JP2005274243A5 - - Google Patents
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- Publication number
- JP2005274243A5 JP2005274243A5 JP2004085650A JP2004085650A JP2005274243A5 JP 2005274243 A5 JP2005274243 A5 JP 2005274243A5 JP 2004085650 A JP2004085650 A JP 2004085650A JP 2004085650 A JP2004085650 A JP 2004085650A JP 2005274243 A5 JP2005274243 A5 JP 2005274243A5
- Authority
- JP
- Japan
- Prior art keywords
- subject
- cassette
- inspection
- stored
- arm mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims 19
- 230000032258 transport Effects 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 2
- 238000013507 mapping Methods 0.000 claims 2
- 239000012491 analyte Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010998 test method Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004085650A JP2005274243A (ja) | 2004-03-23 | 2004-03-23 | 被検体の検査装置及びその検査方法 |
| TW094108407A TW200533907A (en) | 2004-03-23 | 2005-03-18 | Apparatus and method for inspecting an inspection object |
| US11/086,900 US20050232735A1 (en) | 2004-03-23 | 2005-03-21 | Apparatus and method for inspecting an inspection object |
| KR1020050023985A KR20060044613A (ko) | 2004-03-23 | 2005-03-23 | 피검체의 검사장치 및 그 검사방법 |
| CNA2005100594091A CN1673719A (zh) | 2004-03-23 | 2005-03-23 | 用于检查检查物体的装置和方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004085650A JP2005274243A (ja) | 2004-03-23 | 2004-03-23 | 被検体の検査装置及びその検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005274243A JP2005274243A (ja) | 2005-10-06 |
| JP2005274243A5 true JP2005274243A5 (https=) | 2007-05-17 |
Family
ID=35046394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004085650A Pending JP2005274243A (ja) | 2004-03-23 | 2004-03-23 | 被検体の検査装置及びその検査方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20050232735A1 (https=) |
| JP (1) | JP2005274243A (https=) |
| KR (1) | KR20060044613A (https=) |
| CN (1) | CN1673719A (https=) |
| TW (1) | TW200533907A (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4578383B2 (ja) * | 2005-10-25 | 2010-11-10 | 株式会社堀場製作所 | パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム |
| JP2007256173A (ja) * | 2006-03-24 | 2007-10-04 | Olympus Corp | 外観検査装置 |
| KR100833716B1 (ko) | 2007-03-30 | 2008-05-29 | (주) 인텍플러스 | 반도체 소자 비전 검사 시스템 |
| FR2931295B1 (fr) * | 2008-05-13 | 2010-08-20 | Altatech Semiconductor | Dispositif et procede d'inspection de plaquettes semi-conductrices |
| KR101227812B1 (ko) * | 2011-04-08 | 2013-02-07 | 세크론 주식회사 | 발광 소자 검사 방법 |
| KR101287229B1 (ko) * | 2011-11-04 | 2013-07-17 | 세메스 주식회사 | 발광 소자들의 검사 공정에서 웨이퍼를 이송하는 방법 |
| JP6448456B2 (ja) * | 2015-04-28 | 2019-01-09 | 株式会社ディスコ | 加工装置 |
| JP2018128339A (ja) * | 2017-02-08 | 2018-08-16 | 住友化学株式会社 | 半導体ウェハの表面検査装置及び半導体ウェハの表面検査方法 |
| JP7274350B2 (ja) * | 2019-05-28 | 2023-05-16 | 東京エレクトロン株式会社 | 搬送システム、検査システム及び検査方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3468056B2 (ja) * | 1997-09-23 | 2003-11-17 | 東京エレクトロン株式会社 | 基板検出装置 |
| JP3270828B2 (ja) * | 1998-09-21 | 2002-04-02 | 理学電機工業株式会社 | 蛍光x線分析装置 |
| US6137303A (en) * | 1998-12-14 | 2000-10-24 | Sony Corporation | Integrated testing method and apparatus for semiconductor test operations processing |
| JP2002076077A (ja) * | 2000-08-31 | 2002-03-15 | Nikon Corp | 検査装置 |
| DE10103253A1 (de) * | 2001-01-25 | 2002-08-01 | Leica Microsystems | Verfahren und Anordnung zum Transportieren und Inspizieren von Halbleitersubstraten |
| JP2002280425A (ja) * | 2001-03-16 | 2002-09-27 | Hitachi Ltd | 半導体集積回路装置の製造方法およびテスト方法 |
| WO2003012837A1 (fr) * | 2001-07-31 | 2003-02-13 | Asahi Kasei Microsystems Co.,Ltd. | Systeme de gestion de la fabrication de semi-conducteurs |
-
2004
- 2004-03-23 JP JP2004085650A patent/JP2005274243A/ja active Pending
-
2005
- 2005-03-18 TW TW094108407A patent/TW200533907A/zh unknown
- 2005-03-21 US US11/086,900 patent/US20050232735A1/en not_active Abandoned
- 2005-03-23 CN CNA2005100594091A patent/CN1673719A/zh active Pending
- 2005-03-23 KR KR1020050023985A patent/KR20060044613A/ko not_active Withdrawn
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