JP2003502866A5 - - Google Patents
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- Publication number
- JP2003502866A5 JP2003502866A5 JP2001505058A JP2001505058A JP2003502866A5 JP 2003502866 A5 JP2003502866 A5 JP 2003502866A5 JP 2001505058 A JP2001505058 A JP 2001505058A JP 2001505058 A JP2001505058 A JP 2001505058A JP 2003502866 A5 JP2003502866 A5 JP 2003502866A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19927750.8 | 1999-06-17 | ||
| DE19927750 | 1999-06-17 | ||
| PCT/DE2000/001123 WO2000079589A1 (de) | 1999-06-17 | 2000-04-11 | Elektronisches bauelement mit flexiblen kontaktierungsstellen und verfahren zum herstellen eines derartigen bauelements |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005339301A Division JP4226589B2 (ja) | 1999-06-17 | 2005-11-24 | 軟質ボンディング部を有する電子部品およびこのような部品を製造するための方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003502866A JP2003502866A (ja) | 2003-01-21 |
| JP2003502866A5 true JP2003502866A5 (enExample) | 2006-02-09 |
Family
ID=7911618
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001505058A Pending JP2003502866A (ja) | 1999-06-17 | 2000-04-11 | 軟質ボンディング部を有する電子部品およびこのような部品を製造するための方法 |
| JP2005339301A Expired - Fee Related JP4226589B2 (ja) | 1999-06-17 | 2005-11-24 | 軟質ボンディング部を有する電子部品およびこのような部品を製造するための方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005339301A Expired - Fee Related JP4226589B2 (ja) | 1999-06-17 | 2005-11-24 | 軟質ボンディング部を有する電子部品およびこのような部品を製造するための方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US6956287B2 (enExample) |
| EP (1) | EP1186035A1 (enExample) |
| JP (2) | JP2003502866A (enExample) |
| KR (1) | KR20020011440A (enExample) |
| WO (1) | WO2000079589A1 (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6870272B2 (en) * | 1994-09-20 | 2005-03-22 | Tessera, Inc. | Methods of making microelectronic assemblies including compliant interfaces |
| US6284563B1 (en) * | 1995-10-31 | 2001-09-04 | Tessera, Inc. | Method of making compliant microelectronic assemblies |
| US6211572B1 (en) * | 1995-10-31 | 2001-04-03 | Tessera, Inc. | Semiconductor chip package with fan-in leads |
| KR20020011440A (ko) | 1999-06-17 | 2002-02-08 | 마이클 골위저, 호레스트 쉐퍼 | 가요성 접점을 구비한 전자 소자 및 그 전자 소자의 제조방법 |
| DE10014300A1 (de) * | 2000-03-23 | 2001-10-04 | Infineon Technologies Ag | Halbleiterbauelement und Verfahren zu dessen Herstellung |
| DE10016132A1 (de) | 2000-03-31 | 2001-10-18 | Infineon Technologies Ag | Elektronisches Bauelement mit flexiblen Kontaktierungsstellen und Verfahren zu dessen Herstellung |
| DE10063914A1 (de) * | 2000-12-20 | 2002-07-25 | Pac Tech Gmbh | Kontakthöckeraufbau zur Herstellung eines Verbindungsaufbaus zwischen Substratanschlussflächen |
| US20020170897A1 (en) * | 2001-05-21 | 2002-11-21 | Hall Frank L. | Methods for preparing ball grid array substrates via use of a laser |
| DE10126296B4 (de) * | 2001-05-30 | 2008-04-17 | Qimonda Ag | Verfahren zur Herstellung eines elektronischen Bauelements |
| DE10143790B4 (de) * | 2001-09-06 | 2007-08-02 | Infineon Technologies Ag | Elektronisches Bauteil mit wenigstens einem Halbleiterchip |
| JP2003124393A (ja) * | 2001-10-17 | 2003-04-25 | Hitachi Ltd | 半導体装置およびその製造方法 |
| JP2003163312A (ja) * | 2001-11-28 | 2003-06-06 | Shinkawa Ltd | 半導体装置の製造方法 |
| DE10233641B4 (de) * | 2002-07-24 | 2007-08-23 | Infineon Technologies Ag | Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung |
| DE10239080A1 (de) * | 2002-08-26 | 2004-03-11 | Infineon Technologies Ag | Integrierte Schaltung |
| DE10261410B4 (de) * | 2002-12-30 | 2008-09-04 | Qimonda Ag | Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung |
| JP3945415B2 (ja) * | 2003-02-14 | 2007-07-18 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| JP2006518944A (ja) * | 2003-02-25 | 2006-08-17 | テッセラ,インコーポレイテッド | バンプを有するボールグリッドアレー |
| DE10318074B4 (de) * | 2003-04-17 | 2009-05-20 | Qimonda Ag | Verfahren zur Herstellung von BOC Modul Anordnungen mit verbesserten mechanischen Eigenschaften |
| US7294929B2 (en) * | 2003-12-30 | 2007-11-13 | Texas Instruments Incorporated | Solder ball pad structure |
| JP3873986B2 (ja) * | 2004-04-16 | 2007-01-31 | セイコーエプソン株式会社 | 電子部品、実装構造体、電気光学装置および電子機器 |
| DE102004030140B3 (de) * | 2004-06-22 | 2006-01-19 | Infineon Technologies Ag | Flexible Kontaktierungsvorrichtung |
| DE102004030813B4 (de) * | 2004-06-25 | 2007-03-29 | Infineon Technologies Ag | Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung |
| US8680534B2 (en) | 2005-01-11 | 2014-03-25 | Semileds Corporation | Vertical light emitting diodes (LED) having metal substrate and spin coated phosphor layer for producing white light |
| US8012774B2 (en) * | 2005-01-11 | 2011-09-06 | SemiLEDs Optoelectronics Co., Ltd. | Coating process for a light-emitting diode (LED) |
| JP5593018B2 (ja) * | 2005-02-25 | 2014-09-17 | テッセラ,インコーポレイテッド | コンプライアンスを有する超小型電子アセンブリ |
| US7749886B2 (en) * | 2006-12-20 | 2010-07-06 | Tessera, Inc. | Microelectronic assemblies having compliancy and methods therefor |
| TWI381464B (zh) * | 2008-08-29 | 2013-01-01 | 瀚宇彩晶股份有限公司 | The bump structure and its making method |
| JP5149876B2 (ja) * | 2009-07-23 | 2013-02-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| US8912021B2 (en) | 2011-09-12 | 2014-12-16 | SemiLEDs Optoelectronics Co., Ltd. | System and method for fabricating light emitting diode (LED) dice with wavelength conversion layers |
| US8410508B1 (en) | 2011-09-12 | 2013-04-02 | SemiLEDs Optoelectronics Co., Ltd. | Light emitting diode (LED) package having wavelength conversion member and wafer level fabrication method |
| US8841146B2 (en) | 2011-09-12 | 2014-09-23 | SemiLEDs Optoelectronics Co., Ltd. | Method and system for fabricating light emitting diode (LED) dice with wavelength conversion layers having controlled color characteristics |
| US8492746B2 (en) | 2011-09-12 | 2013-07-23 | SemiLEDs Optoelectronics Co., Ltd. | Light emitting diode (LED) dice having wavelength conversion layers |
| US9074070B2 (en) | 2011-10-31 | 2015-07-07 | Ticona Llc | Thermoplastic composition for use in forming a laser direct structured substrate |
| AT17082U1 (de) * | 2020-04-27 | 2021-05-15 | Zkw Group Gmbh | Verfahren zur befestigung eines elektronischen bauteils |
Family Cites Families (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3641254A (en) * | 1969-06-27 | 1972-02-08 | W S Electronic Services Corp | Microcircuit package and method of making same |
| US4001870A (en) | 1972-08-18 | 1977-01-04 | Hitachi, Ltd. | Isolating protective film for semiconductor devices and method for making the same |
| US4074342A (en) | 1974-12-20 | 1978-02-14 | International Business Machines Corporation | Electrical package for lsi devices and assembly process therefor |
| JPS5519850A (en) | 1978-07-31 | 1980-02-12 | Hitachi Ltd | Semiconductor |
| JPS601846A (ja) | 1983-06-18 | 1985-01-08 | Toshiba Corp | 多層配線構造の半導体装置とその製造方法 |
| US4902606A (en) | 1985-12-20 | 1990-02-20 | Hughes Aircraft Company | Compressive pedestal for microminiature connections |
| US4740700A (en) | 1986-09-02 | 1988-04-26 | Hughes Aircraft Company | Thermally insulative and electrically conductive interconnect and process for making same |
| US4885126A (en) | 1986-10-17 | 1989-12-05 | Polonio John D | Interconnection mechanisms for electronic components |
| US4813129A (en) * | 1987-06-19 | 1989-03-21 | Hewlett-Packard Company | Interconnect structure for PC boards and integrated circuits |
| JP2781560B2 (ja) | 1988-01-22 | 1998-07-30 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| US5074947A (en) | 1989-12-18 | 1991-12-24 | Epoxy Technology, Inc. | Flip chip technology using electrically conductive polymers and dielectrics |
| US5679977A (en) | 1990-09-24 | 1997-10-21 | Tessera, Inc. | Semiconductor chip assemblies, methods of making same and components for same |
| US5148266A (en) | 1990-09-24 | 1992-09-15 | Ist Associates, Inc. | Semiconductor chip assemblies having interposer and flexible lead |
| US5148265A (en) | 1990-09-24 | 1992-09-15 | Ist Associates, Inc. | Semiconductor chip assemblies with fan-in leads |
| US5072520A (en) | 1990-10-23 | 1991-12-17 | Rogers Corporation | Method of manufacturing an interconnect device having coplanar contact bumps |
| US5180311A (en) | 1991-01-22 | 1993-01-19 | Hughes Aircraft Company | Resilient interconnection bridge |
| JP2958136B2 (ja) * | 1991-03-08 | 1999-10-06 | 株式会社日立製作所 | 半導体集積回路装置、その製造方法および実装構造 |
| IL104056A (en) | 1991-12-13 | 1997-02-18 | Hoechst Ag | Process for the preparation of L-phosphinothricin and its derivatives |
| JP2833326B2 (ja) | 1992-03-03 | 1998-12-09 | 松下電器産業株式会社 | 電子部品実装接続体およびその製造方法 |
| JPH05251455A (ja) * | 1992-03-04 | 1993-09-28 | Toshiba Corp | 半導体装置 |
| US5915752A (en) | 1992-07-24 | 1999-06-29 | Tessera, Inc. | Method of making connections to a semiconductor chip assembly |
| JPH0684917A (ja) | 1992-08-31 | 1994-03-25 | Tanaka Kikinzoku Kogyo Kk | 高周波用バンプの形成方法 |
| US6544825B1 (en) * | 1992-12-26 | 2003-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a MIS transistor |
| DE4300652C1 (de) * | 1993-01-13 | 1994-03-31 | Bosch Gmbh Robert | Verfahren zur Herstellung einer hybrid integrierten optischen Schaltung und Vorrichtung zur Emission von Lichtwellen |
| JP3214186B2 (ja) | 1993-10-07 | 2001-10-02 | 三菱電機株式会社 | 半導体装置の製造方法 |
| JPH07115096A (ja) | 1993-10-18 | 1995-05-02 | Fujitsu Ltd | バンプ電極 |
| US5455390A (en) | 1994-02-01 | 1995-10-03 | Tessera, Inc. | Microelectronics unit mounting with multiple lead bonding |
| US5508228A (en) * | 1994-02-14 | 1996-04-16 | Microelectronics And Computer Technology Corporation | Compliant electrically connective bumps for an adhesive flip chip integrated circuit device and methods for forming same |
| US5491302A (en) | 1994-09-19 | 1996-02-13 | Tessera, Inc. | Microelectronic bonding with lead motion |
| US5777379A (en) | 1995-08-18 | 1998-07-07 | Tessera, Inc. | Semiconductor assemblies with reinforced peripheral regions |
| US5874782A (en) * | 1995-08-24 | 1999-02-23 | International Business Machines Corporation | Wafer with elevated contact structures |
| US6284563B1 (en) | 1995-10-31 | 2001-09-04 | Tessera, Inc. | Method of making compliant microelectronic assemblies |
| US6211572B1 (en) * | 1995-10-31 | 2001-04-03 | Tessera, Inc. | Semiconductor chip package with fan-in leads |
| US5749997A (en) | 1995-12-27 | 1998-05-12 | Industrial Technology Research Institute | Composite bump tape automated bonding method and bonded structure |
| US5808874A (en) * | 1996-05-02 | 1998-09-15 | Tessera, Inc. | Microelectronic connections with liquid conductive elements |
| DE19618447A1 (de) * | 1996-05-08 | 1997-11-20 | Studiengesellschaft Kohle Mbh | Lithographisches Verfahren zur Erzeugung von Nanostrukturen auf Oberflächen |
| DE19639934A1 (de) | 1996-09-27 | 1998-04-09 | Siemens Ag | Verfahren zur Flipchip-Kontaktierung eines Halbleiterchips mit geringer Anschlußzahl |
| US5910687A (en) * | 1997-01-24 | 1999-06-08 | Chipscale, Inc. | Wafer fabrication of die-bottom contacts for electronic devices |
| US5783465A (en) | 1997-04-03 | 1998-07-21 | Lucent Technologies Inc. | Compliant bump technology |
| WO1998050950A1 (fr) | 1997-05-07 | 1998-11-12 | Hitachi, Ltd. | Dispositif semi-conducteur et production de ce dispositif |
| US6051489A (en) * | 1997-05-13 | 2000-04-18 | Chipscale, Inc. | Electronic component package with posts on the active side of the substrate |
| DE19723734C2 (de) | 1997-06-06 | 2002-02-07 | Gerhard Naundorf | Leiterbahnstrukturen auf einem nichtleitenden Trägermaterial und Verfahren zu ihrer Herstellung |
| DE19731346C2 (de) * | 1997-06-06 | 2003-09-25 | Lpkf Laser & Electronics Ag | Leiterbahnstrukturen und ein Verfahren zu deren Herstellung |
| JPH1167776A (ja) | 1997-08-21 | 1999-03-09 | Citizen Watch Co Ltd | 突起電極およびその製造方法 |
| US6140456A (en) * | 1997-10-24 | 2000-10-31 | Quester Techology, Inc. | Chemicals and processes for making fluorinated poly(para-xylylenes) |
| CN1146988C (zh) * | 1997-12-08 | 2004-04-21 | 东芝株式会社 | 半导体功率器件的封装及其组装方法 |
| US6261941B1 (en) * | 1998-02-12 | 2001-07-17 | Georgia Tech Research Corp. | Method for manufacturing a multilayer wiring substrate |
| US6100175A (en) * | 1998-08-28 | 2000-08-08 | Micron Technology, Inc. | Method and apparatus for aligning and attaching balls to a substrate |
| US6075712A (en) * | 1999-01-08 | 2000-06-13 | Intel Corporation | Flip-chip having electrical contact pads on the backside of the chip |
| US6426564B1 (en) * | 1999-02-24 | 2002-07-30 | Micron Technology, Inc. | Recessed tape and method for forming a BGA assembly |
| US6225206B1 (en) * | 1999-05-10 | 2001-05-01 | International Business Machines Corporation | Flip chip C4 extension structure and process |
| KR20020011440A (ko) | 1999-06-17 | 2002-02-08 | 마이클 골위저, 호레스트 쉐퍼 | 가요성 접점을 구비한 전자 소자 및 그 전자 소자의 제조방법 |
-
2000
- 2000-04-11 KR KR1020017016160A patent/KR20020011440A/ko not_active Ceased
- 2000-04-11 WO PCT/DE2000/001123 patent/WO2000079589A1/de not_active Ceased
- 2000-04-11 JP JP2001505058A patent/JP2003502866A/ja active Pending
- 2000-04-11 EP EP00934894A patent/EP1186035A1/de not_active Withdrawn
-
2001
- 2001-12-17 US US10/022,226 patent/US6956287B2/en not_active Expired - Fee Related
-
2005
- 2005-05-06 US US11/124,515 patent/US7820482B2/en not_active Expired - Fee Related
- 2005-11-24 JP JP2005339301A patent/JP4226589B2/ja not_active Expired - Fee Related