JP2005317923A - 有機アクセプタ膜を備えた有機薄膜トランジスタ - Google Patents
有機アクセプタ膜を備えた有機薄膜トランジスタ Download PDFInfo
- Publication number
- JP2005317923A JP2005317923A JP2005058809A JP2005058809A JP2005317923A JP 2005317923 A JP2005317923 A JP 2005317923A JP 2005058809 A JP2005058809 A JP 2005058809A JP 2005058809 A JP2005058809 A JP 2005058809A JP 2005317923 A JP2005317923 A JP 2005317923A
- Authority
- JP
- Japan
- Prior art keywords
- organic
- group
- source
- semiconductor layer
- acceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 title claims description 97
- 239000010409 thin film Substances 0.000 title claims description 18
- 239000004065 semiconductor Substances 0.000 claims abstract description 85
- 239000000463 material Substances 0.000 claims description 43
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 claims description 17
- 238000004381 surface treatment Methods 0.000 claims description 14
- 239000000126 substance Substances 0.000 claims description 12
- LXQOQPGNCGEELI-UHFFFAOYSA-N 2,4-dinitroaniline Chemical compound NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O LXQOQPGNCGEELI-UHFFFAOYSA-N 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 5
- ZUTCJXFCHHDFJS-UHFFFAOYSA-N 1,5-dinitronaphthalene Chemical compound C1=CC=C2C([N+](=O)[O-])=CC=CC2=C1[N+]([O-])=O ZUTCJXFCHHDFJS-UHFFFAOYSA-N 0.000 claims description 4
- NQRACBRRMUBSDA-UHFFFAOYSA-N 17-azahexacyclo[10.9.2.02,7.03,19.08,23.015,22]tricosa-1(21),2(7),3,5,8,10,12(23),13,15(22),19-decaene-16,18-dione Chemical compound C12=CC=C3C=CC=C4C5=CC=CC=6C(=CC=C(C1=C34)C56)C(NC2=O)=O NQRACBRRMUBSDA-UHFFFAOYSA-N 0.000 claims description 4
- VHQGURIJMFPBKS-UHFFFAOYSA-N 2,4,7-trinitrofluoren-9-one Chemical compound [O-][N+](=O)C1=CC([N+]([O-])=O)=C2C3=CC=C([N+](=O)[O-])C=C3C(=O)C2=C1 VHQGURIJMFPBKS-UHFFFAOYSA-N 0.000 claims description 4
- -1 2,5-di-t-butylphenyl Chemical group 0.000 claims description 4
- SSDNULNTQAUNFQ-UHFFFAOYSA-N 3,5-dinitrobenzonitrile Chemical compound [O-][N+](=O)C1=CC(C#N)=CC([N+]([O-])=O)=C1 SSDNULNTQAUNFQ-UHFFFAOYSA-N 0.000 claims description 4
- BAJQRLZAPXASRD-UHFFFAOYSA-N 4-Nitrobiphenyl Chemical group C1=CC([N+](=O)[O-])=CC=C1C1=CC=CC=C1 BAJQRLZAPXASRD-UHFFFAOYSA-N 0.000 claims description 4
- TYMLOMAKGOJONV-UHFFFAOYSA-N 4-nitroaniline Chemical compound NC1=CC=C([N+]([O-])=O)C=C1 TYMLOMAKGOJONV-UHFFFAOYSA-N 0.000 claims description 4
- KNGXTXBAJOYBNO-UHFFFAOYSA-N 5-nitroanthracene-1-carbonitrile Chemical compound C1=CC=C2C=C3C([N+](=O)[O-])=CC=CC3=CC2=C1C#N KNGXTXBAJOYBNO-UHFFFAOYSA-N 0.000 claims description 4
- 150000001336 alkenes Chemical class 0.000 claims description 4
- 150000008064 anhydrides Chemical class 0.000 claims description 4
- BIOPPFDHKHWJIA-UHFFFAOYSA-N anthracene-9,10-dinitrile Chemical compound C1=CC=C2C(C#N)=C(C=CC=C3)C3=C(C#N)C2=C1 BIOPPFDHKHWJIA-UHFFFAOYSA-N 0.000 claims description 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 4
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 4
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 4
- 125000004185 ester group Chemical group 0.000 claims description 4
- 125000003709 fluoroalkyl group Chemical group 0.000 claims description 4
- 125000005843 halogen group Chemical group 0.000 claims description 4
- 150000002391 heterocyclic compounds Chemical class 0.000 claims description 4
- 150000003949 imides Chemical class 0.000 claims description 4
- 150000002466 imines Chemical class 0.000 claims description 4
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 4
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 claims description 4
- 125000003375 sulfoxide group Chemical group 0.000 claims description 4
- 230000002194 synthesizing effect Effects 0.000 claims description 2
- 125000003118 aryl group Chemical group 0.000 claims 3
- 230000002708 enhancing effect Effects 0.000 claims 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 104
- 238000000034 method Methods 0.000 description 17
- 239000000758 substrate Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 12
- 238000000151 deposition Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 6
- 230000004397 blinking Effects 0.000 description 5
- 239000000969 carrier Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005669 field effect Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000010549 co-Evaporation Methods 0.000 description 3
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000012756 surface treatment agent Substances 0.000 description 3
- 238000002207 thermal evaporation Methods 0.000 description 3
- IYZMXHQDXZKNCY-UHFFFAOYSA-N 1-n,1-n-diphenyl-4-n,4-n-bis[4-(n-phenylanilino)phenyl]benzene-1,4-diamine Chemical compound C1=CC=CC=C1N(C=1C=CC(=CC=1)N(C=1C=CC(=CC=1)N(C=1C=CC=CC=1)C=1C=CC=CC=1)C=1C=CC(=CC=1)N(C=1C=CC=CC=1)C=1C=CC=CC=1)C1=CC=CC=C1 IYZMXHQDXZKNCY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 125000001917 2,4-dinitrophenyl group Chemical group [H]C1=C([H])C(=C([H])C(=C1*)[N+]([O-])=O)[N+]([O-])=O 0.000 description 1
- 229910020684 PbZr Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000001810 electrochemical catalytic reforming Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- IGKLGCQYPZTEPK-UHFFFAOYSA-N pentacene-1,2-dione Chemical compound C1=CC=C2C=C(C=C3C(C=C4C=CC(C(C4=C3)=O)=O)=C3)C3=CC2=C1 IGKLGCQYPZTEPK-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/20—Organic diodes
- H10K10/26—Diodes comprising organic-organic junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/474—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
- H10K10/84—Ohmic electrodes, e.g. source or drain electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/611—Charge transfer complexes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】 有機半導体層と、有機半導体層に電気的に連結されたソース及びドレイン電極と、ソース及びドレイン電極と有機半導体層とにそれぞれ絶縁されるように備えられたゲート電極と、ソース及びドレイン電極と有機半導体層との間に介在された有機アクセプタ膜と、を備えることを特徴とする有機TFTである。
【選択図】図2A
Description
110、210 ゲート電極
120、220 ゲート絶縁膜
130、230 ソース及びドレイン電極
140、240 有機半導体層
205 バッファー層
235 有機アクセプタ膜
232 表面処理膜
Claims (11)
- 有機半導体層と、
前記有機半導体層に電気的に連結されたソース及びドレイン電極と、
前記ソース及びドレイン電極と、前記有機半導体層とにそれぞれ絶縁されるように備えられたゲート電極と、
前記ソース及びドレイン電極と、前記有機半導体層との間に介された有機アクセプタ膜と、を備えることを特徴とする有機薄膜トランジスタ。 - 前記有機半導体層は、ペンタセンを含むことを特徴とする請求項1に記載の有機薄膜トランジスタ。
- 前記ソース及びドレイン電極と前記ゲート電極とを絶縁させるゲート絶縁膜を備え、
前記有機アクセプタ膜は、前記ソース電極及び前記ドレイン電極と、ゲート絶縁膜とに接触されて形成されることを特徴とする請求項1に記載の有機薄膜トランジスタ。 - 前記ゲート絶縁膜と前記有機アクセプタ膜との間に、界面間の接着力を強化させる表面処理膜を更に含むことを特徴とする請求項3に記載の有機薄膜トランジスタ。
- 前記ソース及びドレイン電極と前記ゲート電極とを絶縁させるゲート絶縁膜を備え、
前記有機アクセプタ膜は、前記ソース及びドレイン電極に接触されて形成されることを特徴とする請求項1に記載の有機薄膜トランジスタ。 - 前記ゲート絶縁膜と前記有機半導体層との間に、界面間の接着力を強化させる表面処理膜を更に含むことを特徴とする請求項5に記載の有機薄膜トランジスタ。
- 前記有機アクセプタ膜は、電子受容物質であって、ニトロ基、シアノ基、スルホニル基、スルホキシド基、カルボニル基、カルボキシル基、エステル基、無水物、イミド、イミン、ハロゲン基、フルオロアルキル基、フルオロ芳香族基からなる群から選択される一つ以上を含有する芳香族系、オレフィン系、芳香族−オレフィン共役系、芳香族−芳香族共役系、融合芳香族系、及びヘテロ環化合物系からなる群から選択される一つ以上の物質を含むことを特徴とする請求項1に記載の有機薄膜トランジスタ。
- 前記有機アクセプタ膜は、電子受容物質であって、2,4,7−トリニトロフルオレノン、4−ニトロアニリン、2,4−ジニトロアニリン、5−ニトロアントラニロニトリル、2,4−ジニトロフェニルアミン、1,5−ジニトロナフタレン、4−ニトロビフェニル、9,10−ジシアノアントラセン、3,5−ジニトロベンゾニトリル、N,N’−ビス(2,5−ジ−t−ブチルフェニル)−3,4,9,10−ペリレンジカルボキシイミドからなる群から選択される一つ以上の物質を含むことを特徴とする請求項1に記載の有機薄膜トランジスタ。
- 前記有機アクセプタ膜の厚さは、1ないし100Åであることを特徴とする請求項1に記載の有機薄膜トランジスタ。
- 前記表面処理膜は、−SiCl3、−Si(OMe)3及び−SHのモイエティからなるグループの中から選択された何れか一つを含むことを特徴とする請求項4または6に記載の有機薄膜トランジスタ。
- 前記有機アクセプタ膜は、前記有機半導体層と前記ソース及びドレイン電極との間の界面の周りで、前記有機半導体層の形成物質と、前記有機アクセプタ物質とが共に合成されて介在され、前記有機アクセプタ物質の組成比は、0.1ないし10%であることを特徴とする請求項7または8に記載の有機薄膜トランジスタ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040030222A KR100615216B1 (ko) | 2004-04-29 | 2004-04-29 | 유기 억셉터막을 구비한 유기 박막 트랜지스터 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005317923A true JP2005317923A (ja) | 2005-11-10 |
Family
ID=35186172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005058809A Pending JP2005317923A (ja) | 2004-04-29 | 2005-03-03 | 有機アクセプタ膜を備えた有機薄膜トランジスタ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7355198B2 (ja) |
JP (1) | JP2005317923A (ja) |
KR (1) | KR100615216B1 (ja) |
CN (1) | CN1694280B (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007142056A (ja) * | 2005-11-16 | 2007-06-07 | National Institute Of Advanced Industrial & Technology | 有機半導体装置の製造方法 |
JP2007165824A (ja) * | 2005-12-15 | 2007-06-28 | Lg Philips Lcd Co Ltd | 薄膜トランジスタアレイ基板及びその製造方法 |
JP2007194360A (ja) * | 2006-01-18 | 2007-08-02 | Sharp Corp | 有機薄膜トランジスタおよびその製造方法 |
JP2010532559A (ja) * | 2007-07-02 | 2010-10-07 | コリア・インスティテュート・オブ・マシナリー・アンド・マテリアルズ | 自己整合型有機薄膜トランジスタ及びその製造方法 |
JP2011003842A (ja) * | 2009-06-22 | 2011-01-06 | Sony Corp | 薄膜トランジスタおよびその製造方法 |
JP2013062497A (ja) * | 2011-08-22 | 2013-04-04 | Sumitomo Chemical Co Ltd | 有機薄膜トランジスタ |
CN101957526B (zh) * | 2009-07-13 | 2013-04-17 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
JP2013175571A (ja) * | 2012-02-24 | 2013-09-05 | National Institute For Materials Science | 有機電界効果トランジスタ |
JP2013211534A (ja) * | 2012-02-28 | 2013-10-10 | Sumitomo Chemical Co Ltd | 有機薄膜トランジスタの製造方法及び有機薄膜トランジスタ |
JP2018503985A (ja) * | 2015-02-04 | 2018-02-08 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | 低コンタクト抵抗を有する有機電界効果トランジスタ |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7719496B2 (en) | 2004-11-23 | 2010-05-18 | Samsung Mobile Display Co., Ltd. | Organic thin film transistor, method of manufacturing the same, and flat panel display device with the organic thin film transistor |
KR100659103B1 (ko) * | 2005-10-24 | 2006-12-19 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터, 이를 구비한 평판 디스플레이 장치및 유기 박막 트랜지스터의 제조방법 |
KR100730157B1 (ko) * | 2005-11-03 | 2007-06-19 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터 및 이를 구비한 유기 발광디스플레이 장치 |
KR100637204B1 (ko) * | 2005-01-15 | 2006-10-23 | 삼성에스디아이 주식회사 | 박막 트랜지스터, 그 제조 방법 및 이를 구비한 평판 표시장치 |
EP1684365A3 (en) * | 2005-01-20 | 2008-08-13 | Fuji Electric Holdings Co., Ltd. | Transistor |
KR100637210B1 (ko) * | 2005-01-28 | 2006-10-23 | 삼성에스디아이 주식회사 | 박막 트랜지스터, 이의 제조 방법 및 이를 구비한 평판표시 장치 |
KR100647683B1 (ko) * | 2005-03-08 | 2006-11-23 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터 및 이를 구비한 평판 디스플레이 장치 |
KR100953652B1 (ko) * | 2005-08-18 | 2010-04-20 | 삼성모바일디스플레이주식회사 | 유기 박막 트랜지스터 및 그 제조 방법 |
TWI261361B (en) * | 2005-08-31 | 2006-09-01 | Ind Tech Res Inst | Organic thin-film transistor structure and method for fabricating the same is provided |
US7485580B2 (en) * | 2005-09-20 | 2009-02-03 | Air Products And Chemicals, Inc. | Method for removing organic electroluminescent residues from a substrate |
KR100719566B1 (ko) * | 2005-10-22 | 2007-05-17 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터, 및 이를 구비한 평판 표시 장치 |
US20070264747A1 (en) * | 2006-05-15 | 2007-11-15 | Kuo-Hsi Yen | Patterning process and method of manufacturing organic thin film transistor using the same |
US20080012014A1 (en) * | 2006-07-14 | 2008-01-17 | Jin-Seong Park | Thin film transistor, method of preparing the same, and flat panel display device including the thin film transistor |
KR20090080522A (ko) * | 2006-11-14 | 2009-07-24 | 이데미쓰 고산 가부시키가이샤 | 유기 박막 트랜지스터 및 유기 박막 발광 트랜지스터 |
KR100805700B1 (ko) * | 2006-12-29 | 2008-02-21 | 삼성에스디아이 주식회사 | 유기 전자 소자 및 그 제조방법 |
TWI345835B (en) * | 2007-01-02 | 2011-07-21 | Chunghwa Picture Tubes Ltd | Organic thin film transistor and method for manufacturing thereof |
KR100976572B1 (ko) * | 2008-02-26 | 2010-08-17 | 고려대학교 산학협력단 | 유기 박막 트랜지스터의 제조방법 |
US20100159635A1 (en) * | 2008-12-24 | 2010-06-24 | Weyerhaeuser Company | Method of patterning conductive layer and devices made thereby |
US8895352B2 (en) * | 2009-06-02 | 2014-11-25 | International Business Machines Corporation | Method to improve nucleation of materials on graphene and carbon nanotubes |
JP2011077500A (ja) * | 2009-09-04 | 2011-04-14 | Sony Corp | 薄膜トランジスタ、薄膜トランジスタの製造方法、表示装置、および電子機器 |
US8211782B2 (en) * | 2009-10-23 | 2012-07-03 | Palo Alto Research Center Incorporated | Printed material constrained by well structures |
JP5651961B2 (ja) * | 2010-02-03 | 2015-01-14 | ソニー株式会社 | 薄膜トランジスタおよびその製造方法、ならびに電子機器 |
US9202895B2 (en) * | 2010-05-07 | 2015-12-01 | Japan Science And Technology Agency | Process for production of functional device, process for production of ferroelectric material layer, process for production of field effect transistor, thin film transistor, field effect transistor, and piezoelectric inkjet head |
TWI463669B (zh) * | 2010-07-07 | 2014-12-01 | Sony Corp | 薄膜電晶體,製造薄膜電晶體的方法,顯示裝置及電子設備 |
DE102010031979B4 (de) * | 2010-07-22 | 2014-10-30 | Novaled Ag | Halbleiterbauelement, Verfahren zu dessen Herstellung, Verwendung des Halbleiterbauelementes und Inverter mit zwei Halbleiterbauelementen |
WO2012117089A1 (en) | 2011-03-03 | 2012-09-07 | Basf Se | Perylene-based semiconducting materials |
US8471020B2 (en) | 2011-03-03 | 2013-06-25 | Basf Se | Perylene-based semiconducting materials |
WO2012152598A1 (en) | 2011-05-11 | 2012-11-15 | Basf Se | Halogenated perylene-based semiconducting materials |
JP5884306B2 (ja) * | 2011-06-13 | 2016-03-15 | ソニー株式会社 | 薄膜トランジスタおよびその製造方法、ならびに電子機器 |
KR20140058621A (ko) | 2011-08-12 | 2014-05-14 | 바스프 에스이 | 플루오린화 페릴렌계 반도체 물질 |
TWI491050B (zh) * | 2011-11-25 | 2015-07-01 | Sony Corp | 電晶體,顯示器及電子裝置 |
US9899616B2 (en) | 2012-04-05 | 2018-02-20 | Novaled Gmbh | Organic field effect transistor and method for producing the same |
EP2658006B1 (en) * | 2012-04-27 | 2015-05-20 | Novaled GmbH | Organic field effect transistor |
WO2017051730A1 (ja) * | 2015-09-24 | 2017-03-30 | 富士フイルム株式会社 | 有機薄膜トランジスタおよび有機薄膜トランジスタの製造方法 |
US11469323B2 (en) * | 2018-09-25 | 2022-10-11 | Intel Corporation | Ferroelectric gate stack for band-to-band tunneling reduction |
CN109698241A (zh) * | 2018-12-28 | 2019-04-30 | 天津大学 | 高介电常数栅介质层的柔性薄膜晶体管及其制造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06318725A (ja) * | 1993-05-10 | 1994-11-15 | Ricoh Co Ltd | 光起電力素子およびその製造方法 |
JPH09139288A (ja) * | 1995-11-16 | 1997-05-27 | Nippon Telegr & Teleph Corp <Ntt> | 有機エレクトロルミネッセンス素子及びその作製方法 |
JPH1149968A (ja) * | 1997-06-09 | 1999-02-23 | Samsung Display Devices Co Ltd | 光導電性組成物及びこれより形成された光導電膜を採用した表示素子 |
JP2001244467A (ja) * | 2000-02-28 | 2001-09-07 | Hitachi Ltd | コプラナー型半導体装置とそれを用いた表示装置および製法 |
JP2004103905A (ja) * | 2002-09-11 | 2004-04-02 | Pioneer Electronic Corp | 有機半導体素子 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6278127B1 (en) * | 1994-12-09 | 2001-08-21 | Agere Systems Guardian Corp. | Article comprising an organic thin film transistor adapted for biasing to form a N-type or a P-type transistor |
US6326640B1 (en) * | 1996-01-29 | 2001-12-04 | Motorola, Inc. | Organic thin film transistor with enhanced carrier mobility |
KR100399283B1 (ko) | 2001-05-02 | 2003-09-26 | 권영수 | 고성능 유기 박막 트랜지스트의 소자 구조 및 그 제조방법. |
US6734038B2 (en) * | 2001-09-04 | 2004-05-11 | The Trustees Of Princeton University | Method of manufacturing high-mobility organic thin films using organic vapor phase deposition |
US6433359B1 (en) * | 2001-09-06 | 2002-08-13 | 3M Innovative Properties Company | Surface modifying layers for organic thin film transistors |
US6946676B2 (en) * | 2001-11-05 | 2005-09-20 | 3M Innovative Properties Company | Organic thin film transistor with polymeric interface |
-
2004
- 2004-04-29 KR KR1020040030222A patent/KR100615216B1/ko active IP Right Grant
- 2004-12-14 US US11/010,341 patent/US7355198B2/en not_active Expired - Fee Related
-
2005
- 2005-03-03 JP JP2005058809A patent/JP2005317923A/ja active Pending
- 2005-03-14 CN CN2005100547052A patent/CN1694280B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06318725A (ja) * | 1993-05-10 | 1994-11-15 | Ricoh Co Ltd | 光起電力素子およびその製造方法 |
JPH09139288A (ja) * | 1995-11-16 | 1997-05-27 | Nippon Telegr & Teleph Corp <Ntt> | 有機エレクトロルミネッセンス素子及びその作製方法 |
JPH1149968A (ja) * | 1997-06-09 | 1999-02-23 | Samsung Display Devices Co Ltd | 光導電性組成物及びこれより形成された光導電膜を採用した表示素子 |
JP2001244467A (ja) * | 2000-02-28 | 2001-09-07 | Hitachi Ltd | コプラナー型半導体装置とそれを用いた表示装置および製法 |
JP2004103905A (ja) * | 2002-09-11 | 2004-04-02 | Pioneer Electronic Corp | 有機半導体素子 |
Non-Patent Citations (1)
Title |
---|
CHUNG-KUN SONG, BON-WON KOO, SANG-BACK LEE AND DO-HYUN KIM: "Characteristics of Pentacene Organic Thin Film Transistors with Gate Insulator Processed by Organic", JPN. J. APPL. PHYS., vol. Vol. 41, Part 1, No. 4B, JPN4007005610, 30 April 2002 (2002-04-30), pages 2730 - 2734, ISSN: 0000822886 * |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007142056A (ja) * | 2005-11-16 | 2007-06-07 | National Institute Of Advanced Industrial & Technology | 有機半導体装置の製造方法 |
JP2007165824A (ja) * | 2005-12-15 | 2007-06-28 | Lg Philips Lcd Co Ltd | 薄膜トランジスタアレイ基板及びその製造方法 |
JP2007194360A (ja) * | 2006-01-18 | 2007-08-02 | Sharp Corp | 有機薄膜トランジスタおよびその製造方法 |
JP2010532559A (ja) * | 2007-07-02 | 2010-10-07 | コリア・インスティテュート・オブ・マシナリー・アンド・マテリアルズ | 自己整合型有機薄膜トランジスタ及びその製造方法 |
JP2011003842A (ja) * | 2009-06-22 | 2011-01-06 | Sony Corp | 薄膜トランジスタおよびその製造方法 |
CN101957526B (zh) * | 2009-07-13 | 2013-04-17 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
US9349760B2 (en) | 2009-07-13 | 2016-05-24 | Boe Technology Group Co., Ltd. | Method of manufacturing a TFT-LCD array substrate having light blocking layer on the surface treated semiconductor layer |
JP2013062497A (ja) * | 2011-08-22 | 2013-04-04 | Sumitomo Chemical Co Ltd | 有機薄膜トランジスタ |
JP2013175571A (ja) * | 2012-02-24 | 2013-09-05 | National Institute For Materials Science | 有機電界効果トランジスタ |
JP2013211534A (ja) * | 2012-02-28 | 2013-10-10 | Sumitomo Chemical Co Ltd | 有機薄膜トランジスタの製造方法及び有機薄膜トランジスタ |
JP2018503985A (ja) * | 2015-02-04 | 2018-02-08 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | 低コンタクト抵抗を有する有機電界効果トランジスタ |
Also Published As
Publication number | Publication date |
---|---|
US20050242342A1 (en) | 2005-11-03 |
US7355198B2 (en) | 2008-04-08 |
CN1694278A (zh) | 2005-11-09 |
KR100615216B1 (ko) | 2006-08-25 |
CN1694280B (zh) | 2011-08-10 |
KR20050104811A (ko) | 2005-11-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2005317923A (ja) | 有機アクセプタ膜を備えた有機薄膜トランジスタ | |
US7902602B2 (en) | Organic thin film transistor with stacked organic and inorganic layers | |
JP4247377B2 (ja) | 薄膜トランジスタ及びその製造方法 | |
KR101240325B1 (ko) | 반도체 장치 및 그 제조 방법 | |
CN101884108B (zh) | 有机半导体装置 | |
US7906206B2 (en) | Organic insulator composition comprising high dielectric constant insulator dispersed in hyperbranched polymer and organic thin film transistor using the same | |
US7507613B2 (en) | Ambipolar organic thin-film field-effect transistor and making method | |
JP2006191044A (ja) | 垂直型有機薄膜トランジスタ、垂直型有機発光トランジスタおよびディスプレイ素子 | |
KR20070122203A (ko) | 박막 트랜지스터용 중합체성 게이트 유전체 | |
KR20020084427A (ko) | 고성능 유기 박막 트랜지스트의 소자 구조 및 그 제조방법 | |
JP4938974B2 (ja) | 有機薄膜トランジスター | |
JP4433746B2 (ja) | 有機電界効果トランジスタ及びその製造方法 | |
US20150295193A1 (en) | Semiconductor device using paper as a substrate and method of manufacturing the same | |
JP5025948B2 (ja) | 有機電界効果トランジスタ及び半導体装置 | |
KR100592266B1 (ko) | 유기 박막 트랜지스터의 제조 방법 | |
JP2003086805A (ja) | 薄膜トランジスタ、電気絶縁膜及びそれらの製造方法 | |
JP6505857B2 (ja) | 有機薄膜トランジスタおよび有機薄膜トランジスタの製造方法 | |
KR101102222B1 (ko) | 전기장 처리를 이용한 유기 박막 트랜지스터의 제조방법 | |
KR101325452B1 (ko) | Dlc층이 형성된 유기 박막 트랜지스터 및 그 제조방법 | |
Kim et al. | Device fabrications of organic thin-film transistors | |
JP2005109337A (ja) | 電界効果トランジスタ | |
TW200814388A (en) | Ambipolar semiconductor active layer of organiic thein film transistor and applications thereof | |
JP2006229053A (ja) | 有機半導体層を有する電界効果型有機薄膜トランジスタ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070227 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070528 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070531 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070606 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080219 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080519 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080520 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20080805 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20081024 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20081205 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20101013 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20101018 |