JP2004526306A5 - - Google Patents
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- Publication number
- JP2004526306A5 JP2004526306A5 JP2002560246A JP2002560246A JP2004526306A5 JP 2004526306 A5 JP2004526306 A5 JP 2004526306A5 JP 2002560246 A JP2002560246 A JP 2002560246A JP 2002560246 A JP2002560246 A JP 2002560246A JP 2004526306 A5 JP2004526306 A5 JP 2004526306A5
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- optically
- optically active
- inactive region
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims 19
- 239000000463 material Substances 0.000 claims 18
- 238000000034 method Methods 0.000 claims 16
- 230000003287 optical effect Effects 0.000 claims 9
- 239000012792 core layer Substances 0.000 claims 7
- 239000004065 semiconductor Substances 0.000 claims 7
- 238000005253 cladding Methods 0.000 claims 5
- 238000003776 cleavage reaction Methods 0.000 claims 5
- 230000007017 scission Effects 0.000 claims 5
- 238000000137 annealing Methods 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 239000012300 argon atmosphere Substances 0.000 claims 1
- 239000002800 charge carrier Substances 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000001451 molecular beam epitaxy Methods 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000011800 void material Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0101642A GB2371406A (en) | 2001-01-23 | 2001-01-23 | An Optically Active Device |
| PCT/GB2002/000282 WO2002060022A2 (en) | 2001-01-23 | 2002-01-23 | Improvements in or relating to optical devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004526306A JP2004526306A (ja) | 2004-08-26 |
| JP2004526306A5 true JP2004526306A5 (enExample) | 2007-04-19 |
Family
ID=9907276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002560246A Pending JP2004526306A (ja) | 2001-01-23 | 2002-01-23 | 光学装置における又は関係する改良 |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US20020097942A1 (enExample) |
| EP (1) | EP1421654B1 (enExample) |
| JP (1) | JP2004526306A (enExample) |
| CN (1) | CN1265518C (enExample) |
| AT (1) | ATE298144T1 (enExample) |
| DE (1) | DE60204702T2 (enExample) |
| ES (1) | ES2244764T3 (enExample) |
| GB (1) | GB2371406A (enExample) |
| WO (1) | WO2002060022A2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6674950B2 (en) * | 2001-04-27 | 2004-01-06 | Sarnoff Corporation | Optical waveguide crossing and method of making same |
| US20050008055A1 (en) * | 2003-05-30 | 2005-01-13 | Archcom Technology, Inc. | Facet passivation for edge emitting semiconductor lasers |
| US9002146B2 (en) * | 2011-02-18 | 2015-04-07 | National Institute Of Advanced Industrial Science And Technology | Optical gate switch |
| US9306672B2 (en) * | 2013-03-14 | 2016-04-05 | Encore Corporation | Method of fabricating and operating an optical modulator |
| EP2985645B1 (en) * | 2014-08-13 | 2019-10-16 | Caliopa NV | Method for producing an integrated optical circuit |
| CN107093602B (zh) * | 2017-04-18 | 2019-01-22 | 合肥汇芯半导体科技有限公司 | 一种可集成化的光控分子开关器件及其制备方法 |
| AU2020289609A1 (en) * | 2019-06-03 | 2022-01-06 | Simone Assali | Quantum heterostructures, related devices and methods for manufacturing the same |
| GB2595211B (en) | 2020-05-13 | 2023-02-01 | Rockley Photonics Ltd | Hybrid integration process and devices |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5145792A (en) * | 1988-05-23 | 1992-09-08 | Optical Measurement Technology Development Co., Ltd. | Method of fabricating a semiconductor optical device |
| US5138626A (en) * | 1990-09-12 | 1992-08-11 | Hughes Aircraft Company | Ridge-waveguide buried-heterostructure laser and method of fabrication |
| FR2674684A1 (fr) * | 1991-03-28 | 1992-10-02 | Alcatel Nv | Procede de realisation d'un composant semiconducteur tel qu'un laser a ruban enterre. |
| US5307357A (en) * | 1992-11-05 | 1994-04-26 | International Business Machines Corporation | Protection means for ridge waveguide laser structures using thick organic films |
| JPH07176827A (ja) * | 1993-08-20 | 1995-07-14 | Mitsubishi Electric Corp | 変調器付半導体レーザ装置の製造方法 |
| US5418190A (en) * | 1993-12-30 | 1995-05-23 | At&T Corp. | Method of fabrication for electro-optical devices |
| GB9503981D0 (en) * | 1995-02-28 | 1995-04-19 | Ca Nat Research Council | Bandag tuning of semiconductor well structures |
| JP3725582B2 (ja) * | 1995-07-05 | 2005-12-14 | 三菱電機株式会社 | 半導体レーザ装置の製造方法，及び半導体レーザ装置 |
| US5629233A (en) * | 1996-04-04 | 1997-05-13 | Lucent Technologies Inc. | Method of making III/V semiconductor lasers |
| GB0002775D0 (en) * | 2000-02-07 | 2000-03-29 | Univ Glasgow | Improved integrated optical devices |
| GB0018576D0 (en) * | 2000-07-27 | 2000-09-13 | Univ Glasgow | Improved semiconductor laser |
-
2001
- 2001-01-23 GB GB0101642A patent/GB2371406A/en not_active Withdrawn
- 2001-02-20 US US09/788,988 patent/US20020097942A1/en not_active Abandoned
-
2002
- 2002-01-23 US US10/466,971 patent/US6944386B2/en not_active Expired - Lifetime
- 2002-01-23 ES ES02716148T patent/ES2244764T3/es not_active Expired - Lifetime
- 2002-01-23 AT AT02716148T patent/ATE298144T1/de not_active IP Right Cessation
- 2002-01-23 DE DE60204702T patent/DE60204702T2/de not_active Expired - Lifetime
- 2002-01-23 EP EP02716148A patent/EP1421654B1/en not_active Expired - Lifetime
- 2002-01-23 CN CNB02804018XA patent/CN1265518C/zh not_active Expired - Lifetime
- 2002-01-23 JP JP2002560246A patent/JP2004526306A/ja active Pending
- 2002-01-23 WO PCT/GB2002/000282 patent/WO2002060022A2/en not_active Ceased
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