JP2002509360A - 選択的に連結された本体を有するシリコン酸化物絶縁体(soi)半導体 - Google Patents
選択的に連結された本体を有するシリコン酸化物絶縁体(soi)半導体Info
- Publication number
- JP2002509360A JP2002509360A JP2000539529A JP2000539529A JP2002509360A JP 2002509360 A JP2002509360 A JP 2002509360A JP 2000539529 A JP2000539529 A JP 2000539529A JP 2000539529 A JP2000539529 A JP 2000539529A JP 2002509360 A JP2002509360 A JP 2002509360A
- Authority
- JP
- Japan
- Prior art keywords
- region
- soi
- transistor
- conductivity type
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/311—Thin-film BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/411—Insulated-gate bipolar transistors [IGBT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6708—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H10D30/6711—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect by using electrodes contacting the supplementary regions or layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Thin Film Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Element Separation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/991,808 | 1997-12-16 | ||
| US08/991,808 US6020222A (en) | 1997-12-16 | 1997-12-16 | Silicon oxide insulator (SOI) semiconductor having selectively linked body |
| PCT/US1998/027030 WO1999031731A2 (en) | 1997-12-16 | 1998-12-16 | Silicon oxide insulator (soi) semiconductor having selectively linked body |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008030550A Division JP2008193101A (ja) | 1997-12-16 | 2008-02-12 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002509360A true JP2002509360A (ja) | 2002-03-26 |
| JP2002509360A5 JP2002509360A5 (enExample) | 2006-01-26 |
Family
ID=25537598
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000539529A Pending JP2002509360A (ja) | 1997-12-16 | 1998-12-16 | 選択的に連結された本体を有するシリコン酸化物絶縁体(soi)半導体 |
| JP2008030550A Withdrawn JP2008193101A (ja) | 1997-12-16 | 2008-02-12 | 半導体装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008030550A Withdrawn JP2008193101A (ja) | 1997-12-16 | 2008-02-12 | 半導体装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US6020222A (enExample) |
| EP (1) | EP1040521B1 (enExample) |
| JP (2) | JP2002509360A (enExample) |
| KR (1) | KR100562538B1 (enExample) |
| DE (1) | DE69836981T2 (enExample) |
| WO (1) | WO1999031731A2 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006203198A (ja) * | 2005-01-19 | 2006-08-03 | Internatl Business Mach Corp <Ibm> | Sramアレイ、sramセル、マイクロプロセッサ、方法、sramメモリ(高性能シリコン基板に実現された論理部分と、連結されたボディを有する電界効果トランジスタを含むsramアレイ部分とを備えるsramメモリおよびマイクロプロセッサ、およびそれらの製造方法) |
| JP2007005780A (ja) * | 2005-05-26 | 2007-01-11 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| US8809862B2 (en) | 2005-05-26 | 2014-08-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
| JP2022177013A (ja) * | 2011-11-11 | 2022-11-30 | 株式会社半導体エネルギー研究所 | 発光装置 |
Families Citing this family (81)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5940691A (en) | 1997-08-20 | 1999-08-17 | Micron Technology, Inc. | Methods of forming SOI insulator layers and methods of forming transistor devices |
| GB2334633B (en) * | 1998-02-21 | 2002-09-25 | Mitel Corp | Low leakage electrostatic discharge protection system |
| JP3517154B2 (ja) * | 1998-04-30 | 2004-04-05 | 株式会社東芝 | 誘電体分離集積回路 |
| JP3560480B2 (ja) * | 1998-10-05 | 2004-09-02 | シャープ株式会社 | スタティック・ランダム・アクセスメモリ |
| US6188247B1 (en) | 1999-01-29 | 2001-02-13 | International Business Machines Corporation | Method and apparatus for elimination of parasitic bipolar action in logic circuits for history removal under stack contention including complementary oxide semiconductor (CMOS) silicon on insulator (SOI) elements |
| US6278157B1 (en) | 1999-01-29 | 2001-08-21 | International Business Machines Corporation | Method and apparatus for elimination of parasitic bipolar action in logic circuits including complementary oxide semiconductor (CMOS) silicon on insulator (SOI) elements |
| US6365934B1 (en) | 1999-01-29 | 2002-04-02 | International Business Machines Corporation | Method and apparatus for elimination of parasitic bipolar action in complementary oxide semiconductor (CMOS) silicon on insulator (SOI) circuits |
| US6816824B2 (en) * | 1999-04-19 | 2004-11-09 | International Business Machines Corporation | Method for statically timing SOI devices and circuits |
| US6154091A (en) * | 1999-06-02 | 2000-11-28 | International Business Machines Corporation | SOI sense amplifier with body contact structure |
| TW476993B (en) * | 2000-01-19 | 2002-02-21 | Advanced Micro Devices Inc | Silicon on insulator circuit structure with buried semiconductor interconnect structure and method for forming same |
| US6392257B1 (en) * | 2000-02-10 | 2002-05-21 | Motorola Inc. | Semiconductor structure, semiconductor device, communicating device, integrated circuit, and process for fabricating the same |
| US6693033B2 (en) | 2000-02-10 | 2004-02-17 | Motorola, Inc. | Method of removing an amorphous oxide from a monocrystalline surface |
| US6552396B1 (en) * | 2000-03-14 | 2003-04-22 | International Business Machines Corporation | Matched transistors and methods for forming the same |
| CN1430792A (zh) * | 2000-05-31 | 2003-07-16 | 摩托罗拉公司 | 半导体器件及方法 |
| US6420767B1 (en) | 2000-06-28 | 2002-07-16 | Advanced Micro Devices, Inc. | Capacitively coupled DTMOS on SOI |
| US6501973B1 (en) | 2000-06-30 | 2002-12-31 | Motorola, Inc. | Apparatus and method for measuring selected physical condition of an animate subject |
| US6583459B1 (en) * | 2000-06-30 | 2003-06-24 | Stmicroelectronics, Inc. | Random access memory cell and method for fabricating same |
| US6477285B1 (en) | 2000-06-30 | 2002-11-05 | Motorola, Inc. | Integrated circuits with optical signal propagation |
| US6410941B1 (en) | 2000-06-30 | 2002-06-25 | Motorola, Inc. | Reconfigurable systems using hybrid integrated circuits with optical ports |
| US6427066B1 (en) | 2000-06-30 | 2002-07-30 | Motorola, Inc. | Apparatus and method for effecting communications among a plurality of remote stations |
| US6359298B1 (en) | 2000-07-20 | 2002-03-19 | Advanced Micro Devices, Inc. | Capacitively coupled DTMOS on SOI for multiple devices |
| WO2002009187A2 (en) * | 2000-07-24 | 2002-01-31 | Motorola, Inc. | Heterojunction tunneling diodes and process for fabricating same |
| US6555946B1 (en) | 2000-07-24 | 2003-04-29 | Motorola, Inc. | Acoustic wave device and process for forming the same |
| US6632686B1 (en) | 2000-09-29 | 2003-10-14 | Intel Corporation | Silicon on insulator device design having improved floating body effect |
| US6638838B1 (en) | 2000-10-02 | 2003-10-28 | Motorola, Inc. | Semiconductor structure including a partially annealed layer and method of forming the same |
| US6583034B2 (en) | 2000-11-22 | 2003-06-24 | Motorola, Inc. | Semiconductor structure including a compliant substrate having a graded monocrystalline layer and methods for fabricating the structure and semiconductor devices including the structure |
| US6563118B2 (en) | 2000-12-08 | 2003-05-13 | Motorola, Inc. | Pyroelectric device on a monocrystalline semiconductor substrate and process for fabricating same |
| US20020096683A1 (en) * | 2001-01-19 | 2002-07-25 | Motorola, Inc. | Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate |
| US6441435B1 (en) | 2001-01-31 | 2002-08-27 | Advanced Micro Devices, Inc. | SOI device with wrap-around contact to underside of body, and method of making |
| US6589823B1 (en) | 2001-02-22 | 2003-07-08 | Advanced Micro Devices, Inc. | Silicon-on-insulator (SOI)electrostatic discharge (ESD) protection device with backside contact plug |
| US6673646B2 (en) | 2001-02-28 | 2004-01-06 | Motorola, Inc. | Growth of compound semiconductor structures on patterned oxide films and process for fabricating same |
| US6373121B1 (en) * | 2001-03-23 | 2002-04-16 | United Microelectronics Corp. | Silicon chip built-in inductor structure |
| WO2002082551A1 (en) | 2001-04-02 | 2002-10-17 | Motorola, Inc. | A semiconductor structure exhibiting reduced leakage current |
| US6709989B2 (en) | 2001-06-21 | 2004-03-23 | Motorola, Inc. | Method for fabricating a semiconductor structure including a metal oxide interface with silicon |
| JP2003008028A (ja) * | 2001-06-27 | 2003-01-10 | Seiko Epson Corp | 半導体装置 |
| US6992321B2 (en) | 2001-07-13 | 2006-01-31 | Motorola, Inc. | Structure and method for fabricating semiconductor structures and devices utilizing piezoelectric materials |
| US20030010992A1 (en) * | 2001-07-16 | 2003-01-16 | Motorola, Inc. | Semiconductor structure and method for implementing cross-point switch functionality |
| US6646293B2 (en) | 2001-07-18 | 2003-11-11 | Motorola, Inc. | Structure for fabricating high electron mobility transistors utilizing the formation of complaint substrates |
| US6693298B2 (en) | 2001-07-20 | 2004-02-17 | Motorola, Inc. | Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same |
| US7019332B2 (en) | 2001-07-20 | 2006-03-28 | Freescale Semiconductor, Inc. | Fabrication of a wavelength locker within a semiconductor structure |
| US6472694B1 (en) | 2001-07-23 | 2002-10-29 | Motorola, Inc. | Microprocessor structure having a compound semiconductor layer |
| US6855992B2 (en) * | 2001-07-24 | 2005-02-15 | Motorola Inc. | Structure and method for fabricating configurable transistor devices utilizing the formation of a compliant substrate for materials used to form the same |
| US6667196B2 (en) | 2001-07-25 | 2003-12-23 | Motorola, Inc. | Method for real-time monitoring and controlling perovskite oxide film growth and semiconductor structure formed using the method |
| US6585424B2 (en) | 2001-07-25 | 2003-07-01 | Motorola, Inc. | Structure and method for fabricating an electro-rheological lens |
| US6594414B2 (en) | 2001-07-25 | 2003-07-15 | Motorola, Inc. | Structure and method of fabrication for an optical switch |
| KR100422468B1 (ko) * | 2001-07-31 | 2004-03-11 | 삼성전자주식회사 | 에스 오 아이 소자 및 그 제조방법 |
| US6589856B2 (en) | 2001-08-06 | 2003-07-08 | Motorola, Inc. | Method and apparatus for controlling anti-phase domains in semiconductor structures and devices |
| US6462360B1 (en) | 2001-08-06 | 2002-10-08 | Motorola, Inc. | Integrated gallium arsenide communications systems |
| US6639249B2 (en) | 2001-08-06 | 2003-10-28 | Motorola, Inc. | Structure and method for fabrication for a solid-state lighting device |
| US20030034491A1 (en) | 2001-08-14 | 2003-02-20 | Motorola, Inc. | Structure and method for fabricating semiconductor structures and devices for detecting an object |
| US6673667B2 (en) | 2001-08-15 | 2004-01-06 | Motorola, Inc. | Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials |
| US20030036217A1 (en) * | 2001-08-16 | 2003-02-20 | Motorola, Inc. | Microcavity semiconductor laser coupled to a waveguide |
| US20030071327A1 (en) * | 2001-10-17 | 2003-04-17 | Motorola, Inc. | Method and apparatus utilizing monocrystalline insulator |
| US6916717B2 (en) | 2002-05-03 | 2005-07-12 | Motorola, Inc. | Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate |
| US20040012037A1 (en) * | 2002-07-18 | 2004-01-22 | Motorola, Inc. | Hetero-integration of semiconductor materials on silicon |
| US20040070312A1 (en) * | 2002-10-10 | 2004-04-15 | Motorola, Inc. | Integrated circuit and process for fabricating the same |
| US20040069991A1 (en) * | 2002-10-10 | 2004-04-15 | Motorola, Inc. | Perovskite cuprate electronic device structure and process |
| US7169619B2 (en) | 2002-11-19 | 2007-01-30 | Freescale Semiconductor, Inc. | Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process |
| US6885065B2 (en) | 2002-11-20 | 2005-04-26 | Freescale Semiconductor, Inc. | Ferromagnetic semiconductor structure and method for forming the same |
| US7020374B2 (en) * | 2003-02-03 | 2006-03-28 | Freescale Semiconductor, Inc. | Optical waveguide structure and method for fabricating the same |
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| US20040164315A1 (en) * | 2003-02-25 | 2004-08-26 | Motorola, Inc. | Structure and device including a tunneling piezoelectric switch and method of forming same |
| US7173320B1 (en) * | 2003-04-30 | 2007-02-06 | Altera Corporation | High performance lateral bipolar transistor |
| US7184298B2 (en) * | 2003-09-24 | 2007-02-27 | Innovative Silicon S.A. | Low power programming technique for a floating body memory transistor, memory cell, and memory array |
| KR100501706B1 (ko) * | 2003-10-16 | 2005-07-18 | 삼성에스디아이 주식회사 | 게이트-바디콘택 박막 트랜지스터 |
| US7045873B2 (en) * | 2003-12-08 | 2006-05-16 | International Business Machines Corporation | Dynamic threshold voltage MOSFET on SOI |
| US8398670B2 (en) | 2004-03-19 | 2013-03-19 | Aga Medical Corporation | Multi-layer braided structures for occluding vascular defects and for occluding fluid flow through portions of the vasculature of the body |
| US8313505B2 (en) | 2004-03-19 | 2012-11-20 | Aga Medical Corporation | Device for occluding vascular defects |
| US8777974B2 (en) | 2004-03-19 | 2014-07-15 | Aga Medical Corporation | Multi-layer braided structures for occluding vascular defects |
| US8747453B2 (en) | 2008-02-18 | 2014-06-10 | Aga Medical Corporation | Stent/stent graft for reinforcement of vascular abnormalities and associated method |
| US9039724B2 (en) | 2004-03-19 | 2015-05-26 | Aga Medical Corporation | Device for occluding vascular defects |
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| US7511345B2 (en) * | 2005-06-21 | 2009-03-31 | Sarnoff Corporation | Bulk resistance control technique |
| US7285480B1 (en) * | 2006-04-07 | 2007-10-23 | International Business Machines Corporation | Integrated circuit chip with FETs having mixed body thicknesses and method of manufacture thereof |
| JP5042518B2 (ja) * | 2006-04-12 | 2012-10-03 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US8034061B2 (en) | 2007-07-12 | 2011-10-11 | Aga Medical Corporation | Percutaneous catheter directed intravascular occlusion devices |
| WO2010032386A1 (ja) * | 2008-09-17 | 2010-03-25 | シャープ株式会社 | 半導体装置 |
| US8698245B2 (en) | 2010-12-14 | 2014-04-15 | International Business Machines Corporation | Partially depleted (PD) semiconductor-on-insulator (SOI) field effect transistor (FET) structure with a gate-to-body tunnel current region for threshold voltage (VT) lowering and method of forming the structure |
| CN102214679B (zh) * | 2011-05-26 | 2012-12-05 | 上海先进半导体制造股份有限公司 | 形成于绝缘体上硅中的自隔离式高压半桥结构 |
| CN107256890A (zh) * | 2017-06-19 | 2017-10-17 | 西安理工大学 | 一种逆导型绝缘栅双极型晶体管及其制备方法 |
| US20250113606A1 (en) * | 2023-09-28 | 2025-04-03 | Qualcomm Incorporated | Body tied to source standard cell implementations in semiconductor-on-insulator (soi) technology |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05323362A (ja) * | 1991-12-19 | 1993-12-07 | Seiko Instr Inc | 半導体装置及びその製造方法 |
| JPH0685262A (ja) * | 1992-09-07 | 1994-03-25 | Nec Corp | 電界効果トランジスタおよびその製造方法 |
| JPH06291265A (ja) * | 1992-02-25 | 1994-10-18 | Seiko Instr Inc | 半導体装置とその製造方法 |
| JPH0774363A (ja) * | 1993-07-05 | 1995-03-17 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| US5463238A (en) * | 1992-02-25 | 1995-10-31 | Seiko Instruments Inc. | CMOS structure with parasitic channel prevention |
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| US5559368A (en) * | 1994-08-30 | 1996-09-24 | The Regents Of The University Of California | Dynamic threshold voltage mosfet having gate to body connection for ultra-low voltage operation |
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1997
- 1997-12-16 US US08/991,808 patent/US6020222A/en not_active Expired - Lifetime
-
1998
- 1998-12-16 JP JP2000539529A patent/JP2002509360A/ja active Pending
- 1998-12-16 KR KR1020007006666A patent/KR100562538B1/ko not_active Expired - Fee Related
- 1998-12-16 WO PCT/US1998/027030 patent/WO1999031731A2/en not_active Ceased
- 1998-12-16 EP EP98964114A patent/EP1040521B1/en not_active Expired - Lifetime
- 1998-12-16 DE DE69836981T patent/DE69836981T2/de not_active Expired - Lifetime
-
1999
- 1999-01-05 US US09/225,658 patent/US5994738A/en not_active Expired - Lifetime
- 1999-12-31 US US09/476,041 patent/US6627952B1/en not_active Expired - Lifetime
-
2008
- 2008-02-12 JP JP2008030550A patent/JP2008193101A/ja not_active Withdrawn
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| JPH06291265A (ja) * | 1992-02-25 | 1994-10-18 | Seiko Instr Inc | 半導体装置とその製造方法 |
| US5463238A (en) * | 1992-02-25 | 1995-10-31 | Seiko Instruments Inc. | CMOS structure with parasitic channel prevention |
| JPH0685262A (ja) * | 1992-09-07 | 1994-03-25 | Nec Corp | 電界効果トランジスタおよびその製造方法 |
| JPH0774363A (ja) * | 1993-07-05 | 1995-03-17 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| US5559368A (en) * | 1994-08-30 | 1996-09-24 | The Regents Of The University Of California | Dynamic threshold voltage mosfet having gate to body connection for ultra-low voltage operation |
| EP0724295A1 (en) * | 1995-01-27 | 1996-07-31 | Nec Corporation | SOI-type semiconductor device with variable threshold voltages |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006203198A (ja) * | 2005-01-19 | 2006-08-03 | Internatl Business Mach Corp <Ibm> | Sramアレイ、sramセル、マイクロプロセッサ、方法、sramメモリ(高性能シリコン基板に実現された論理部分と、連結されたボディを有する電界効果トランジスタを含むsramアレイ部分とを備えるsramメモリおよびマイクロプロセッサ、およびそれらの製造方法) |
| JP2007005780A (ja) * | 2005-05-26 | 2007-01-11 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| US8809862B2 (en) | 2005-05-26 | 2014-08-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
| US9373723B2 (en) | 2005-05-26 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
| JP2022177013A (ja) * | 2011-11-11 | 2022-11-30 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP7185803B2 (ja) | 2011-11-11 | 2022-12-07 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP2022189858A (ja) * | 2011-11-11 | 2022-12-22 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP7202503B2 (ja) | 2011-11-11 | 2023-01-11 | 株式会社半導体エネルギー研究所 | 発光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1040521B1 (en) | 2007-01-24 |
| EP1040521A2 (en) | 2000-10-04 |
| US5994738A (en) | 1999-11-30 |
| KR20010024753A (ko) | 2001-03-26 |
| US6627952B1 (en) | 2003-09-30 |
| WO1999031731A3 (en) | 1999-09-16 |
| WO1999031731A2 (en) | 1999-06-24 |
| US6020222A (en) | 2000-02-01 |
| DE69836981T2 (de) | 2007-11-22 |
| KR100562538B1 (ko) | 2006-03-22 |
| JP2008193101A (ja) | 2008-08-21 |
| DE69836981D1 (de) | 2007-03-15 |
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