JP2005327952A - 電力用半導体装置 - Google Patents
電力用半導体装置 Download PDFInfo
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Abstract
【解決手段】 制御回路で電力用スイッチング素子が制御される電力用半導体装置が、表面と裏面を有する半導体基板と、半導体基板の表面側に設けられ、第1導電層、絶縁膜、および第2導電層の積層構造からなるコンデンサと、コンデンサより表面側に設けられ、ボンディングワイヤが接続されたボンディングパッドとを含む。ボンディングパッドはコンデンサと重なるように配置されている。
【選択図】 図2
Description
図1は、本発明の実施の形態1にかかる電力用半導体装置B2の回路図である。電力用半導体装置B2は、電力用スイッチング素子である絶縁ゲート型バイポーラトランジスタ(IGBT)T1を含む。IGBTT1の制御入力端子P1側には制御回路B1が接続されている。IGBTT1は、更に、出力端子P2、GND端子P3を備える。制御回路B1とGND端子P3との間には、コンデンサC1が設けられている。
金属層5はボンディングパッドを兼ね、アルミニウム等からなるボンディングワイヤ6が金属層5に接続されている。ボンディングワイヤ6は、外部信号や固定電位(GND)との接続に用いられる。
図3は、全体が200で表される、本実施の形態2にかかる電力用半導体装置の断面図であり、図8(a)のVIII−VIIIと同じ方向に見た場合の断面となっている。図3中、図2と同一符号は同一または相当箇所を示す。
図4は、全体が300で表される、本実施の形態3にかかる電力用半導体装置の断面図であり、図8(a)のVIII−VIIIと同じ方向に見た場合の断面となっている。図4中、図2と同一符号は同一または相当箇所を示す。
図6は、全体が400で表される、本実施の形態4にかかる電力用半導体装置の断面図であり、図8(a)のVIII−VIIIと同じ方向に見た場合の断面となっている。図6中、図2と同一符号は同一または相当箇所を示す。
図7は、全体が500で表される、本実施の形態5にかかる電力用半導体装置の断面図であり、図8(a)のVIII−VIIIと同じ方向に見た場合の断面となっている。図7中、図2と同一符号は同一または相当箇所を示す。
また、電力用スイッチング素子として、IGBT以外にパワーFET等の半導体素子も使用できる。
Claims (7)
- 制御回路で電力用スイッチング素子が制御される電力用半導体装置であって、
表面と裏面を有する半導体基板と、
該半導体基板の表面側に設けられ、第1導電層、絶縁膜、および第2導電層の積層構造からなるコンデンサと、
該コンデンサより表面側に設けられ、ボンディングワイヤが接続されたボンディングパッドとを含み、
該ボンディングパッドが該コンデンサと重なるように配置されたことを特徴とする電力用半導体装置。 - 上記半導体基板の表面側に、複数の上記コンデンサが積層されたことを特徴とする請求項1に記載の電力用半導体装置。
- 上記コンデンサと上記ボンディングパッドとの間に、絶縁膜を設けたことを特徴とする請求項1に記載の電力用半導体装置。
- 上記コンデンサと上記ボンディングパッドとの間に、導電層を設けたことを特徴とする請求項1に記載の電力用半導体装置。
- 上記半導体基板と上記コンデンサとの間に、導電層を設けたことを特徴とする請求項1に記載の電力用半導体装置。
- 上記導電層が、固定電位に接続されたことを特徴とする請求項4又は5に記載の電力用半導体装置。
- 上記コンデンサを構成する絶縁膜が、上記電力用半導体装置に含まれる上記電力用スイッチング素子のゲート酸化膜からなることを特徴とする請求項1に記載の電力用半導体装置。
Priority Applications (3)
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JP2004145819A JP2005327952A (ja) | 2004-05-17 | 2004-05-17 | 電力用半導体装置 |
DE102004061575A DE102004061575A1 (de) | 2004-05-17 | 2004-12-21 | Leistungshalbleitervorrichtung |
US11/019,741 US7368825B2 (en) | 2004-05-17 | 2004-12-23 | Power semiconductor device |
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JP2004145819A JP2005327952A (ja) | 2004-05-17 | 2004-05-17 | 電力用半導体装置 |
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JP2005327952A true JP2005327952A (ja) | 2005-11-24 |
JP2005327952A5 JP2005327952A5 (ja) | 2006-11-02 |
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JP2004145819A Pending JP2005327952A (ja) | 2004-05-17 | 2004-05-17 | 電力用半導体装置 |
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US (1) | US7368825B2 (ja) |
JP (1) | JP2005327952A (ja) |
DE (1) | DE102004061575A1 (ja) |
Cited By (4)
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JP2014013796A (ja) * | 2012-07-03 | 2014-01-23 | Fuji Electric Co Ltd | ワンチップイグナイタ及び内燃機関点火装置 |
JPWO2014021358A1 (ja) * | 2012-08-02 | 2016-07-21 | 株式会社堀場製作所 | 増幅器及び放射線検出器 |
US9447767B2 (en) | 2012-07-03 | 2016-09-20 | Fuji Electric Co., Ltd. | Single chip igniter and internal combustion engine ignition device |
JP7470087B2 (ja) | 2021-09-17 | 2024-04-17 | 株式会社東芝 | 窒化物半導体装置 |
Family Cites Families (15)
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JPS63120446A (ja) * | 1986-11-08 | 1988-05-24 | Mitsubishi Electric Corp | 半導体集積回路装置における電源,接地配線構造 |
JPS63184358A (ja) * | 1987-01-27 | 1988-07-29 | Oki Electric Ind Co Ltd | 半導体集積回路 |
JPH02304963A (ja) * | 1989-05-19 | 1990-12-18 | Nec Corp | 半導体集積回路装置 |
JPH04196552A (ja) * | 1990-11-28 | 1992-07-16 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JPH06112406A (ja) * | 1992-09-30 | 1994-04-22 | Toshiba Corp | 半導体集積回路 |
US6147857A (en) * | 1997-10-07 | 2000-11-14 | E. R. W. | Optional on chip power supply bypass capacitor |
US6236101B1 (en) * | 1997-11-05 | 2001-05-22 | Texas Instruments Incorporated | Metallization outside protective overcoat for improved capacitors and inductors |
KR100294449B1 (ko) * | 1998-07-15 | 2001-07-12 | 윤종용 | 본딩패드하부에형성되는커패시터를구비한반도체집적회로장치 |
TW430935B (en) * | 1999-03-19 | 2001-04-21 | Ind Tech Res Inst | Frame type bonding pad structure having a low parasitic capacitance |
US6455378B1 (en) * | 1999-10-26 | 2002-09-24 | Hitachi, Ltd. | Method of manufacturing a trench gate power transistor with a thick bottom insulator |
JP3907921B2 (ja) * | 2000-06-19 | 2007-04-18 | 富士通株式会社 | 半導体装置の製造方法 |
US6576526B2 (en) * | 2001-07-09 | 2003-06-10 | Chartered Semiconductor Manufacturing Ltd. | Darc layer for MIM process integration |
US6576922B1 (en) * | 2001-12-21 | 2003-06-10 | Texas Instruments Incorporated | Ferroelectric capacitor plasma charging monitor |
JP2004095866A (ja) * | 2002-08-30 | 2004-03-25 | Fujitsu Ltd | 半導体装置及びその製造方法 |
KR100505658B1 (ko) * | 2002-12-11 | 2005-08-03 | 삼성전자주식회사 | MIM(Metal-Insulator-Metal)커패시터를 갖는 반도체 소자 |
-
2004
- 2004-05-17 JP JP2004145819A patent/JP2005327952A/ja active Pending
- 2004-12-21 DE DE102004061575A patent/DE102004061575A1/de not_active Withdrawn
- 2004-12-23 US US11/019,741 patent/US7368825B2/en not_active Expired - Fee Related
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JP2014013796A (ja) * | 2012-07-03 | 2014-01-23 | Fuji Electric Co Ltd | ワンチップイグナイタ及び内燃機関点火装置 |
US9447767B2 (en) | 2012-07-03 | 2016-09-20 | Fuji Electric Co., Ltd. | Single chip igniter and internal combustion engine ignition device |
JPWO2014021358A1 (ja) * | 2012-08-02 | 2016-07-21 | 株式会社堀場製作所 | 増幅器及び放射線検出器 |
US20180006613A1 (en) | 2012-08-02 | 2018-01-04 | Horiba, Ltd. | Amplifier and radiation detector |
US10554178B2 (en) | 2012-08-02 | 2020-02-04 | Horiba, Ltd. | Amplifier and radiation detector |
JP7470087B2 (ja) | 2021-09-17 | 2024-04-17 | 株式会社東芝 | 窒化物半導体装置 |
Also Published As
Publication number | Publication date |
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US20060138635A1 (en) | 2006-06-29 |
US7368825B2 (en) | 2008-05-06 |
DE102004061575A1 (de) | 2005-12-15 |
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