JP2005504908A - 流体を滴下させる装置と、この方法 - Google Patents

流体を滴下させる装置と、この方法 Download PDF

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Publication number
JP2005504908A
JP2005504908A JP2003532398A JP2003532398A JP2005504908A JP 2005504908 A JP2005504908 A JP 2005504908A JP 2003532398 A JP2003532398 A JP 2003532398A JP 2003532398 A JP2003532398 A JP 2003532398A JP 2005504908 A JP2005504908 A JP 2005504908A
Authority
JP
Japan
Prior art keywords
fluid
chamber
control
process chamber
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003532398A
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English (en)
Japanese (ja)
Other versions
JP2005504908A5 (https=
Inventor
メキアス，カーダー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tel Manufacturing and Engineering of America Inc
Original Assignee
FSI International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FSI International Inc filed Critical FSI International Inc
Publication of JP2005504908A publication Critical patent/JP2005504908A/ja
Publication of JP2005504908A5 publication Critical patent/JP2005504908A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/113—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/3584—Inflatable article [e.g., tire filling chuck and/or stem]
    • Y10T137/36—With pressure-responsive pressure-control means
    • Y10T137/3631—Diaphragm, bellows or expansible tube

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Reciprocating Pumps (AREA)
JP2003532398A 2001-10-01 2002-09-26 流体を滴下させる装置と、この方法 Pending JP2005504908A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32643601P 2001-10-01 2001-10-01
PCT/US2002/030724 WO2003029133A1 (en) 2001-10-01 2002-09-26 Fluid dispensing apparatus

Publications (2)

Publication Number Publication Date
JP2005504908A true JP2005504908A (ja) 2005-02-17
JP2005504908A5 JP2005504908A5 (https=) 2005-11-17

Family

ID=23272194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003532398A Pending JP2005504908A (ja) 2001-10-01 2002-09-26 流体を滴下させる装置と、この方法

Country Status (6)

Country Link
US (1) US6797063B2 (https=)
EP (1) EP1432639A1 (https=)
JP (1) JP2005504908A (https=)
KR (1) KR20040068538A (https=)
CN (1) CN1561313A (https=)
WO (1) WO2003029133A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008055906A (ja) * 2006-08-29 2008-03-13 Xerox Corp 導管を通して流体を移送するシステム及び方法
KR20160047996A (ko) * 2014-10-23 2016-05-03 도쿄엘렉트론가부시키가이샤 송액 방법, 송액 시스템 및 컴퓨터 판독 가능한 기록 매체
JP2016191077A (ja) * 2015-03-30 2016-11-10 株式会社コーワ 膜厚調整ユニット及び鋼板洗浄装置
KR20180014183A (ko) * 2015-06-26 2018-02-07 도쿄엘렉트론가부시키가이샤 인라인 분사 커패시터 시스템

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US8313821B2 (en) * 2006-06-02 2012-11-20 Advanced Technology Materials, Inc. Barrier fluoropolymer film-based liners and packaging comprising same
US20090016903A1 (en) * 2007-07-13 2009-01-15 Integrated Designs L.P. Precision Pump With Multiple Heads
US8047815B2 (en) * 2007-07-13 2011-11-01 Integrated Designs L.P. Precision pump with multiple heads
US8317493B2 (en) * 2007-07-13 2012-11-27 Integrated Designs L.P. Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids
US7831340B2 (en) * 2007-11-26 2010-11-09 Control Components, Inc. Local digital valve controller unit
US10132309B2 (en) 2013-03-15 2018-11-20 Integrated Designs, L.P. Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool
ITUB20155093A1 (it) * 2015-11-05 2017-05-05 Siciliana Articoli Tecnici Srl Apparato per il dosaggio automatizzato e la manipolazione in ambiente controllato di fluidi per processi chimici
US10354872B2 (en) 2016-08-11 2019-07-16 Tokyo Electron Limited High-precision dispense system with meniscus control
CN107728432A (zh) 2016-08-11 2018-02-23 东京毅力科创株式会社 高纯度分配系统
KR102394995B1 (ko) 2016-08-11 2022-05-04 도쿄엘렉트론가부시키가이샤 고순도 분배 유닛

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008055906A (ja) * 2006-08-29 2008-03-13 Xerox Corp 導管を通して流体を移送するシステム及び方法
KR20160047996A (ko) * 2014-10-23 2016-05-03 도쿄엘렉트론가부시키가이샤 송액 방법, 송액 시스템 및 컴퓨터 판독 가능한 기록 매체
JP2016084719A (ja) * 2014-10-23 2016-05-19 東京エレクトロン株式会社 送液方法、送液システム、及びコンピュータ読み取り可能な記録媒体
US10400760B2 (en) 2014-10-23 2019-09-03 Tokyo Electronic Limited Liquid delivery method, liquid delivery system, and computer-readable storage medium
KR102414895B1 (ko) 2014-10-23 2022-06-30 도쿄엘렉트론가부시키가이샤 송액 방법, 송액 시스템 및 컴퓨터 판독 가능한 기록 매체
JP2016191077A (ja) * 2015-03-30 2016-11-10 株式会社コーワ 膜厚調整ユニット及び鋼板洗浄装置
KR20180014183A (ko) * 2015-06-26 2018-02-07 도쿄엘렉트론가부시키가이샤 인라인 분사 커패시터 시스템
JP2018527741A (ja) * 2015-06-26 2018-09-20 東京エレクトロン株式会社 インラインディスペンスキャパシタシステム
KR102476462B1 (ko) * 2015-06-26 2022-12-09 도쿄엘렉트론가부시키가이샤 인라인 분사 커패시터 시스템

Also Published As

Publication number Publication date
WO2003029133A1 (en) 2003-04-10
US6797063B2 (en) 2004-09-28
CN1561313A (zh) 2005-01-05
US20030075555A1 (en) 2003-04-24
KR20040068538A (ko) 2004-07-31
EP1432639A1 (en) 2004-06-30

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