JP2010219477A - 電子部品内蔵配線基板の製造方法 - Google Patents
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- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
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- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- H01L2224/08135—Disposition the bonding area connecting directly to another bonding area, i.e. connectorless bonding, e.g. bumpless bonding the bonding area connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/08145—Disposition the bonding area connecting directly to another bonding area, i.e. connectorless bonding, e.g. bumpless bonding the bonding area connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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Abstract
【解決手段】基板40Aの電極パッド41上に突起部を有するバンプ43を形成し、シート状の部材51を絶縁層44に圧着して突起部43bの一部を絶縁層44の上面に露出させたものを個片化して電子部品40を得る。さらに、この電子部品40を第2の絶縁層内に再配置して再配線を行う。さらに、絶縁層44を覆う第3の絶縁層(半硬化状態)を形成後、上記再配線を介して突起部43bに接続される導体が形成された第1の構造体と、これと同様の工程を経て作製された第2の構造体とを重ね合わせ、第3の絶縁層を熱硬化させて一体化したものに対し、さらに再配線を行う。
【選択図】図3
Description
21,23,25,31,33,35,44…樹脂層(絶縁層)、
22,27,32,37…配線層(配線パターン/再配線)、
24,26a,26b,34,36a,36b…導体ビア、
28,38…ソルダレジスト層(保護膜/絶縁層)、
27P,37P…外部接続用のパッド、
40…半導体チップ(電子部品)、
40A…半導体基板(基板本体)、
41…電極パッド、
43(43a,43b)…突起部を有するバンプ、
51…銅箔(シート状の部材)、
52…テープ(支持基材)、
54,54a…(第1、第2の)構造体。
Claims (5)
- 基板本体に形成された電極パッド上に突起部を有するバンプを形成後、前記基板本体上に前記バンプを覆うように第1の絶縁層を形成し、該絶縁層にシート状の部材を圧着して前記突起部の一部を前記絶縁層の上面に露出させた後、前記シート状の部材を除去して電子部品を得る工程と、
前記電子部品の少なくとも側面周囲を覆い、その一方の面が前記第1の絶縁層の表面と同一面となるように第2の絶縁層を形成する工程と、
前記第1、第2の絶縁層上に、前記突起部の露出した一部に直接接続される第1の配線層を所要のパターン形状に形成する工程と、
前記第1の配線層を覆うように熱硬化性材料からなる第3の絶縁層を半硬化状態で形成後、該第3の絶縁層に前記第1の配線層に達するビアホールを形成し、該ビアホールに導電性材料を充填する工程と、
以上の工程を経て作製された第1の構造体と、同様の工程を経て作製された第2の構造体とを、それぞれ前記導電性材料が充填されている側の面を対向させ、その充填されている箇所を位置合わせして重ね合わせた後、半硬化状態にある前記第3の絶縁層を熱硬化させて一体化する工程と、
該一体化された構造体の両面に、前記電子部品の実装エリアの周囲の領域に対応する部分において前記第1、第2の各構造体における前記第1の配線層にそれぞれ達する複数のビアホールを形成した後、該ビアホールを充填して前記第1の配線層に接続される第2の配線層を所要のパターン形状に形成する工程と、
前記第2の配線層の所定の箇所に画定されたパッドの部分を露出させて保護膜を形成する工程とを含むことを特徴とする電子部品内蔵配線基板の製造方法。 - 前記電子部品を得る工程において、前記シート状の部材として、前記第1の絶縁層と対向する側の面が粗面とされた銅箔又は樹脂フィルムを用い、該銅箔又は樹脂フィルムの圧着により前記粗面を前記第1の絶縁層及び前記突起部の露出した一部に転写することを特徴とする請求項1に記載の電子部品内蔵配線基板の製造方法。
- 前記電子部品を得る工程において、前記電極パッド上に形成される前記突起部を有するバンプは、ボンディングワイヤの前記パッドへの接合と、該接合後の該ボンディングワイヤの切断を連続的に行うことで形成されることを特徴とする請求項2に記載の電子部品内蔵配線基板の製造方法。
- 前記第2の絶縁層を形成する工程は、支持基材上に前記電子部品をフェイスダウンの態様で配置する工程と、前記支持基材上に前記電子部品の側面周囲を覆うように前記第2の絶縁層を形成する工程と、前記支持基材を除去する工程とを含むことを特徴とする請求項2に記載の電子部品内蔵配線基板の製造方法。
- 前記電子部品は、ウエハレベルパッケージのプロセスを用いて半導体ウエハに作り込まれた複数のデバイスに対し、前記電子部品を得る工程で行った処理を施した後に、各デバイス単位に個片化して得られた半導体チップであることを特徴とする請求項2に記載の電子部品内蔵配線基板の製造方法。
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Cited By (10)
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JP2013201301A (ja) * | 2012-03-26 | 2013-10-03 | Tdk Corp | 半導体装置、電子部品内蔵基板、及びこれらの製造方法 |
JP2015233160A (ja) * | 2015-09-11 | 2015-12-24 | Tdk株式会社 | 半導体装置、電子部品内蔵基板、及びこれらの製造方法 |
JP2016058655A (ja) * | 2014-09-11 | 2016-04-21 | 株式会社ジェイデバイス | 半導体装置の製造方法 |
EP3096350A1 (en) * | 2015-05-21 | 2016-11-23 | MediaTek Inc. | Semiconductor package assembly and method for forming the same |
TWI618159B (zh) * | 2015-05-21 | 2018-03-11 | 聯發科技股份有限公司 | 半導體封裝組件及其製造方法 |
KR20180106791A (ko) * | 2017-03-21 | 2018-10-01 | 앰코 테크놀로지 인코포레이티드 | 반도체 장치 및 그 제조 방법 |
CN113597669A (zh) * | 2019-03-25 | 2021-11-02 | 京瓷株式会社 | 电子部件及其制造方法 |
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