JP2002248399A - 塗布部材の製造方法及び装置 - Google Patents
塗布部材の製造方法及び装置Info
- Publication number
- JP2002248399A JP2002248399A JP2001052638A JP2001052638A JP2002248399A JP 2002248399 A JP2002248399 A JP 2002248399A JP 2001052638 A JP2001052638 A JP 2001052638A JP 2001052638 A JP2001052638 A JP 2001052638A JP 2002248399 A JP2002248399 A JP 2002248399A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- lip
- tip
- discharge port
- coating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 212
- 238000000576 coating method Methods 0.000 title claims abstract description 212
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title description 16
- 239000007788 liquid Substances 0.000 claims abstract description 59
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 230000007547 defect Effects 0.000 abstract description 19
- 239000000463 material Substances 0.000 abstract description 12
- 239000010408 film Substances 0.000 description 39
- 239000011324 bead Substances 0.000 description 33
- 239000005871 repellent Substances 0.000 description 15
- 238000000926 separation method Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- -1 for example Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000003892 spreading Methods 0.000 description 3
- 238000009736 wetting Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- 101100136629 Autographa californica nuclear polyhedrosis virus AC96 gene Proteins 0.000 description 1
- 101100257194 Homo sapiens SMIM8 gene Proteins 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 102100024789 Small integral membrane protein 8 Human genes 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910001410 inorganic ion Inorganic materials 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920013716 polyethylene resin Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001052638A JP2002248399A (ja) | 2001-02-27 | 2001-02-27 | 塗布部材の製造方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001052638A JP2002248399A (ja) | 2001-02-27 | 2001-02-27 | 塗布部材の製造方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002248399A true JP2002248399A (ja) | 2002-09-03 |
| JP2002248399A5 JP2002248399A5 (enExample) | 2008-03-21 |
Family
ID=18913243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001052638A Withdrawn JP2002248399A (ja) | 2001-02-27 | 2001-02-27 | 塗布部材の製造方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002248399A (enExample) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003088790A (ja) * | 2001-09-18 | 2003-03-25 | Fuji Photo Film Co Ltd | 塗布装置 |
| WO2004011157A1 (ja) * | 2002-07-26 | 2004-02-05 | Dai Nippon Printing Co., Ltd. | 塗膜の製造方法 |
| JP2004351349A (ja) * | 2003-05-30 | 2004-12-16 | Dainippon Printing Co Ltd | 塗工用ダイヘッド、塗工装置及び塗工用ダイヘッドの製造方法 |
| JP2005058913A (ja) * | 2003-08-12 | 2005-03-10 | Tokyo Electron Ltd | 塗布ノズル及び塗布装置 |
| JP2005152885A (ja) * | 2003-10-27 | 2005-06-16 | Tokyo Ohka Kogyo Co Ltd | スリットノズル |
| WO2006098482A1 (en) * | 2005-03-18 | 2006-09-21 | Fujifilm Corporation | Coating method and apparatus |
| JP2011507700A (ja) * | 2007-12-31 | 2011-03-10 | スリーエム イノベイティブ プロパティズ カンパニー | コーティング材料の塗布方法 |
| JP2012206097A (ja) * | 2011-03-30 | 2012-10-25 | Fujifilm Corp | 塗膜付きフィルムの製造方法 |
| JP2019055388A (ja) * | 2017-09-22 | 2019-04-11 | 株式会社Screenホールディングス | 塗工装置および塗工方法 |
| JPWO2021065579A1 (enExample) * | 2019-09-30 | 2021-04-08 | ||
| WO2021182132A1 (ja) * | 2020-03-11 | 2021-09-16 | 富士フイルム株式会社 | ダイヘッド |
| WO2022168750A1 (ja) * | 2021-02-03 | 2022-08-11 | 住友化学株式会社 | スロットダイおよび薄膜の製造方法 |
| JP2022119189A (ja) * | 2021-02-03 | 2022-08-16 | 住友化学株式会社 | スロットダイおよび薄膜の製造方法 |
| KR20220126297A (ko) | 2020-03-05 | 2022-09-15 | 후지필름 가부시키가이샤 | 다이 헤드 |
| KR20220154202A (ko) | 2020-06-01 | 2022-11-21 | 후지필름 가부시키가이샤 | 다이 헤드 |
| KR20230087375A (ko) | 2021-12-09 | 2023-06-16 | 후지필름 가부시키가이샤 | 다이 헤드 및 도막의 제조 방법 |
| CN116801991A (zh) * | 2021-02-03 | 2023-09-22 | 住友化学株式会社 | 缝模和薄膜的制造方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05293420A (ja) * | 1992-04-16 | 1993-11-09 | Fuji Photo Film Co Ltd | 塗布装置 |
| JPH05293418A (ja) * | 1992-04-16 | 1993-11-09 | Fuji Photo Film Co Ltd | 塗布装置 |
| JPH08168719A (ja) * | 1994-12-16 | 1996-07-02 | Konica Corp | 塗布方法 |
| JPH08243476A (ja) * | 1995-03-10 | 1996-09-24 | Chugai Ro Co Ltd | ダイコータによるガラス基板への塗布方法 |
| JPH11207230A (ja) * | 1998-01-26 | 1999-08-03 | Konica Corp | 塗布装置及び塗布方法 |
-
2001
- 2001-02-27 JP JP2001052638A patent/JP2002248399A/ja not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05293420A (ja) * | 1992-04-16 | 1993-11-09 | Fuji Photo Film Co Ltd | 塗布装置 |
| JPH05293418A (ja) * | 1992-04-16 | 1993-11-09 | Fuji Photo Film Co Ltd | 塗布装置 |
| JPH08168719A (ja) * | 1994-12-16 | 1996-07-02 | Konica Corp | 塗布方法 |
| JPH08243476A (ja) * | 1995-03-10 | 1996-09-24 | Chugai Ro Co Ltd | ダイコータによるガラス基板への塗布方法 |
| JPH11207230A (ja) * | 1998-01-26 | 1999-08-03 | Konica Corp | 塗布装置及び塗布方法 |
Cited By (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003088790A (ja) * | 2001-09-18 | 2003-03-25 | Fuji Photo Film Co Ltd | 塗布装置 |
| WO2004011157A1 (ja) * | 2002-07-26 | 2004-02-05 | Dai Nippon Printing Co., Ltd. | 塗膜の製造方法 |
| JP2004351349A (ja) * | 2003-05-30 | 2004-12-16 | Dainippon Printing Co Ltd | 塗工用ダイヘッド、塗工装置及び塗工用ダイヘッドの製造方法 |
| JP2005058913A (ja) * | 2003-08-12 | 2005-03-10 | Tokyo Electron Ltd | 塗布ノズル及び塗布装置 |
| JP2005152885A (ja) * | 2003-10-27 | 2005-06-16 | Tokyo Ohka Kogyo Co Ltd | スリットノズル |
| WO2006098482A1 (en) * | 2005-03-18 | 2006-09-21 | Fujifilm Corporation | Coating method and apparatus |
| JP2006255660A (ja) * | 2005-03-18 | 2006-09-28 | Fuji Photo Film Co Ltd | 塗布方法及び装置 |
| EP2240285A4 (en) * | 2007-12-31 | 2012-08-01 | 3M Innovative Properties Co | DEVICE FOR APPLYING A COATING MATERIAL |
| JP2011507700A (ja) * | 2007-12-31 | 2011-03-10 | スリーエム イノベイティブ プロパティズ カンパニー | コーティング材料の塗布方法 |
| JP2012206097A (ja) * | 2011-03-30 | 2012-10-25 | Fujifilm Corp | 塗膜付きフィルムの製造方法 |
| JP2019055388A (ja) * | 2017-09-22 | 2019-04-11 | 株式会社Screenホールディングス | 塗工装置および塗工方法 |
| JPWO2021065579A1 (enExample) * | 2019-09-30 | 2021-04-08 | ||
| WO2021065579A1 (ja) * | 2019-09-30 | 2021-04-08 | 富士フイルム株式会社 | ダイヘッド |
| CN114450095B (zh) * | 2019-09-30 | 2024-03-26 | 富士胶片株式会社 | 模头 |
| JP7270757B2 (ja) | 2019-09-30 | 2023-05-10 | 富士フイルム株式会社 | ダイヘッド |
| KR20220051853A (ko) | 2019-09-30 | 2022-04-26 | 후지필름 가부시키가이샤 | 다이 헤드 |
| CN114450095A (zh) * | 2019-09-30 | 2022-05-06 | 富士胶片株式会社 | 模头 |
| CN115190823A (zh) * | 2020-03-05 | 2022-10-14 | 富士胶片株式会社 | 模头 |
| KR20220126297A (ko) | 2020-03-05 | 2022-09-15 | 후지필름 가부시키가이샤 | 다이 헤드 |
| CN115175772A (zh) * | 2020-03-11 | 2022-10-11 | 富士胶片株式会社 | 模头 |
| JP7266746B2 (ja) | 2020-03-11 | 2023-04-28 | 富士フイルム株式会社 | ダイヘッド |
| JPWO2021182132A1 (enExample) * | 2020-03-11 | 2021-09-16 | ||
| WO2021182132A1 (ja) * | 2020-03-11 | 2021-09-16 | 富士フイルム株式会社 | ダイヘッド |
| CN115175772B (zh) * | 2020-03-11 | 2024-06-18 | 富士胶片株式会社 | 模头 |
| KR20220154202A (ko) | 2020-06-01 | 2022-11-21 | 후지필름 가부시키가이샤 | 다이 헤드 |
| CN115697573A (zh) * | 2020-06-01 | 2023-02-03 | 富士胶片株式会社 | 模头 |
| JP2022119189A (ja) * | 2021-02-03 | 2022-08-16 | 住友化学株式会社 | スロットダイおよび薄膜の製造方法 |
| WO2022168750A1 (ja) * | 2021-02-03 | 2022-08-11 | 住友化学株式会社 | スロットダイおよび薄膜の製造方法 |
| CN116801991A (zh) * | 2021-02-03 | 2023-09-22 | 住友化学株式会社 | 缝模和薄膜的制造方法 |
| KR20230087375A (ko) | 2021-12-09 | 2023-06-16 | 후지필름 가부시키가이샤 | 다이 헤드 및 도막의 제조 방법 |
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