JP2002538435A - 高帯域受動集積回路テスタのプローブカードアセンブリ - Google Patents

高帯域受動集積回路テスタのプローブカードアセンブリ

Info

Publication number
JP2002538435A
JP2002538435A JP2000601449A JP2000601449A JP2002538435A JP 2002538435 A JP2002538435 A JP 2002538435A JP 2000601449 A JP2000601449 A JP 2000601449A JP 2000601449 A JP2000601449 A JP 2000601449A JP 2002538435 A JP2002538435 A JP 2002538435A
Authority
JP
Japan
Prior art keywords
signal path
impedance
signal
conductive
probe card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000601449A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002538435A5 (enExample
Inventor
ミラー，チャールズ，エイ
Original Assignee
フォームファクター，インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by フォームファクター，インコーポレイテッド filed Critical フォームファクター，インコーポレイテッド
Publication of JP2002538435A publication Critical patent/JP2002538435A/ja
Publication of JP2002538435A5 publication Critical patent/JP2002538435A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06766—Input circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2000601449A 1999-02-25 2000-02-23 高帯域受動集積回路テスタのプローブカードアセンブリ Pending JP2002538435A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/258,186 1999-02-25
US09/258,186 US6218910B1 (en) 1999-02-25 1999-02-25 High bandwidth passive integrated circuit tester probe card assembly
PCT/US2000/004674 WO2000050905A1 (en) 1999-02-25 2000-02-23 High bandwidth passive integrated circuit tester probe card assembly

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007043029A Division JP2007178440A (ja) 1999-02-25 2007-02-22 高帯域受動集積回路テスタのプローブカードアセンブリ

Publications (2)

Publication Number Publication Date
JP2002538435A true JP2002538435A (ja) 2002-11-12
JP2002538435A5 JP2002538435A5 (enExample) 2007-04-19

Family

ID=22979472

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000601449A Pending JP2002538435A (ja) 1999-02-25 2000-02-23 高帯域受動集積回路テスタのプローブカードアセンブリ
JP2007043029A Pending JP2007178440A (ja) 1999-02-25 2007-02-22 高帯域受動集積回路テスタのプローブカードアセンブリ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2007043029A Pending JP2007178440A (ja) 1999-02-25 2007-02-22 高帯域受動集積回路テスタのプローブカードアセンブリ

Country Status (8)

Country Link
US (5) US6218910B1 (enExample)
EP (1) EP1159624B1 (enExample)
JP (2) JP2002538435A (enExample)
KR (3) KR100757578B1 (enExample)
AU (1) AU3603400A (enExample)
DE (1) DE60007516T2 (enExample)
TW (1) TW514733B (enExample)
WO (1) WO2000050905A1 (enExample)

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US20010035800A1 (en) 2001-11-01
US6501343B2 (en) 2002-12-31
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US6218910B1 (en) 2001-04-17
US20040140822A1 (en) 2004-07-22
US20110115512A1 (en) 2011-05-19
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