JP2005093775A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
- Publication number
- JP2005093775A JP2005093775A JP2003325949A JP2003325949A JP2005093775A JP 2005093775 A JP2005093775 A JP 2005093775A JP 2003325949 A JP2003325949 A JP 2003325949A JP 2003325949 A JP2003325949 A JP 2003325949A JP 2005093775 A JP2005093775 A JP 2005093775A
- Authority
- JP
- Japan
- Prior art keywords
- trench
- region
- drain region
- conductivity type
- offset drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 49
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 239000012535 impurity Substances 0.000 claims abstract description 60
- 239000012212 insulator Substances 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims description 27
- 239000002344 surface layer Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 16
- 239000010410 layer Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000015556 catabolic process Effects 0.000 abstract description 22
- 238000005468 ion implantation Methods 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 229910052698 phosphorus Inorganic materials 0.000 description 7
- 239000011574 phosphorus Substances 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 108020004414 DNA Proteins 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- -1 phosphorus ions Chemical class 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 102000053602 DNA Human genes 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66659—Lateral single gate silicon transistors with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
【解決手段】トレンチ横型MOSFETにおいて、トレンチ4に沿うように形成されるn- オフセットドレイン領域5において、底部のn- オフセットドレイン領域5bの実効不純物表面濃度Ctbを側壁部のn- オフセットドレイン領域5aの実効不純物表面濃度Ctsより高くすることで、距離Lを短くしても、高い耐圧を得ることができて、且つ、オン抵抗を低減できる。また、フィールドプレート形成の製造マージンを大きくできる。
【選択図】 図1
Description
2 pウェル領域
3 nウェル領域
4 トレンチ
4a トレンチ(高アスペクト比)
5 n- オフセット領域
5a n- オフセット領域の側壁部
5b n- オフセット領域の底部
6 絶縁物
7 pベース領域
8 nソース領域
9 nドレイン領域
10 ゲート絶縁膜
11 ゲート電極
12 層間絶縁膜
13 絶縁体
14 凹部
15 フィールドプレート
15a フィールドプレートの先端
16 ソース電極
17 ドレイン電極
21 マスク酸化膜
22 バッファ酸化膜
23 イオン注入(23°)
24 イオン注入(0°)
25 リン(P)
26 エピタキシャル成長層
27 HTO膜
L フィールドプレートの先端とトレンチ上端との距離(トレンチ内の絶縁体( 絶縁物)に埋め込まれるフィールドプレートの長さ)
Td トレンチ深さ
Tw トレンチ幅
Td1 トレンチ深さ(高アスペクト比)
Tw1 トレンチ幅(高アスペクト比)
Claims (5)
- 第1導電型の半導体基板に形成されたトレンチと、該トレンチに沿うように前記半導体基板に形成された第2導電型のオフセットドレイン領域と、前記トレンチに充填された絶縁体と、該絶縁体に一部が埋め込まれたフィールドプレートとを具備する半導体装置において、
前記トレンチの底部に形成された前記オフセットドレイン領域の実効不純物表面濃度が、側壁部に形成された前記オフセットドレイン領域の実効不純物表面濃度より高いことを特徴とする半導体装置。 - 第1導電型の半導体基板に形成されたトレンチと、該トレンチに沿うように前記半導体基板に形成された第2導電型のオフセットドレイン領域と、前記トレンチを挟んで対向する半導体基板の一方の表面層に、前記オフセットドレイン領域と隣接して形成された第1導電型のベース領域と、該ベース領域の表面層に形成された第2導電型のソース領域と、該ソース領域と前記半導体基板に挟まれたベース領域上にゲート絶縁膜を介して形成されたゲート電極と、前記トレンチに充填された絶縁体と、前記ソース領域と接続され、前記絶縁体に埋め込まれて形成されたフィールドプレートと、前記ソース領域と接続されたソース電極と、前記トレンチを挟んで対向する半導体基板の他方の表面層に前記トレンチと隣接して形成され、前記オフセットドレイン領域と隣接して形成された第2導電型のドレイン領域と、該ドレイン領域と接続されたドレイン電極とを具備する半導体装置において、
前記トレンチの底部に形成された前記オフセットドレイン領域の実効不純物表面濃度が、側壁部に形成された前記オフセットドレイン領域の実効不純物表面濃度より高いことを特徴とする半導体装置。 - 前記一方の表面層に形成され、前記オフセットドレイン領域と隣接して形成された第1導電型の第1ウェル領域と、前記他方の表面層に形成され、前記オフセット領域と隣接して形成された第2導電型の第2ウェル領域とを有し、前記ベース領域は、前記第1ウェル領域の表面層に選択的に形成され、前記ドレイン領域は、前記第2ウェル領域の表面層に選択的に形成されたことを特徴とする請求項2に記載の半導体装置。
- 前記請求項1〜3のいずれか一項に記載の半導体装置の製造方法において、
前記トレンチの側壁部に第2導電型の不純物を所定のドーズ量でイオン注入する工程と、前記トレンチの底部に、前記ドーズ量より多いドーズ量でイオン注入する工程とを含むことを特徴とする半導体装置の製造方法。 - 前記請求項1〜3のいずれか一項に記載の半導体装置の製造方法において、
前記トレンチの全面に第2導電型の不純物を層を形成する工程と、前記トレンチの底部に第2導電型の不純物を所定のドーズ量でイオン注入する工程と、熱処理工程とを含むことを特徴とする半導体装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003325949A JP2005093775A (ja) | 2003-09-18 | 2003-09-18 | 半導体装置およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003325949A JP2005093775A (ja) | 2003-09-18 | 2003-09-18 | 半導体装置およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005093775A true JP2005093775A (ja) | 2005-04-07 |
Family
ID=34456265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003325949A Pending JP2005093775A (ja) | 2003-09-18 | 2003-09-18 | 半導体装置およびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005093775A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008166409A (ja) * | 2006-12-27 | 2008-07-17 | Renesas Technology Corp | パワーmisfet、半導体装置およびdc/dcコンバータ |
JP2009081397A (ja) * | 2007-09-27 | 2009-04-16 | Fuji Electric Device Technology Co Ltd | 半導体装置および半導体装置の製造方法 |
JP2014143419A (ja) * | 2013-01-23 | 2014-08-07 | Freescale Semiconductor Inc | 3次元的な表面電界緩和が増強された半導体デバイス |
JP2015008184A (ja) * | 2013-06-25 | 2015-01-15 | 株式会社 日立パワーデバイス | 半導体装置 |
CN104701380A (zh) * | 2014-12-23 | 2015-06-10 | 电子科技大学 | 一种双向mos型器件及其制造方法 |
JP2019096776A (ja) * | 2017-11-24 | 2019-06-20 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
WO2019157817A1 (zh) * | 2018-02-13 | 2019-08-22 | 株洲中车时代电气股份有限公司 | 一种具有折叠型复合栅结构的igbt芯片 |
WO2020137243A1 (ja) * | 2018-12-26 | 2020-07-02 | パナソニック・タワージャズセミコンダクター株式会社 | 半導体装置およびその製造方法 |
-
2003
- 2003-09-18 JP JP2003325949A patent/JP2005093775A/ja active Pending
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008166409A (ja) * | 2006-12-27 | 2008-07-17 | Renesas Technology Corp | パワーmisfet、半導体装置およびdc/dcコンバータ |
JP4601603B2 (ja) * | 2006-12-27 | 2010-12-22 | ルネサスエレクトロニクス株式会社 | パワーmisfet、半導体装置およびdc/dcコンバータ |
US8319289B2 (en) | 2006-12-27 | 2012-11-27 | Renesas Electronics Corporation | Power MISFET, semiconductor device and DC/DC converter |
JP2009081397A (ja) * | 2007-09-27 | 2009-04-16 | Fuji Electric Device Technology Co Ltd | 半導体装置および半導体装置の製造方法 |
JP2014143419A (ja) * | 2013-01-23 | 2014-08-07 | Freescale Semiconductor Inc | 3次元的な表面電界緩和が増強された半導体デバイス |
JP2015008184A (ja) * | 2013-06-25 | 2015-01-15 | 株式会社 日立パワーデバイス | 半導体装置 |
CN104701380A (zh) * | 2014-12-23 | 2015-06-10 | 电子科技大学 | 一种双向mos型器件及其制造方法 |
JP2019096776A (ja) * | 2017-11-24 | 2019-06-20 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
WO2019157817A1 (zh) * | 2018-02-13 | 2019-08-22 | 株洲中车时代电气股份有限公司 | 一种具有折叠型复合栅结构的igbt芯片 |
WO2020137243A1 (ja) * | 2018-12-26 | 2020-07-02 | パナソニック・タワージャズセミコンダクター株式会社 | 半導体装置およびその製造方法 |
JPWO2020137243A1 (ja) * | 2018-12-26 | 2021-11-04 | タワー パートナーズ セミコンダクター株式会社 | 半導体装置およびその製造方法 |
JP7366934B2 (ja) | 2018-12-26 | 2023-10-23 | タワー パートナーズ セミコンダクター株式会社 | 半導体装置およびその製造方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100363353B1 (ko) | 반도체 장치 및 그 제조 방법 | |
JP4743744B2 (ja) | フローティングアイランド電圧維持層を有する半導体パワーデバイス | |
US10749025B2 (en) | Semiconductor device and manufacturing method thereof | |
KR100969851B1 (ko) | 수퍼 정션 구조를 가지는 반도체 장치 및 그 제조 방법 | |
JP3531613B2 (ja) | トレンチゲート型半導体装置及びその製造方法 | |
US7906388B2 (en) | Semiconductor device and method for manufacture | |
TWI284925B (en) | High voltage power MOSFET having a voltage sustaining region that includes doped columns formed by trench etching using an etchant gas that is also a doping source | |
JP5299373B2 (ja) | 半導体素子 | |
KR100558041B1 (ko) | 반도체 소자의 트랜지스터 및 그 제조 방법 | |
WO2014192234A1 (ja) | 半導体装置の製造方法 | |
US7598586B2 (en) | Semiconductor device and production method therefor | |
KR100922915B1 (ko) | 반도체소자 및 이의 제조방법 | |
JP2005093775A (ja) | 半導体装置およびその製造方法 | |
JP4595327B2 (ja) | 半導体素子 | |
JP2006521706A (ja) | 超接合デバイス及びその製造方法 | |
KR101530579B1 (ko) | 반도체 소자 및 이의 제조 방법 | |
US9231081B2 (en) | Method of manufacturing a semiconductor device | |
US7875509B2 (en) | Manufacturing method of semiconductor apparatus and semiconductor apparatus, power converter using the same | |
US10326013B2 (en) | Method of forming a field-effect transistor (FET) or other semiconductor device with front-side source and drain contacts | |
US20180145171A1 (en) | Field Effect Transistor (FET) or Other Semiconductor Device with Front-Side Source and Drain Contacts | |
JP2006140239A (ja) | 半導体装置及びその製造方法 | |
EP1699087A1 (en) | Semiconductor device and its manufacturing method | |
KR101068139B1 (ko) | Ldmosfet 제조방법 | |
JP2018061055A (ja) | 半導体装置 | |
JP4992179B2 (ja) | 半導体装置およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20051213 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20060703 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20060704 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20071011 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071023 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071220 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080415 |