JP2005142448A - 表面波励起プラズマcvd装置 - Google Patents
表面波励起プラズマcvd装置 Download PDFInfo
- Publication number
- JP2005142448A JP2005142448A JP2003379035A JP2003379035A JP2005142448A JP 2005142448 A JP2005142448 A JP 2005142448A JP 2003379035 A JP2003379035 A JP 2003379035A JP 2003379035 A JP2003379035 A JP 2003379035A JP 2005142448 A JP2005142448 A JP 2005142448A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- plasma cvd
- surface wave
- cvd apparatus
- wave excitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005284 excitation Effects 0.000 title claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000000463 material Substances 0.000 claims abstract description 50
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims abstract description 46
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000006243 chemical reaction Methods 0.000 claims abstract description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- 238000009792 diffusion process Methods 0.000 claims description 8
- 150000003377 silicon compounds Chemical class 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 6
- 230000004913 activation Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 140
- 239000010408 film Substances 0.000 description 20
- 239000010409 thin film Substances 0.000 description 11
- 229910004298 SiO 2 Inorganic materials 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 239000002243 precursor Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000013067 intermediate product Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910008051 Si-OH Inorganic materials 0.000 description 1
- 229910006358 Si—OH Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- -1 electrons Chemical class 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
- C23C16/45508—Radial flow
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
- C23C16/45589—Movable means, e.g. fans
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Abstract
【解決手段】表面波励起プラズマCVD装置100は、シリコン元素を含む材料ガスを上面側導入管および側面側導入管7の少なくとも一方によりチャンバー1内に導入し、表面波励起プラズマPにより活性化して材料ガスに化学反応を起こさせるプロセスガスをプロセスガス導入管5によりチャンバー1内に導入する。上面側導入管および/または側面側導入管7のガス噴出口63,73は、プロセスガス導入管5のガス噴出口53よりも基板10に近く設けることができる。
【選択図】図1
Description
(3)請求項1〜3のいずれかの表面波励起プラズマCVD装置では、材料ガス導入手段は、一以上の経路と一以上のガス噴出口とを有することが好ましい。また、材料ガス導入手段は、ガス噴出口の被処理基板との距離を可変とすることができ、さらに、第2の材料ガス導入手段では、ガス噴出口の向きを可変とすることもできる。
(5)請求項1〜7のいずれかの表面波励起プラズマCVD装置において、プロセスガス導入手段は、誘電体部材に一以上の経路と一以上のガス噴出口とを有するガス流路を設けて構成することができる。
〈第1の実施の形態〉
図1は、本発明の第1の実施の形態によるプラズマCVD装置の概略構成を示す全体構成図である。図2〜4は、第1の実施の形態によるプラズマCVD装置のそれぞれプロセスガス導入管、上面側導入管、側面側導入管の構造を示す図である。
図7(a)は、本発明の第2の実施の形態によるプラズマCVD装置の概略構成を示す全体構成図である。図7(b)は、図7(a)の領域Cを拡大して示す部分断面図である。図1と同じ構成部品には同一符号を付し、説明を省略する。
図9は、誘電体板4Aを模式的に示す平面図である。誘電体板4Aは、複数の誘電体ブロックを組み合わせて構成され、全体として矩形形状である。誘電体ブロック同士が接触するコーナーには隙間があり、貫通孔53Aとして形成されている。誘電体板4Aは、特に矩形形状の基板の成膜に適している。
このように、プロセスガス導入管5、上面側導入管6および側面側導入管7については様々な変形例が考えられる。本発明は、その特徴を損なわない限り、以上説明した実施の形態に何ら限定されない。
2:マイクロ波導波管
3:スロットアンテナ
4,4A:誘電体板
5:プロセスガス導入管
6:上面側導入管
7:側面側導入管
9:基板ホルダー
10:基板
53,63,73:噴出口
64,74:ガス流拡散板
100,200:プラズマCVD装置
P:プラズマ
Claims (8)
- マイクロ波を誘電体部材を介してプラズマ処理室内に導入し、前記マイクロ波から表面波を形成し、前記表面波によりプラズマ処理室内のガスを励起して表面波励起プラズマを生成し、前記表面波励起プラズマにより被処理基板上にシリコン化合物を形成する表面波励起プラズマCVD装置であって、
シリコン元素を含む材料ガスを導入し、ガス噴出口から前記プラズマ処理室内に噴出する材料ガス導入手段と、
前記表面波励起プラズマにより活性化して前記材料ガスに化学反応を起こさせるプロセスガスを導入し、前記材料ガス導入手段のガス噴出口と離れて設けられたガス噴出口から前記プラズマ処理室内に噴出するプロセスガス導入手段とを具備することを特徴とする表面波励起プラズマCVD装置。 - 請求項1に記載の表面波励起プラズマCVD装置において、
前記材料ガス導入手段のガス噴出口は、前記プロセスガス導入手段のガス噴出口よりも前記被処理基板に近く設けられることを特徴とする表面波励起プラズマCVD装置。 - 請求項1または2に記載の表面波励起プラズマCVD装置において、
前記材料ガス導入手段は、
前記誘電体部材と被処理基板との間の空間に前記ガス噴出口を有し、前記被処理基板に向かってガスを噴出する第1の材料ガス導入手段と、
前記誘電体部材と被処理基板との間の空間の周辺領域に前記ガス噴出口を有し、前記被処理基板の表面と略平行にガスを噴出する第2の材料ガス導入手段との少なくとも一方を有することを特徴とする表面波励起プラズマCVD装置。 - 請求項1〜3のいずれかに記載の表面波励起プラズマCVD装置において、
前記材料ガス導入手段は、一以上の経路と一以上のガス噴出口とを有することを特徴とする表面波励起プラズマCVD装置。 - 請求項1〜4のいずれかに記載の表面波励起プラズマCVD装置において、
前記材料ガス導入手段は、前記ガス噴出口の前記被処理基板との距離を可変とする可変手段をさらに有することを特徴とする表面波励起プラズマCVD装置。 - 請求項3に記載の表面波励起プラズマCVD装置において、
前記第2の材料ガス導入手段は、前記ガス噴出口の向きを可変とする可変手段をさらに有することを特徴とする表面波励起プラズマCVD装置。 - 請求項1〜6のいずれかに記載の表面波励起プラズマCVD装置において、
前記材料ガス導入手段は、前記ガス噴出口の前方にガス流拡散部材をさらに有することを特徴とする表面波励起プラズマCVD装置。 - 請求項1〜7のいずれかに記載の表面波励起プラズマCVD装置において、
前記プロセスガス導入手段は、前記誘電体部材に一以上の経路と一以上のガス噴出口とを有するガス流路を設けて成ることを特徴とする表面波励起プラズマCVD装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003379035A JP4273932B2 (ja) | 2003-11-07 | 2003-11-07 | 表面波励起プラズマcvd装置 |
US10/976,856 US8307781B2 (en) | 2003-11-07 | 2004-11-01 | Surface wave excitation plasma CVD system |
TW093133332A TWI249975B (en) | 2003-11-07 | 2004-11-02 | Surface wave excitation plasma CVD system |
KR1020040088315A KR100610469B1 (ko) | 2003-11-07 | 2004-11-02 | 표면파 여기 플라즈마 cvd 시스템 |
CNB2004100922886A CN100339505C (zh) | 2003-11-07 | 2004-11-05 | 表面波激发等离子体cvd系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003379035A JP4273932B2 (ja) | 2003-11-07 | 2003-11-07 | 表面波励起プラズマcvd装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005142448A true JP2005142448A (ja) | 2005-06-02 |
JP4273932B2 JP4273932B2 (ja) | 2009-06-03 |
Family
ID=34587233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003379035A Expired - Fee Related JP4273932B2 (ja) | 2003-11-07 | 2003-11-07 | 表面波励起プラズマcvd装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8307781B2 (ja) |
JP (1) | JP4273932B2 (ja) |
KR (1) | KR100610469B1 (ja) |
CN (1) | CN100339505C (ja) |
TW (1) | TWI249975B (ja) |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009539269A (ja) * | 2006-05-30 | 2009-11-12 | アプライド マテリアルズ インコーポレイテッド | 誘電性ギャップ充填のためのプロセスチャンバ |
US8445078B2 (en) | 2011-04-20 | 2013-05-21 | Applied Materials, Inc. | Low temperature silicon oxide conversion |
US8450191B2 (en) | 2011-01-24 | 2013-05-28 | Applied Materials, Inc. | Polysilicon films by HDP-CVD |
US8449942B2 (en) | 2009-11-12 | 2013-05-28 | Applied Materials, Inc. | Methods of curing non-carbon flowable CVD films |
US8466073B2 (en) | 2011-06-03 | 2013-06-18 | Applied Materials, Inc. | Capping layer for reduced outgassing |
WO2013118822A1 (ja) * | 2012-02-10 | 2013-08-15 | 株式会社ジェイテクト | 炭素膜成膜装置および炭素膜成膜方法 |
US8551891B2 (en) | 2011-10-04 | 2013-10-08 | Applied Materials, Inc. | Remote plasma burn-in |
US8563445B2 (en) | 2010-03-05 | 2013-10-22 | Applied Materials, Inc. | Conformal layers by radical-component CVD |
US8617989B2 (en) | 2011-09-26 | 2013-12-31 | Applied Materials, Inc. | Liner property improvement |
US8629067B2 (en) | 2009-12-30 | 2014-01-14 | Applied Materials, Inc. | Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio |
US8647992B2 (en) | 2010-01-06 | 2014-02-11 | Applied Materials, Inc. | Flowable dielectric using oxide liner |
US8664127B2 (en) | 2010-10-15 | 2014-03-04 | Applied Materials, Inc. | Two silicon-containing precursors for gapfill enhancing dielectric liner |
US8716154B2 (en) | 2011-03-04 | 2014-05-06 | Applied Materials, Inc. | Reduced pattern loading using silicon oxide multi-layers |
US8741788B2 (en) | 2009-08-06 | 2014-06-03 | Applied Materials, Inc. | Formation of silicon oxide using non-carbon flowable CVD processes |
US8889566B2 (en) | 2012-09-11 | 2014-11-18 | Applied Materials, Inc. | Low cost flowable dielectric films |
US8980382B2 (en) | 2009-12-02 | 2015-03-17 | Applied Materials, Inc. | Oxygen-doping for non-carbon radical-component CVD films |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
US9285168B2 (en) | 2010-10-05 | 2016-03-15 | Applied Materials, Inc. | Module for ozone cure and post-cure moisture treatment |
US9404178B2 (en) | 2011-07-15 | 2016-08-02 | Applied Materials, Inc. | Surface treatment and deposition for reduced outgassing |
US9412581B2 (en) | 2014-07-16 | 2016-08-09 | Applied Materials, Inc. | Low-K dielectric gapfill by flowable deposition |
JP2017199507A (ja) * | 2016-04-26 | 2017-11-02 | 東京エレクトロン株式会社 | プラズマ処理装置およびガス導入機構 |
JP2018174340A (ja) * | 2013-03-15 | 2018-11-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 高対称四重ガス注入によるプラズマリアクタ |
US10283321B2 (en) | 2011-01-18 | 2019-05-07 | Applied Materials, Inc. | Semiconductor processing system and methods using capacitively coupled plasma |
JP2023016748A (ja) * | 2021-07-21 | 2023-02-02 | ゼネラル・エレクトリック・カンパニイ | セラミックファイバをコーティングするためのシステムおよび方法 |
Families Citing this family (85)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1497978B1 (en) * | 2002-04-24 | 2018-07-25 | Thomson Licensing DTV | Auxiliary signal synchronization for closed captioning insertion |
JP5068458B2 (ja) * | 2006-01-18 | 2012-11-07 | 東京エレクトロン株式会社 | プラズマ処理装置およびプラズマ処理方法 |
US8100082B2 (en) * | 2007-05-18 | 2012-01-24 | Tokyo Electron Limited | Method and system for introducing process fluid through a chamber component |
KR100963297B1 (ko) * | 2007-09-04 | 2010-06-11 | 주식회사 유진테크 | 샤워헤드 및 이를 포함하는 기판처리장치, 샤워헤드를이용하여 플라스마를 공급하는 방법 |
TWI394200B (zh) * | 2008-06-04 | 2013-04-21 | Tokyo Electron Ltd | 經由腔室構件導入處理流體的方法與系統 |
KR20120023655A (ko) * | 2009-05-15 | 2012-03-13 | 가부시키가이샤 시마쓰세사쿠쇼 | 표면파 플라즈마 cvd 장치 및 성막 방법 |
JP5375732B2 (ja) * | 2010-04-26 | 2013-12-25 | 株式会社島津製作所 | バリヤ膜を形成する方法およびバリヤ膜を形成するために用いるcvd装置 |
US20120152900A1 (en) * | 2010-12-20 | 2012-06-21 | Applied Materials, Inc. | Methods and apparatus for gas delivery into plasma processing chambers |
JP5851899B2 (ja) * | 2011-03-25 | 2016-02-03 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US9245717B2 (en) * | 2011-05-31 | 2016-01-26 | Lam Research Corporation | Gas distribution system for ceramic showerhead of plasma etch reactor |
KR101879175B1 (ko) * | 2011-10-20 | 2018-08-20 | 삼성전자주식회사 | 화학 기상 증착 장치 |
US9132436B2 (en) | 2012-09-21 | 2015-09-15 | Applied Materials, Inc. | Chemical control features in wafer process equipment |
US10256079B2 (en) | 2013-02-08 | 2019-04-09 | Applied Materials, Inc. | Semiconductor processing systems having multiple plasma configurations |
US9362130B2 (en) | 2013-03-01 | 2016-06-07 | Applied Materials, Inc. | Enhanced etching processes using remote plasma sources |
US9867269B2 (en) | 2013-03-15 | 2018-01-09 | Starfire Industries, Llc | Scalable multi-role surface-wave plasma generator |
US9309598B2 (en) | 2014-05-28 | 2016-04-12 | Applied Materials, Inc. | Oxide and metal removal |
US9966240B2 (en) | 2014-10-14 | 2018-05-08 | Applied Materials, Inc. | Systems and methods for internal surface conditioning assessment in plasma processing equipment |
US9355922B2 (en) | 2014-10-14 | 2016-05-31 | Applied Materials, Inc. | Systems and methods for internal surface conditioning in plasma processing equipment |
US11637002B2 (en) | 2014-11-26 | 2023-04-25 | Applied Materials, Inc. | Methods and systems to enhance process uniformity |
US10573496B2 (en) | 2014-12-09 | 2020-02-25 | Applied Materials, Inc. | Direct outlet toroidal plasma source |
US10224210B2 (en) | 2014-12-09 | 2019-03-05 | Applied Materials, Inc. | Plasma processing system with direct outlet toroidal plasma source |
US11257693B2 (en) | 2015-01-09 | 2022-02-22 | Applied Materials, Inc. | Methods and systems to improve pedestal temperature control |
US20160225652A1 (en) | 2015-02-03 | 2016-08-04 | Applied Materials, Inc. | Low temperature chuck for plasma processing systems |
US9691645B2 (en) | 2015-08-06 | 2017-06-27 | Applied Materials, Inc. | Bolted wafer chuck thermal management systems and methods for wafer processing systems |
US9741593B2 (en) | 2015-08-06 | 2017-08-22 | Applied Materials, Inc. | Thermal management systems and methods for wafer processing systems |
US9349605B1 (en) | 2015-08-07 | 2016-05-24 | Applied Materials, Inc. | Oxide etch selectivity systems and methods |
US10504700B2 (en) | 2015-08-27 | 2019-12-10 | Applied Materials, Inc. | Plasma etching systems and methods with secondary plasma injection |
US10504754B2 (en) | 2016-05-19 | 2019-12-10 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US10522371B2 (en) | 2016-05-19 | 2019-12-31 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
TWI624561B (zh) * | 2016-08-12 | 2018-05-21 | 漢民科技股份有限公司 | 用於半導體製程之氣體噴射器及成膜裝置 |
US10629473B2 (en) | 2016-09-09 | 2020-04-21 | Applied Materials, Inc. | Footing removal for nitride spacer |
US9934942B1 (en) | 2016-10-04 | 2018-04-03 | Applied Materials, Inc. | Chamber with flow-through source |
US10546729B2 (en) | 2016-10-04 | 2020-01-28 | Applied Materials, Inc. | Dual-channel showerhead with improved profile |
US10062579B2 (en) | 2016-10-07 | 2018-08-28 | Applied Materials, Inc. | Selective SiN lateral recess |
US10163696B2 (en) | 2016-11-11 | 2018-12-25 | Applied Materials, Inc. | Selective cobalt removal for bottom up gapfill |
US9768034B1 (en) | 2016-11-11 | 2017-09-19 | Applied Materials, Inc. | Removal methods for high aspect ratio structures |
US10026621B2 (en) | 2016-11-14 | 2018-07-17 | Applied Materials, Inc. | SiN spacer profile patterning |
US10242908B2 (en) | 2016-11-14 | 2019-03-26 | Applied Materials, Inc. | Airgap formation with damage-free copper |
US10566206B2 (en) | 2016-12-27 | 2020-02-18 | Applied Materials, Inc. | Systems and methods for anisotropic material breakthrough |
US10403507B2 (en) | 2017-02-03 | 2019-09-03 | Applied Materials, Inc. | Shaped etch profile with oxidation |
US10431429B2 (en) * | 2017-02-03 | 2019-10-01 | Applied Materials, Inc. | Systems and methods for radial and azimuthal control of plasma uniformity |
US10319739B2 (en) | 2017-02-08 | 2019-06-11 | Applied Materials, Inc. | Accommodating imperfectly aligned memory holes |
US10943834B2 (en) | 2017-03-13 | 2021-03-09 | Applied Materials, Inc. | Replacement contact process |
US10319649B2 (en) | 2017-04-11 | 2019-06-11 | Applied Materials, Inc. | Optical emission spectroscopy (OES) for remote plasma monitoring |
US11276559B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Semiconductor processing chamber for multiple precursor flow |
US11276590B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Multi-zone semiconductor substrate supports |
US10497579B2 (en) | 2017-05-31 | 2019-12-03 | Applied Materials, Inc. | Water-free etching methods |
US10920320B2 (en) | 2017-06-16 | 2021-02-16 | Applied Materials, Inc. | Plasma health determination in semiconductor substrate processing reactors |
US10541246B2 (en) | 2017-06-26 | 2020-01-21 | Applied Materials, Inc. | 3D flash memory cells which discourage cross-cell electrical tunneling |
US10727080B2 (en) | 2017-07-07 | 2020-07-28 | Applied Materials, Inc. | Tantalum-containing material removal |
US10541184B2 (en) | 2017-07-11 | 2020-01-21 | Applied Materials, Inc. | Optical emission spectroscopic techniques for monitoring etching |
US10354889B2 (en) | 2017-07-17 | 2019-07-16 | Applied Materials, Inc. | Non-halogen etching of silicon-containing materials |
US10170336B1 (en) | 2017-08-04 | 2019-01-01 | Applied Materials, Inc. | Methods for anisotropic control of selective silicon removal |
US10043674B1 (en) | 2017-08-04 | 2018-08-07 | Applied Materials, Inc. | Germanium etching systems and methods |
US10297458B2 (en) | 2017-08-07 | 2019-05-21 | Applied Materials, Inc. | Process window widening using coated parts in plasma etch processes |
US10424487B2 (en) | 2017-10-24 | 2019-09-24 | Applied Materials, Inc. | Atomic layer etching processes |
US10283324B1 (en) | 2017-10-24 | 2019-05-07 | Applied Materials, Inc. | Oxygen treatment for nitride etching |
US10128086B1 (en) | 2017-10-24 | 2018-11-13 | Applied Materials, Inc. | Silicon pretreatment for nitride removal |
US10256112B1 (en) | 2017-12-08 | 2019-04-09 | Applied Materials, Inc. | Selective tungsten removal |
US10903054B2 (en) | 2017-12-19 | 2021-01-26 | Applied Materials, Inc. | Multi-zone gas distribution systems and methods |
US11328909B2 (en) | 2017-12-22 | 2022-05-10 | Applied Materials, Inc. | Chamber conditioning and removal processes |
US10854426B2 (en) | 2018-01-08 | 2020-12-01 | Applied Materials, Inc. | Metal recess for semiconductor structures |
US10964512B2 (en) | 2018-02-15 | 2021-03-30 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus and methods |
US10679870B2 (en) | 2018-02-15 | 2020-06-09 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus |
TWI766433B (zh) | 2018-02-28 | 2022-06-01 | 美商應用材料股份有限公司 | 形成氣隙的系統及方法 |
US10593560B2 (en) | 2018-03-01 | 2020-03-17 | Applied Materials, Inc. | Magnetic induction plasma source for semiconductor processes and equipment |
US10319600B1 (en) | 2018-03-12 | 2019-06-11 | Applied Materials, Inc. | Thermal silicon etch |
US10497573B2 (en) | 2018-03-13 | 2019-12-03 | Applied Materials, Inc. | Selective atomic layer etching of semiconductor materials |
US10573527B2 (en) | 2018-04-06 | 2020-02-25 | Applied Materials, Inc. | Gas-phase selective etching systems and methods |
US10490406B2 (en) | 2018-04-10 | 2019-11-26 | Appled Materials, Inc. | Systems and methods for material breakthrough |
US10699879B2 (en) | 2018-04-17 | 2020-06-30 | Applied Materials, Inc. | Two piece electrode assembly with gap for plasma control |
US10886137B2 (en) | 2018-04-30 | 2021-01-05 | Applied Materials, Inc. | Selective nitride removal |
US10872778B2 (en) | 2018-07-06 | 2020-12-22 | Applied Materials, Inc. | Systems and methods utilizing solid-phase etchants |
US10755941B2 (en) | 2018-07-06 | 2020-08-25 | Applied Materials, Inc. | Self-limiting selective etching systems and methods |
US10672642B2 (en) | 2018-07-24 | 2020-06-02 | Applied Materials, Inc. | Systems and methods for pedestal configuration |
US11049755B2 (en) | 2018-09-14 | 2021-06-29 | Applied Materials, Inc. | Semiconductor substrate supports with embedded RF shield |
US10892198B2 (en) | 2018-09-14 | 2021-01-12 | Applied Materials, Inc. | Systems and methods for improved performance in semiconductor processing |
US11062887B2 (en) | 2018-09-17 | 2021-07-13 | Applied Materials, Inc. | High temperature RF heater pedestals |
US11417534B2 (en) | 2018-09-21 | 2022-08-16 | Applied Materials, Inc. | Selective material removal |
US11682560B2 (en) | 2018-10-11 | 2023-06-20 | Applied Materials, Inc. | Systems and methods for hafnium-containing film removal |
US11121002B2 (en) | 2018-10-24 | 2021-09-14 | Applied Materials, Inc. | Systems and methods for etching metals and metal derivatives |
US11437242B2 (en) | 2018-11-27 | 2022-09-06 | Applied Materials, Inc. | Selective removal of silicon-containing materials |
US11721527B2 (en) | 2019-01-07 | 2023-08-08 | Applied Materials, Inc. | Processing chamber mixing systems |
US10920319B2 (en) | 2019-01-11 | 2021-02-16 | Applied Materials, Inc. | Ceramic showerheads with conductive electrodes |
US20220364231A1 (en) * | 2021-05-11 | 2022-11-17 | Applied Materials, Inc. | Gas injector for epitaxy and cvd chamber |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4718976A (en) * | 1982-03-31 | 1988-01-12 | Fujitsu Limited | Process and apparatus for plasma treatment |
JPS6294922A (ja) * | 1985-10-22 | 1987-05-01 | Fuji Photo Film Co Ltd | プラズマcvd法による製膜装置 |
US4763602A (en) * | 1987-02-25 | 1988-08-16 | Glasstech Solar, Inc. | Thin film deposition apparatus including a vacuum transport mechanism |
JPH01241826A (ja) * | 1988-03-23 | 1989-09-26 | Mitsubishi Electric Corp | 薄膜形成装置 |
JPH03203317A (ja) * | 1989-12-29 | 1991-09-05 | Matsushita Electric Ind Co Ltd | プラズマ処理装置 |
JPH04123257A (ja) | 1990-09-14 | 1992-04-23 | Sharp Corp | 文書処理装置 |
JPH0477229U (ja) | 1990-11-20 | 1992-07-06 | ||
JPH04287309A (ja) | 1991-03-18 | 1992-10-12 | Fuji Electric Co Ltd | マイクロ波プラズマ処理装置 |
JP3258121B2 (ja) | 1993-03-30 | 2002-02-18 | 株式会社東芝 | Cvd装置 |
US5620523A (en) * | 1994-04-11 | 1997-04-15 | Canon Sales Co., Inc. | Apparatus for forming film |
US5643394A (en) * | 1994-09-16 | 1997-07-01 | Applied Materials, Inc. | Gas injection slit nozzle for a plasma process reactor |
JPH08203694A (ja) | 1995-01-30 | 1996-08-09 | Hitachi Ltd | プラズマ処理装置 |
US5698036A (en) * | 1995-05-26 | 1997-12-16 | Tokyo Electron Limited | Plasma processing apparatus |
JPH09129535A (ja) | 1995-10-30 | 1997-05-16 | Tokyo Ohka Kogyo Co Ltd | 加熱処理装置 |
US5803975A (en) * | 1996-03-01 | 1998-09-08 | Canon Kabushiki Kaisha | Microwave plasma processing apparatus and method therefor |
WO1998000576A1 (en) | 1996-06-28 | 1998-01-08 | Lam Research Corporation | Apparatus and method for high density plasma chemical vapor deposition |
JP3164019B2 (ja) | 1997-05-21 | 2001-05-08 | 日本電気株式会社 | 酸化シリコン膜およびその形成方法と成膜装置 |
JP3036477B2 (ja) | 1997-07-31 | 2000-04-24 | 日本電気株式会社 | 半導体製造装置 |
US6132552A (en) * | 1998-02-19 | 2000-10-17 | Micron Technology, Inc. | Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor |
JP4069966B2 (ja) | 1998-04-10 | 2008-04-02 | 東京エレクトロン株式会社 | シリコン酸化膜の成膜方法および装置 |
US6190732B1 (en) * | 1998-09-03 | 2001-02-20 | Cvc Products, Inc. | Method and system for dispensing process gas for fabricating a device on a substrate |
TW477009B (en) * | 1999-05-26 | 2002-02-21 | Tadahiro Ohmi | Plasma process device |
US6284051B1 (en) * | 1999-05-27 | 2001-09-04 | Ag Associates (Israel) Ltd. | Cooled window |
JP3668079B2 (ja) * | 1999-05-31 | 2005-07-06 | 忠弘 大見 | プラズマプロセス装置 |
JP2000348898A (ja) | 1999-06-03 | 2000-12-15 | Nisshin:Kk | 表面波励起プラズマの生成方法 |
US6245192B1 (en) * | 1999-06-30 | 2001-06-12 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
JP2001135626A (ja) * | 1999-11-02 | 2001-05-18 | Hitachi Kokusai Electric Inc | プラズマcvd装置及びプラズマcvd膜形成方法 |
JP3366301B2 (ja) * | 1999-11-10 | 2003-01-14 | 日本電気株式会社 | プラズマcvd装置 |
US6622650B2 (en) * | 1999-11-30 | 2003-09-23 | Tokyo Electron Limited | Plasma processing apparatus |
JP4222707B2 (ja) * | 2000-03-24 | 2009-02-12 | 東京エレクトロン株式会社 | プラズマ処理装置及び方法、ガス供給リング及び誘電体 |
JP4849705B2 (ja) * | 2000-03-24 | 2012-01-11 | 東京エレクトロン株式会社 | プラズマ処理装置、プラズマ生成導入部材及び誘電体 |
CN1302152C (zh) * | 2001-03-19 | 2007-02-28 | 株式会社Ips | 化学气相沉积设备 |
KR100485235B1 (ko) * | 2001-06-20 | 2005-04-27 | 동경 엘렉트론 주식회사 | 마이크로파 플라즈마 처리 장치, 플라즈마 처리 방법 및마이크로파 방사 부재 |
JP2003158127A (ja) * | 2001-09-07 | 2003-05-30 | Arieesu Gijutsu Kenkyu Kk | 成膜方法、成膜装置、及び半導体装置 |
JP2003086398A (ja) | 2001-09-13 | 2003-03-20 | Canon Inc | プラズマ処理装置 |
KR20030030271A (ko) | 2001-10-09 | 2003-04-18 | 엘지전자 주식회사 | 평판형 플라즈마 화학 기상 증착법 장치 |
JP3697199B2 (ja) * | 2001-11-06 | 2005-09-21 | 三菱重工業株式会社 | 太陽電池の製造方法および太陽電池 |
JP4179041B2 (ja) * | 2003-04-30 | 2008-11-12 | 株式会社島津製作所 | 有機el用保護膜の成膜装置、製造方法および有機el素子 |
-
2003
- 2003-11-07 JP JP2003379035A patent/JP4273932B2/ja not_active Expired - Fee Related
-
2004
- 2004-11-01 US US10/976,856 patent/US8307781B2/en not_active Expired - Fee Related
- 2004-11-02 KR KR1020040088315A patent/KR100610469B1/ko not_active IP Right Cessation
- 2004-11-02 TW TW093133332A patent/TWI249975B/zh not_active IP Right Cessation
- 2004-11-05 CN CNB2004100922886A patent/CN100339505C/zh not_active Expired - Fee Related
Cited By (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009539269A (ja) * | 2006-05-30 | 2009-11-12 | アプライド マテリアルズ インコーポレイテッド | 誘電性ギャップ充填のためのプロセスチャンバ |
US8741788B2 (en) | 2009-08-06 | 2014-06-03 | Applied Materials, Inc. | Formation of silicon oxide using non-carbon flowable CVD processes |
US8449942B2 (en) | 2009-11-12 | 2013-05-28 | Applied Materials, Inc. | Methods of curing non-carbon flowable CVD films |
US8980382B2 (en) | 2009-12-02 | 2015-03-17 | Applied Materials, Inc. | Oxygen-doping for non-carbon radical-component CVD films |
US8629067B2 (en) | 2009-12-30 | 2014-01-14 | Applied Materials, Inc. | Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio |
US8647992B2 (en) | 2010-01-06 | 2014-02-11 | Applied Materials, Inc. | Flowable dielectric using oxide liner |
US8563445B2 (en) | 2010-03-05 | 2013-10-22 | Applied Materials, Inc. | Conformal layers by radical-component CVD |
US9285168B2 (en) | 2010-10-05 | 2016-03-15 | Applied Materials, Inc. | Module for ozone cure and post-cure moisture treatment |
US8664127B2 (en) | 2010-10-15 | 2014-03-04 | Applied Materials, Inc. | Two silicon-containing precursors for gapfill enhancing dielectric liner |
US10283321B2 (en) | 2011-01-18 | 2019-05-07 | Applied Materials, Inc. | Semiconductor processing system and methods using capacitively coupled plasma |
US8450191B2 (en) | 2011-01-24 | 2013-05-28 | Applied Materials, Inc. | Polysilicon films by HDP-CVD |
US8716154B2 (en) | 2011-03-04 | 2014-05-06 | Applied Materials, Inc. | Reduced pattern loading using silicon oxide multi-layers |
US8445078B2 (en) | 2011-04-20 | 2013-05-21 | Applied Materials, Inc. | Low temperature silicon oxide conversion |
US8466073B2 (en) | 2011-06-03 | 2013-06-18 | Applied Materials, Inc. | Capping layer for reduced outgassing |
US9404178B2 (en) | 2011-07-15 | 2016-08-02 | Applied Materials, Inc. | Surface treatment and deposition for reduced outgassing |
US8617989B2 (en) | 2011-09-26 | 2013-12-31 | Applied Materials, Inc. | Liner property improvement |
US8551891B2 (en) | 2011-10-04 | 2013-10-08 | Applied Materials, Inc. | Remote plasma burn-in |
CN104105815A (zh) * | 2012-02-10 | 2014-10-15 | 株式会社捷太格特 | 用于沉积碳膜的设备以及用于沉积碳膜的方法 |
WO2013118822A1 (ja) * | 2012-02-10 | 2013-08-15 | 株式会社ジェイテクト | 炭素膜成膜装置および炭素膜成膜方法 |
US8889566B2 (en) | 2012-09-11 | 2014-11-18 | Applied Materials, Inc. | Low cost flowable dielectric films |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
JP2018174340A (ja) * | 2013-03-15 | 2018-11-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 高対称四重ガス注入によるプラズマリアクタ |
US11244811B2 (en) | 2013-03-15 | 2022-02-08 | Applied Materials, Inc. | Plasma reactor with highly symmetrical four-fold gas injection |
US11728141B2 (en) | 2013-03-15 | 2023-08-15 | Applied Materials, Inc. | Gas hub for plasma reactor |
US9412581B2 (en) | 2014-07-16 | 2016-08-09 | Applied Materials, Inc. | Low-K dielectric gapfill by flowable deposition |
JP2017199507A (ja) * | 2016-04-26 | 2017-11-02 | 東京エレクトロン株式会社 | プラズマ処理装置およびガス導入機構 |
US10804078B2 (en) | 2016-04-26 | 2020-10-13 | Tokyo Electron Limited | Plasma processing apparatus and gas introduction mechanism |
JP2023016748A (ja) * | 2021-07-21 | 2023-02-02 | ゼネラル・エレクトリック・カンパニイ | セラミックファイバをコーティングするためのシステムおよび方法 |
JP7416470B2 (ja) | 2021-07-21 | 2024-01-17 | ゼネラル・エレクトリック・カンパニイ | セラミックファイバをコーティングするためのシステムおよび方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI249975B (en) | 2006-02-21 |
US8307781B2 (en) | 2012-11-13 |
CN100339505C (zh) | 2007-09-26 |
JP4273932B2 (ja) | 2009-06-03 |
TW200527981A (en) | 2005-08-16 |
US20050109279A1 (en) | 2005-05-26 |
KR20050044248A (ko) | 2005-05-12 |
KR100610469B1 (ko) | 2006-08-09 |
CN1614086A (zh) | 2005-05-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4273932B2 (ja) | 表面波励起プラズマcvd装置 | |
JP4506557B2 (ja) | シャワーヘッドおよび表面波励起プラズマ処理装置 | |
US6417111B2 (en) | Plasma processing apparatus | |
US10256079B2 (en) | Semiconductor processing systems having multiple plasma configurations | |
TWI660420B (zh) | 使用遠端電漿源之加強式蝕刻製程 | |
KR102114002B1 (ko) | 다수의 유동 경로들을 사용한 라디칼 케미스트리 조절 및 제어 | |
US6851384B2 (en) | Remote plasma apparatus for processing substrate with two types of gases | |
TWI452627B (zh) | Plasma processing apparatus and method | |
US20100098882A1 (en) | Plasma source for chamber cleaning and process | |
KR20030004427A (ko) | 플라즈마 처리 장치 | |
JP2001023955A (ja) | プラズマ処理装置 | |
JP2009302324A (ja) | ガスリング、半導体基板処理装置および半導体基板処理方法 | |
WO2012018024A1 (ja) | プラズマ処理装置 | |
JP4502639B2 (ja) | シャワープレート、プラズマ処理装置、及び、製品の製造方法 | |
JP3682178B2 (ja) | プラズマ処理方法及びプラズマ処理装置 | |
KR100377096B1 (ko) | 개선된 샤워헤드를 구비한 반도체 제조장치 | |
JP4426632B2 (ja) | プラズマ処理装置 | |
JP4273983B2 (ja) | 表面波励起プラズマcvd装置 | |
JP5264938B2 (ja) | 中性粒子照射型cvd装置 | |
JP4517935B2 (ja) | シャワープレートおよび表面波励起プラズマ処理装置 | |
JP4304280B2 (ja) | プラズマ生成装置およびプラズマ処理製造方法 | |
JP2004296512A (ja) | プラズマ処理装置のクリーニング方法 | |
JP2006173372A (ja) | プラズマソース、これを備える表面波励起プラズマcvd装置および成膜方法 | |
JP2006012962A (ja) | 斜め貫通孔付真空紫外光遮光板を用いたマイクロ波プラズマ処理装置及び処理方法 | |
KR20210124173A (ko) | 플라스마 처리 장치 및 플라스마 처리 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060209 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080521 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080527 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080725 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080819 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090210 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090223 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4273932 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120313 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120313 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130313 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140313 Year of fee payment: 5 |
|
LAPS | Cancellation because of no payment of annual fees |