JP2005108962A - 電子部品内蔵基板及びその製造方法 - Google Patents
電子部品内蔵基板及びその製造方法 Download PDFInfo
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- JP2005108962A JP2005108962A JP2003337323A JP2003337323A JP2005108962A JP 2005108962 A JP2005108962 A JP 2005108962A JP 2003337323 A JP2003337323 A JP 2003337323A JP 2003337323 A JP2003337323 A JP 2003337323A JP 2005108962 A JP2005108962 A JP 2005108962A
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- semiconductor chip
- insulating film
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- H01L2924/30105—Capacitance
Abstract
【解決手段】 接続パッドを備えた配線基板と、バンプ24aが接続パッドにフリップチップ接続された第1電子部品24と、第1電子部品24の面積より大きな面積を有する第2電子部品26のバンプ26aが、第1電子部品24の周辺外側に配置された接続パッドにフリップチップ接続され、第1電子部品24の上に所定間隔をもって実装された第2電子部品26と、第1電子部品24と配線基板との隙間、第2電子部品26と第1電子部品24及び配線基板との隙間に充填された充填絶縁体28とを有し、第1電子部品24は充填絶縁体28に埋設されている。
【選択図】 図8
Description
関連技術1に係わる電子部品内蔵基板の製造方法は、図1(a)に示すように、まず、ビルドアップ配線基板を製造するための絶縁性のベース基板100を用意する。ベース基板100にはスルーホール100xが設けられていて、このスルーホール100xにはその内面にベース基板100上の第1配線パターン102に繋がるスルーホールめっき層102xが形成され、その孔は樹脂体101で埋め込まれている。
関連技術2の電子部品内蔵基板の製造方法は、図3(a)に示すように、まず、関連技術1と同様に、第1配線パターン102を備えたベース基板100を用意し、第1層間絶縁膜104に形成された第1ビアホール104xを介して第1配線パターン102に接続される第2配線パターン106を第1層間絶縁膜104上に形成する。その後に、半導体チップが実装される実装領域Aに開口部108xを備えた第1絶縁膜108aを形成する。このとき、実装領域Aには後に半導体チップがフリップチップ接続される第2配線パターン106の接続パッド106xが露出する。さらに、実装領域Aに露出する第2配線パターン106の接続パッド106x上に無電解めっきによりNi/Au層106aを形成する。
図5〜図8は本発明の実施形態の電子部品内蔵基板の製造方法を順に示す断面図である。図5(a)に示すように、まず、ビルドアップ配線基板を製造するためのベース基板10を用意する。このベース基板10はガラスエポキシ樹脂などの絶縁性材料から構成されている。ベース基板10にはスルーホール10aが設けられていて、このスルーホール10aにはその内面にベース基板10上の第1配線パターン12に繋がるスルーホールめっき層10bが形成され、その孔は樹脂体10cで埋め込まれている。
Claims (12)
- 接続パッドをもつ配線パターンを備えた配線基板と、
第1電子部品のバンプが前記接続パッドにフリップチップ接続された前記第1電子部品と、
第2電子部品のバンプが前記第1電子部品の周辺外側に配置された前記接続パッドにフリップチップ接続され、前記第1電子部品の上面から所定間隔をもった状態で実装された前記第2電子部品と、
前記第1電子部品と前記配線基板との隙間、前記第2電子部品と前記第1電子部品及び前記配線基板との隙間に充填された充填絶縁体とを有し、
前記第1電子部品は前記充填絶縁体の中に埋設されていることを特徴とする電子部品内蔵基板。 - 前記第2電子部品のバンプの高さは、前記第1電子部品のバンプを含む厚みより高く設定されていることを特徴とする請求項1に記載の電子部品内蔵基板。
- 前記第1電子部品の前記バンプを除いた厚みは150μm以下であることを特徴とする請求項1又は2に記載の電子部品内蔵基板。
- 前記第1及び第2電子部品が実装された実装領域を一括して開口する開口部が設けられた保護絶縁膜が前記配線基板上に形成されており、前記充填絶縁体は、前記第2電子部品の側面から前記保護絶縁膜の開口部の側面まで延在して形成されていることを特徴とする請求項1乃至3のいずれか一項に記載の電子部品内蔵基板。
- 前記充填絶縁体は、フィラーを含有し、かつ熱膨張係数が20乃至30ppm/℃の樹脂であることを特徴とする請求項1乃至4のいずれか一項に記載の電子部品内蔵基板。
- 前記電子部品は、半導体チップであることを特徴とする請求項1乃至5のいずれか一項に記載の電子部品内蔵基板。
- 接続パッドをもつ配線パターンを備えた配線基板を用意する工程と、
前記接続パッドに第1電子部品のバンプをフリップチップ接続する工程と、
第2電子部品のバンプを前記第1電子部品の周辺外側に配置された前記接続パッドにフリップチップ接続して、前記第1電子部品の上面から所定間隔をもった状態で前記第2電子部品を実装する工程と、
前記第1電子部品と前記配線基板との隙間、前記第2電子部品と前記第1電子部品及び前記配線基板との隙間に、充填絶縁体を充填することにより、前記第1電子部品を前記充填絶縁体の中に埋設させる工程とを有することを特徴とする電子部品内蔵基板の製造方法。 - 前記接続パッドに第1電子部品のバンプをフリップチップ接続する工程の前に、
複数の前記接続パッドを一括して露出させる開口部を備えた保護絶縁膜を前記配線基板上に形成する工程をさらに有し、
前記充填樹脂体を充填する工程において、前記充填樹脂体は前記第2電子部品の側面から前記保護絶縁膜の開口部の側面まで延在して形成されることを特徴とする請求項7に記載の電子部品内蔵基板の製造方法。 - 前記第2電子部品のバンプの高さは、前記第1電子部品のバンプを含む厚みより高く設定されることを特徴とする請求項7又は8に記載の電子部品内蔵基板の製造方法。
- 前記第1電子部品のバンプを除いた厚みは、150μm以下であることを特徴とする請求項7乃至9のいずれか一項に記載の電子部品内蔵基板の製造方法。
- 前記充填絶縁体は、フィラーを含有し、かつ熱膨張係数が20乃至30ppm/℃の樹脂であることを特徴とする請求項7乃至10のいずれか一項に記載の電子部品内蔵基板の製造方法。
- 前記電子部品は、半導体チップであることを特徴とする請求項7乃至11のいずれか一項に記載の電子部品内蔵基板の製造方法。
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JP2003337323A JP4198566B2 (ja) | 2003-09-29 | 2003-09-29 | 電子部品内蔵基板の製造方法 |
US10/918,348 US20050067715A1 (en) | 2003-09-29 | 2004-08-16 | Electronic parts built-in substrate and method of manufacturing the same |
KR1020040064544A KR20050031364A (ko) | 2003-09-29 | 2004-08-17 | 전자 부품 내장 기판 및 그 제조 방법 |
EP04254934A EP1519415A3 (en) | 2003-09-29 | 2004-08-17 | Electronic parts built-in substrate and method of manufacturing the same |
TW093125809A TW200515585A (en) | 2003-09-29 | 2004-08-27 | Electronic parts built-in substrate and method of manufacturing the same |
US11/049,958 US7198986B2 (en) | 2003-09-29 | 2005-02-04 | Electronic parts built-in substrate and method of manufacturing the same |
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- 2003-09-29 JP JP2003337323A patent/JP4198566B2/ja not_active Expired - Fee Related
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2004
- 2004-08-16 US US10/918,348 patent/US20050067715A1/en not_active Abandoned
- 2004-08-17 KR KR1020040064544A patent/KR20050031364A/ko not_active Application Discontinuation
- 2004-08-17 EP EP04254934A patent/EP1519415A3/en not_active Ceased
- 2004-08-27 TW TW093125809A patent/TW200515585A/zh unknown
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JP2011253900A (ja) * | 2010-06-01 | 2011-12-15 | Elpida Memory Inc | 半導体装置及びその製造方法 |
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KR20050031364A (ko) | 2005-04-06 |
TW200515585A (en) | 2005-05-01 |
US20050067715A1 (en) | 2005-03-31 |
US7198986B2 (en) | 2007-04-03 |
EP1519415A2 (en) | 2005-03-30 |
US20050130349A1 (en) | 2005-06-16 |
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JP4198566B2 (ja) | 2008-12-17 |
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