JP2005313188A - レーザー加工方法 - Google Patents
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- JP2005313188A JP2005313188A JP2004132671A JP2004132671A JP2005313188A JP 2005313188 A JP2005313188 A JP 2005313188A JP 2004132671 A JP2004132671 A JP 2004132671A JP 2004132671 A JP2004132671 A JP 2004132671A JP 2005313188 A JP2005313188 A JP 2005313188A
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- 238000005520 cutting process Methods 0.000 claims abstract description 20
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- 238000012545 processing Methods 0.000 claims description 30
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- 239000011888 foil Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract 1
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- 235000012431 wafers Nutrition 0.000 description 60
- 230000003287 optical effect Effects 0.000 description 10
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
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- 239000010980 sapphire Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000004697 Polyetherimide Substances 0.000 description 2
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910020177 SiOF Inorganic materials 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
Abstract
【解決手段】 レーザー光線照射手段によって被加工物にレーザー光線を照射しつつレーザー光線照射手段に対して被加工物を相対的に移動して被加工物を切断するレーザー加工方法であって、被加工物の加工面に水溶性の接着剤を介してレーザー光線の外周側領域のエネルギーに対して耐加工性を有する保護シートを装着する保護シート装着工程と、保護シートを通して被加工物にレーザー光線を照射しつつレーザー光線照射手段に対して被加工物を相対的に移動するレーザー光線照射工程と、レーザー光線照射工程終了後に保護シートを除去する保護シート除去工程とを含む。
【選択図】 図8
Description
被加工物の加工面に水溶性の接着剤を介してレーザー光線の外周側領域のエネルギーに対して耐加工性を有する保護シートを装着する保護シート装着工程と、
該保護シートを通して被加工物にレーザー光線を照射しつつ該レーザー光線照射手段に対して被加工物を相対的に移動するレーザー光線照射工程と、
該レーザー光線照射工程終了後に該保護シートを除去する保護シート除去工程と、を含む、
ことを特徴とするレーザー加工方法が提供される。
図4には本発明によるレーザー加工方法によって個々の半導体チップに分割される半導体ウエーハが示されている。図4に示す半導体ウエーハ10は厚さが100μmのシリコンウエーハによって形成されており、表面10aに格子状に配列された複数のストリート(分割予定ライン)101によって複数の領域が区画され、この区画された領域にIC、LSI等の回路102が形成されている。この半導体ウエーハ10を上述したレーザー加工装置を用いて個々の半導体チップに分割するには、先ず図5に示すように半導体ウエーハ10を環状のフレーム7に装着された保護テープ70に裏面側を貼着し(従って、半導体ウエーハ10は表面10aが上側となる)、半導体ウエーハ10を環状のフレーム7によって支持する(被加工物支持工程)。このように環状のフレーム7に保護テープ70を介して支持された半導体ウエーハ10は、図1に示すレーザー加工装置のチャックテーブル36の吸着チャック361上に表面10aを上側にして搬送され、該吸着チャック361に吸引保持される。なお、半導体ウエーハ10を保護テープ70を介して支持する環状のフレーム7は、チャックテーブル36に配設されたクランプ362によって固定される。このようにして半導体ウエーハ10を吸引保持したチャックテーブル36は、移動手段37の作動により案内レール31、31に沿って移動せしめられレーザー光線照射ユニット5に配設された撮像手段6の直下に位置付けられる。
レーザー光線照射工程においては、図7で示すようにチャックテーブル36をレーザー光線を照射するレーザー光線照射手段52の集光器524が位置するレーザー光線照射領域に移動し、所定のストリート101の一端(図7において左端)を集光器524の直下に位置付ける。そして、集光器524からパルスレーザー光線を照射しつつチャックテーブル36即ち半導体ウエーハ10を図7において矢印X1で示す方向に所定の送り速度で移動せしめ、所定のストリート101の他端(図7において右端)が集光器524の照射位置に達したらパルスレーザー光線の照射を停止するとともにチャックテーブル36即ち半導体ウエーハ10の移動を停止する。なお、レーザー光線照射工程における加工条件は、例えば次のように設定されている。
光源 :YVO4 パルスレーザー
波長 :355nm
平均出力 :1〜5W
繰り返し周波数:30〜100kHz
集光スポット径:φ10μm〜φ20μm
送り速度 :100mm/秒〜200mm/秒
3:チャックテーブル機構
31:案内レール
36:チャックテーブル
4:レーザー光線照射ユニット支持機構
41:案内レール
42:可動支持基台
5:レーザー光線照射ユニット
51:ユニットホルダ
52:レーザー光線加工手段
522:レーザー光線発振手段
523:レーザー光線変調手段
524:集光器
6:撮像手段
7:環状のフレーム
70:保護テープ
8:接着剤
9:保護シート
10:半導体ウエーハ
101:ストリート
102:回路
Claims (4)
- レーザー光線照射手段によって被加工物にレーザー光線を照射しつつ該レーザー光線照射手段に対して被加工物を相対的に移動して被加工物を切断するレーザー加工方法であって、
被加工物の加工面に水溶性の接着剤を介してレーザー光線の外周側領域のエネルギーに対して耐加工性を有する保護シートを装着する保護シート装着工程と、
該保護シートを通して被加工物にレーザー光線を照射しつつ該レーザー光線照射手段に対して被加工物を相対的に移動するレーザー光線照射工程と、
該レーザー光線照射工程終了後に該保護シートを除去する保護シート除去工程と、を含む、
ことを特徴とするレーザー加工方法。 - 該保護シートは、金属箔によって形成されている、請求項1記載のレーザー加工方法。
- 該保護シートを形成する金属箔は、アルミ箔からなっている、請求項2記載のレーザー加工方法。
- 該保護シート除去工程は、被加工物に水を供給して該保護シートを接着剤とともに除去する、請求項1から3のいずれかに記載のレーザー加工方法。
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JP2004132671A JP4439990B2 (ja) | 2004-04-28 | 2004-04-28 | レーザー加工方法 |
US11/114,072 US20050242073A1 (en) | 2004-04-28 | 2005-04-26 | Laser beam processing method |
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JP2004132671A JP4439990B2 (ja) | 2004-04-28 | 2004-04-28 | レーザー加工方法 |
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JP2005313188A true JP2005313188A (ja) | 2005-11-10 |
JP4439990B2 JP4439990B2 (ja) | 2010-03-24 |
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Cited By (5)
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WO2008041604A1 (fr) * | 2006-10-04 | 2008-04-10 | Hamamatsu Photonics K.K. | Procédé de traitement laser |
JP2008121140A (ja) * | 2006-11-10 | 2008-05-29 | Barudan Co Ltd | デザインピースの刺繍加工方法 |
JP2008290102A (ja) * | 2007-05-23 | 2008-12-04 | Sharp Corp | レーザー加工方法、および、それを用いた半導体装置の製造方法 |
JPWO2014030521A1 (ja) * | 2012-08-21 | 2016-07-28 | 旭硝子株式会社 | 複合シートの切断方法、ガラスシートの切断方法、複合シートの切断片 |
US9919945B2 (en) | 2013-11-14 | 2018-03-20 | Mitsubishi Electric Corporation | Laser processing method and laser processing apparatus |
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WO2004096483A1 (ja) * | 2003-04-25 | 2004-11-11 | Nitto Denko Corporation | レーザー加工品の製造方法、およびそれに用いるレーザー加工用粘着シート |
EP1714730B1 (en) * | 2003-12-25 | 2012-04-11 | Nitto Denko Corporation | Method of manufacturing by laser workpieces |
JP4854061B2 (ja) | 2005-01-14 | 2012-01-11 | 日東電工株式会社 | レーザー加工品の製造方法及びレーザー加工用保護シート |
JP4873863B2 (ja) * | 2005-01-14 | 2012-02-08 | 日東電工株式会社 | レーザー加工品の製造方法及びレーザー加工用粘着シート |
CN101208172A (zh) * | 2005-06-27 | 2008-06-25 | 日东电工株式会社 | 激光材料加工用表面保护片 |
JP4777830B2 (ja) * | 2006-06-06 | 2011-09-21 | 株式会社ディスコ | ウエーハの分割方法 |
WO2014113508A2 (en) | 2013-01-15 | 2014-07-24 | Microfabrica Inc. | Methods of forming parts using laser machining |
US20140299356A1 (en) * | 2013-04-04 | 2014-10-09 | Chong Zhang | Protective film with dye materials for laser absorption enhancement for via drilling |
CN111958130B (zh) * | 2020-08-13 | 2022-11-22 | 李�杰 | 一种高精度飞秒激光切割装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852374A (ja) * | 1971-11-02 | 1973-07-23 | ||
JPH05228682A (ja) * | 1992-02-17 | 1993-09-07 | Ishikawajima Harima Heavy Ind Co Ltd | パルスレーザ光を用いた材料加工方法 |
JPH06120334A (ja) * | 1992-10-08 | 1994-04-28 | Mitsubishi Electric Corp | シリコンウエハ切断装置 |
JPH11335655A (ja) * | 1998-05-22 | 1999-12-07 | Lintec Corp | エネルギー線硬化型親水性粘着剤組成物およびその利用方法 |
JP2000068237A (ja) * | 1998-08-18 | 2000-03-03 | Lintec Corp | ウエハ裏面研削時の表面保護シートおよびその利用方法 |
JP2001347598A (ja) * | 2000-06-06 | 2001-12-18 | Mitsubishi Gas Chem Co Inc | 炭酸ガスレーザー孔あけに適した銅張板及びそれを用いた高密度プリント配線板 |
JP2002134440A (ja) * | 2000-10-27 | 2002-05-10 | Tokuyama Corp | 基板の処理方法及びそれに用いるトレー |
JP2003138228A (ja) * | 2001-11-02 | 2003-05-14 | Nitto Denko Corp | 半導体ウエハ保護用粘着シート |
JP2005279758A (ja) * | 2004-03-30 | 2005-10-13 | Nitto Denko Corp | レーザー加工品の製造方法及びレーザー加工用保護シート |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5597767A (en) * | 1995-01-06 | 1997-01-28 | Texas Instruments Incorporated | Separation of wafer into die with wafer-level processing |
KR970008386A (ko) * | 1995-07-07 | 1997-02-24 | 하라 세이지 | 기판의 할단(割斷)방법 및 그 할단장치 |
US6063696A (en) * | 1997-05-07 | 2000-05-16 | Texas Instruments Incorporated | Method of reducing wafer particles after partial saw using a superhard protective coating |
US6413839B1 (en) * | 1998-10-23 | 2002-07-02 | Emcore Corporation | Semiconductor device separation using a patterned laser projection |
US6153536A (en) * | 1999-03-04 | 2000-11-28 | International Business Machines Corporation | Method for mounting wafer frame at back side grinding (BSG) tool |
US6562698B2 (en) * | 1999-06-08 | 2003-05-13 | Kulicke & Soffa Investments, Inc. | Dual laser cutting of wafers |
US6420245B1 (en) * | 1999-06-08 | 2002-07-16 | Kulicke & Soffa Investments, Inc. | Method for singulating semiconductor wafers |
JP2001035817A (ja) * | 1999-07-22 | 2001-02-09 | Toshiba Corp | ウェーハの分割方法及び半導体装置の製造方法 |
US6403449B1 (en) * | 2000-04-28 | 2002-06-11 | Micron Technology, Inc. | Method of relieving surface tension on a semiconductor wafer |
JP4780828B2 (ja) * | 2000-11-22 | 2011-09-28 | 三井化学株式会社 | ウエハ加工用粘着テープ及びその製造方法並びに使用方法 |
US6713366B2 (en) * | 2002-06-12 | 2004-03-30 | Intel Corporation | Method of thinning a wafer utilizing a laminated reinforcing layer over the device side |
JP2004322168A (ja) * | 2003-04-25 | 2004-11-18 | Disco Abrasive Syst Ltd | レーザー加工装置 |
JP4471632B2 (ja) * | 2003-11-18 | 2010-06-02 | 株式会社ディスコ | ウエーハの加工方法 |
US7008861B2 (en) * | 2003-12-11 | 2006-03-07 | Cree, Inc. | Semiconductor substrate assemblies and methods for preparing and dicing the same |
-
2004
- 2004-04-28 JP JP2004132671A patent/JP4439990B2/ja not_active Expired - Lifetime
-
2005
- 2005-04-26 US US11/114,072 patent/US20050242073A1/en not_active Abandoned
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852374A (ja) * | 1971-11-02 | 1973-07-23 | ||
JPH05228682A (ja) * | 1992-02-17 | 1993-09-07 | Ishikawajima Harima Heavy Ind Co Ltd | パルスレーザ光を用いた材料加工方法 |
JPH06120334A (ja) * | 1992-10-08 | 1994-04-28 | Mitsubishi Electric Corp | シリコンウエハ切断装置 |
JPH11335655A (ja) * | 1998-05-22 | 1999-12-07 | Lintec Corp | エネルギー線硬化型親水性粘着剤組成物およびその利用方法 |
JP2000068237A (ja) * | 1998-08-18 | 2000-03-03 | Lintec Corp | ウエハ裏面研削時の表面保護シートおよびその利用方法 |
JP2001347598A (ja) * | 2000-06-06 | 2001-12-18 | Mitsubishi Gas Chem Co Inc | 炭酸ガスレーザー孔あけに適した銅張板及びそれを用いた高密度プリント配線板 |
JP2002134440A (ja) * | 2000-10-27 | 2002-05-10 | Tokuyama Corp | 基板の処理方法及びそれに用いるトレー |
JP2003138228A (ja) * | 2001-11-02 | 2003-05-14 | Nitto Denko Corp | 半導体ウエハ保護用粘着シート |
JP2005279758A (ja) * | 2004-03-30 | 2005-10-13 | Nitto Denko Corp | レーザー加工品の製造方法及びレーザー加工用保護シート |
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WO2008041604A1 (fr) * | 2006-10-04 | 2008-04-10 | Hamamatsu Photonics K.K. | Procédé de traitement laser |
CN102357739A (zh) * | 2006-10-04 | 2012-02-22 | 浜松光子学株式会社 | 激光加工方法 |
US8735770B2 (en) | 2006-10-04 | 2014-05-27 | Hamamatsu Photonics K.K. | Laser processing method for forming a modified region in an object |
CN102357739B (zh) * | 2006-10-04 | 2014-09-10 | 浜松光子学株式会社 | 激光加工方法 |
CN102357738B (zh) * | 2006-10-04 | 2015-04-15 | 浜松光子学株式会社 | 激光加工方法 |
JP2008121140A (ja) * | 2006-11-10 | 2008-05-29 | Barudan Co Ltd | デザインピースの刺繍加工方法 |
JP2008290102A (ja) * | 2007-05-23 | 2008-12-04 | Sharp Corp | レーザー加工方法、および、それを用いた半導体装置の製造方法 |
JPWO2014030521A1 (ja) * | 2012-08-21 | 2016-07-28 | 旭硝子株式会社 | 複合シートの切断方法、ガラスシートの切断方法、複合シートの切断片 |
US9919945B2 (en) | 2013-11-14 | 2018-03-20 | Mitsubishi Electric Corporation | Laser processing method and laser processing apparatus |
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