CN1561313A - 流体分配装置 - Google Patents

流体分配装置 Download PDF

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Publication number
CN1561313A
CN1561313A CNA028194195A CN02819419A CN1561313A CN 1561313 A CN1561313 A CN 1561313A CN A028194195 A CNA028194195 A CN A028194195A CN 02819419 A CN02819419 A CN 02819419A CN 1561313 A CN1561313 A CN 1561313A
Authority
CN
China
Prior art keywords
fluid
control
process chamber
volume
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA028194195A
Other languages
English (en)
Chinese (zh)
Inventor
卡迪尔·梅基亚斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tel Manufacturing and Engineering of America Inc
Original Assignee
FSI International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FSI International Inc filed Critical FSI International Inc
Publication of CN1561313A publication Critical patent/CN1561313A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/113—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/3584—Inflatable article [e.g., tire filling chuck and/or stem]
    • Y10T137/36—With pressure-responsive pressure-control means
    • Y10T137/3631—Diaphragm, bellows or expansible tube

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Reciprocating Pumps (AREA)
CNA028194195A 2001-10-01 2002-09-26 流体分配装置 Pending CN1561313A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32643601P 2001-10-01 2001-10-01
US60/326,436 2001-10-01

Publications (1)

Publication Number Publication Date
CN1561313A true CN1561313A (zh) 2005-01-05

Family

ID=23272194

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA028194195A Pending CN1561313A (zh) 2001-10-01 2002-09-26 流体分配装置

Country Status (6)

Country Link
US (1) US6797063B2 (https=)
EP (1) EP1432639A1 (https=)
JP (1) JP2005504908A (https=)
KR (1) KR20040068538A (https=)
CN (1) CN1561313A (https=)
WO (1) WO2003029133A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107924812A (zh) * 2015-06-26 2018-04-17 东京毅力科创株式会社 直列式分配容器系统

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US8047815B2 (en) * 2007-07-13 2011-11-01 Integrated Designs L.P. Precision pump with multiple heads
US8317493B2 (en) * 2007-07-13 2012-11-27 Integrated Designs L.P. Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids
US7831340B2 (en) * 2007-11-26 2010-11-09 Control Components, Inc. Local digital valve controller unit
US10132309B2 (en) 2013-03-15 2018-11-20 Integrated Designs, L.P. Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool
JP2016084719A (ja) * 2014-10-23 2016-05-19 東京エレクトロン株式会社 送液方法、送液システム、及びコンピュータ読み取り可能な記録媒体
JP6643774B2 (ja) * 2015-03-30 2020-02-12 株式会社コーワ 膜厚調整ユニット及び鋼板洗浄装置
ITUB20155093A1 (it) * 2015-11-05 2017-05-05 Siciliana Articoli Tecnici Srl Apparato per il dosaggio automatizzato e la manipolazione in ambiente controllato di fluidi per processi chimici
US10354872B2 (en) 2016-08-11 2019-07-16 Tokyo Electron Limited High-precision dispense system with meniscus control
CN107728432A (zh) 2016-08-11 2018-02-23 东京毅力科创株式会社 高纯度分配系统
KR102394995B1 (ko) 2016-08-11 2022-05-04 도쿄엘렉트론가부시키가이샤 고순도 분배 유닛

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107924812A (zh) * 2015-06-26 2018-04-17 东京毅力科创株式会社 直列式分配容器系统
TWI623357B (zh) * 2015-06-26 2018-05-11 Tokyo Electron Limited 用於流體輸送的設備
CN107924812B (zh) * 2015-06-26 2021-11-30 东京毅力科创株式会社 直列式分配容器系统

Also Published As

Publication number Publication date
WO2003029133A1 (en) 2003-04-10
JP2005504908A (ja) 2005-02-17
US6797063B2 (en) 2004-09-28
US20030075555A1 (en) 2003-04-24
KR20040068538A (ko) 2004-07-31
EP1432639A1 (en) 2004-06-30

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication