JP2005286330A5 - - Google Patents
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- Publication number
- JP2005286330A5 JP2005286330A5 JP2005087085A JP2005087085A JP2005286330A5 JP 2005286330 A5 JP2005286330 A5 JP 2005286330A5 JP 2005087085 A JP2005087085 A JP 2005087085A JP 2005087085 A JP2005087085 A JP 2005087085A JP 2005286330 A5 JP2005286330 A5 JP 2005286330A5
- Authority
- JP
- Japan
- Prior art keywords
- channel layer
- region
- insulating layer
- temperature gradient
- lateral width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006911 nucleation Effects 0.000 claims 20
- 238000010899 nucleation Methods 0.000 claims 20
- 239000013078 crystal Substances 0.000 claims 17
- 239000000758 substrate Substances 0.000 claims 17
- 239000010409 thin film Substances 0.000 claims 16
- 239000004973 liquid crystal related substance Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 3
- 238000000137 annealing Methods 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 230000000149 penetrating effect Effects 0.000 claims 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW093108422A TWI240950B (en) | 2004-03-26 | 2004-03-26 | Thin film transistor, thin film transistor substrate, and methods for manufacturing the same |
| TW093108422 | 2004-03-26 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005286330A JP2005286330A (ja) | 2005-10-13 |
| JP2005286330A5 true JP2005286330A5 (enExample) | 2008-04-24 |
| JP5049467B2 JP5049467B2 (ja) | 2012-10-17 |
Family
ID=34988722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005087085A Expired - Fee Related JP5049467B2 (ja) | 2004-03-26 | 2005-03-24 | 薄膜トランジスタと薄膜トランジスタ基板とそれらの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (3) | US7199399B2 (enExample) |
| JP (1) | JP5049467B2 (enExample) |
| KR (1) | KR101126282B1 (enExample) |
| TW (1) | TWI240950B (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8994270B2 (en) | 2008-05-30 | 2015-03-31 | Colorado State University Research Foundation | System and methods for plasma application |
| US8575843B2 (en) | 2008-05-30 | 2013-11-05 | Colorado State University Research Foundation | System, method and apparatus for generating plasma |
| EP2297377B1 (en) | 2008-05-30 | 2017-12-27 | Colorado State University Research Foundation | Plasma-based chemical source device and method of use thereof |
| US9272359B2 (en) | 2008-05-30 | 2016-03-01 | Colorado State University Research Foundation | Liquid-gas interface plasma device |
| TWI361492B (en) | 2008-07-25 | 2012-04-01 | Au Optronics Corp | Thin film transistor substrate, electric apparatus, and method for fabricating the same |
| US8222822B2 (en) | 2009-10-27 | 2012-07-17 | Tyco Healthcare Group Lp | Inductively-coupled plasma device |
| JP5553460B2 (ja) | 2010-03-31 | 2014-07-16 | コロラド ステート ユニバーシティー リサーチ ファウンデーション | 液体−気体界面プラズマデバイス |
| US8735207B2 (en) * | 2011-04-05 | 2014-05-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method to avoid fixed pattern noise within backside illuminated (BSI) complementary metal-oxide-semiconductor (CMOS) sensor array |
| US9532826B2 (en) | 2013-03-06 | 2017-01-03 | Covidien Lp | System and method for sinus surgery |
| US9555145B2 (en) | 2013-03-13 | 2017-01-31 | Covidien Lp | System and method for biofilm remediation |
| KR101980466B1 (ko) * | 2015-03-05 | 2019-05-20 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 삼차원 물체 생성 기법 |
| CN104900713B (zh) * | 2015-06-15 | 2017-12-08 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制作方法、显示基板、显示装置 |
| KR102526615B1 (ko) * | 2018-09-18 | 2023-04-27 | 엘지디스플레이 주식회사 | 박막 트랜지스터와, 이를 포함하는 기판 내장형 드라이버 및 표시 장치 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6066416A (ja) * | 1983-09-22 | 1985-04-16 | Matsushita Electric Ind Co Ltd | 半導体集積回路基体の製造方法 |
| JPH081892B2 (ja) * | 1987-06-03 | 1996-01-10 | 松下電子工業株式会社 | 半導体装置の製造方法 |
| JP3472401B2 (ja) * | 1996-01-17 | 2003-12-02 | 三菱電機株式会社 | 半導体装置の製造方法 |
| JP3969510B2 (ja) * | 1998-08-31 | 2007-09-05 | エルジー フィリップス エルシーディー カンパニー リミテッド | 薄膜トランジスタアレイ基板および液晶表示装置 |
| JP2000208771A (ja) * | 1999-01-11 | 2000-07-28 | Hitachi Ltd | 半導体装置、液晶表示装置およびこれらの製造方法 |
| JP2001135573A (ja) * | 1999-11-02 | 2001-05-18 | Sharp Corp | 半導体装置の製造方法およびその半導体装置 |
| JP2002270507A (ja) * | 2001-03-14 | 2002-09-20 | Hitachi Cable Ltd | 結晶シリコン層の形成方法および結晶シリコン半導体装置 |
| JP2003008024A (ja) * | 2001-06-21 | 2003-01-10 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ及び半導体装置及び表示装置 |
| JP2004063478A (ja) * | 2002-04-11 | 2004-02-26 | Fumimasa Yo | 薄膜トランジスタ及びその製造方法 |
| AU2003302834A1 (en) * | 2002-12-09 | 2004-06-30 | Samsung Electronics Co., Ltd. | Display pixel, display apparatus having an image pixel and method of manufacturing display device |
| JP4593094B2 (ja) * | 2003-08-21 | 2010-12-08 | 日本電気株式会社 | 液晶表示装置及びその製造方法 |
-
2004
- 2004-03-26 TW TW093108422A patent/TWI240950B/zh not_active IP Right Cessation
-
2005
- 2005-03-21 US US11/085,420 patent/US7199399B2/en not_active Expired - Fee Related
- 2005-03-24 KR KR1020050024638A patent/KR101126282B1/ko not_active Expired - Fee Related
- 2005-03-24 JP JP2005087085A patent/JP5049467B2/ja not_active Expired - Fee Related
-
2007
- 2007-01-15 US US11/623,214 patent/US7432140B2/en not_active Expired - Fee Related
-
2008
- 2008-08-25 US US12/197,416 patent/US8139175B2/en not_active Expired - Fee Related
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