KR20040068538A - 유체투여장치 - Google Patents

유체투여장치 Download PDF

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Publication number
KR20040068538A
KR20040068538A KR10-2004-7004706A KR20047004706A KR20040068538A KR 20040068538 A KR20040068538 A KR 20040068538A KR 20047004706 A KR20047004706 A KR 20047004706A KR 20040068538 A KR20040068538 A KR 20040068538A
Authority
KR
South Korea
Prior art keywords
fluid
chamber
control
process chamber
volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR10-2004-7004706A
Other languages
English (en)
Korean (ko)
Inventor
캐더 메키어스
Original Assignee
에프 에스 아이 인터내셔날,인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에프 에스 아이 인터내셔날,인코포레이티드 filed Critical 에프 에스 아이 인터내셔날,인코포레이티드
Publication of KR20040068538A publication Critical patent/KR20040068538A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/113—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/3584—Inflatable article [e.g., tire filling chuck and/or stem]
    • Y10T137/36—With pressure-responsive pressure-control means
    • Y10T137/3631—Diaphragm, bellows or expansible tube

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Reciprocating Pumps (AREA)
KR10-2004-7004706A 2001-10-01 2002-09-26 유체투여장치 Withdrawn KR20040068538A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US32643601P 2001-10-01 2001-10-01
US60/326,436 2001-10-01
PCT/US2002/030724 WO2003029133A1 (en) 2001-10-01 2002-09-26 Fluid dispensing apparatus

Publications (1)

Publication Number Publication Date
KR20040068538A true KR20040068538A (ko) 2004-07-31

Family

ID=23272194

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7004706A Withdrawn KR20040068538A (ko) 2001-10-01 2002-09-26 유체투여장치

Country Status (6)

Country Link
US (1) US6797063B2 (https=)
EP (1) EP1432639A1 (https=)
JP (1) JP2005504908A (https=)
KR (1) KR20040068538A (https=)
CN (1) CN1561313A (https=)
WO (1) WO2003029133A1 (https=)

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US8313821B2 (en) * 2006-06-02 2012-11-20 Advanced Technology Materials, Inc. Barrier fluoropolymer film-based liners and packaging comprising same
US8186817B2 (en) * 2006-08-29 2012-05-29 Xerox Corporation System and method for transporting fluid through a conduit
US20090016903A1 (en) * 2007-07-13 2009-01-15 Integrated Designs L.P. Precision Pump With Multiple Heads
US8047815B2 (en) * 2007-07-13 2011-11-01 Integrated Designs L.P. Precision pump with multiple heads
US8317493B2 (en) * 2007-07-13 2012-11-27 Integrated Designs L.P. Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids
US7831340B2 (en) * 2007-11-26 2010-11-09 Control Components, Inc. Local digital valve controller unit
US10132309B2 (en) 2013-03-15 2018-11-20 Integrated Designs, L.P. Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool
JP2016084719A (ja) * 2014-10-23 2016-05-19 東京エレクトロン株式会社 送液方法、送液システム、及びコンピュータ読み取り可能な記録媒体
JP6643774B2 (ja) * 2015-03-30 2020-02-12 株式会社コーワ 膜厚調整ユニット及び鋼板洗浄装置
US9987655B2 (en) * 2015-06-26 2018-06-05 Tokyo Electron Limited Inline dispense capacitor system
ITUB20155093A1 (it) * 2015-11-05 2017-05-05 Siciliana Articoli Tecnici Srl Apparato per il dosaggio automatizzato e la manipolazione in ambiente controllato di fluidi per processi chimici
US10354872B2 (en) 2016-08-11 2019-07-16 Tokyo Electron Limited High-precision dispense system with meniscus control
CN107728432A (zh) 2016-08-11 2018-02-23 东京毅力科创株式会社 高纯度分配系统
KR102394995B1 (ko) 2016-08-11 2022-05-04 도쿄엘렉트론가부시키가이샤 고순도 분배 유닛

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Also Published As

Publication number Publication date
WO2003029133A1 (en) 2003-04-10
JP2005504908A (ja) 2005-02-17
US6797063B2 (en) 2004-09-28
CN1561313A (zh) 2005-01-05
US20030075555A1 (en) 2003-04-24
EP1432639A1 (en) 2004-06-30

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20040330

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid