications
US6890850B2 (en) * 2001-12-14 2005-05-10 Applied Materials, Inc. Method of depositing dielectric materials in damascene applications
US6838393B2 (en) * 2001-12-14 2005-01-04 Applied Materials, Inc. Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide
US6897144B1 (en) * 2002-03-20 2005-05-24 Advanced Micro Devices, Inc. Cu capping layer deposition with improved integrated circuit reliability
US6936309B2 (en) * 2002-04-02 2005-08-30 Applied Materials, Inc. Hardness improvement of silicon carboxy films
US7749563B2 (en) * 2002-10-07 2010-07-06 Applied Materials, Inc. Two-layer film for next generation damascene barrier application with good oxidation resistance
US20040124420A1 (en) * 2002-12-31 2004-07-01 Lin Simon S.H. Etch stop layer
US7132369B2 (en) * 2002-12-31 2006-11-07 Applied Materials, Inc. Method of forming a low-K dual damascene interconnect structure
US6790788B2 (en) * 2003-01-13 2004-09-14 Applied Materials Inc. Method of improving stability in low k barrier layers
US7238393B2 (en) * 2003-02-13 2007-07-03 Asm Japan K.K. Method of forming silicon carbide films
US6913992B2 (en) * 2003-03-07 2005-07-05 Applied Materials, Inc. Method of modifying interlayer adhesion
US7208389B1 (en) 2003-03-31 2007-04-24 Novellus Systems, Inc. Method of porogen removal from porous low-k films using UV radiation
US20040253378A1 (en) * 2003-06-12 2004-12-16 Applied Materials, Inc. Stress reduction of SIOC low k film by addition of alkylenes to OMCTS based processes
JP4032044B2 (ja) 2003-06-17 2008-01-16 株式会社半導体プロセス研究所 成膜方法、半導体装置の製造方法及び半導体装置
US20050037153A1 (en) * 2003-08-14 2005-02-17 Applied Materials, Inc. Stress reduction of sioc low k films
US6849561B1 (en) * 2003-08-18 2005-02-01 Asm Japan K.K. Method of forming low-k films
US20050062164A1 (en) * 2003-09-23 2005-03-24 Taiwan Semiconductor Manufacturing Co., Ltd. Method for improving time dependent dielectric breakdown lifetimes
US7420275B1 (en) 2003-09-24 2008-09-02 Novellus Systems, Inc. Boron-doped SIC copper diffusion barrier films
US6967405B1 (en) 2003-09-24 2005-11-22 Yongsik Yu Film for copper diffusion barrier
US6903004B1 (en) * 2003-12-16 2005-06-07 Freescale Semiconductor, Inc. Method of making a semiconductor device having a low K dielectric
US7030468B2 (en) * 2004-01-16 2006-04-18 International Business Machines Corporation Low k and ultra low k SiCOH dielectric films and methods to form the same
US20050230350A1 (en) 2004-02-26 2005-10-20 Applied Materials, Inc. In-situ dry clean chamber for front end of line fabrication
US20060051966A1 (en) * 2004-02-26 2006-03-09 Applied Materials, Inc. In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber
US7341761B1 (en) 2004-03-11 2008-03-11 Novellus Systems, Inc. Methods for producing low-k CDO films
US7030041B2 (en) * 2004-03-15 2006-04-18 Applied Materials Inc. Adhesion improvement for low k dielectrics
US7288284B2 (en) * 2004-03-26 2007-10-30 Taiwan Semiconductor Manufacturing Co., Ltd. Post-cleaning chamber seasoning method
US7196423B2 (en) * 2004-03-26 2007-03-27 Taiwan Semiconductor Manufacturing Co., Ltd. Interconnect structure with dielectric barrier and fabrication method thereof
US7547643B2 (en) * 2004-03-31 2009-06-16 Applied Materials, Inc. Techniques promoting adhesion of porous low K film to underlying barrier layer
US7781351B1 (en) 2004-04-07 2010-08-24 Novellus Systems, Inc. Methods for producing low-k carbon doped oxide films with low residual stress
US6949472B1 (en) * 2004-05-03 2005-09-27 Taiwan Semiconductor Manufacturing Co., Ltd Method for high kinetic energy plasma barrier deposition
US20050277302A1 (en) * 2004-05-28 2005-12-15 Nguyen Son V Advanced low dielectric constant barrier layers
US7282438B1 (en) 2004-06-15 2007-10-16 Novellus Systems, Inc. Low-k SiC copper diffusion barrier films
US7229041B2 (en) * 2004-06-30 2007-06-12 Ohio Central Steel Company Lifting lid crusher
US7422776B2 (en) * 2004-08-24 2008-09-09 Applied Materials, Inc. Low temperature process to produce low-K dielectrics with low stress by plasma-enhanced chemical vapor deposition (PECVD)
US7166544B2 (en) * 2004-09-01 2007-01-23 Applied Materials, Inc. Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
US7695765B1 (en) 2004-11-12 2010-04-13 Novellus Systems, Inc. Methods for producing low-stress carbon-doped oxide films with improved integration properties
US20060199386A1 (en) * 2004-12-27 2006-09-07 Jim-Jey Huang Semiconductor device with low-resistance inlaid copper/barrier interconnects and method for manufacturing the same
US7253123B2 (en) * 2005-01-10 2007-08-07 Applied Materials, Inc. Method for producing gate stack sidewall spacers
US7166531B1 (en) 2005-01-31 2007-01-23 Novellus Systems, Inc. VLSI fabrication processes for introducing pores into dielectric materials
JP5180426B2 (ja) * 2005-03-11 2013-04-10 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US7704887B2 (en) * 2005-11-22 2010-04-27 Applied Materials, Inc. Remote plasma pre-clean with low hydrogen pressure
US20070134435A1 (en) * 2005-12-13 2007-06-14 Ahn Sang H Method to improve the ashing/wet etch damage resistance and integration stability of low dielectric constant films
KR101350908B1 (ko) * 2006-12-05 2014-01-16 부산대학교 산학협력단 액정 표시 패널 및 그 제조 방법
US7906174B1 (en) 2006-12-07 2011-03-15 Novellus Systems, Inc. PECVD methods for producing ultra low-k dielectric films using UV treatment
US20080182403A1 (en) * 2007-01-26 2008-07-31 Atif Noori Uv curing of pecvd-deposited sacrificial polymer films for air-gap ild
KR20090108721A (ko) * 2007-01-29 2009-10-16 어플라이드 머티어리얼스, 인코포레이티드 신규한 공기 갭 통합 방법
US7915166B1 (en) 2007-02-22 2011-03-29 Novellus Systems, Inc. Diffusion barrier and etch stop films
US7878054B2 (en) * 2007-02-28 2011-02-01 The Boeing Company Barrier coatings for polymeric substrates
US8173537B1 (en) 2007-03-29 2012-05-08 Novellus Systems, Inc. Methods for reducing UV and dielectric diffusion barrier interaction
WO2009008424A1 (ja) * 2007-07-10 2009-01-15 Jsr Corporation ケイ素化合物の製造方法
US20090093100A1 (en) * 2007-10-09 2009-04-09 Li-Qun Xia Method for forming an air gap in multilevel interconnect structure
US7879683B2 (en) * 2007-10-09 2011-02-01 Applied Materials, Inc. Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay
US8124522B1 (en) 2008-04-11 2012-02-28 Novellus Systems, Inc. Reducing UV and dielectric diffusion barrier interaction through the modulation of optical properties
FR2930561B1 (fr) * 2008-04-28 2011-01-14 Altatech Semiconductor Dispositif et procede de traitement chimique en phase vapeur.
US8247332B2 (en) 2009-12-04 2012-08-21 Novellus Systems, Inc. Hardmask materials
US8349746B2 (en) * 2010-02-23 2013-01-08 Applied Materials, Inc. Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure
US8741394B2 (en) * 2010-03-25 2014-06-03 Novellus Systems, Inc. In-situ deposition of film stacks
US9324576B2 (en) 2010-05-27 2016-04-26 Applied Materials, Inc. Selective etch for silicon films
US10283321B2 (en) 2011-01-18 2019-05-07 Applied Materials, Inc. Semiconductor processing system and methods using capacitively coupled plasma
US8771539B2 (en) 2011-02-22 2014-07-08 Applied Materials, Inc. Remotely-excited fluorine and water vapor etch
US9064815B2 (en) 2011-03-14 2015-06-23 Applied Materials, Inc. Methods for etch of metal and metal-oxide films
US8999856B2 (en) 2011-03-14 2015-04-07 Applied Materials, Inc. Methods for etch of sin films
US8524600B2 (en) 2011-03-31 2013-09-03 Applied Materials, Inc. Post deposition treatments for CVD cobalt films
US8771536B2 (en) 2011-08-01 2014-07-08 Applied Materials, Inc. Dry-etch for silicon-and-carbon-containing films
US8679982B2 (en) 2011-08-26 2014-03-25 Applied Materials, Inc. Selective suppression of dry-etch rate of materials containing both silicon and oxygen
US8679983B2 (en) 2011-09-01 2014-03-25 Applied Materials, Inc. Selective suppression of dry-etch rate of materials containing both silicon and nitrogen
US8927390B2 (en) 2011-09-26 2015-01-06 Applied Materials, Inc. Intrench profile
US8808563B2 (en) 2011-10-07 2014-08-19 Applied Materials, Inc. Selective etch of silicon by way of metastable hydrogen termination
WO2013070436A1 (en) 2011-11-08 2013-05-16 Applied Materials, Inc. Methods of reducing substrate dislocation during gapfill processing
US10832904B2 (en) 2012-06-12 2020-11-10 Lam Research Corporation Remote plasma based deposition of oxygen doped silicon carbide films
US9234276B2 (en) * 2013-05-31 2016-01-12 Novellus Systems, Inc. Method to obtain SiC class of films of desired composition and film properties
US10211310B2 (en) 2012-06-12 2019-02-19 Novellus Systems, Inc. Remote plasma based deposition of SiOC class of films
US10325773B2 (en) 2012-06-12 2019-06-18 Novellus Systems, Inc. Conformal deposition of silicon carbide films
US9267739B2 (en) 2012-07-18 2016-02-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
US9373517B2 (en) 2012-08-02 2016-06-21 Applied Materials, Inc. Semiconductor processing with DC assisted RF power for improved control
US9034770B2 (en) 2012-09-17 2015-05-19 Applied Materials, Inc. Differential silicon oxide etch
US9023734B2 (en) 2012-09-18 2015-05-05 Applied Materials, Inc. Radical-component oxide etch
US9390937B2 (en) 2012-09-20 2016-07-12 Applied Materials, Inc. Silicon-carbon-nitride selective etch
US9132436B2 (en) 2012-09-21 2015-09-15 Applied Materials, Inc. Chemical control features in wafer process equipment
US8765574B2 (en) 2012-11-09 2014-07-01 Applied Materials, Inc. Dry etch process
US8969212B2 (en) 2012-11-20 2015-03-03 Applied Materials, Inc. Dry-etch selectivity
US9064816B2 (en) 2012-11-30 2015-06-23 Applied Materials, Inc. Dry-etch for selective oxidation removal
US8980763B2 (en) 2012-11-30 2015-03-17 Applied Materials, Inc. Dry-etch for selective tungsten removal
US9337068B2 (en) 2012-12-18 2016-05-10 Lam Research Corporation Oxygen-containing ceramic hard masks and associated wet-cleans
US9111877B2 (en) 2012-12-18 2015-08-18 Applied Materials, Inc. Non-local plasma oxide etch
US8921234B2 (en) 2012-12-21 2014-12-30 Applied Materials, Inc. Selective titanium nitride etching
US10256079B2 (en) 2013-02-08 2019-04-09 Applied Materials, Inc. Semiconductor processing systems having multiple plasma configurations
US9362130B2 (en) 2013-03-01 2016-06-07 Applied Materials, Inc. Enhanced etching processes using remote plasma sources
US9040422B2 (en) 2013-03-05 2015-05-26 Applied Materials, Inc. Selective titanium nitride removal
US8801952B1 (en) 2013-03-07 2014-08-12 Applied Materials, Inc. Conformal oxide dry etch
US10170282B2 (en) 2013-03-08 2019-01-01 Applied Materials, Inc. Insulated semiconductor faceplate designs
US20140271097A1 (en) 2013-03-15 2014-09-18 Applied Materials, Inc. Processing systems and methods for halide scavenging
US8895449B1 (en) 2013-05-16 2014-11-25 Applied Materials, Inc. Delicate dry clean
US9114438B2 (en) 2013-05-21 2015-08-25 Applied Materials, Inc. Copper residue chamber clean
US10297442B2 (en) 2013-05-31 2019-05-21 Lam Research Corporation Remote plasma based deposition of graded or multi-layered silicon carbide film
US9493879B2 (en) 2013-07-12 2016-11-15 Applied Materials, Inc. Selective sputtering for pattern transfer
US9773648B2 (en) 2013-08-30 2017-09-26 Applied Materials, Inc. Dual discharge modes operation for remote plasma
US8956980B1 (en) 2013-09-16 2015-02-17 Applied Materials, Inc. Selective etch of silicon nitride
CN110391177A (zh) * 2013-09-29 2019-10-29 格罗方德半导体公司 自组装单层原位气相沉积作为铜助粘剂及扩散阻障件的方法
US9371579B2 (en) 2013-10-24 2016-06-21 Lam Research Corporation Ground state hydrogen radical sources for chemical vapor deposition of silicon-carbon-containing films
US8951429B1 (en) 2013-10-29 2015-02-10 Applied Materials, Inc. Tungsten oxide processing
US9576809B2 (en) 2013-11-04 2017-02-21 Applied Materials, Inc. Etch suppression with germanium
US9236265B2 (en) 2013-11-04 2016-01-12 Applied Materials, Inc. Silicon germanium processing
US9520303B2 (en) 2013-11-12 2016-12-13 Applied Materials, Inc. Aluminum selective etch
US9245762B2 (en) 2013-12-02 2016-01-26 Applied Materials, Inc. Procedure for etch rate consistency
US9117855B2 (en) 2013-12-04 2015-08-25 Applied Materials, Inc. Polarity control for remote plasma
US9263278B2 (en) 2013-12-17 2016-02-16 Applied Materials, Inc. Dopant etch selectivity control
US9287095B2 (en) 2013-12-17 2016-03-15 Applied Materials, Inc. Semiconductor system assemblies and methods of operation
US9190293B2 (en) 2013-12-18 2015-11-17 Applied Materials, Inc. Even tungsten etch for high aspect ratio trenches
US9287134B2 (en) 2014-01-17 2016-03-15 Applied Materials, Inc. Titanium oxide etch
US9293568B2 (en) 2014-01-27 2016-03-22 Applied Materials, Inc. Method of fin patterning
US9396989B2 (en) 2014-01-27 2016-07-19 Applied Materials, Inc. Air gaps between copper lines
US9385028B2 (en) 2014-02-03 2016-07-05 Applied Materials, Inc. Air gap process
US9499898B2 (en) 2014-03-03 2016-11-22 Applied Materials, Inc. Layered thin film heater and method of fabrication
US9299575B2 (en) 2014-03-17 2016-03-29 Applied Materials, Inc. Gas-phase tungsten etch
US9299538B2 (en) 2014-03-20 2016-03-29 Applied Materials, Inc. Radial waveguide systems and methods for post-match control of microwaves
US9299537B2 (en) 2014-03-20 2016-03-29 Applied Materials, Inc. Radial waveguide systems and methods for post-match control of microwaves
US9136273B1 (en) 2014-03-21 2015-09-15 Applied Materials, Inc. Flash gate air gap
US9903020B2 (en) 2014-03-31 2018-02-27 Applied Materials, Inc. Generation of compact alumina passivation layers on aluminum plasma equipment components
US9269590B2 (en) 2014-04-07 2016-02-23 Applied Materials, Inc. Spacer formation
US9309598B2 (en) 2014-05-28 2016-04-12 Applied Materials, Inc. Oxide and metal removal
US9847289B2 (en) 2014-05-30 2017-12-19 Applied Materials, Inc. Protective via cap for improved interconnect performance
US9378969B2 (en) 2014-06-19 2016-06-28 Applied Materials, Inc. Low temperature gas-phase carbon removal
US9406523B2 (en) 2014-06-19 2016-08-02 Applied Materials, Inc. Highly selective doped oxide removal method
US9281238B2 (en) * 2014-07-11 2016-03-08 United Microelectronics Corp. Method for fabricating interlayer dielectric layer
US9425058B2 (en) 2014-07-24 2016-08-23 Applied Materials, Inc. Simplified litho-etch-litho-etch process
US9378978B2 (en) 2014-07-31 2016-06-28 Applied Materials, Inc. Integrated oxide recess and floating gate fin trimming
US9159606B1 (en) 2014-07-31 2015-10-13 Applied Materials, Inc. Metal air gap
US9496167B2 (en) 2014-07-31 2016-11-15 Applied Materials, Inc. Integrated bit-line airgap formation and gate stack post clean
US9165786B1 (en) 2014-08-05 2015-10-20 Applied Materials, Inc. Integrated oxide and nitride recess for better channel contact in 3D architectures
US9659753B2 (en) 2014-08-07 2017-05-23 Applied Materials, Inc. Grooved insulator to reduce leakage current
US9553102B2 (en) 2014-08-19 2017-01-24 Applied Materials, Inc. Tungsten separation
US9355856B2 (en) 2014-09-12 2016-05-31 Applied Materials, Inc. V trench dry etch
US9368364B2 (en) 2014-09-24 2016-06-14 Applied Materials, Inc. Silicon etch process with tunable selectivity to SiO2 and other materials
US9478434B2 (en) 2014-09-24 2016-10-25 Applied Materials, Inc. Chlorine-based hardmask removal
US9613822B2 (en) 2014-09-25 2017-04-04 Applied Materials, Inc. Oxide etch selectivity enhancement
US9966240B2 (en) 2014-10-14 2018-05-08 Applied Materials, Inc. Systems and methods for internal surface conditioning assessment in plasma processing equipment
US9355922B2 (en) 2014-10-14 2016-05-31 Applied Materials, Inc. Systems and methods for internal surface conditioning in plasma processing equipment
US11637002B2 (en) 2014-11-26 2023-04-25 Applied Materials, Inc. Methods and systems to enhance process uniformity
US9299583B1 (en) 2014-12-05 2016-03-29 Applied Materials, Inc. Aluminum oxide selective etch
US10573496B2 (en) 2014-12-09 2020-02-25 Applied Materials, Inc. Direct outlet toroidal plasma source
US10224210B2 (en) 2014-12-09 2019-03-05 Applied Materials, Inc. Plasma processing system with direct outlet toroidal plasma source
US9502258B2 (en) 2014-12-23 2016-11-22 Applied Materials, Inc. Anisotropic gap etch
US9343272B1 (en) 2015-01-08 2016-05-17 Applied Materials, Inc. Self-aligned process
US11257693B2 (en) 2015-01-09 2022-02-22 Applied Materials, Inc. Methods and systems to improve pedestal temperature control
US9373522B1 (en) 2015-01-22 2016-06-21 Applied Mateials, Inc. Titanium nitride removal
US9449846B2 (en) 2015-01-28 2016-09-20 Applied Materials, Inc. Vertical gate separation
US9728437B2 (en) 2015-02-03 2017-08-08 Applied Materials, Inc. High temperature chuck for plasma processing systems
US20160225652A1 (en) 2015-02-03 2016-08-04 Applied Materials, Inc. Low temperature chuck for plasma processing systems
US9881805B2 (en) 2015-03-02 2018-01-30 Applied Materials, Inc. Silicon selective removal
US20160314964A1 (en) 2015-04-21 2016-10-27 Lam Research Corporation Gap fill using carbon-based films
US9741593B2 (en) 2015-08-06 2017-08-22 Applied Materials, Inc. Thermal management systems and methods for wafer processing systems
US9691645B2 (en) 2015-08-06 2017-06-27 Applied Materials, Inc. Bolted wafer chuck thermal management systems and methods for wafer processing systems
US9349605B1 (en) 2015-08-07 2016-05-24 Applied Materials, Inc. Oxide etch selectivity systems and methods
US10504700B2 (en) 2015-08-27 2019-12-10 Applied Materials, Inc. Plasma etching systems and methods with secondary plasma injection
US9754822B1 (en) * 2016-03-02 2017-09-05 Taiwan Semiconductor Manufacturing Company, Ltd. Interconnect structure and method
US10504754B2 (en) 2016-05-19 2019-12-10 Applied Materials, Inc. Systems and methods for improved semiconductor etching and component protection
US10522371B2 (en) 2016-05-19 2019-12-31 Applied Materials, Inc. Systems and methods for improved semiconductor etching and component protection
US9865484B1 (en) 2016-06-29 2018-01-09 Applied Materials, Inc. Selective etch using material modification and RF pulsing
US10199500B2 (en) * 2016-08-02 2019-02-05 Taiwan Semiconductor Manufacturing Company, Ltd. Multi-layer film device and method
US10858727B2 (en) 2016-08-19 2020-12-08 Applied Materials, Inc. High density, low stress amorphous carbon film, and process and equipment for its deposition
US10062575B2 (en) 2016-09-09 2018-08-28 Applied Materials, Inc. Poly directional etch by oxidation
US10629473B2 (en) 2016-09-09 2020-04-21 Applied Materials, Inc. Footing removal for nitride spacer
US9847221B1 (en) 2016-09-29 2017-12-19 Lam Research Corporation Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing
US10062585B2 (en) 2016-10-04 2018-08-28 Applied Materials, Inc. Oxygen compatible plasma source
US9721789B1 (en) 2016-10-04 2017-08-01 Applied Materials, Inc. Saving ion-damaged spacers
US10546729B2 (en) 2016-10-04 2020-01-28 Applied Materials, Inc. Dual-channel showerhead with improved profile
US9934942B1 (en) 2016-10-04 2018-04-03 Applied Materials, Inc. Chamber with flow-through source
US10062579B2 (en) 2016-10-07 2018-08-28 Applied Materials, Inc. Selective SiN lateral recess
US9947549B1 (en) 2016-10-10 2018-04-17 Applied Materials, Inc. Cobalt-containing material removal
US9768034B1 (en) 2016-11-11 2017-09-19 Applied Materials, Inc. Removal methods for high aspect ratio structures
US10163696B2 (en) 2016-11-11 2018-12-25 Applied Materials, Inc. Selective cobalt removal for bottom up gapfill
US10026621B2 (en) 2016-11-14 2018-07-17 Applied Materials, Inc. SiN spacer profile patterning
US10242908B2 (en) 2016-11-14 2019-03-26 Applied Materials, Inc. Airgap formation with damage-free copper
US10002787B2 (en) 2016-11-23 2018-06-19 Lam Research Corporation Staircase encapsulation in 3D NAND fabrication
US9837270B1 (en) 2016-12-16 2017-12-05 Lam Research Corporation Densification of silicon carbide film using remote plasma treatment
US10566206B2 (en) 2016-12-27 2020-02-18 Applied Materials, Inc. Systems and methods for anisotropic material breakthrough
US10403507B2 (en) 2017-02-03 2019-09-03 Applied Materials, Inc. Shaped etch profile with oxidation
US10431429B2 (en) 2017-02-03 2019-10-01 Applied Materials, Inc. Systems and methods for radial and azimuthal control of plasma uniformity
US10043684B1 (en) 2017-02-06 2018-08-07 Applied Materials, Inc. Self-limiting atomic thermal etching systems and methods
US10319739B2 (en) 2017-02-08 2019-06-11 Applied Materials, Inc. Accommodating imperfectly aligned memory holes
US10943834B2 (en) 2017-03-13 2021-03-09 Applied Materials, Inc. Replacement contact process
US10319649B2 (en) 2017-04-11 2019-06-11 Applied Materials, Inc. Optical emission spectroscopy (OES) for remote plasma monitoring
US11276590B2 (en) 2017-05-17 2022-03-15 Applied Materials, Inc. Multi-zone semiconductor substrate supports
US11276559B2 (en) 2017-05-17 2022-03-15 Applied Materials, Inc. Semiconductor processing chamber for multiple precursor flow
US10497579B2 (en) 2017-05-31 2019-12-03 Applied Materials, Inc. Water-free etching methods
US10049891B1 (en) 2017-05-31 2018-08-14 Applied Materials, Inc. Selective in situ cobalt residue removal
US10920320B2 (en) 2017-06-16 2021-02-16 Applied Materials, Inc. Plasma health determination in semiconductor substrate processing reactors
US10541246B2 (en) 2017-06-26 2020-01-21 Applied Materials, Inc. 3D flash memory cells which discourage cross-cell electrical tunneling
US10727080B2 (en) 2017-07-07 2020-07-28 Applied Materials, Inc. Tantalum-containing material removal
US10541184B2 (en) 2017-07-11 2020-01-21 Applied Materials, Inc. Optical emission spectroscopic techniques for monitoring etching
US10354889B2 (en) 2017-07-17 2019-07-16 Applied Materials, Inc. Non-halogen etching of silicon-containing materials
US10170336B1 (en) 2017-08-04 2019-01-01 Applied Materials, Inc. Methods for anisotropic control of selective silicon removal
US10043674B1 (en) 2017-08-04 2018-08-07 Applied Materials, Inc. Germanium etching systems and methods
US10297458B2 (en) 2017-08-07 2019-05-21 Applied Materials, Inc. Process window widening using coated parts in plasma etch processes
US10128086B1 (en) 2017-10-24 2018-11-13 Applied Materials, Inc. Silicon pretreatment for nitride removal
US10283324B1 (en) 2017-10-24 2019-05-07 Applied Materials, Inc. Oxygen treatment for nitride etching
US10256112B1 (en) 2017-12-08 2019-04-09 Applied Materials, Inc. Selective tungsten removal
US10903054B2 (en) 2017-12-19 2021-01-26 Applied Materials, Inc. Multi-zone gas distribution systems and methods
US10854426B2 (en) 2018-01-08 2020-12-01 Applied Materials, Inc. Metal recess for semiconductor structures
US10964512B2 (en) 2018-02-15 2021-03-30 Applied Materials, Inc. Semiconductor processing chamber multistage mixing apparatus and methods
US10679870B2 (en) 2018-02-15 2020-06-09 Applied Materials, Inc. Semiconductor processing chamber multistage mixing apparatus
TWI766433B (zh) 2018-02-28 2022-06-01 美商應用材料股份有限公司 形成氣隙的系統及方法
US10593560B2 (en) 2018-03-01 2020-03-17 Applied Materials, Inc. Magnetic induction plasma source for semiconductor processes and equipment
US10319600B1 (en) 2018-03-12 2019-06-11 Applied Materials, Inc. Thermal silicon etch
US10497573B2 (en) 2018-03-13 2019-12-03 Applied Materials, Inc. Selective atomic layer etching of semiconductor materials
US10573527B2 (en) 2018-04-06 2020-02-25 Applied Materials, Inc. Gas-phase selective etching systems and methods
US10490406B2 (en) 2018-04-10 2019-11-26 Appled Materials, Inc. Systems and methods for material breakthrough
US10699879B2 (en) 2018-04-17 2020-06-30 Applied Materials, Inc. Two piece electrode assembly with gap for plasma control
US10886137B2 (en) 2018-04-30 2021-01-05 Applied Materials, Inc. Selective nitride removal
US10872778B2 (en) 2018-07-06 2020-12-22 Applied Materials, Inc. Systems and methods utilizing solid-phase etchants
US10755941B2 (en) 2018-07-06 2020-08-25 Applied Materials, Inc. Self-limiting selective etching systems and methods
US10840087B2 (en) 2018-07-20 2020-11-17 Lam Research Corporation Remote plasma based deposition of boron nitride, boron carbide, and boron carbonitride films
US10672642B2 (en) 2018-07-24 2020-06-02 Applied Materials, Inc. Systems and methods for pedestal configuration
US11049755B2 (en) 2018-09-14 2021-06-29 Applied Materials, Inc. Semiconductor substrate supports with embedded RF shield
US10892198B2 (en) 2018-09-14 2021-01-12 Applied Materials, Inc. Systems and methods for improved performance in semiconductor processing
US11062887B2 (en) 2018-09-17 2021-07-13 Applied Materials, Inc. High temperature RF heater pedestals
US11417534B2 (en) 2018-09-21 2022-08-16 Applied Materials, Inc. Selective material removal
US11682560B2 (en) 2018-10-11 2023-06-20 Applied Materials, Inc. Systems and methods for hafnium-containing film removal
WO2020081367A1 (en) 2018-10-19 2020-04-23 Lam Research Corporation Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill
US11121002B2 (en) 2018-10-24 2021-09-14 Applied Materials, Inc. Systems and methods for etching metals and metal derivatives
US11437242B2 (en) 2018-11-27 2022-09-06 Applied Materials, Inc. Selective removal of silicon-containing materials
US11721527B2 (en) 2019-01-07 2023-08-08 Applied Materials, Inc. Processing chamber mixing systems
US10920319B2 (en) 2019-01-11 2021-02-16 Applied Materials, Inc. Ceramic showerheads with conductive electrodes

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09260369A (ja) * 1996-03-25 1997-10-03 Toshiba Corp 絶縁膜の形成方法
JPH1044160A (ja) * 1996-07-29 1998-02-17 Tdk Corp 成形金型とその製造方法
JP2001185547A (ja) * 1999-10-18 2001-07-06 Applied Materials Inc 極限低誘電率膜のためのキャッピング層
JP2001196365A (ja) * 2000-01-11 2001-07-19 Fujitsu Vlsi Ltd 成膜方法、成膜装置及び半導体装置の製造方法
JP2001326224A (ja) * 2000-02-28 2001-11-22 Canon Sales Co Inc 半導体装置及びその製造方法
JP2001332550A (ja) * 2000-05-24 2001-11-30 Canon Sales Co Inc 半導体装置及びその製造方法
WO2002054484A2 (en) * 2001-01-03 2002-07-11 Dow Corning Corporation Metal ion diffusion barrier layers
WO2002077320A1 (en) * 2001-03-23 2002-10-03 Dow Corning Corporation Method for producing hydrogenated silicon oxycarbide films
WO2003005438A2 (en) * 2001-07-02 2003-01-16 Dow Corning Corporation Improved metal barrier behavior by sic:h deposition on porous materials

Family Cites Families (137)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1147014A (en) 1967-01-27 1969-04-02 Westinghouse Electric Corp Improvements in diffusion masking
US4262631A (en) 1979-10-01 1981-04-21 Kubacki Ronald M Thin film deposition apparatus using an RF glow discharge
JPS59128281A (ja) 1982-12-29 1984-07-24 信越化学工業株式会社 炭化けい素被覆物の製造方法
JPH07111957B2 (ja) 1984-03-28 1995-11-29 圭弘 浜川 半導体の製法
US4649071A (en) 1984-04-28 1987-03-10 Kabushiki Kaisha Toyota Chuo Kenkyusho Composite material and process for producing the same
US4759947A (en) 1984-10-08 1988-07-26 Canon Kabushiki Kaisha Method for forming deposition film using Si compound and active species from carbon and halogen compound
US4795947A (en) 1984-11-16 1989-01-03 Deutsche Thomson-Brandt Gmbh Device for eliminating the interline flicker
US5000178A (en) 1986-05-23 1991-03-19 Lti Biomedical, Inc. Shielded electromagnetic transducer
US4951601A (en) 1986-12-19 1990-08-28 Applied Materials, Inc. Multi-chamber integrated process system
US5000113A (en) 1986-12-19 1991-03-19 Applied Materials, Inc. Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process
US4872947A (en) 1986-12-19 1989-10-10 Applied Materials, Inc. CVD of silicon oxide using TEOS decomposition and in-situ planarization process
US4895734A (en) 1987-03-31 1990-01-23 Hitachi Chemical Company, Ltd. Process for forming insulating film used in thin film electroluminescent device
US4894352A (en) 1988-10-26 1990-01-16 Texas Instruments Inc. Deposition of silicon-containing films using organosilicon compounds and nitrogen trifluoride
US4981724A (en) 1988-10-27 1991-01-01 Hochberg Arthur K Deposition of silicon oxide films using alkylsilane liquid sources
US5003178A (en) 1988-11-14 1991-03-26 Electron Vision Corporation Large-area uniform electron source
US5011706A (en) 1989-04-12 1991-04-30 Dow Corning Corporation Method of forming coatings containing amorphous silicon carbide
JPH03105974A (ja) 1989-09-19 1991-05-02 Kobe Steel Ltd 多結晶ダイヤ薄膜合成によるシヨツトキー・ダイオードの製作法
EP0449117A3 (en) 1990-03-23 1992-05-06 Matsushita Electric Industrial Co., Ltd. Organic polymer and preparation and use thereof
WO1992012535A1 (en) 1991-01-08 1992-07-23 Fujitsu Limited Process for forming silicon oxide film
US5525550A (en) 1991-05-21 1996-06-11 Fujitsu Limited Process for forming thin films by plasma CVD for use in the production of semiconductor devices
US5242530A (en) 1991-08-05 1993-09-07 International Business Machines Corporation Pulsed gas plasma-enhanced chemical vapor deposition of silicon
US5238866A (en) 1991-09-11 1993-08-24 GmbH & Co. Ingenieurburo Berlin Biotronik Mess- und Therapiegerate Plasma enhanced chemical vapor deposition process for producing an amorphous semiconductive surface coating
US5224441A (en) 1991-09-27 1993-07-06 The Boc Group, Inc. Apparatus for rapid plasma treatments and method
US5472829A (en) 1991-12-30 1995-12-05 Sony Corporation Method of forming a resist pattern by using an anti-reflective layer
US5472827A (en) 1991-12-30 1995-12-05 Sony Corporation Method of forming a resist pattern using an anti-reflective layer
WO1993023713A1 (en) 1992-05-15 1993-11-25 Shin-Etsu Quartz Products Co., Ltd. Vertical heat treatment apparatus and heat insulating material
US5298597A (en) 1992-09-18 1994-03-29 Industrial Technology Research Institute Aqueous preparation of polyamide with catalyst mixture
JP2734915B2 (ja) 1992-11-18 1998-04-02 株式会社デンソー 半導体のドライエッチング方法
JP2684942B2 (ja) 1992-11-30 1997-12-03 日本電気株式会社 化学気相成長法と化学気相成長装置および多層配線の製造方法
US5298587A (en) 1992-12-21 1994-03-29 The Dow Chemical Company Protective film for articles and method
US5360491A (en) 1993-04-07 1994-11-01 The United States Of America As Represented By The United States Department Of Energy β-silicon carbide protective coating and method for fabricating same
US5465680A (en) 1993-07-01 1995-11-14 Dow Corning Corporation Method of forming crystalline silicon carbide coatings
US5468978A (en) 1993-07-07 1995-11-21 Dowben; Peter A. Forming B1-x Cx semiconductor devices by chemical vapor deposition
US5433786A (en) 1993-08-27 1995-07-18 The Dow Chemical Company Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein
JP2899600B2 (ja) 1994-01-25 1999-06-02 キヤノン販売 株式会社 成膜方法
US5618619A (en) 1994-03-03 1997-04-08 Monsanto Company Highly abrasion-resistant, flexible coatings for soft substrates
JPH07245332A (ja) 1994-03-04 1995-09-19 Hitachi Ltd 半導体製造装置および半導体装置の製造方法ならびに半導体装置
US5565084A (en) 1994-10-11 1996-10-15 Qnix Computer Co., Ltd. Electropolishing methods for etching substrate in self alignment
US5607773A (en) 1994-12-20 1997-03-04 Texas Instruments Incorporated Method of forming a multilevel dielectric
EP0720223B1 (en) 1994-12-30 2003-03-26 STMicroelectronics S.r.l. Process for the production of a semiconductor device having better interface adhesion between dielectric layers
US5818071A (en) 1995-02-02 1998-10-06 Dow Corning Corporation Silicon carbide metal diffusion barrier layer
US5710067A (en) 1995-06-07 1998-01-20 Advanced Micro Devices, Inc. Silicon oxime film
US5623160A (en) 1995-09-14 1997-04-22 Liberkowski; Janusz B. Signal-routing or interconnect substrate, structure and apparatus
US5789776A (en) 1995-09-22 1998-08-04 Nvx Corporation Single poly memory cell and array
US5638251A (en) 1995-10-03 1997-06-10 Advanced Refractory Technologies, Inc. Capacitive thin films using diamond-like nanocomposite materials
JPH09237785A (ja) 1995-12-28 1997-09-09 Toshiba Corp 半導体装置およびその製造方法
US5741626A (en) 1996-04-15 1998-04-21 Motorola, Inc. Method for forming a dielectric tantalum nitride layer as an anti-reflective coating (ARC)
US5780163A (en) 1996-06-05 1998-07-14 Dow Corning Corporation Multilayer coating for microelectronic devices
US5869396A (en) 1996-07-15 1999-02-09 Chartered Semiconductor Manufacturing Ltd. Method for forming a polycide gate electrode
US5989998A (en) 1996-08-29 1999-11-23 Matsushita Electric Industrial Co., Ltd. Method of forming interlayer insulating film
DE19637334A1 (de) 1996-09-13 1998-03-19 Bayer Ag Stabilisierte blockierte Isocyanate
US5776235A (en) 1996-10-04 1998-07-07 Dow Corning Corporation Thick opaque ceramic coatings
US5730792A (en) 1996-10-04 1998-03-24 Dow Corning Corporation Opaque ceramic coatings
US5711987A (en) 1996-10-04 1998-01-27 Dow Corning Corporation Electronic coatings
US5855681A (en) 1996-11-18 1999-01-05 Applied Materials, Inc. Ultra high throughput wafer vacuum processing system
US5789316A (en) 1997-03-10 1998-08-04 Vanguard International Semiconductor Corporation Self-aligned method for forming a narrow via
US6080526A (en) 1997-03-24 2000-06-27 Alliedsignal Inc. Integration of low-k polymers into interlevel dielectrics using controlled electron-beam radiation
US5817579A (en) 1997-04-09 1998-10-06 Vanguard International Semiconductor Corporation Two step plasma etch method for forming self aligned contact
US5976979A (en) 1997-06-10 1999-11-02 Industrial Technology Research Institute Sequential oxygen plasma treatment and chemical mechanical polish (CMP) planarizing method for forming planarized low dielectric constant dielectric layer
JPH1116904A (ja) 1997-06-26 1999-01-22 Mitsubishi Electric Corp 半導体装置及びその製造方法
JP3411559B2 (ja) 1997-07-28 2003-06-03 マサチューセッツ・インスティチュート・オブ・テクノロジー シリコーン膜の熱分解化学蒸着法
US5926740A (en) 1997-10-27 1999-07-20 Micron Technology, Inc. Graded anti-reflective coating for IC lithography
KR19990030660A (ko) 1997-10-02 1999-05-06 윤종용 전자빔을 이용한 반도체장치의 층간 절연막 형성방법
US6051321A (en) 1997-10-24 2000-04-18 Quester Technology, Inc. Low dielectric constant materials and method
US6291334B1 (en) 1997-12-19 2001-09-18 Applied Materials, Inc. Etch stop layer for dual damascene process
US6555476B1 (en) * 1997-12-23 2003-04-29 Texas Instruments Incorporated Silicon carbide as a stop layer in chemical mechanical polishing for isolation dielectric
US6107192A (en) 1997-12-30 2000-08-22 Applied Materials, Inc. Reactive preclean prior to metallization for sub-quarter micron application
US6140226A (en) 1998-01-16 2000-10-31 International Business Machines Corporation Dual damascene processing for semiconductor chip interconnects
US6432846B1 (en) 1999-02-02 2002-08-13 Asm Japan K.K. Silicone polymer insulation film on semiconductor substrate and method for forming the film
US6514880B2 (en) 1998-02-05 2003-02-04 Asm Japan K.K. Siloxan polymer film on semiconductor substrate and method for forming same
TW437017B (en) 1998-02-05 2001-05-28 Asm Japan Kk Silicone polymer insulation film on semiconductor substrate and method for formation thereof
US6383955B1 (en) 1998-02-05 2002-05-07 Asm Japan K.K. Silicone polymer insulation film on semiconductor substrate and method for forming the film
US6054379A (en) * 1998-02-11 2000-04-25 Applied Materials, Inc. Method of depositing a low k dielectric with organo silane
US6287990B1 (en) 1998-02-11 2001-09-11 Applied Materials, Inc. CVD plasma assisted low dielectric constant films
US6660656B2 (en) * 1998-02-11 2003-12-09 Applied Materials Inc. Plasma processes for depositing low dielectric constant films
US6340435B1 (en) 1998-02-11 2002-01-22 Applied Materials, Inc. Integrated low K dielectrics and etch stops
US6413583B1 (en) 1998-02-11 2002-07-02 Applied Materials, Inc. Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound
US6303523B2 (en) 1998-02-11 2001-10-16 Applied Materials, Inc. Plasma processes for depositing low dielectric constant films
US6627532B1 (en) * 1998-02-11 2003-09-30 Applied Materials, Inc. Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition
JP3305251B2 (ja) 1998-02-26 2002-07-22 松下電器産業株式会社 配線構造体の形成方法
US6068884A (en) 1998-04-28 2000-05-30 Silcon Valley Group Thermal Systems, Llc Method of making low κ dielectric inorganic/organic hybrid films
US6159871A (en) 1998-05-29 2000-12-12 Dow Corning Corporation Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
US6060132A (en) 1998-06-15 2000-05-09 Siemens Aktiengesellschaft High density plasma CVD process for making dielectric anti-reflective coatings
US6316167B1 (en) 2000-01-10 2001-11-13 International Business Machines Corporation Tunabale vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and application thereof
US6147009A (en) 1998-06-29 2000-11-14 International Business Machines Corporation Hydrogenated oxidized silicon carbon material
US6071809A (en) 1998-09-25 2000-06-06 Rockwell Semiconductor Systems, Inc. Methods for forming high-performing dual-damascene interconnect structures
US6974766B1 (en) 1998-10-01 2005-12-13 Applied Materials, Inc. In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application
US6528426B1 (en) * 1998-10-16 2003-03-04 Texas Instruments Incorporated Integrated circuit interconnect and method
US6169039B1 (en) 1998-11-06 2001-01-02 Advanced Micro Devices, Inc. Electron bean curing of low-k dielectrics in integrated circuits
JP2002533502A (ja) * 1998-12-22 2002-10-08 フイルメニツヒ ソシエテ アノニム 吸着性を有する多孔質ポリメチルシルセスキオキサン
JP3353743B2 (ja) 1999-05-18 2002-12-03 日本電気株式会社 半導体装置とその製造方法
US6312793B1 (en) 1999-05-26 2001-11-06 International Business Machines Corporation Multiphase low dielectric constant material
US6204201B1 (en) 1999-06-11 2001-03-20 Electron Vision Corporation Method of processing films prior to chemical vapor deposition using electron beam processing
US6436824B1 (en) 1999-07-02 2002-08-20 Chartered Semiconductor Manufacturing Ltd. Low dielectric constant materials for copper damascene
US6114259A (en) 1999-07-27 2000-09-05 Lsi Logic Corporation Process for treating exposed surfaces of a low dielectric constant carbon doped silicon oxide dielectric material to protect the material from damage
US6399489B1 (en) 1999-11-01 2002-06-04 Applied Materials, Inc. Barrier layer deposition using HDP-CVD
FR2802336B1 (fr) * 1999-12-13 2002-03-01 St Microelectronics Sa Structure d'interconnexions de type damascene et son procede de realisation
JP3348084B2 (ja) 1999-12-28 2002-11-20 キヤノン販売株式会社 成膜方法及び半導体装置
US6331494B1 (en) 1999-12-30 2001-12-18 Novellus Systems, Inc. Deposition of low dielectric constant thin film without use of an oxidizer
US6582777B1 (en) 2000-02-17 2003-06-24 Applied Materials Inc. Electron beam modification of CVD deposited low dielectric constant materials
US6410462B1 (en) 2000-05-12 2002-06-25 Sharp Laboratories Of America, Inc. Method of making low-K carbon doped silicon oxide
US7122900B2 (en) 2000-06-26 2006-10-17 Renesas Technology Corp. Semiconductor device and method manufacturing the same
US6764958B1 (en) 2000-07-28 2004-07-20 Applied Materials Inc. Method of depositing dielectric films
US6703265B2 (en) * 2000-08-02 2004-03-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
US6573196B1 (en) * 2000-08-12 2003-06-03 Applied Materials Inc. Method of depositing organosilicate layers
US6365527B1 (en) 2000-10-06 2002-04-02 United Microelectronics Corp. Method for depositing silicon carbide in semiconductor devices
CN100386472C (zh) 2000-10-25 2008-05-07 国际商业机器公司 作为在半导体器件中的层内和层间绝缘体的超低介电常数材料及其制造方法、以及包含该材料的电子器件
US6441491B1 (en) 2000-10-25 2002-08-27 International Business Machines Corporation Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same
US6756323B2 (en) 2001-01-25 2004-06-29 International Business Machines Corporation Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device
US6790789B2 (en) 2000-10-25 2004-09-14 International Business Machines Corporation Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made
US6500773B1 (en) 2000-11-27 2002-12-31 Applied Materials, Inc. Method of depositing organosilicate layers
US6340628B1 (en) 2000-12-12 2002-01-22 Novellus Systems, Inc. Method to deposit SiOCH films with dielectric constant below 3.0
JP3545364B2 (ja) * 2000-12-19 2004-07-21 キヤノン販売株式会社 半導体装置及びその製造方法
US6583048B2 (en) 2001-01-17 2003-06-24 Air Products And Chemicals, Inc. Organosilicon precursors for interlayer dielectric films with low dielectric constants
US6429121B1 (en) 2001-02-07 2002-08-06 Advanced Micro Devices, Inc. Method of fabricating dual damascene with silicon carbide via mask/ARC
US6537733B2 (en) * 2001-02-23 2003-03-25 Applied Materials, Inc. Method of depositing low dielectric constant silicon carbide layers
US6532150B2 (en) * 2001-05-31 2003-03-11 American Megatrends, Inc. Disk drive carrier apparatus and associated method
US6486082B1 (en) 2001-06-18 2002-11-26 Applied Materials, Inc. CVD plasma assisted lower dielectric constant sicoh film
US6875699B1 (en) * 2001-06-21 2005-04-05 Lam Research Corporation Method for patterning multilevel interconnects
US6879046B2 (en) 2001-06-28 2005-04-12 Agere Systems Inc. Split barrier layer including nitrogen-containing portion and oxygen-containing portion
US6562725B2 (en) * 2001-07-05 2003-05-13 Taiwan Semiconductor Manufacturing Co., Ltd Dual damascene structure employing nitrogenated silicon carbide and non-nitrogenated silicon carbide etch stop layers
US20030064154A1 (en) * 2001-08-06 2003-04-03 Laxman Ravi K. Low-K dielectric thin films and chemical vapor deposition method of making same
US6573193B2 (en) * 2001-08-13 2003-06-03 Taiwan Semiconductor Manufacturing Co., Ltd Ozone-enhanced oxidation for high-k dielectric semiconductor devices
US20030040195A1 (en) * 2001-08-27 2003-02-27 Ting-Chang Chang Method for fabricating low dielectric constant material film
US6887780B2 (en) * 2001-08-31 2005-05-03 Intel Corporation Concentration graded carbon doped oxide
US6759327B2 (en) * 2001-10-09 2004-07-06 Applied Materials Inc. Method of depositing low k barrier layers
US6656837B2 (en) * 2001-10-11 2003-12-02 Applied Materials, Inc. Method of eliminating photoresist poisoning in damascene applications
US20030085408A1 (en) * 2001-11-02 2003-05-08 Neng-Hui Yang Oxygen-doped silicon carbide etch stop layer
JP4152619B2 (ja) 2001-11-14 2008-09-17 株式会社ルネサステクノロジ 半導体装置およびその製造方法
US6838393B2 (en) * 2001-12-14 2005-01-04 Applied Materials, Inc. Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide
US6890850B2 (en) * 2001-12-14 2005-05-10 Applied Materials, Inc. Method of depositing dielectric materials in damascene applications
US20030194495A1 (en) 2002-04-11 2003-10-16 Applied Materials, Inc. Crosslink cyclo-siloxane compound with linear bridging group to form ultra low k dielectric
US20030194496A1 (en) * 2002-04-11 2003-10-16 Applied Materials, Inc. Methods for depositing dielectric material
US20030211244A1 (en) 2002-04-11 2003-11-13 Applied Materials, Inc. Reacting an organosilicon compound with an oxidizing gas to form an ultra low k dielectric
US6846515B2 (en) 2002-04-17 2005-01-25 Air Products And Chemicals, Inc. Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants
US7384471B2 (en) 2002-04-17 2008-06-10 Air Products And Chemicals, Inc. Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants
US7105460B2 (en) * 2002-07-11 2006-09-12 Applied Materials Nitrogen-free dielectric anti-reflective coating and hardmask

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09260369A (ja) * 1996-03-25 1997-10-03 Toshiba Corp 絶縁膜の形成方法
JPH1044160A (ja) * 1996-07-29 1998-02-17 Tdk Corp 成形金型とその製造方法
JP2001185547A (ja) * 1999-10-18 2001-07-06 Applied Materials Inc 極限低誘電率膜のためのキャッピング層
JP2001196365A (ja) * 2000-01-11 2001-07-19 Fujitsu Vlsi Ltd 成膜方法、成膜装置及び半導体装置の製造方法
JP2001326224A (ja) * 2000-02-28 2001-11-22 Canon Sales Co Inc 半導体装置及びその製造方法
JP2001332550A (ja) * 2000-05-24 2001-11-30 Canon Sales Co Inc 半導体装置及びその製造方法
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WO2002077320A1 (en) * 2001-03-23 2002-10-03 Dow Corning Corporation Method for producing hydrogenated silicon oxycarbide films
WO2003005438A2 (en) * 2001-07-02 2003-01-16 Dow Corning Corporation Improved metal barrier behavior by sic:h deposition on porous materials

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JP2008147644A (ja) * 2006-11-21 2008-06-26 Applied Materials Inc ウェットエッチングアンダカットを最小にし且つ超低ｋ（ｋ＜２．５）誘電体をポアシーリングする方法
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US20050233576A1 (en) 2005-10-20
KR100960755B1 (ko) 2010-06-01
US20030129827A1 (en) 2003-07-10
US6890850B2 (en) 2005-05-10
KR20040068586A (ko) 2004-07-31
US7151053B2 (en) 2006-12-19
WO2003052162A1 (en) 2003-06-26

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