JP2005203474A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2005203474A JP2005203474A JP2004006513A JP2004006513A JP2005203474A JP 2005203474 A JP2005203474 A JP 2005203474A JP 2004006513 A JP2004006513 A JP 2004006513A JP 2004006513 A JP2004006513 A JP 2004006513A JP 2005203474 A JP2005203474 A JP 2005203474A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- film
- conductive
- power semiconductor
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 171
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 120
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 60
- 229910052751 metal Inorganic materials 0.000 claims abstract description 52
- 239000002184 metal Substances 0.000 claims abstract description 51
- 229910052782 aluminium Inorganic materials 0.000 claims description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 23
- 229910000679 solder Inorganic materials 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 16
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 11
- 229910052750 molybdenum Inorganic materials 0.000 claims description 11
- 239000011733 molybdenum Substances 0.000 claims description 11
- 238000010030 laminating Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 18
- 239000010410 layer Substances 0.000 description 138
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 16
- 239000010931 gold Substances 0.000 description 16
- 229910052737 gold Inorganic materials 0.000 description 16
- 238000004090 dissolution Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
【解決手段】 本発明の半導体装置は、半導体チップ1と、半導体チップ1の第一の主面上に形成された金属層2b,2cと、半導体チップ1の第二の主面上に積層された複数の導電膜から成る第一の導電層3aと、金属層2b上に、半導体チップ1から見て第一の導電層3aと同一順序の層構造を有して積層された複数の導電膜から成る第二の導電層3bと、金属層2c上に、半導体チップ1から見て第一の導電層3aと同一順序の層構造を有して積層された複数の導電膜から成る第三の導電層3cとを備えている。また、複数の導電膜は、ニッケル膜3a2と、ニッケル膜3a2よりも半導体チップとの接触抵抗が低い低接触抵抗導電膜3a1とを備えている。また、半導体チップ1の側から、低接触抵抗導電膜3a1およびニッケル膜3a2の順に形成されている。
【選択図】図1
Description
図1に、本実施の形態に係る電力用半導体装置の断面図を示す。ここで、図1では便宜上、パッケージ、当該パッケージ内の各端子、および第一の主電極板(ドレイン電極板)下部の絶縁基板等を省略している。
本実施の形態に係る電力用半導体装置を、図4および図5に示す。図4は、本実施の形態に係る電力用半導体装置において、図1の破線7の領域を拡大した断面図である。また、図5は、本実施の形態に係る電力用半導体装置において、図1の破線8の領域を拡大した断面図である。
本実施の形態に係る電力用半導体装置を、図6および図7に示す。図6は、本実施の形態に係る電力用半導体装置において、図1の破線7の領域を拡大した断面図である。また、図7は、本実施の形態に係る電力用半導体装置において、図1の破線8の領域を拡大した断面図である。
本実施の形態に係る電力用半導体装置では、電力用半導体チップ1の第一の主面上に形成されている金属層2b,2cは、次の金属元素含んでいる。つまり、金属層2b,2cと接する部分における低接触抵抗導電膜3a1,3b1,3c1と、同じ金属元素を含んでいる。
Claims (6)
- 半導体チップと、
前記半導体チップの第一の主面上に形成された第一、第二の金属層と、
前記半導体チップの第二の主面上に積層された、複数の導電膜から成る第一の導電層と、
前記第一の金属層上に、前記半導体チップから見て、前記第一の導電層と同一順序の層構造を有して積層された複数の導電膜から成る第二の導電層と、
前記第二の金属層上に、前記半導体チップから見て、前記第一の導電層と同一順序の層構造を有して積層された複数の導電膜から成る第三の導電層とを、備えており、
前記複数の導電膜は、
ニッケル膜と、
前記ニッケル膜よりも前記半導体チップとの接触抵抗が低い低接触抵抗導電膜とを、備えており、
前記半導体チップの側から、前記低接触抵抗導電膜および前記ニッケル膜の順に形成されている、
ことを特徴とする半導体装置。 - 前記第一ないし第三の導電層上に各々、はんだを介して配設される第一ないし第三の電極板とを、さらに備えている、
ことを特徴とする請求項1に記載の半導体装置。 - 前記半導体チップは、
前記第二の主面の表面内に形成されるN型不純物領域を、備えており、
前記低接触抵抗導電膜は、チタン膜である、
ことを特徴とする請求項1または請求項2に記載の半導体装置。 - 前記半導体チップは、
前記第二の主面の表面内に形成されるP型不純物領域を、備えており、
前記低接触抵抗導電膜は、アルミニウム膜とモリブデン膜とが前記半導体チップから見て当該順に積層されたものである、
ことを特徴とする請求項1または請求項2に記載の半導体装置。 - 前記第一、第二の金属層は、
自身と接する部分における前記低接触抵抗導電膜と同じ金属元素を含んでいる、
ことを特徴とする請求項1または請求項2に記載の半導体装置。 - 前記半導体チップは、絶縁ゲート型トランジスタである、
ことを特徴とする請求項1ないし請求項5のいずれかに記載の半導体装置。
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JP2004006513A JP4073876B2 (ja) | 2004-01-14 | 2004-01-14 | 半導体装置 |
US10/918,355 US7045831B2 (en) | 2004-01-14 | 2004-08-16 | Semiconductor device |
CNB2004100786330A CN100338751C (zh) | 2004-01-14 | 2004-09-14 | 半导体装置 |
DE102004048688A DE102004048688B4 (de) | 2004-01-14 | 2004-10-06 | Leistungs-Halbleitervorrichtung |
KR1020040104732A KR100617527B1 (ko) | 2004-01-14 | 2004-12-13 | 반도체장치 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2006024829A (ja) * | 2004-07-09 | 2006-01-26 | Toshiba Corp | 半導体装置及びその製造方法 |
US8294244B2 (en) | 2009-08-27 | 2012-10-23 | Mitsubishi Electric Corporation | Semiconductor device having an enlarged emitter electrode |
JPWO2015029159A1 (ja) * | 2013-08-28 | 2017-03-02 | 三菱電機株式会社 | 半導体装置 |
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JP4762663B2 (ja) * | 2005-10-14 | 2011-08-31 | 三菱電機株式会社 | 半導体装置 |
US8354692B2 (en) * | 2006-03-15 | 2013-01-15 | Infineon Technologies Ag | Vertical semiconductor power switch, electronic component and methods of producing the same |
US20090080602A1 (en) * | 2006-08-03 | 2009-03-26 | Kenneth Brooks | Dedicated breast radiation imaging/therapy system |
US7960845B2 (en) * | 2008-01-03 | 2011-06-14 | Linear Technology Corporation | Flexible contactless wire bonding structure and methodology for semiconductor device |
US7902665B2 (en) * | 2008-09-02 | 2011-03-08 | Linear Technology Corporation | Semiconductor device having a suspended isolating interconnect |
US8525330B2 (en) * | 2009-09-09 | 2013-09-03 | Hitachi, Ltd. | Connecting member for connecting a semiconductor element and a frame, formed of an Al-based layer and first and second Zn-based layers provided on surfaces of the Al-based layer |
JP5765324B2 (ja) | 2012-12-10 | 2015-08-19 | トヨタ自動車株式会社 | 半導体装置 |
CN103985743A (zh) * | 2014-05-14 | 2014-08-13 | 中国电子科技集团公司第十三研究所 | 双极型功率晶体管基片及其制作方法 |
US9607243B1 (en) | 2014-10-10 | 2017-03-28 | Google Inc. | Time-lapsed image sequence generation |
JP7180392B2 (ja) * | 2019-01-11 | 2022-11-30 | 株式会社デンソー | 半導体装置及びその製造方法 |
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US4560421A (en) * | 1980-10-02 | 1985-12-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor device and method of manufacturing the same |
JPS60119777A (ja) * | 1983-11-30 | 1985-06-27 | Mitsubishi Electric Corp | ゲ−トタ−ンオフサイリスタ |
JP2577330B2 (ja) * | 1986-12-11 | 1997-01-29 | 新技術事業団 | 両面ゲ−ト静電誘導サイリスタの製造方法 |
JPH0243725A (ja) * | 1988-08-03 | 1990-02-14 | Fuji Electric Co Ltd | 半導体装置の製造方法 |
US5184206A (en) * | 1990-10-26 | 1993-02-02 | General Electric Company | Direct thermocompression bonding for thin electronic power chips |
JP4123717B2 (ja) | 2000-12-27 | 2008-07-23 | 松下電器産業株式会社 | チップ型半導体素子の製造方法 |
JP4055399B2 (ja) * | 2001-11-14 | 2008-03-05 | 松下電器産業株式会社 | チップ型半導体素子及びその製造方法 |
JP2003229460A (ja) * | 2002-02-05 | 2003-08-15 | Sanyo Electric Co Ltd | Mosfetおよびその製造方法 |
JP3937860B2 (ja) | 2002-02-15 | 2007-06-27 | 松下電器産業株式会社 | チップ型半導体素子およびその製造方法 |
JP4000877B2 (ja) * | 2002-03-19 | 2007-10-31 | 松下電器産業株式会社 | チップ型半導体素子とその製造方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006024829A (ja) * | 2004-07-09 | 2006-01-26 | Toshiba Corp | 半導体装置及びその製造方法 |
US7964939B2 (en) | 2004-07-09 | 2011-06-21 | Kabushiki Kaisha Toshiba | Semiconductor device and method of manufacturing same |
US8294244B2 (en) | 2009-08-27 | 2012-10-23 | Mitsubishi Electric Corporation | Semiconductor device having an enlarged emitter electrode |
JPWO2015029159A1 (ja) * | 2013-08-28 | 2017-03-02 | 三菱電機株式会社 | 半導体装置 |
US9716052B2 (en) | 2013-08-28 | 2017-07-25 | Mitsubishi Electric Corporation | Semiconductor device comprising a conductive film joining a diode and switching element |
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DE102004048688A1 (de) | 2005-08-11 |
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