JP2002520140A5 - - Google Patents

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Publication number
JP2002520140A5
JP2002520140A5 JP2000558925A JP2000558925A JP2002520140A5 JP 2002520140 A5 JP2002520140 A5 JP 2002520140A5 JP 2000558925 A JP2000558925 A JP 2000558925A JP 2000558925 A JP2000558925 A JP 2000558925A JP 2002520140 A5 JP2002520140 A5 JP 2002520140A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000558925A
Other languages
Japanese (ja)
Other versions
JP2002520140A (ja
Filing date
Publication date
Priority claimed from US09/112,259 external-priority patent/US6273110B1/en
Priority claimed from US09/274,511 external-priority patent/US6279724B1/en
Application filed filed Critical
Publication of JP2002520140A publication Critical patent/JP2002520140A/ja
Publication of JP2002520140A5 publication Critical patent/JP2002520140A5/ja
Pending legal-status Critical Current

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JP2000558925A 1998-07-08 1999-06-25 自動化された半導体処理システム Pending JP2002520140A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/112,259 1998-07-08
US09/112,259 US6273110B1 (en) 1997-12-19 1998-07-08 Automated semiconductor processing system
US09/274,511 1999-03-23
US09/274,511 US6279724B1 (en) 1997-12-19 1999-03-23 Automated semiconductor processing system
PCT/US1999/014414 WO2000002675A1 (en) 1998-07-08 1999-06-25 Automated semiconductor processing system

Publications (2)

Publication Number Publication Date
JP2002520140A JP2002520140A (ja) 2002-07-09
JP2002520140A5 true JP2002520140A5 (enExample) 2006-08-03

Family

ID=26809757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000558925A Pending JP2002520140A (ja) 1998-07-08 1999-06-25 自動化された半導体処理システム

Country Status (6)

Country Link
US (2) US6279724B1 (enExample)
EP (1) EP1109632A4 (enExample)
JP (1) JP2002520140A (enExample)
CN (1) CN1126610C (enExample)
TW (1) TW507265B (enExample)
WO (1) WO2000002675A1 (enExample)

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