JP2005159326A5 - - Google Patents
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- Publication number
- JP2005159326A5 JP2005159326A5 JP2004311126A JP2004311126A JP2005159326A5 JP 2005159326 A5 JP2005159326 A5 JP 2005159326A5 JP 2004311126 A JP2004311126 A JP 2004311126A JP 2004311126 A JP2004311126 A JP 2004311126A JP 2005159326 A5 JP2005159326 A5 JP 2005159326A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- wiring
- mask
- convex portion
- columnar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 5
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 4
- 239000003870 refractory metal Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- 229910010272 inorganic material Inorganic materials 0.000 claims 2
- 239000011147 inorganic material Substances 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004311126A JP4748967B2 (ja) | 2003-11-04 | 2004-10-26 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003375038 | 2003-11-04 | ||
| JP2003375038 | 2003-11-04 | ||
| JP2004311126A JP4748967B2 (ja) | 2003-11-04 | 2004-10-26 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005159326A JP2005159326A (ja) | 2005-06-16 |
| JP2005159326A5 true JP2005159326A5 (enExample) | 2007-08-16 |
| JP4748967B2 JP4748967B2 (ja) | 2011-08-17 |
Family
ID=34741376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004311126A Expired - Fee Related JP4748967B2 (ja) | 2003-11-04 | 2004-10-26 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4748967B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1760798B1 (en) * | 2005-08-31 | 2012-01-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| EP1793266B1 (en) * | 2005-12-05 | 2017-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Transflective Liquid Crystal Display with a Horizontal Electric Field Configuration |
| KR20100065145A (ko) * | 2007-09-14 | 2010-06-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 전자 기기 |
| JP2009224238A (ja) * | 2008-03-18 | 2009-10-01 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス素子及びその製造方法 |
| JP5429454B2 (ja) * | 2009-04-17 | 2014-02-26 | ソニー株式会社 | 薄膜トランジスタの製造方法および薄膜トランジスタ |
| WO2011043194A1 (en) * | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| US20210242207A1 (en) * | 2018-05-18 | 2021-08-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
| US11251200B2 (en) * | 2019-05-23 | 2022-02-15 | Tokyo Electron Limited | Coaxial contacts for 3D logic and memory |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07109828B2 (ja) * | 1988-09-14 | 1995-11-22 | 日本電気株式会社 | 多層配線構造体の製造方法 |
| JPH08181213A (ja) * | 1994-12-27 | 1996-07-12 | Kawasaki Steel Corp | 半導体装置の製造方法 |
| JPH08274164A (ja) * | 1995-03-31 | 1996-10-18 | Seiko Epson Corp | 半導体装置 |
| JPH08306779A (ja) * | 1995-05-10 | 1996-11-22 | Sony Corp | 半導体装置の製造方法 |
| JP2000012683A (ja) * | 1998-06-17 | 2000-01-14 | Nec Corp | 集積回路とその製造方法 |
-
2004
- 2004-10-26 JP JP2004311126A patent/JP4748967B2/ja not_active Expired - Fee Related
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